Ulvac DOP-181S Series Instruction Manual page 24

7. Dust mask, gloves, air compressor
*Wipe off the stained parts at the time of parts replacement, with use tool No .5, 6.
Because small mine dust may be scattered in the case of an air blow, please wear protection
glasses, a dust protective mask, gloves by all means.
Please be careful about work enough.
Procedure for replacing consumables
This product has two pump heads. Following description is procedure for a single head.
For other pump-head also can use this procedure.
6-4-1. Preparations
Turn off the power supply, and make sure that the pump has stopped.
After stopping the pump, leave it for 30 minutes and check that surface temperature cooled.
Remove the pump from the wiring and the equipment.
6-4-2. Disassembling the pump
Refer to the exploded view. (Fig 6-1)
Remove all cap screws (M6 *95L*8, No.1) that fasten the pump-head (No.2) to the Casing.
Remove the pump-heads assembly (No.5).
* Head-gasket (No.6) is attached inside the pump-head.
Separate the connection-pipe (No.3) from the pump-head.
*Connecting-pipe is inserted to the pump-head.
*Two O rings (No. 4) attached to each connection pipe.
Remove the valve-retainer (No.7), inlet/outlet valve (No.8).
Remove the cylinder parts. (Photo.5-8)
(cylinder-plate (No.9), cylinder-gasket (No.10), cylinder (No.11)).
Remove the cap screw (M8*20, No.12) that fasten cup-packing-retainer (No.13) to the
connecting-rod (No.15).
Remove the cup-packing (No.14).
Photo 1: Pump-head disassembly, installation
6-4-3. Replace the pump head gasket (No.6)
Refer to the exploded view (Fig 6-1), clause 6-4-2(Disassembling the pump).
Remove the head-gasket that attached inside the pump-head and place a new gasket.
Photo 2: Head-gasket disassembly, installation
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