Technical Information; Description Of The Turbopump - Varian Turbo-V 2000 ICE Instructions For Use Manual

DESCRIPTION OF THE TURBOPUMP

The Turbo-V2000 ICE pump is available in three
versions which differ only in their inlet flange.
They are:
− Model 969-9125 with ISO 250 bolted high vac-
uum flange
− Model 969-9126 with ConFlat 12" external di-
ameter high vacuum flange
− Model 969-9127 with ISO 250 high vacuum
flange
Model 969-9125
Model 969-9126
Model 969-9127
The Turbo-V2000 ICE pump consists of a high fre-
quency motor driving a turbine fitted with 8 bladed
stages and 4 Macrotorr stages. The turbine rotates
in an anticlockwise direction when viewed from the
high vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine stages have seven differ-
ent angles, while the Macrotorr stages are in form
of discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of stainless
steel with five different blade angles. These are sup-
ported and accurately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding
rotor discs. These are made of aluminium alloy.
The Spiral Seal is a dynamic seal based on a
Siegbahn disk that increases the protection of the
bearings against corrosive gases.
All aluminium pump parts directly in contact with the
process gas are protected against corrosion by a
special protective polymeric coating. The film, the
Varian patented Armorr Coating, is deposited by a
special and proprietary PVD process that ensures an
outstand uniformity without any impact on the pump
unbalance. Specific tests performed by Varian have
demonstrated the superior protective capability of
the Armorr Coating, especially against chlorinated
and fluorinated gases.
During normal operation, the motor is fed with a
voltage of 120 Vac three-phase at 550 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
The pump must operate with forced air cooling. A
water cooling kit is available to cool the pump in
the cases where it is used under heavy load or
when forced air is insufficient for cooling purposes.
Two thermistor sensors are mounted near the
bearings to prevent the pump from overheating. A
speed sensor is located in the upper side of the
rotor to detect the rotor speed. The thermistor
sensors, the speed sensor, the motor stator wind-
ings and the earth are connected to a Turbo-V
controller through a 8 pin socket on the side of the
pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 40 flange.
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TECHNICAL INFORMATION

87-900-915-01(E)