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Type 8745 Ethernet, 8745 Analogue
Technical data
6.7.2
Mass Flow Controller with proportional
valve
Tab. 17:
Fluid data, MFC with proportional valve
Calibration fluid
Mass flow-rate range
(reference to N2 (I
/min))
N
Exact range depends on the product base-block size and on
the gas used. Refer to the datasheet related to the product
Type.
Measuring range
Repeatability
Operating fluid
Measurement accuracy, after
15 minute warm-up time and
with the calibration fluid
Settling time
8) If the operating fluid is different from the calibration fluid, then the
measurement accuracy can be lower. If the operating gas is nitrogen
or oxygen, then the given measurement accuracy is correct. But if the
operating gas is natural gas, then the measurement accuracy may be
different because the composition of natural gas varies depending on the
season and origin.
Air or operating gas
20...1500 I
/min
N
1:50
Larger measuring range
available on request.
±0.1% of the full scale
See Type label
± 0.8%
of the measured value
8)
± 0.3%
of the full scale
8)
< 500 ms
6.7.3
Mass Flow Controller with motor valve
Tab. 18:
Fluid data, MFC with motor valve
Calibration fluid
Mass flow-rate range
(reference to N2 (I
/min))
N
Exact range depends on the product base-block size and on
the gas used. Refer to the datasheet related to the product
Type.
Measuring range
Repeatability
Operating fluid
Measurement accuracy, after
15 minute warm-up time and
with the calibration fluid
Settling time
9) If the operating fluid is different from the calibration fluid, then the
measurement accuracy can be lower. If the operating gas is nitrogen
or oxygen, then the given measurement accuracy is correct. But if the
operating gas is natural gas, then the measurement accuracy may be
different because the composition of natural gas varies depending on the
season and origin.
English
Air or operating gas
20...2500 I
/min
N
1:50
Larger measuring range
available on request.
±0.1% of the full scale
See Type label
± 0.8%
of the measured value
9)
± 0.3%
of the full scale
9)
< 5 s
27
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