User Manual
A620D0001 Rev 1.2
30-July-2019
1.
1.1.
1.2.
1.3.
2.
Safety ________________________________________________________________________________6
2.1.
Intended Use ______________________________________________________________________6
2.2.
2.3.
2.4.
3.
3.1.
3.2.
Product Features _________________________________________________________________ 10
3.3.
Product Labeling __________________________________________________________________ 11
3.4.
Scope of Delivery _________________________________________________________________ 12
3.5.
Accessories ______________________________________________________________________ 12
3.6.
Controllers ______________________________________________________________________ 12
4.
Technical Features ____________________________________________________________________ 13
4.1.
Air Bearing ______________________________________________________________________ 13
4.2.
Torque Motor ____________________________________________________________________ 13
4.3.
Encoder _________________________________________________________________________ 13
4.4.
5.
6.
Installation __________________________________________________________________________ 15
6.1.
6.2.
6.3.
6.4.
6.5.
Air Supply _______________________________________________________________________ 17
6.6.
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: air@pi-usa.us
Table of Contents
Page 3 of 32