Summaries
8
Summaries
Summary 1
Common elements and Interferences ...................................................... 27
Summary 2
Major components and their advantages ................................................ 30
Summary 3
Environmental conditions for operation .................................................. 31
Summary 4
Power supply .............................................................................................. 32
Summary 5
Gas supply .................................................................................................. 33
Summary 6
Exhaust unit requirements ........................................................................ 34
Summary 7
Cooling circuit requirements ..................................................................... 34
Summary 8
Pump models ............................................................................................. 35
Summary 9
Fore-line roughing pump SV40BI ............................................................. 35
Summary 10
Fore-line roughing pump XDS46i ......................................................... 36
Summary 11
Information on the type plate ............................................................... 41
Summary 12
Performance: PlasmaQuant MS, PlasmaQuant MS Q ......................... 75
Summary 13
Performance: PlasmaQuant MS Elite S, PlasmaQuant MS Elite ........ 76
Summary 14
Detector attenuation with and without iCRC ....................................... 87
PlasmaQuant MS product family
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