2
Installation
Removing the Existing Foreline Pump from the MSD
WA R N I N G
16
The existing foreline pump may be hot. The foreline pump can
cause burns if touched when operating. It has a safety shield to
prevent the user from touching it.
To remove the existing foreline pump from the MSD:
1
Vent and shut down the MSD. Venting begins the automated
shut down of the MSD. Refer to the 5973, 5975, 5977A or
5977B Operation Manual for details, as applicable.
2
Turn off the MSD.
3
Disconnect the MSD from its power outlet.
4
On the MSD turbomolecular pump, loosen and remove the
hinged clamp securing the hose to the pump
Hinged
clamp
Foreline
vacuum
hose
(existing)
Figure 4
Foreline hose removal, existing pump (typical)
Retain the removed clamp for use when installing the IDP-3.
5
Remove the hose and the Viton centering ring seal from the
6
pump.
7
Disconnect the power cord for the existing foreline pump
from the MSD electronics module
Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
(Figure
4).
(Figure
5).