Varian SH-100 Instruction Manual

Dry scroll vacuum pump
Table of Contents
  • Declaration of Conformity
  • Warranty
  • Warranty Replacement and Adjustment
  • Table of Contents
  • Instructions for Use
  • General Information
  • Storage
  • Installation
  • Use
  • Maintenance
  • Istruzioni Per L'uso
  • Informazioni Generali
  • Immagazzinamento
  • Installazione
  • Uso
  • Manutenzione
  • Instructions D'utilisation
  • Indications Générales
  • Emmagasinage
  • Installation
  • Utilisation
  • Maintenance
  • Gebrauchsanleitung
  • Allgemeine Hinweise
  • Lagerung
  • Installation
  • Gebrauch
  • Wartung
  • 使用说明
  • 一般信息
  • 维护与维修
  • はじめに
  • 一般情報
  • 사용 지침
  • 일반 정보
  • 유지 보수
  • Technical Information
  • Specifications
  • Interface Drawing with Dimensions
  • Unpacking and Inspection
  • Pumping Speed Curves
  • Outline Drawing and Principal Items
  • Installation
  • Safety
  • Startup
  • Electrical Connections
  • SH-100 Power Cord Selection
  • Run Currents
  • Start Current
  • Grounding Plug and Outlet
  • Starting Current (Typical)
  • SH-100 Typical Run Currents
  • Mechanical Connections
  • Operation
  • Cleaning the Pump
  • Startup Procedure
  • Shutdown Procedure
  • ON/OFF Power Switch
  • Troubleshooting
  • Troubleshooting Chart
  • Exploded View of Pump Body
  • Request for Return Health and Safety Certification

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  • ENGLISH, page 34

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SH-100
Dry Scroll
Vacuum Pump
Manual No. 699904340
Revision E
May 2004
vacuum technologies
INSTRUCTION MANUAL
MANUALE DI ISTRUZIONI
NOTICE DE MODE D'EMPLOI
BEDIENUNGSHANDBUCH
使用手册
使用説明書
사용 설명서

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Summary of Contents for Varian SH-100

  • Page 1 SH-100 INSTRUCTION MANUAL MANUALE DI ISTRUZIONI Dry Scroll NOTICE DE MODE D’EMPLOI Vacuum Pump BEDIENUNGSHANDBUCH 使用手册 使用説明書 사용 설명서 Manual No. 699904340 Revision E May 2004...
  • Page 2 SH-100 Dry Scroll Vacuum Pump Slo-Blo and Littelfuse are registered trademarks of Littelfuse, Inc. Copyright 2004 Vacuum Technologies...
  • Page 3: Declaration Of Conformity

    は、 当社単独の責任の下、 この宣言が該当する製品 당사의 책임하에 SH-100 Vacuum Pump Model Number — SH01001UNIV to which this declaration relates is in conformity with the following standard(s) or other normative documents. auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
  • Page 4: Warranty

    SH-100 Dry Scroll Vacuum Pump Warranty Warranty Replacement Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) and Adjustment months from date of shipment thereof to Customer, and Seller's liability under valid warranty claims is limited, at...
  • Page 5: Table Of Contents

    Specifications ......15 SH-100 Power Cord Selection ... 19 사용...
  • Page 6: Instructions For Use

    The SH-100 is a hermetic, dry scroll vacuum pump. This pump is suitable for pumping air or inert gases. The pump Total weight of the packing, SH-100 pump included, is is not intended to pump toxic, corrosive, explosive, or approximately 20 kg (44 lbs).
  • Page 7: Installation

    SH-100 Dry Scroll Vacuum Pump Installation Maintenance Do not install or use the pump in an environment exposed Personnel responsible for pump operation and mainte- to atmospheric agents (rain, snow, ice), dust, aggressive nance must be well-trained and aware of the accident gases, or in explosive environments or those with a high prevention rules.
  • Page 8: Istruzioni Per L'uso

    La pompa a secco Scroll SH-100 è una pompa ermetica locale. adatta a pompare aria or gas inerti. Il peso dell'imballo, comprensivo della pompa SH-100, è...
  • Page 9: Installazione

    SH-100 Dry Scroll Vacuum Pump Installazione Manutenzione Non installare e/o utilizzare la pompa in ambienti esposti Il personale addetto alla condotta ed alla manutenzione ad agenti atmosferici (pioggia, gelo, neve), polveri, gas della pompa deve essere ben addestrato e deve avere una aggressivi, in ambienti esplosivi o con elevato rischio di approfondita conoscenza delle norme antinfortunistiche.
  • Page 10: Instructions D'utilisation

    La pompe SH-100, est une pompe à vide sèche et hermé- itôt le bureau de vente local. tique. Cette pompe convient pour le pompage de l'air ou Le poids total de l'emballage et de la pompe SH-100 est de gaz inertes.
  • Page 11: Installation

    SH-100 Dry Scroll Vacuum Pump Installation L'arrêt de la pompe ne requiert aucune manœuvre parti- culière; il faut seulement la déconnecter de l'alimentation Ne pas installer et/ou utiliser la pompe dans des milieux électrique grâce au bouton On/Off. exposés aux agents atmosphériques (pluie, gel, neige), à...
  • Page 12: Gebrauchsanleitung

    übernimmt Firma Vacuum Technologies keinerlei Haf- gen örtlichen Verkaufsstelle zu melden. tung. Das Verpackungsgewicht beträgt, einschließlich der Die Pumpe SH-100 ist eine hermetisch dichte trocken- Pumpe SH-100, ungefähr 20 kg. laufende Vakuumpumpe (Scrollpumpe). Diese Vorvakuumpumpe eignet sich für das Pumpen von...
  • Page 13: Installation

    SH-100 Dry Scroll Vacuum Pump Installation Das Ausschalten der Pumpe erfordert keine speziellen Schritte, sie braucht nur durch Betätigung des Schalters Die Pumpe darf nicht in Umgebungen installiert und/oder On/Off abgeschaltet werden. benutzt werden, die ungeschützt vor Witterungsbedin- ANMERKUNG Das Einlaßventil schließt unverzüglich gungen (Regen, Frost, Schnee), Staub und aggressiven nach Abschalten der Pumpe.
  • Page 14: 使用说明

    SH-100 Dry Scroll Vacuum Pump 使用说明 一般信息 贮存 当将泵运输到其它地方或进行贮存时,不应超出以下环 本设备仅可由专业人员操作和使用。操作本设备之前,使 境范围要求: 用人员应认真阅读本使用手册及由 Vacuum Technologies 提供的其它所有相关说明。Vacuum Technologies 对于因 − − 20 °C 至 +60 °C ( 4 °F 至 140 °F) 温度: 未按使用手册指导进行违规操作、未经培训人员执行不 相对湿度: 0 至 95% (无冷凝) 当操作、未获授权的设备连接、或其它与特定国家标准及 规章相违反的行为而引起的任何问题或事件, 概不负责。...
  • Page 15: 维护与维修

    SH-100 Dry Scroll Vacuum Pump 安装 维护与维修 不要将泵安装在易受自然天气侵害 (如下雨、下雪、结冰) 负责操作和维护泵的人员,必须接受良好的专业培训,并 的环境中,不要在多尘、周围存在腐蚀性气体、易发生爆 熟知突发事件预防及处理规程。 炸场所或易引起火灾的环境中使用本泵。 警告 接触高电压将有导致死亡的危险。 ❑ 操作期间,必须留意并符合以下环境条件。 应始终保持格外小心,并遵守预防突发 事件的规章和要求。 +5 °C 至 +40 °C (41 °F 至 104 °F) 温度: 机器处于开机运转状态时,应特别留 ❑ 相对湿度: 0 至 95% (无冷凝) 意避开移动部件和高压区。 如果在操作一定时间之后需要对泵进 ❑...
  • Page 16: はじめに

    SH-100 Dry Scroll Vacuum Pump はじめに 一般情報 保管 ポンプを輸送および保管する際は、以下の環境条件を 本装置は、 専門家による使用を想定して設計されていま 守ってください。 す。 ユーザーは装置を使用する前に、本取扱説明書、お よび Varian Technologies が提供するその他の情報を読 − − 20 °C ~ +60 °C ( 4 °F ~ 140 °F) 温度: んでください。 これらの説明書の指示を守らなかった 相対湿度: 0 ~ 95% (結露なきこと) 場合や未熟練者による誤用、装置に対する未認可の干...
  • Page 17 SH-100 Dry Scroll Vacuum Pump 設置 保守 大気中の作用物 (雨、雪、氷)、ダスト、悪性ガスにさら ポンプの操作•保守責任者は、十分な訓練を受けており されるような環境、爆発性雰囲気、または火災危険度の 事故防止規則に精通している必要があります。 高い環境下でポンプを設置したり、 使用したりしないで 警告 高電圧に触れると死亡する恐れがあ ❑ ください。 ります。 常に十分な注意を払い、事故 動作時は以下の環境条件に準拠してください: 防止規則を守ってください。 +5 °C ~ +40 °C (41 °F ~ 104 °F) 温度: 機械が起動したとき、可動部品およ ❑ び高電圧に注意してください。 相対湿度: 0 ~ 95% (結露なきこと) ポンプを長時間使用した後で保守作...
  • Page 18: 사용 지침

    는 공기 또는 불활성 가스의 펌핑 작업에 적합합니다. 판매 사무소로 연락하십시오. 이 펌프는 유독성, 부식성, 폭발성 또는 미립자-성형 가스 SH-100 펌프를 포함한 포장품의 총 중량은 약 20 kg 의 펌핑 작업용으로 고안되지 않았습니다. (44 lbs)입니다. 다음 내용들은 본 장비 사용시에 작업자의 안전을 보장하...
  • Page 19: 유지 보수

    SH-100 Dry Scroll Vacuum Pump 설치 유지 보수 비, 눈, 얼음, 먼지 또는 활성 가스에 노출되거나, 폭발 또 펌프 작동 및 유지 보수 책임자는 충분한 교육을 받아야 는 화재 발생 우려가 있는 환경에서는 이 펌프를 설치하 하며, 사고 방지 지침을 철저히 인식하고 있어야 합니다.
  • Page 20: Technical Information

    SH-100 Dry Scroll Vacuum Pump Technical Information Table 1 Specifications Model SH-100 Dry Scroll Single Hermetic Vacuum Pump Interface dimensions See Figure 1 on page 16 Peak pumping speed 50 Hz: 83 L/m, 5 m /hr (2.9 cfm) 60 Hz: 100 L/m, 6 m /hr (3.5 cfm)
  • Page 21: Interface Drawing With Dimensions

    SH-100 Dry Scroll Vacuum Pump Figure 1 Interface Drawing with Dimensions...
  • Page 22: Unpacking And Inspection

    1. Orient the shipping container with “This End Up” on top. 2. Open the box and remove the upper foam block. 3. Carefully lift the SH-100 out of the box. Save the carton and all packing materials. 4. Inspect the pump for damage. If there is shipping...
  • Page 23: Installation

    SH-100 Dry Scroll Vacuum Pump Installation CAUTION Do not block the fan ducts. Blocking these ducts can cause pump overheat- Safety ing. A pump surface temperature in excess of 65 °C (150 °F) is potentially Do not remove or modify any safety or insulating equip- damaging.
  • Page 24: Sh-100 Power Cord Selection

    10 A capacity. looks like the plug illustrated in Figure 4. ❑ If repair or replacement of the cord or Table 2 SH-100 Power Cord Selection plug is necessary, connect the grounding wire to the grounding Country Power Cord Specification Order terminal only.
  • Page 25: Run Currents

    Run Currents Typical run currents listed in Table 3 are approximately constant from minimum to maximum intake pressure. Table 3 SH-100 Typical Run Currents Frequency Low Voltage Range High Voltage Range 90 V...
  • Page 26: Mechanical Connections

    Mechanical Connections Isolation Valve Cleaning the Pump The SH-100 has an integral automatic isolation valve. An Unlike conventional oil-sealed pumps, Vacuum Technol- internal timer opens the valve 10 seconds after the pump ogies dry scroll pumps do not contain fluid for the cleans- is switched ON.
  • Page 27: Troubleshooting

    Identify the cause of the overload. The SH-100 is equipped with an auto-reset thermal motor protector. This protector will automatically shut down the pump when it detects an overload condition, and will automatically restart the pump when the motor has cooled to...
  • Page 28 10 minutes prior to disassembly. The parts needed for tip seal replacement on the SH-100 are available in the kit described in Table 5. This kit con- tains seals and O-rings, and can be obtained from your Vacuum Technologies dealer.
  • Page 29: Exploded View Of Pump Body

    SH-100 Dry Scroll Vacuum Pump Figure 7 Exploded View of Pump Body 1. Front Cowling Screws; M5 (3) 2. Exhaust Adapter (NW16) 3. Front Cowling 4. Frame Bolts; M5 (4) 5. Scroll Housing 6. Tip Seals 7. Main O-ring Parker No. 2-168 8.
  • Page 30 SH-100 Dry Scroll Vacuum Pump This page intentionally left blank.
  • Page 31: Request For Return Health And Safety Certification

    4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 32 Request for Return 9001 Health and Safety Certification R E G I S T E R E D FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis): URBO UMPS AND URBOCONTROLLERS Claimed Defect Position Parameters...
  • Page 34 Tel(39) 011 997 9 111 Tel:(39) 011 997 9 111 Fax(39) 011 997 9 350 Brazil Fax:(39) 011 997 9 350 Varian Industria e Comercio Ltda. Japan Varian Vacuum Technologies Avenida Dr. Cardoso de Mello 1644 Customer Support and Service:...

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