MKS Baratron 122B Instruction Manual
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MKS Baratron 122B Instruction Manual

MKS Baratron 122B Instruction Manual

Absolute pressure transducer
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MKS Baratron 122B Instruction Manual

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Summary of Contents for MKS Baratron 122B

  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 110899-P1 Rev D, 8/98 Instruction Manual ® MKS Baratron Type 122B Absolute Pressure Transducer Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
  • Page 3 MKS Instruments, Inc. (MKS) warrants that the equipment described above (the “equipment”) manufactured by MKS shall be free from defects in materials and workmanship for a period of one year from date of shipment and will for a period of two years from the date of shipment, correctly perform all date-related operations, including...
  • Page 4 110899-P1 Rev D, 8/98 ® MKS Baratron Type 122B Absolute Pressure Transducer...
  • Page 5 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 6: Table Of Contents

    Table of Contents Table of Contents Pressure Transducer Safety Information.................. 1 Symbols Used in This Instruction Manual ..............1 Symbols Found on the Unit..................2 Safety Procedures and Precautions ................3 Informations relatives à la sécurité pour le transducteur de pression........5 Symboles utilisés dans ce manuel d'utilisation............
  • Page 7 Table of Contents Dimensions....................25 Electrical Information....................26 Grounding .....................26 Chapter Three: Overview .......................27 Sensor ........................27 Signal Conditioner Electronics ...................29 Labels ........................30 Serial Number Label ..................30 Chapter Four: Operation ......................31 How To Adjust the Zero .....................31 Lowest Suggested Pressure Reading...............31 Lowest Suggested Pressure Control..............32 Highest Base Pressure For Proper Zero Adjust ..........31 Chapter Five: Maintenance.....................33 General Information ....................33...
  • Page 8 List of Figures and Tables List of Figures and Tables Figures Figure 1: Interface Cables for the Type 122 Transducer ............21 Figure 2: Preferred Method to Connect an Overall Metal Braided Shielded Cable....23 Figure 3: Alternate Method to Connect an Overall Metal Braided Shielded Cable....23 Figure 4: Dimensions of a 122 Transducer................
  • Page 9 List of Figures and Tables...

  • Page 10: Pressure Transducer Safety Information

    Pressure Transducer Safety Information Symbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 11: Symbols Found On The Unit

    Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017...

  • Page 12: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 13 Safety Procedures and Precautions Pressure Transducer Safety Information OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise.

  • Page 14: Informations Relatives À La Sécurité Pour Le Transducteur De Pression

    Informations relatives à la sécurité pour le Symboles utilisés dans ce manuel d'utilisation transducteur de pression Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel.

  • Page 15: Symboles Apparaissant Sur L'unité

    Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le transducteur de pression Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse)

  • Page 16: Mesures De Sécurité Et Précautions

    Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
  • Page 17 Mesures de sécurité et précautions Informations relatives à la sécurité pour le transducteur de pression VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...

  • Page 18: Sicherheitshinweise Für Den Druckmeßwertwandler

    Sicherheitshinweise für den Druckmeßwertwandler In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßwertwandler In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin.

  • Page 19: Erklärung Der Am Gerät Angebrachten Symbole

    Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Druckmeßwertwandler Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Netz) Aus (Netz) Erde Schutzerdung IEC 417, No.5007...

  • Page 20: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Instrument zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
  • Page 21 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Druckmeßwertwandler Anweisungen zum Installieren der Armaturen Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Instrumentes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.

  • Page 22: Medidas De Seguridad Del Transductor De Presión

    Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.

  • Page 23: Símbolos Hallados En La Unidad

    Símbolos hallados en la unidad Medidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra...

  • Page 24: Procedimientos Y Precauciones De Seguridad

    No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
  • Page 25 Procedimientos y precauciones de seguridad Medidas de seguridad del transductor de presión USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.

  • Page 26: Chapter One: General Information

    Introduction Chapter One: General Information Introduction ® The MKS Baratron Type 122B Absolute Pressure Transducer continues the evolution of low cost pressure measurement by providing a 15-pin Type “D” connector on the industry standard ® 122A unit. Using a latest-generation single-sided dual-electrode Inconel...

  • Page 27: How This Manual Is Organized

    Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.

  • Page 28: Chapter Two: Installation

    Chapter Two: Installation How To Unpack the Type 122 Unit MKS has carefully packed the Type 122 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.

  • Page 29: Interface Cables

    XX indicates the cable length, in feet; standard length is 10 ft Table 5: Interface Cables Certain interface cables can be supplied by MKS, or you may choose to make your own, provided the appropriate specifications contained herein are maintained. Refer to Figure 1 for the part numbers for the cables used with various MKS Readout/Controller Systems.

  • Page 30: Figure 1: Interface Cables For The Type 122 Transducer

    CB-259-5/CB259S-5 Figure 1: Interface Cables for the Type 122 Transducer Interface Cables for Non-MKS Power Supplies/Readouts Shielded cable assemblies, in a nominal 10’ (3M) length, with one end terminated in “flying leads” (pigtail) fashion are available at nominal cost. Shielded cable assemblies are...

  • Page 31: Generic Shielded Cable Guidelines

    Interface Cables Chapter Two: Installation Generic Shielded Cable Guidelines Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2.

  • Page 32: Figure 2: Preferred Method To Connect An Overall Metal Braided Shielded Cable

    Chapter Two: Installation Interface Cables Example 1: Preferred method to Connect Cable (shown on a transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary)

  • Page 33: Product Location And Requirements

    Although the 122 unit may be mounted in any attitude, it is recommended that it be placed in a system with the P port facing down, as this allows contamination, if present, to fall away from the pressure sensing diaphragm. Any standard vacuum fitting installed by MKS may be used ® ®...

  • Page 34: Dimensions

    Chapter Two: Installation Setup Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. Figure 4: Dimensions of a 122 Transducer...

  • Page 35: Electrical Information

    Electrical Information Chapter Two: Installation Electrical Information The 122 transducer requires an external power source capable of supplying ±15 VDC, ±5%, at 35 mA minimum. Noise and ripple should be less than 20 mV p-p. Any readout device may be used which has input capabilities of 0 to 10 VDC and impedance greater than 10k ohms.

  • Page 36: Chapter Three: Overview

    Chapter Three: Overview Sensor Chapter Three: Overview Sensor The variable capacitance sensor, shown in Figure 6, consists of a pressure inlet tube (port) connected to a small chamber in the sensor body. One wall of this chamber is an elastic metal diaphragm.

  • Page 37: Figure 7: Cross Sectional View Of The Type 122 Transducer

    Sensor Chapter Three: Overview Figure 7: Cross Sectional View of the Type 122 Transducer...

  • Page 38: Signal Conditioner Electronics

    Chapter Three: Overview Signal Conditioner Electronics Signal Conditioner Electronics The block diagram (refer to Figure 8) shows the output from a sine wave oscillator which is at a fixed frequency and amplitude and is used to drive the bridge circuit. An imbalance of the sensor electrode capacitances (caused by an input pressure) causes a differential charge through the bridge and to the following buffer amplifier.

  • Page 39: Labels

    The serial number label lists the serial number and the model number of the unit. The CE symbol designates compliance with the European CE directive. Serial #: 0123456789 Model #: 122BA00010AB MKS In stru ment s, Inc. Made in t he USA Figure 9: Serial Number Label...

  • Page 40: Chapter Four: Operation

    Chapter Four: Operation How To Adjust the Zero Chapter Four: Operation How To Adjust the Zero All capacitance manometers require initial and periodic zero adjustments be made at a pressure lower than their minimum resolution in order to ensure that the full dynamic range specified can be achieved.

  • Page 41: Lowest Suggested Pressure Control

    How To Adjust the Zero Chapter Four: Operation If available pressures are not sufficiently low to set the transducer zero, a vacuum leak detector may be used. In this case, mount the transducer on the leak detector in the same plane of orientation as where it will be used.

  • Page 42: Chapter Five: Maintenance

    Sensor MKS recommends that you do not attempt to clean the sensor except in the case of water soluble deposited material, such as ammonium chloride from the exhaust line of a low pressure CVD Nitride reactor. In this case, the following procedure may be used: 1.
  • Page 43 Sensor Chapter Five: Maintenance This page intentionally left blank.

  • Page 44: Appendix A: Product Specifications

    Appendix A: Product Specifications Electrical Specifications Appendix A: Product Specifications Electrical Specifications CE Compliance Electromagnetic Compatibility EMC Directive 89/336/EEC Input Power Required ±15 VDC @ 35 mA, regulated ±5% Output Signal 0 to 10 VDC into 10K ohm or greater Performance Specifications Accuracy ±...

  • Page 45: Environmental Specifications

    Environmental Specifications Appendix A: Product Specifications Environmental Specifications Ambient Operating Temperature Range 0° to 50° C (32° to 122° F) Due to continuing research and development activities, these product specifications are subject to change without notice.

  • Page 46: Appendix B: Model Code Explanation

    Appendix B: Model Code Explanation Model Code Appendix B: Model Code Explanation Model Code The options of your unit are identified in the model code. The model code is identified as follows: 122BA-XXXXXYZ where: Type 122BA XXXXX Type Number Full Scale Range Fittings Accuracy Type Number (122BA)

  • Page 47: Full Scale Range - Torr (Xxxxx)

    Model Code Appendix B: Model Code Explanation Full Scale Range - Torr (XXXXX) The full scale range is indicated by a five-digit code. Full Scale Range Ordering Code 00001 00002 00010 00100 1000 01000 5000 05000 10000 10000 15000 15000 20000 20000 25000...

  • Page 48: Index

    Index Index Accuracy, 38 Maintenance, 33 Manual organization, 18 Medidas de seguridad del transductor de presión, 13 Base pressure, for zero, 32 Operation Cables, 20 zero adjust, 31 CE compliance, 35 Customer support, 18 Pressure, for control, 32 Pressure, for reading, 32 Dimensions, 25 Returning the product, 18, 19 Electrical, 26...
  • Page 49 Index Zero, 31 Zero, base pressure, 32...
  • Page 50 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

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