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Parker ZFA Series Manual
Parker ZFA Series Manual

Parker ZFA Series Manual

Optomechanical focusing nano positioner

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ZFA Series
Optomechanical Focusing Nano Positioner
Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com

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Summary of Contents for Parker ZFA Series

  • Page 1 ZFA Series Optomechanical Focusing Nano Positioner Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 2 The products described herein, including without limitation, product features, specifications, designs, availability and pricing, are subject to change by Parker Hannifin Corporation and its subsidiaries at any time without notice. The information in the product manual, including any apparatus, methods, techniques, and concepts described herein, are the proprietary property of Parker Hannifin Corporation, Electromechanical Automation-parker or its licensor’s, and may not be copied, disclosed, or...
  • Page 3 REV 002: Minor edits to the table on page 17. Added in a new cable specifcation page that is now on page 16. Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 4 For builders of machinery and instruments seeking smooth motion, high stability, and rapid step and settle performance, Parker offers the ZFA series. ZFA is a voice coil driven positioner that provides nano meter level stability. Units are offered with internal or external non-contact magnetic counterbalance assemblies to support a wide range of objective masses in vertical orientations.
  • Page 5 DO NOT lift the positioner by cables. The unit should be lifted by the body structure only. Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 6 Dismantling and Disposal Properly dispose of product and components in accordance with national and international regulations and laws. Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 7 Refer to the amplifier and motion control electronics installation instructions for specific requirements on meeting EMC compatibility. Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 8 7. Time for the winding to reach 63% of its final temperature rise above the rest of the motor, given constant power 8. Measured between motor leads at 25ºC. At 100ºC, multiply resistance by 1.295 (75ºC rise * 0.393%/ºC) Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 9 • To meet catalog specifications the surface must have a flatness error less than or equal to 0.005mm over base mounting surface. Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 10 (3). Mounting to a frame with Minimum Natural Frequency >1KHz and mounting surface flatness of 8 microns or better. (4). Possible performance highly dependent on other system design factors, contact factory for details. Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 11 (µm/m/˚C) Digital Incremental 2.5 nm 10.1 -5%/+10% (Differential) 1V P-P 20 µm / Sin/Cos Controller 10.1 Incremental +/-10% (Differential) Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 12 ZFA Series Nano Positioner Dimensions – mm [in] Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 13 Objective Positions Dimensions – mm [in] T1 Position T2 Position Thread Thread T3 Position T4 Position Thread Thread T5 Position T6 Position Thread Thread Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 14 OUTER SHLD ZFA SC Encoder Option - Specification Description Specification +5VDC Supply Voltage +/-10% with a maximum current of 100mA Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 15 Objective Adapter (M27x0.75 Thread) 102-8458-04 Objective Adapter (M27x1.00 Thread) 102-8458-05 Objective Adapter (SM1 Thread) 102-8458-06 Objective Adapter (RMS Thread) Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 16 Cable, DB15M/F Molded, 5.0Ft Motor Extension Cable Male to Female - 006-2983-01.00 Motor Extension Cable Flying Leads - 006-2982-01.00 Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 17 Bracket Middle/ Objective Down Bracket Bottom/ Objective Down Bracket Top/ Objective Up Bracket Middle/ Objective Up Bracket Bottom/ Objective Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 18 (for internal counterbalance only models) or shipping bolt (external counterbalance models) needs removed. See Figures 2 and 3 below. Figure 1: Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 19 ZFA Series Nano Positioner Stage Mounting Figure 2: Figure 3: Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 20 Take care that at each end the screws are adjusted in the same amount so that they contact the carriage evenly. Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 21 The 102-8458 objective adapters can simply be threaded into the objective bracket and tightened using a spanner wrench. Figure 5: Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 22 The intellectual rights of the manufacturer of the incomplete machine are not affected. Brian Favero, Engineering Manager November 22, 2024 ENGINEERING YOUR SUCCESS Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 23 This Declaration is issued under the sole responsibility of the manufacturer. Brian Favero, Engineering Manager November 22, 2024 ENGINEERING YOUR SUCCESS Parker Hannifin Corporation • Electronic Motion and Controls Division • 800-358-9070 • www.parker.com/emc Buy: www.ValinOnline.com | Phone 844-385-3099 | Email: CustomerService@valin.com...
  • Page 24 Parker Hannifin Taiwan Co., Ltd 8F No 22 Wuquan 7th Road Germany Wuku District New Taipei City, Taiwan 24890 Electromechanical Europe Tel: +886 2 2298 8987 Parker Hannifin GmbH & Co KG enquiry.taiwan@parker.com Robert-Bosch-Strasse 22 D-77656 Offenburg Germany Tel: +49 (0) 7815090 Email: em-motion@parker.com ©...

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Zfa090