E-664 LVPZT Position Servo Controller
Table of Contents :
0.
0.1.
0.2.
0.3.
1.
Introduction....................................................................... 5
2.
Quick Start ........................................................................ 6
2.1.
Starting Operation........................................................................ 6
2.2.
Troubleshooting ........................................................................... 7
3.
Operating Modes .............................................................. 7
3.1.
3.2.
4.
Block Diagram................................................................... 9
5.
5.1.
Static Calibration........................................................................ 10
5.2.
5.3.
6.
6.1.
6.2.
7.
8.
8.1.
Connectors................................................................................. 18
9.
© Copyright 2005 by Physik Instrumente (PI) GmbH & Co. KG
Release: 1.0.4
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Release 1.0.4
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User Manual PZ 99E
Page 2