Table of Contents
Safety Symbols ............................................................................................................................................. i
Trademarks ....................................................................................................................................................... i
Notes on this Manual ........................................................................................................................................ i
Introduction .......................................................................................................................................3
Notes on Use ............................................................................................................................................... 4
Notes on Storage ......................................................................................................................................... 6
Notes on Cleaning ....................................................................................................................................... 6
Notes on Transporting ................................................................................................................................. 7
Maintenance and Inspection ........................................................................................................................ 7
Disposal Method.......................................................................................................................................... 7
Accessories.........................................................................................................................................9
Standard Accessories ................................................................................................................................... 9
Optional Accessories ................................................................................................................................. 11
System Diagram ...............................................................................................................................12
Indicators .........................................................................................................................................16
Cleaning Parts ..................................................................................................................................17
Measurement Procedure ..................................................................................................................18
Preparation ......................................................................................................................................19
Connecting to a Computer .................................................................................................................... 19
Connecting the AC Adapter ................................................................................................................... 20
Turning the Power ON/OFF ................................................................................................................... 20
Installing the Target Mask .................................................................................................................21
Mask Detection Function ...................................................................................................................... 22
Setting a Specimen ...........................................................................................................................28
Error Messages .................................................................................................................................32
Troubleshooting ...............................................................................................................................36
Specifications ...................................................................................................................................39
Dimensions ......................................................................................................................................41
...............................................................................................25
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²
(Option) ............................................................26
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Procedure ..............................................................27
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......................................................................................... 29
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................................................................................................................... 30
............................................................................................................38
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8
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..........................................................15