Omega FMA 1500 User Manual page 13

TABLE I FMA 1500/1400 FOR RANGES UP TO 10 L/MIN
CODE
02
04
06
08
10
12
TABLE II FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN
MEDIUM FLOW MASS FLOW METER/CONTROLLERS*
TABLE III FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70
For other gases use the K factor as a multiplier from APPENDIX 2.
FLOW RANGES
LOW FLOW MASS FLOW METER/CONTROLLERS*
scc/min [N
0 to 10
0 to 20
0 to 50
0 to 100
0 to 200
0 to 500
CODE
23
24
26
27
28
HIGH FLOW MASS FLOW METER/CONTROLLERS*
CODE
40
41
42
]
CODE
2
14
16
18
20
standard liters/min [N
standard liters/min [N
8
std liters/min [N
0 to 1
0 to 2
0 to 5
0 to 10
]
2
15
20
30
40
50
]
2
60
80
100
F F
F (21.1 C) at 1 atm].
]
2