Ulvac GI-M2 Instruction Manual page 50

10
9
8
7
6
5
4
3
2
1
0
1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01
Fig. 9-2 Supplementary explanation of output voltage (GI-M2)
The measurement output voltage can be converted to a pressure value using the following
equation.
10
9
8
7
6
5
4
3
2
1
0
1.0E-10 1.0E-09 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01
Pressure (Pa)
P:Pressure value
V:Measured output voltage
E:V from which decimal point is rounded down
P=10(V-E)×10
GI-M2:
Pressure (Torr)
-( -E)
８
（Torr）
44
（Torr）
（V）
（V）