Omega FMA 1500 User Manual page 31

Mass flow meters and controllers
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Actual Gas
Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H
Hydrogen Sulfide H
Iodine Pentafluoride IF
Isobutane CH(CH
)
3
Isobutylene C
H
4
6
Krypton Kr
Methane CH
4
Methanol CH
3
Methyl Acetylene C
Methyl Bromide CH
Methyl Chloride CH
Methyl Fluoride CH
Methyl Mercaptan CH
Methyl Trichlorosilane (CH
Molybdenum Hexafluoride MoF
Monoethylamine C
Monomethylamine CH
Neon NE
Nitric Oxide NO
Nitrogen N
2
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrosyl Chloride NOCl
Nitrous Oxide N
O
2
Octafluorocyclobutane (Freon-C318) C
Oxygen O
2
Oxygen Difluoride OF
Ozone
Pentaborane B
H
5
9
Pentane C
H
5
12
Perchloryl Fluoride ClO
Perfluoropropane C
Phosgene COCl
2
Phosphine PH
3
Phosphorous Oxychloride POCl
Phosphorous Pentafluoride PH
Se
2
S
2
5
3
H
3
4
Br
2
Cl
3
F
3
SH
3
)SiCl
3
3
6
H
NH
2
5
2
NH
3
2
2
3
2
F
3
F
3
8
3
5
K Factor
Relative to N
.9998
.9987
.7893
.80
.2492
.27
.2951
1.453
.7175
.5843
.4313
.5835
.6299
.68
.5180
.2499
.2126
.3512
.51
1.46
.990
1.000
.737
.4802
.6134
.7128
F
.176
4
6
.9926
.6337
.446
.2554
.2134
.3950
.174
.4438
1.070
.36
.3021
26
Cp
[Cal/g]
2
.3479
.0545
.1025
.2397
.1108
.3872
.3701
.0593
.5328
.3274
.3547
.1106
.1926
.3221
.2459
.164
.1373
.387
.4343
.246
.2328
.2485
.1933
.1797
.1632
.2088
.185
.2193
.1917
.195
.38
.398
.1514
.197
.1394
.2374
.1324
.1610
Density
[g/I]
.893
5.707
3.613
1.520
9.90
3.593
2.503
3.739
.715
1.429
1.787
4.236
2.253
1.518
2.146
6.669
9.366
2.011
1.386
.900
1.339
1.25
2.052
3.168
2.920
1.964
8.397
1.427
2.406
2.144
2.816
3.219
4.571
8.388
4.418
1.517
6.843
5.620

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Fma 1400

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