Module 5. Basic Measurement
SMU Fundamentals
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Classic Test Environment
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SMUs Connected in Series or Parallel
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Cabling and Fixture Issues
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Kelvin and Driven Guard
Probes and Prober Connections
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Triax and Coax Adapters
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Safety Interlock Issues
Module 6. Low Current Measurement
Low-Current Measurement Challenges
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Calibration and Zero Cancel
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Effect of Cable Movement
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ASU for Ultra Low-Current Measurement
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Low-Current Subthreshold
Trade-Off Speed Vs Accuracy
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Low-Current Gummel Plot
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Low-Current Gate Oxide Leakage
Contents-3
Contents