HELIX CTI-CRYOGENICS CRYO-TORR 100 Installation, Operation And Servicing Instructions page 51

13
12 ""-
15
Y
.£1 ./
,
/
I .
, /
-""~/
10
eTl-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
- --
------~,---
- -- -
6
7
27
i
'
I'
23'~t
18
r-, .
I I ' .
I
I 20
I
r ' 26
": It'9
25 •
r
r
+-3 24
l~J
4-..2
Figure B.4 Exploded view of Cryo-Torr SF Cryopump
B-9/B-1O