Surface Resistivity - Keithley 8009 Instruction Manual

Model 8009 Resistivity Test Fixture Instruction Manual
or
Where:
ρ is the volume resistivity of the specimen
V is the applied voltage for the electrometer
t is the average thickness of the specimen in centimeters
c
t is the average thickness of the specimen in inches
i
I is the current reading from the electrometer

Surface resistivity

Surface resistivity is the electrical resistance of the surface of specimen material. It is measured from
electrode to electrode along the surface of the specimen. Since surface length is fixed, the
measurement is independent of the physical dimensions of the specimen.
Surface resistivity (ρ) is measured by applying a voltage potential across the surface of the specimen,
measuring the resultant current, and then performing the following calculation:
Where:
σ is the surface resistivity of the specimen
V is the applied voltage from the electrometer
I is the current reading from the electrometer
8009-901-01 Rev. D / May 2019
Section 3: Derivation of resistivity equations
3-3