Cutaway Views Of - HELIX CTI-CRYOGENICS CRYO-TORR 100 Installation, Operation And Servicing Instructions

Ui
15K CONOHISING
ARRAY
VACUUM
VESSEL
15K CRYO-
AOSOR81NG ARRAY
80K RADIATION
SHIELO
COlO~HEAO
CYLINDER
PRESSURE
RELIEF
VALliE
(HIOOEN)
STANOPIPE
FILTER
GAS flOW FROM USER'S
VACUUM SYSTEM INTO
INLET OF CRYOPUMP
I I I
j j
CT·100
GAS FLOW FROM USER'S
VACUU'" SYSTEM INTO
INLET Of CRYOPUMP
IHIHIH
CT-8
80K CONDENSING
ARRAY
MOUNTlNG flANGE
PURGE FITTING
ACCESSORY PORT
CONNECTION
TEMPERATURE
SENSOR CONNECTOR
PRESSURE
RELIEF VALVE
~
MO'",""
FLANGE
15K ARRAY
80K RADIATION
SHIELO
~-"':UU'VESSEL
REGENERATION
PURGE fiTTING
COLO-HEAD
CYLiNOER
ORIVE-UNIT
ACCESSORY
PORT
CONNECTION
15K CONOENSING
ANO CRYO-
ADSORBING ARRAY
1
CfI-CRYCXJENICS
HELIX TECHNOLOGY CORPORATION
GAS fLOW FROM USER'S
VACUUM SYSTEM INTO
INLET OF CRYOPUMP
MQUNTING flANGE
CONDENSING
ARRAY
L _ - -
VACUUM VESSEL
'1.,-+---
80K RADIATION
SHiElD
COLO-HEAD
CYLINDER
~~. -~-
ORIIIE UNIT
ACCESSORY HELIUM-
iPO'::R::T'~-CTIOH ,/a~~~~~~~~ ~~~~~fh~t~t--
US SUPPLY
C, CONNECTOR
• ,
FI LTER
CT·7
G~S HOl FRail uSE~'S
\~(UW SlSI[~ I~TO
I~~ET Of CH10Pl!~?
CRi~E-u~lr
OISPl~CER A$SEIIBLl
CT-8F
HELlUM-
GAS RETURN
CONNECTOR
RELIEF VALVE
&OK
'O\CHSI~~
MRlY
&OK Pll'lAT!C~
SHIELD
~ACUUU
,ESSEL
T[~P£~~IUP£ S[~SO'!
{0~NE:Cl0R
~CCESSQRl POR'
CO~~ECTlO~
PRESsu.q[ RWEF
~Al~E
HrUUI!-GAS SU;>;>lY
CO!.HtlOR
HE~IUY-GAS HTUR~
{O~~ECIOR
UI'
/.\ r
Figure 1.2 Cutaway views of Cryo· Torr Cryopumps
l\
V'
1-2