Omega FMA 1500 User Manual page 4

7.3 Linearity Adjustment......................................................................
7.3.1 Connections and Initial Warm Up...........................................
7.3.2 ZERO Adjustment.................................................................
7.3.3 25% Flow Adjustment.............................................................
7.3.4 50% Flow Adjustment............................................................
7.3.5 75% Flow Adjustment.............................................................
7.3.6 100% Flow Adjustment.......................................................
7.4 Calibration of FMA 1400 Mass Flow Controllers............................
7.4.1 Disable Solenoid Valve.........................................................
7.4.2 Valve Adjustment..................................................................
7.4.3 Full Scale Flow Adjustment...................................................
7.4.4 25% Flow Adjustment...........................................................
7.4.5 50% Flow Adjustment...........................................................
7.4.6 75% Flow Adjustment.........................................................
7.4.7 100% Flow Adjustment..........................................................
8. TROUBLESHOOTING.........................................................
8.1 Common Conditions......................................................................
8.2 Troubleshooting Guide...................................................................
8.3 Technical Assistance...................................................................
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES...........
APPENDIX 1 COMPONENT DIAGRAMS..................................................
APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS)...................................
APPENDIX 3 DIMENSIONAL DRAWINGS................................................
APPENDIX 4 WARRANTY.........................................................................
16
16
17
17
17
17
17
17
17
18
18
18
18
18
18
19
19
20
22
22
23
24
28
32