HELIX CTI-CRYOGENICS CRYO-TORR 100 Installation, Operation And Servicing Instructions page 42

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Table A.1 Troubleshooting the Cryopump (Cont.)
Problem
Possible Cause Corrective Action
3) Cryopump fails to cool 1) Low helium pressure in 1) Check compressor gauge for
down to the required compressor. low helium charge pressure.
opemting temperature; Add gas as necessary.
takes too long to reach
temperature (20K). 2) Helium-gas supply/return 2) Check that helium-gas supply line
line incorrectly attached; is connected to supply connector
self-sealing couplings not and all self-sealing couplings
fully tightened. are fully seated.
3) Vacuum leak in vacuum
3) Check the following:
system or cryopump. a. Vacuum chamber and Hi-Vac
valve for leaks.
b. Cryopump for leaks.
c. Cryopump relief valve for leaks.
4)
Incomplete regenemtion 4) Regenerate the cryopump.
may not have fully cleaned
the adsorbing array. High
mteofrise.
5) Compressor problems. 5) Refer to compressor trouble·
shooting procedures in Table A.l
of compressor mannal.
4)
The cryopump
1)
Incorrect position of
1)
Measure and confmn incoming
makes a growling frequency selector switch voltages with values in Table
1.1.
noise (Model 8300 S3. or of the voltage
of the controller manual; also.
Compressor).
selector switch S2.
confmn correct selector switch
settings as described in Section 3.2.
page 3-3.
BASIC OPERATING INFORMATION
HELIUM
PRESSURE PSIG
(kPa)+
(NORMAL OPERATION·
STEADY STATE)
CRYOPUMP HELIUM STATIC
(NO. USED) 8300COMP.
SCCOMP.
PRESSURE PSIG
(kPa)
cr·l00{l) 95 (655) 250 (1725)
245·250 (l690·1725)
cr·l00(2)"
115 (790)
280 (1930)
cr·7 (I)
95 (655) 250 (1725) 245·250 (1690·1725)
cr·g (1) 105 (725) 280 (1930) 245·250 (1690·1725)
cr·gF(I)
*Center point of needle swing "Powered
by
8002 Controller
& 2 7
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