Introduction - HELIX CTI-CRYOGENICS CRYO-TORR 100 Installation, Operation And Servicing Instructions

ai-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Section 1:
Introduction
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . 1·1
1.2 Installation, Operation and Servicing
Instructions . . . . . . . . . . . . . . . . . . . . . . . . 1·1
1.1 General
This manual provides instructions for installing,
operating and servicing the Cryo-Torr® 100, 7, 8 and 8F
Cryopumps. If you are installing or operating a high-
vacuum system you should also have available the
Model SC Compressor or 8300 T
>I
Compressor and the
manuals listed below that apply to your particular system.
MANUAL REQUIRED
SYSTEM
8300 MODELSC
COMPONENT COMPRESSOR COMPRESSOR
Cryo-Torr 100,7, M8040240 M8040240
8 and 8F High-
Vacuum Pump
83OO T
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M8040242
------
Compressor
ModelSC -----.
M8040243
Compressor
8001 "'/8002'"
M8040241
------
Controller
The manuals cover two basic components: The
cryopump, compressor, and the controller where
applicable. Each manual presents infonnation for
installation, operation and servicing of that component.
A manual is shipped with each system component
(cryopump, compressor, and controller).
I-I
When you purchase a system, you will receive the three
manuals necessary for system installation, plus a loose-
leaf binder with index tab separators allowing you to
compile a complete indexed system notebook.
The Cryo-Torr High-Vacuum Pump System, shown in
Figure 1.1, provides fast, clean pumping of all gases in
the 10-
3
to 10-
10
torr range. It operates on the principle
that gases can be condensed and held at extremely low
vapor pressure, achieving high speeds and throughputs at
the cryogenic temperatures of the operating cryopump.
The cryopump is a reliable rugged unit that requires a
minimum of servicing. The cryopump exposes no
moving parts, operating fluids, or backing pumps to the
working vacuum; the possibility of contamination is
eliminated.
Figure 1.2 shows cutaway views of the cryopumps. The
CT-8F cryopump is virtually identical in operation
to
the
CT-8 and is of a flat pump design that offers a dimen-
sional alternative when vertical space is limited. The
CT-SF cryopump is available with gas and electrical
connectors facing in either a left or right direction
to
match your piping and electrical interface.
1.2 Installation, Operation and
Servicing Instructions
Installation, Operation and Servicing Instructions for
your Cryo-Torr vacuum pump provide complete and
easily accessible information. All personnel with
installation, operation, and servicing responsibilities
should become familiar with the contents of these
instructions to ensure safe, reliable, and efficient
cryopump performance.