Ulvac DOP-181S Series Instruction Manual page 5

6.3 Regular Inspections ................................................................................................................ 10
6.4 Replacing Consumables and Cleaning ................................................................................... 11
6.5 Troubleshooting List ............................................................................................................... 16
7. In Conclusion ................................................................................................................................ 17
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Warranty ................................................................................................................................. 17
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Usage Status Check Sheet
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Product information, service bases, and contact information
DOP-181SA／181SB ...................................................................................................... 2
Fig. 2.1
DOP-181SC／181SD ...................................................................................................... 3
Fig. 2.2
DOP-181SE .................................................................................................................... 3
Fig. 2.3
Fig. 3.1 Change region of the voltage and frequency ...................................................................... 6
Fig. 3.2 Example of Piping Used When Evacuating a Vessel ......................................................... 7
Fig. 6.1 Exploded view ................................................................................................................. 15
Table 1.1 Product Specifications ...................................................................................................... 1
Table 4.1 Characteristics of the thermal protector ............................................................................. 8
Table 6.1 Consumables List ............................................................................................................ 10
Table 6.2 Locations for Maintenance and Inspection ....................................................................... 11
Table 6.3 Troubleshooting List ........................................................................................................ 16
Figures and Tables