HELIX CTI-CRYOGENICS CRYO-TORR 100 Installation, Operation And Servicing Instructions page 7

)
Illustrations
1.1 Typical Cryo-Torr® High-Vacuum
Pumping System
(Cryo-Torr 8 Cryopump and
8300™ Compressor shown) . . . . . . . . . . . viii
1.2 Cutaway views of
Cryo-Torr Cryopumps. . . • . . . . . . . . . . 1-2
3.1 Block diagram for
system installation. . . . . . . . . . • • . . . . 3-2
3.2 Cryopump interconnection . . . • . . • . . . . 3-3
4.1 Multiplecryopump installation with
8300™ Compressor powered
by 8002'" Controller. . . . . . . • . . . . . . . 4-4
B.1 Exploded view of Cryo-Torr 100
Cryopump . • • . . . . . . . • . . . . . . • . . B-3
B.2 Exploded view of Cryo-Torr 7
Cryopump. • . . . • . . . . . . . . . . . . . . B-5
B.3 Exploded view of Cryo-Torr 8
Cryopump. . . . • . . . . . . . . . . • . . . . B-7
B.4 Exploded view ofCryo-Torr 8F
Cryopump. . . . . . . . . . . . . . . . . . .• B-9
vii
CTI-CRY()(jENICS
Tables
1.1 Cryopump Specifications. . . . . . . • . . .. 1-2
3.1 Summary of Procedures for
Quick Installation and Startup. . . . . . . .. 3-1
5.1 Typical Pressure Variations During
Cooldown and Normal Operation. . . . . .. 5-2
A.l Troubleshooting the Cryopump . . . . . . .• A-3
LfoTf--
&
~g-
3'7J
I
f;roa
k-,
OX -.
3'"C;;?
~
Y6?j'l)
(