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User Manual
A620D0001 Rev 1.2
30-July-2019
A-62x Series Rotary Air Bearing Stage
PIglide RM, Direct-drive Torque Motor Driven with Encoder Feedback
This document describes the A-62x.xxxxx Series of Rotary Air Bearing Motorized Stages.
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: air@pi-usa.us
Page 1 of 32
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Summary of Contents for PI A-62 Series
- Page 1 PIglide RM, Direct-drive Torque Motor Driven with Encoder Feedback This document describes the A-62x.xxxxx Series of Rotary Air Bearing Motorized Stages. Page 1 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
- Page 2 PI owns the following patents or patent applications for the technology field Magnetic Direct Drives (PIMag®): WO212146709A2, DE102012207082A1 © 2019 PI (Physik Instrumente) L.P. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, PI (Physik Instrumente) L.P. retains all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of the source.
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Page 3: Table Of Contents
Removing the shipping restraint _____________________________________________________ 16 6.5. Air Supply _______________________________________________________________________ 17 6.6. Affixing the Payload to the Stage _____________________________________________________ 18 Page 3 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... - Page 4 Figure 12 - A-624.050x1 Stage Dimensions ____________________________________________________ 28 Figure 13 - A-625.065x1 Stage Dimensions ____________________________________________________ 29 Figure 14 - A-627.075x1 Stage Dimensions ____________________________________________________ 30 Page 4 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us...
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Page 5: About This Document
Action consisting of one or several steps whose sequential order is irrelevant 1.3. Other Applicable Documents None at this time Page 5 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 6: Safety
Immediately eliminate any faults and malfunctions that are likely to affect safety. The operator is responsible for the correct installation and operation of the A-62x. Page 6 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 7: Warnings And Safety Notices
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches, dings, dents, or distortion of the stage. Page 7 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506... -
Page 8: Organizational Measures
Personnel qualification The A-62x may only be installed, started up, operated, maintained and cleaned by authorized and appropriately qualified personnel. Page 8 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 9: Product Description
050 = 50mm 4 = 150 mm 050 = 50mm 5 = 200mm 065 = 65mm 7 = 300mm 075 = 75mm Page 9 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 10: Product Features
Figure 1 - Product Features, A-62x Description Stage base Moving table Motor electrical connection Encoder electrical connection Air supply inlet Air exhaust port Page 10 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 11: Product Labeling
7. Air supply inlet location 8. Motor electrical connection 9. Encoder electrical connection 10. Country of origin 11. Manufacturer's address (website) 12. Manufacturer's logo Page 11 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 12: Scope Of Delivery
3.6. Controllers The A-62x must be connected to a suitable motion controller to be operated. The following standard controllers are available from PI to operate the A-62x. Other controllers are also available, contact PI for options. Part # Description C-891.120200 PIMag®... -
Page 13: Technical Features
The index is integral to the encoder electronics. The index mark is optical; there is one index per revolution of the stage. Page 13 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506... -
Page 14: Unpacking And Handling
Carefully unpack the air bearing stage and other components from the shipping packaging. Inspect the contents for signs of damage. If there is any sign of damage or missing parts, contact PI immediately. Compare the package contents to packing list and notify PI immediately if any parts are missing or incorrect. Keep all packaging materials in case the product needs to be returned. -
Page 15: Installation
6.2. Mounting Orientation The A-62x is suitable for various mounting orientations, such as horizontal, vertical, and inverted. PI recommends that you review your payload and orientation conditions with a PI engineer before purchasing this product. Page 15 of 32 PI (Physik Instrumente) L.P. -
Page 16: Mounting Procedure
M5 SHCS, 8mm long SHCS A-624 M6 SHCS, 8mm long Shipping restraint label A-625 M6 SHCS, 16mm long A-627 M8 SHCS, 10mm long Page 16 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 17: Air Supply
The stage table should never be moved without the air supply turned on. Moving the stage table with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces. Page 17 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 18: Affixing The Payload To The Stage
6.7. Multi-Axis Configurations Multi-axis configurations of the A-62x series stage are not available at this time without customization. Please contact PI for a quote if you require a multi-axis system. Page 18 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 19: Connecting The Stage To Protective Earth
4. Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is <0.1 Ω at 25 A. Page 19 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506... -
Page 20: Connecting The Cables
Connecting the Cables Stage interconnect cables are not in the scope of delivery of the A-62x series stage. However, PI offers several standard cable sets that can be used, depending on the motion controller being used. Contact PI for a quote. -
Page 21: Startup And Operation Of The Stage
Note that the servo tuning values may need to be adjusted if the payload mass or size changes. If PI was not given user application information at the time of order, the servo was tuned with no payload mass. -
Page 22: Maintenance
The A-62x stage weighs up to 50 kg in its largest size. Use care when lifting and use two people to lift. Page 22 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506... -
Page 23: Customer Service
User Manual A620D0001 Rev 1.2 30-July-2019 Customer Service For inquiries and orders, contact your PI sales engineer or use the following contacts: Email: air@pi-usa.us Address: 16 Albert Street, Auburn, MA 01501, USA Tel: 508-832-3456 Fax: 508-832-0506 If you have questions concerning your system, have the following information ready: ... -
Page 24: Technical Data
Notes: 1. Values shown are obtained using controller-based error compensation. Stage must be purchased with a PI controller to achieve this performance. Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage. -
Page 25: Motor Electrical Specifications
See max velocity in table above. Not limited by encoder. 0.8 to 1.2 Vp-p, Differential, 1/rev Index Mark None Notes: Resolution shown for encoder option “A” assumes 4096x interpolation. Page 25 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 26: Ambient Conditions
Any deviation outside the range shown above may damage the stage. 10.6. Dimensions Figure 10 - A-621.025x1 Stage Dimensions Page 26 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 27: Figure 11 - A-623.Xxxx1 Stage Dimensions
User Manual A620D0001 Rev 1.2 30-July-2019 4MM OD TUBE Figure 11 - A-623.xxxx1 Stage Dimensions Page 27 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 28: Figure 12 - A-624.050X1 Stage Dimensions
User Manual A620D0001 Rev 1.2 30-July-2019 Figure 12 - A-624.050x1 Stage Dimensions Page 28 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 29: Figure 13 - A-625.065X1 Stage Dimensions
User Manual A620D0001 Rev 1.2 30-July-2019 Figure 13 - A-625.065x1 Stage Dimensions Page 29 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 30: Figure 14 - A-627.075X1 Stage Dimensions
User Manual A620D0001 Rev 1.2 30-July-2019 Figure 14 - A-627.075x1 Stage Dimensions Page 30 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 31: Pin Assignments
Encoder CLK+ (MA+) Encoder CLK- (MA-) Encoder power Encoder power SLO+ Encoder Data+ (SLO+) SLO- Encoder Data- (SLO-) Encoder ground Encoder ground Page 31 of 32 PI (Physik Instrumente) L.P. 16 Albert Street, Auburn, MA 01501 Tel: 508-832-3456 Fax: 508-832-0506 Email: air@pi-usa.us... -
Page 32: Ec Declaration Of Conformity
Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.
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