Maintenance Procedures - HELIX CTI-CRYOGENICS CRYO-TORR 100 Installation, Operation And Servicing Instructions

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Section 7:
Maintenance
Procedures
7.1 Scheduled Maintenance ..
7.2 Unscheduled Maintenance
7.3 Cleaning the Cryopump ..
7-1
7-1
7-2
7.4 Adding Helium Gas. . . .. . . . 7-2
7.5 Helium Circuit Decontamination. 7-4
7.5.1 Cryopump Decontamination Procedures 7-4
7.5.2 Compressor Decontamination Procedures 7-5
7.1 Scheduled Maintenance Suggested Maintenance Equipment
' ) The only scheduled maintenance required on the
It is advisable to have available the equipment and
disposable supplies listed below.
Cryo-Torr High-Vacuum Pump System is the annual
replacement of the cartridge
PIN
SOS02S0KOOl (for
S300 Compressor) or
PIN
SOS0255KOOI (for SC
Compressor).
The procedures for removing and replacing the cartridge
are included in the Compressor Manual.
7.2 Unscheduled Maintenance
There are several maintenance items that may arise on
an unplanned basis. These items generally do not occur
frequently but when they do, some specialized
procedures are necessary. They are as follows and are
listed in their general order of frequency of occurrence.
I. Cleaning or replacing the cryopump arrays.
2. Adding helium gas.
3. Decontaminating the helium circuit.
7-1
1. Helium, 99.999% pure.
2. Indium gasket 0.005-inch thick, 3" x 3" sheet,
PIN
354373SPOOL
3. Maintenance manifold,
PIN
SOS0250K003*.
4. Pressure regulator (0-3000/0-400 psig).
5. Helium charging line terminating in a l/4-inch
female flare fitting
(pIN
702Ioo2POOI).
6. Installation Tool Kit,
PIN
S032040G013. Supplied
with Cryo-Torr High-Vacuum Pump.
7. Lint-free gloves and cloth.
S. Oaldte or equivalent detergent soap.
9. Denatured alcohol.
10. ApiczonTM vacuum grease,
PIN
579S47*.
11. Torque wrench, 0 to 30 inch-pounds.
*
Available from stock; consult the factory or your sales
representative.