Removing The Existing Foreline Pump From The Msd - Agilent Technologies G6696A Installation Manual

2
Installation

Removing the Existing Foreline Pump from the MSD

WA R N I N G
16
The existing foreline pump may be hot. The foreline pump can
cause burns if touched when operating. It has a safety shield to
prevent the user from touching it.
To remove the existing foreline pump from the MSD:
1 Vent and shut down the MSD. Venting begins the automated
shut down of the MSD. Refer to the 5973, 5975, 5977A or
5977B Operation Manual for details, as applicable.
2 Turn off the MSD.
3 Disconnect the MSD from its power outlet.
4 On the MSD turbomolecular pump, loosen and remove the
hinged clamp securing the hose to the pump
Hinged
clamp
Foreline
vacuum
hose
(existing)
Figure 4 Foreline hose removal, existing pump (typical)
Retain the removed clamp for use when installing the IDP-3.
5
Remove the hose and the Viton centering ring seal from the
6
pump.
7 Disconnect the power cord for the existing foreline pump
from the MSD electronics module
Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
(Figure 4).
(Figure 5).