Table Of Contents - Varian Turbo-V 2000 ICE Instructions For Use Manual

ISTRUZIONI PER L'USO .................................................................................................... 1
GEBRAUCHSANLEITUNG ................................................................................................. 3
MODE D'EMPLOI ................................................................................................................ 5
INSTRUCCIONES DE USO ................................................................................................ 7
INSTRUÇÕES PARA O USO .............................................................................................. 9
GEBRUIKSAANWIJZINGEN ............................................................................................. 11
BRUGSANVISNING .......................................................................................................... 13
BRUKSANVISNING........................................................................................................... 15
BRUKERVEILEDNING ...................................................................................................... 17
KÄYTTÖOHJEET .............................................................................................................. 19
PDHGIES CRHSEWS ............................................................................................................ 21
INSTRUCTIONS FOR USE............................................................................................... 23
TECHNICAL INFORMATION ............................................................................................ 25
DESCRIPTION OF THE TURBOPUMP ......................................................................................25
TECHNICAL SPECIFICATION ....................................................................................................26
INLET SCREEN INSTALLATION ................................................................................................29
HEATING JACKET INSTALLATION............................................................................................29
WATER COOLING KIT INSTALLATION .....................................................................................30
VENT DEVICE INSTALLATION ..................................................................................................31
VENT VALVE INSTALLATION ....................................................................................................32
PUMP USED WITH CORROSIVE GASES .................................................................................33
Gas Purge..........................................................................................................................33
Gas Purge Vent Device Description ..................................................................................33
Solid State Flowmeter Installation .....................................................................................33
Roughing Operation...........................................................................................................34
Pump and chamber at atmosphere ...................................................................................34
Pump under vacuum, chamber at atmosphere (chamber cleaning) .................................34
Suggested Pump Installation .............................................................................................34
Vent Operation...................................................................................................................35
HIGH VACUUM FLANGE CONNECTION...................................................................................35
FORE-VACUUM PUMP CONNECTION .....................................................................................35
ELECTRICAL CONNECTION......................................................................................................35
MOVING THE GAS PURGE VALVE AND FOREVACUUM PUMP CONNECTIONS ................36
PUMP USED IN PRESENCE OF MAGNETIC FIELDS ..............................................................36
ACCESSORIES ...........................................................................................................................36