Agilent Technologies TPS-compact User Manual
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Agilent Technologies TPS-compact User Manual

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Instructions for Use
Safety Guideline for Turbomolecular Pumps 240
General Information
Symbols used 243
Storage
244
Preparation for Installation 245
Installation
246
Use
248
Switching on and Use of TPS-Compact
TPS-Compact Switching off 250
Emergency Stop
Maintenance
Disposal
Original Instructions
TPS-compact User Manual
241
249
250
251
252
239/314

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Summary of Contents for Agilent Technologies TPS-compact

  • Page 1 TPS-compact User Manual Instructions for Use Safety Guideline for Turbomolecular Pumps 240 General Information Symbols used 243 Storage Preparation for Installation 245 Installation Switching on and Use of TPS-Compact TPS-Compact Switching off 250 Emergency Stop Maintenance Disposal Original Instructions 239/314...

  • Page 2: Safety Guideline For Turbomolecular Pumps

    WARNING! To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed! 240/314 TPS-compact User Manual / 87-901-010-01...

  • Page 3: General Information

    The TPS-compact is an integrated system with a turbo-molecular pump for high and ultra-high vacuum applications associated with its relevant controller and its primary pump. The system can pump any type of gas or gas compound.
  • Page 4 The caution messages are displayed before procedures which, if not followed, CAUTION! could cause damage to the equipment. The notes contain important information taken from the text. NOTE 242/314 TPS-compact User Manual / 87-901-010-01...

  • Page 5: Symbols Used

    The pump is designed to pump high throughput of N , Ar and lighter gas. Should you need to pump gases heavier than Ar, please contact Agilent technical support for informations. TPS-compact User Manual / 87-901-010-01 (H) 243/314...
  • Page 6 If for any reason the shelf life time is exceeded, the pumping system has to be CAUTION! returned to the factory. Please contact the local Agilent Vacuum Sales and Service representative for informations. 244/314 TPS-compact User Manual / 87-901-010-01...

  • Page 7: Preparation For Installation

    Instructions for Use Preparation for Installation Preparation for Installation The TPS-compact is supplied in a special protective packing. If this shows signs of damage which may have occurred during transport, contact your local sales office. When unpacking the system, be sure not to drop it and avoid any kind of sudden impact or shock vibration to it.

  • Page 8: Installation

    In the presence of magnetic fields the pumping system must be protected using a ferromagnetic shield. The TPS-compact can be installed in any position. Fix the TPS- compact in a stable position connecting the inlet flange of the turbopump to a fixed counter-flange capable of withstanding a torque of 50 Nm around its axis.
  • Page 9 The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware. See the appendix "Technical Information" for a detailed description. The TPS-compact cannot be fixed by means of its base. NOTE For installation of optional accessories, see "Technical Information".
  • Page 10 The high temperatures may cause burns. WARNING! Avoid impacts or harsh movements of the pump when in operation. The bearings may become damaged and damages to the persons or the things could be taken place. 248/314 TPS-compact User Manual / 87-901-010-01...

  • Page 11: Switching On And Use Of Tps-Compact

    Switching on and Use of TPS-Compact To switch on the TPS-compact it is sufficient to supply the mains and then move the external switch to ON position. The integrated controller automatically recognizes the mains presence and start up the pump.

  • Page 12: Tps-Compact Switching Off

    Instructions for Use TPS-Compact Switching off To switch off the TPS-compact it is sufficient to move the external switch to OFF position. The integrated controller immediately stops the pumping system. Emergency Stop To immediately stop the TPS-compact in an emergency condition it is necessary to remove the supply cable from the mains plug or moving the external switch to OFF position.

  • Page 13: Maintenance

    Instructions for Use Maintenance Maintenance The TPS-compact does not require any maintenance (except Tip-seal replacement). Any work performed on the system must be carried out by authorized personnel. WARNING! Before carrying out any work on the system, disconnect it from the mains,...
  • Page 14 The end user is therefore invited to contact the supplier of the device, whether the Parent Company or a retailer, to initiate the collection and disposal process after checking the contractual terms and conditions of sale. For more information refer to: http://www.agilent.com/environment/product/index.shtml 252/314 TPS-compact User Manual / 87-901-010-01...

  • Page 15: Technical Information

    TPS-compact User Manual Technical Information Description of the TPS-Compact Turbopump Description 257 Controller Description Control Panel Description Scroll Pump Description 260 Technical Specification TPS-Compact Outline Inlet Screen Installation 267 High Vacuum Flange Connection 269 High Vacuum Flange Connection Configurations ASDF – Adaptive Scroll Driving Firmware...
  • Page 16 Window Meanings 297 Service Options 301 Cleaning 301 Exterior Interior Tip-Seal Replacement To Remove the Worn Tip-Seals To Install the new Seals and O-Rings 304 To test the Pumping System Troubleshooting Chart Replacement Parts and Accessories 254/314 TPS-compact User Manual / 87-901-010-01...

  • Page 17: Description Of The Tps-Compact

    Description of the TPS-Compact Description of the TPS-Compact The TPS-compact pumping system consists of a pump with an integrated controller and a forepump and is available in twenty-four models which differ in the TPM size, high vacuum flange and voltage.
  • Page 18 Technical Information Description of the TPS-Compact 74 FS or 304 FS 256/314 TPS-compact User Manual / 87-901-010-01...

  • Page 19: Turbopump Description

    A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating. The pump is balanced after assembly with a residual vibration amplitude less than 0.01 µm. TPS-compact User Manual / 87-901-010-01 (H) 257/314...

  • Page 20: Controller Description

    The controller can be operated by a remote host computer via the serial connection. Control Panel Description The following picture shows the TPS-compact control panel; the associated table lists the avail-able commands. For a detailed description see the following paragraphs.
  • Page 21 Control name Description J5 IN-OUT Input-output connector to remote control the TPS-compact J6 SERIAL Serial input-output connector to control the TPS-compact via an RS 232 or RS 485 connection STATUS Blue LED to show the system operating condition P3 VENT...

  • Page 22: Scroll Pump Description

    Technical Information Description of the TPS-Compact Scroll Pump Description The TPS-compact internal scroll creates vacuum using a simple dual scroll mechanism in which one of the nested scrolls orbits about the other, creating moving zones of captured gas. Gas enters the scroll set at the perimeter and is displaced and compressed toward the center hub where it is exhausted.

  • Page 23: Technical Specification

    115 Vac: 5 A 115 Vac: 4 A 230 Vac: 3 A 230 Vac: 2.5 A 100 Vac: 5 A Compliance with: EN 55011 (Class A Group 1) EN 61326-1 EN 61010-1 EN 1012-2 EN 12100 TPS-compact User Manual / 87-901-010-01 (H) 261/314...
  • Page 24 * According to standard DIN 28 428, the base pressure is that measured in a leakfree test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a ConFlat flange. When the TPS-compact has been stored at a temperature less than 5 °C, wait NOTE until the TPS-compact has reached the above mentioned temperature.

  • Page 25: Tps-Compact Outline

    Technical Information TPS-Compact Outline TPS-Compact Outline The following figure shows the TPS-compact outline. Dimensions are in mm. TPS-compact User Manual / 87-901-010-01 (H) 263/314...
  • Page 26 Technical Information TPS-Compact Outline TPS-compact equipped with 304 FS: Pumping speed for Nitrogen 264/314 TPS-compact User Manual / 87-901-010-01...
  • Page 27 Technical Information TPS-Compact Outline TPS-compact User Manual / 87-901-010-01 (H) 265/314...
  • Page 28 Technical Information TPS-Compact Outline TPS-compact 304 FS: 15l pumpdown 266/314 TPS-compact User Manual / 87-901-010-01...

  • Page 29: Inlet Screen Installation

    Technical Information TPS-Compact Outline Inlet Screen Installation TPS-compact User Manual / 87-901-010-01 (H) 267/314...
  • Page 30 0.7 mm diameter. The inlet screen, however, does reduce the pumping speed by about 10 %. The inlet screen is fitted in the upper part of the pump, as shown in the figure. 268/314 TPS-compact User Manual / 87-901-010-01...

  • Page 31: High Vacuum Flange Connection

    The screen can be removed as shown in the following figure. High Vacuum Flange Connection To connect the Turbo pump to the ISO inlet flange, remove the outer ring and position the centering ring as shown in the figure. TPS-compact User Manual / 87-901-010-01 (H) 269/314...
  • Page 32 Attach the units and tighten each one in turn. Repeat the sequential tightening until the flange faces meet. Exercise care when tightening nuts and bolts to avoid creating dents in the CAUTION! envelope as this may cause the pump rotor to lock. 270/314 TPS-compact User Manual / 87-901-010-01...

  • Page 33: High Vacuum Flange Connection Configurations

    Technical Information TPS-Compact Outline High Vacuum Flange Connection Configurations TPS-compact User Manual / 87-901-010-01 (H) 271/314...
  • Page 34 When the absorbed power exceeds the threshold power ���� �� , then the integrated scroll pump is switched on and the ������ separation electromagnetic valve is re-opened. So, the ASDF is able to extend the scroll Tip-seal life 272/314 TPS-compact User Manual / 87-901-010-01...
  • Page 35 Technical Information ASDF – Adaptive Scroll Driving Firmware TPS-compact User Manual / 87-901-010-01 (H) 273/314...

  • Page 36: Input Power Connector

    The following figure shows the input power connector. P3 – Vent This is a dedicated 24 Vdc connector to control the optional vent valve (available on request). The vent valve can be driven by controller automatically or by serial line. 274/314 TPS-compact User Manual / 87-901-010-01...

  • Page 37: Gauge Connector

    Technical Information Interconnections Gauge Connector TPS-compact is equipped with new generation gauge reading card able to drive/read a Agilent Full Range Gauge FRG-700. The FRG-700 Full Range Gauge is a combined technologies gauge (Inverted Magnetron plus Pirani Gauge). FRG-700 measure from 5x10 mbar to atmosphere (3.8x10...
  • Page 38 Technical Information Interconnections Pressure gauge can be connected/disconnected from the TPS- compact during normal operation. 276/314 TPS-compact User Manual / 87-901-010-01...

  • Page 39: Pressure Display Module

    Technical Information Interconnections Pressure Display Module TPS-compact User Manual / 87-901-010-01 (H) 277/314...
  • Page 40 SPEED SETTING (-) SOFT START (+) SOFT START (-) +24 Vdc = 30 mA NORMAL OUTPUT (relay contact) = 125V = 200 mA PROGRAMMABLE SET POINT NORMAL OUTPUT (relay contact) FAULT OUTPUT PROGRAMMABLE ANALOG SIGNAL (+) 278/314 TPS-compact User Manual / 87-901-010-01...

  • Page 41: Signal Description

    100 Hz +/-20 % ▪ amplitude: 24 V max ▪ ▪ duty cycle range: from 25 % to 75 % corresponding to a pump speed from 1100Hz to 1167Hz (see the ▪ following diagram). TPS-compact User Manual / 87-901-010-01 (H) 279/314...
  • Page 42 PROGRAMMABLE ANALOG SIGNAL: this output signal is a voltage (from 0 to 10 Vdc) proportional to a reference quantity (frequency or power or Temperature or Pressure) set by the user. The de-fault setting is the frequency (see the following example diagram). 280/314 TPS-compact User Manual / 87-901-010-01...
  • Page 43 Technical Information Interconnections Output: Power setting Voltage (V) Output: Temperature setting Voltage (V) TPS-compact User Manual / 87-901-010-01 (H) 281/314...
  • Page 44 (in % of the threshold value) to avoid bouncing. For example: reference quantity: frequency ▪ ▪ threshold: 867 Hz ▪ hysteresis: 2 % activation type: "high level" ▪ 282/314 TPS-compact User Manual / 87-901-010-01...

  • Page 45: How To Connect The Open Collector Input Of The Controller

    How to Connect the Open Collector Input of the Controller Here below there are the typical connections of the open collector input of TPS-compact to an external system. Two cases are considered: TPS-compact User Manual / 87-901-010-01 (H) 283/314...
  • Page 46 24 Vdc the customer does not supply the 24 Vdc. Please note that on the connector a 24 Vdc, 30 mA, a GROUND signal and the open collector pin are available. 284/314 TPS-compact User Manual / 87-901-010-01...
  • Page 47 Technical Information Interconnections TPS-compact User Manual / 87-901-010-01 (H) 285/314...
  • Page 48 Technical Information Interconnections 286/314 TPS-compact User Manual / 87-901-010-01...

  • Page 49: How To Connect The Outputs Of The Controller

    11 and 9. J6 – Serial This is a 9 pin D-type serial input/output connector to control via an RS 232 or RS 485 connection the TPS-compact. TPS-compact User Manual / 87-901-010-01 (H) 287/314...

  • Page 50: Communication Format

    RS 485 is necessary to select the type of communication as well as the device address by means of the software. Communication Format 8 data bit ▪ no parity ▪ 1 stop bit ▪ ▪ baud rate: 600/1200/2400/4800/9600 programmable 288/314 TPS-compact User Manual / 87-901-010-01...
  • Page 51 Technical Information RS 232/RS 485 Communication Description  ½ W PC HOST TPS-compact TPS-compact  ½ W TPS-compact User Manual / 87-901-010-01 (H) 289/314...

  • Page 52: Serial Communication Descriptions

    This unit can communicate by two different proto-col: ▪ protocol (old system) “letter” “Window” protocol (new system). ▪ These two protocols can be used as well with 232 or 485 media. Please use “Window” protocol for new development. NOTE 290/314 TPS-compact User Manual / 87-901-010-01...

  • Page 53: Window Protocol

    ANSWER + CRC to the host. The MESSAGE is a string with the following format: <STX>+<ADDR>+<WIN>+<COM>+<DATA>+<ETX>+<CRC> Where: When a data is indicated between two quotes (‘...’) it means that the indicated NOTE data is the corresponding ASCII character. TPS-compact User Manual / 87-901-010-01 (H) 291/314...
  • Page 54 MESSAGE. Using the RS 485 interface, the message structure remains identical to the one NOTE used for the RS 232 interface, the only difference being that the value assigned to the ADDRESS <ADDR> 292/314 TPS-compact User Manual / 87-901-010-01...
  • Page 55 The specified window is Read Only or temporarily disabled (for example) Win Disabled 1 byte (0x35) you can’t write the Soft Start when the Pump is running) TPS-compact User Manual / 87-901-010-01 (H) 293/314...
  • Page 56 Technical Information Window Protocol Examples Command: START Source: PC Destination: Controller ADDR WINDOW Source: Controller Destination: PC ADDR Command: STOP Source: PC Destination: Controller ADDR WINDOW Source: Controller Destination: PC ADDR 294/314 TPS-compact User Manual / 87-901-010-01...
  • Page 57 Technical Information Window Protocol Command: SOFT-START (ON) Source: PC Destination: Controller ADDR WINDOW Source: Controller Destination: PC ADDR Command: SOFT-START (OFF) Source: PC Destination: Controller ADDR WINDOW Source: Controller Destination: PC ADDR TPS-compact User Manual / 87-901-010-01 (H) 295/314...
  • Page 58 Source: Controller (with address = 3 in stop status) Destination: PC ADDR WINDOW DATA (STATUS) Command: REAL SERIAL TYPE Source: PC Destination: Controller (with address = 3 in 485 mode) ADDR WINDOW Source: Controller Destination: PC ADDR WINDOW DATA 296/314 TPS-compact User Manual / 87-901-010-01...

  • Page 59: Window Meanings

    1 = low level active active" (default = 0) Set point hysteresis (in % of value) 0 to 100 (default = 2) Active Stop (write only in stop) 0 = NO 1 = YES (default = 0) TPS-compact User Manual / 87-901-010-01 (H) 297/314...
  • Page 60 0 to 13107 sec) (default = 15) Vent open time 0 = infinite See “vent connector” paragraph 1 bit = 0.2 sec 1 to 65535 Power limit applied watt Read the maximum allowable power 298/314 TPS-compact User Manual / 87-901-010-01...
  • Page 61 Reserved to Agilent service to 347 0 = reset Tip-seal life (R) Tip-seal life reset (W) CRC EPROM (QE) QE8XXXX (where “XXXX” are variable) Boot CRC (BL) BL2XXXX (where “XXXX” are variable) TPS-compact User Manual / 87-901-010-01 (H) 299/314...
  • Page 62 3. These commands remove the pump motor supply for a short time. If they are used continuously, they can cause the pump stopping. TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP. OVERVOLTAGE CONTROLL. OVERTEMP. 300/314 TPS-compact User Manual / 87-901-010-01...

  • Page 63: Service Options

    O-rings, and can be obtained from your Agilent dealer. Cleaning Exterior The exterior surfaces of the TPS-compact may be cleaned with mild detergents only. Interior Internal dry scroll pump do not contain fluid for the cleansing of accumulated dust and debris.

  • Page 64: Tip-Seal Replacement

    Tip-Seal Replacement The parts and tools required to replace Tip-Seals are listed below: Tip-Seal Replacement Kit P/N IDP3TS ▪ 4 mm Allen wrench ▪ Razor blade or side-cutting pliers ▪ Compressed air (optional) ▪ 302/314 TPS-compact User Manual / 87-901-010-01...

  • Page 65: To Remove The Worn Tip-Seals

    Unlock the scroll pump support by unscrewing the screws (A) (see the “Tip-Seal replacement - Figure A”) Lift the TPS-compact in order to access the Scroll pump site (you’ll hear a “click” noise as soon as the upper part of TPS- compact is locked).

  • Page 66: To Install The New Seals And O-Rings

    Reinstall (4) M5 bolts (B) and torque the (4) M5 bolts to 5.6 Nm (50 in-lb). Unlock the upper part of TPS-compact by sliding the small lever you can find on the bottom side of TPS-compact. Reconnect the TPS-compact to the electrical power mains.

  • Page 67: To Test The Pumping System

    10 minutes prior to disassembly. To test the Pumping System Run the TPS-compact for about 5 seconds. Verify that the front fan is running. If you hear loud noises from the Scroll pump this indicates that the tip seal or main O-ring are possibly out of place.

  • Page 68: Troubleshooting Chart

    Scroll Pump seals worn out Replace tip seals. Poor conductance to TPS-compact Replumb with shorter and/or larger diameter tubing. Hammering Scroll pump overheated Check ventilation to TPS-compact. Check ambient noise temperature. Debris in Scroll pump Flush the TPS-compact. Disassemble pump and inspect.

  • Page 69: Replacement Parts And Accessories

    FRG-700 5 m cable 9699961 9699961 9699961 9699961 Serial cable and T-Plus SW 9699883 9699883 9699883 9699883 Tip-seal replacement kit IDP3TS IDP3TS IDP3TS IDP3TS Vent Valve N.O. 0.5 mm orifice 9699844M005 9699844M005 9699844M005 9699844M005 TPS-compact User Manual / 87-901-010-01 (H) 307/314...
  • Page 70 9699883 9699883 Tip-seal replacement kit IDP3TS IDP3TS IDP3TS IDP3TS Vent Valve N.O. 0.5 mm orifice 9699844M005 9699844M005 9699844M005 9699844M005 For a complete overview of Agilent's extensive product lines, please refer to the Agilent catalog. 308/314 TPS-compact User Manual / 87-901-010-01...
  • Page 76 Request for Return Form United States India (Sales) India (Service) Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies India Pvt. Ltd. 121 Hartwell Avenue Unit Nos 110- 116, & Part of 101 & 109 C-Block, RMZ Centennial Plot Number- 8A, 8B, 8C,...

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