Inficon MAG050 Operating Manual

Safety
Symbols Used
Cold Cathode Gauge
MAG050
MAG060
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and envi-
ronmental damage.
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Note
Operating Manual
Incl. EU Declaration of Conformity
Personnel Qualification
tinb43e1 (2018-06)
Product Identification
All work described in this document may only be carried
In all communications with INFICON, please specify the
out by persons who have suitable technical training and the
information on the product nameplate. For convenient
necessary experience or who have been instructed by the
reference copy that information into the space provided
end-user of the product.
below.
INFICON AG, LI-9496 Balzers
General Safety Instructions
Model:
• Adhere to the applicable regulations and take the neces-
PN:
sary precautions for the process media used.
SN:
• Consider possible reactions between the materials
(→ Technical Data) and the process media.
• Consider possible reactions (e.g. explosion) of the pro-
cess media due to the heat generated by the product.
• Adhere to the applicable regulations and take the neces-
sary precautions for all work you are going to do and con-
sider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Validity
This document applies to products with part number
399-840 (MAG050, DN 25 ISO-KF)
399-841 (MAG050, DN 40 ISO-KF)
399-842 (MAG050, DN 40 CF-F)
399-845 (MAG060, DN 40 ISO-KF)
399-846 (MAG060, DN 40 CF-F)
The part number (PN) can be taken from the product name-
Communicate the safety instructions to all other users.
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the product with vacuum
Responsibility and Warranty
connection DN 40 ISO-KF. They apply to the products with
other vacuum connections by analogy.
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
Intended Use
• make any kind of interventions (modifications, alterations,
The above Cold Cathode Gauges have been designed for
etc.) on the product
vacuum measurement in the pressure range of
• use the product with accessories not listed in the corre-
-9 -3
MAG050: 2×10 ... 5×10 hPa│mbar
sponding product documentation.
-10 -3
MAG060: 1×10 ... 5×10 hPa│mbar.
The end-user assumes the responsibility in conjunction with
They are used together with a INFICON measurement and the process media used.
control unit of the type VGC083C.
Gauge failures due to contamination are not covered by the
warranty.
Functional Principle
Over the whole measurement range, the measuring signal is
output as logarithm of the pressure.
The MAG050 / MAG060 function with a cold cathode ioniza-
tion measurement circuit (according to the inverted magne-
tron principle).
Technical Data
Admissible temperatures
Storage
Operation
MAG050
MAG060
Bakeout
MAG050
MAG060
Relative humidity
Use
Measurement range (air, N
MAG050
MAG060
Accuracy (N , typical)
2
Repeatability (typical)
Gas type dependence
Protection type
Overpressure
Radiation resistance
MAG050
MAG060
Operating voltage
(in measuring chamber)
Operating current
(in measuring chamber)
Electrical connection
Connector
Type
Cable length between gauge
and measurement unit
MAG050
DANGER
DANGER: magnetic fields
MAG060
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair their
function.
Maintain a safety distance of ≥10 cm between
the magnet and the heart pacemaker or prevent
the influence of strong magnetic fields by anti-
Materials on the
magnetic shielding.
vacuum side
Vacuum connection
Measuring chamber
DN 25 ISO-KF
DN 40 ISO-KF / CF-F
Feedthrough isolation
Internal seal
Anode
Ignition aid
Internal volume
Dimensions [mm]
ø63.5
AF 7
DN 40 CF-F
Weight 600 g
(DN 25 ISO-KF, DN 40 ISO-KF)
850 g
(DN 40 CF-F)
–40 °C ... +80 °C
+5 °C ... +80 °C
Installation
(with normal cable)
+5 °C ... +150 °C
(with high temperature cable)
Vacuum Connection
+5 °C ... +80 °C
(with normal cable)
+5 °C ... +250 °C D A N G E R
(with high temperature cable)
Overpressure in the vacuum system >100 kPa
(>1 bar)
+150 °C (without cable)
Injury caused by released parts and harm
+250 °C (without cable)
caused by escaping process gases can result if
max. 80% at temperatures
clamps are opened while the vacuum system is
up to +31 °C, decreasing to
pressurized.
50% at +40 °C
Do not open any clamps while the vacuum sys-
indoors only
tem is pressurized. Use the type clamps which
altitude up to 2000 m NN
are suited to overpressure.
)
2
-9 -3
2×10 ... 5×10 hPa│mbar D A N G E R
-10 -3
1×10 ... 5×10 hPa│mbar
Overpressure in the vacuum system >250 kPa
30% of reading
(>2.5 bar)
5% of reading
KF connections with elastomer seals (e.g.
→ Appendix
O-rings) cannot withstand such pressures. Pro-
cess media can thus leak and possibly damage
your health.
IP 40
≤900 kPa (≤9 bar) Use O-rings provided with an outer centering
ring.
for inert gases and tempera-
tures <55 °C only
D A N G E R
–
Protective ground
9
10 rad
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
≤3.3 kV
grounded vacuum chamber. This connection
must conform to the requirements of a protective
≤700 µA
connection according to EN 61010:
• CF connections fulfill this requirement
• For gauges with a KF flange, use a conduc-
SHV
tive metallic clamping ring
coaxial cable
Caution
max. 100 m Vacuum component
(40 m if the lower limit of the
Dirt and damages impair the function of the
measurement range is used
vacuum component.
→  [1], Operating Manual
When handling vacuum components, take ap-
VGC083C)
propriate measures to ensure cleanliness and
max. 100 m
prevent damages.
(6 m if the lower limit of the
measurement range is used,
→  [1], Operating Manual
Caution
VGC083C)
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
stainless steel (1.4306)
Always wear clean, lint-free gloves and use
clean tools when working in this area.
stainless steel (1.4104)
stainless steel (1.4306)
ceramic (Al O )
2 3 When CF vacuum connections are made, it can be advanta-
MAG050 FPM
geous to temporarily remove the magnet unit (→ Removing
MAG060 Ag
the Magnet Unit).
Mo
Mount the gauge so that no vibrations occur. Vibrations at
stainless steel (1.4310)
the gauge cause a deviation of the measured values.
≈20 cm³
The gauge may be mounted in any orientation.
To keep condensates and particles from getting into
the measuring chamber preferably choose a hori-
zontal to upright position.
Remove the protective lid and connect the product to the
vacuum system.
Keep the protective lid.
Removing the Magnet Unit
(CF vacuum connection only)
For reasons of tolerance, the same magnet unit has
DN 25 ISO-KF
to be used again when reassembling the gauge.
DN 40 ISO-KF
Tools Required Contamination generally has the effect that the pressure indi-
cation is too low. If the contamination is severe, instability
• Allen wrench AF 1.5
occurs. Contamination layers can peel off in the measuring
• Open-end wrench AF 7
chamber and cause short circuits.
Depending on the operating conditions, cleaning may there-
4
fore be necessary after a few days or after a few years.
3
7
Deinstallation
Vacuum
chamber
Procedure

Unfasten the hex head screw (3) on the magnet unit (4)
and remove the magnet unit.
The magnetic force and the tendency to tilt
make it more difficult to separate the magnet
unit and the measuring chamber (7).

Make the vacuum connection between the gauge and
the vacuum system.

Mount the magnet unit and lock it with the hex head
screw (3).
Electrical Connection
• Make sure the vacuum connection is properly
made.
• The VGC083C control unit must be turned off Procedure
before any work is performed on the gauge or 
sensor cable.
Turn off the VGC083C control unit.

Connect the sensor cable to the gauge and to the INFICON
Vent the vacuum system and disconnect the sensor
measurement unit.
cable from the gauge.

Remove gauge from the vacuum system and install the
protective lid.
Operation
The gauge is ready for operation as soon as it has been
connected.
Maintenance
Gas type Dependence
The measuring signal depends on the type of gas being
Sensor failures due to contamination are not covered by the
measured. The value displayed is accurate for dry air, N , O
warranty.
2 2
and CO. It can be mathematically converted for other gases.
This can be done by entering the corresponding calibration
factor on the INFICON measurement unit (→ Appendix).
Ignition Delay
Cleaning the Gauge / Changing Parts
When cold cathode measurement systems are activated, an
ignition delay occurs. The delay time increases at low pres-
sures and for clean, degassed gauges it is typically:
-7 ≈ 0.1 minute
1×10 hPa│mbar
≈
-8
1×10 hPa│mbar 1 minute
-9 ≈
1×10 hPa│mbar 5 minutes
≈
-10
1×10 hPa│mbar 20 minutes (MAG060 only)
The ignition is a statistical process. Already a small amount
of depositions on the inner surfaces can have a strong in-
fluence on it.
Contamination
Gauge failures due to contamination are not covered by the
warranty.
Cold cathode gauges are subject to contamination. The de-
gree of contamination and subsequently the accuracy of the
measured value depend on:
• the pressure in the vacuum chamber
• contaminants inside the vacuum chamber (vapors, pro-
cess particles, etc.)
• the measurement current.
To avoid extensive contamination switch the gauge
-2
on only at pressures of <10 hPa│mbar.
Original: English
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
t i nb43e1