Ulvac DOP-181S Series Instruction Manual page 25

*The head-gasket gets pinched when extruding from the gasket groove.
Ensure that head-gasket are fully assembled in grooves and not pinched.
6-4-4. Replace the O ring (P10, No.4)
Refer to the exploded view (Fig 6-1), clause 6-4-2(Disassembling the pump).
Two O rings attached to each connection pipe.
Remove the O rings and place a new O rings.
*Clean a connecting pipe's O ring groove, installation hole before replace.
The head-gasket gets pinched when extruding from the gasket groove.
Ensure that head-gasket are fully assembled in grooves and not pinched.
Photo 3: Connecting-pipe disassembly
6-4-5. Replace the inlet / exhaust valve (No.8)
Refer to the exploded view (Fig 6-1), clause 6-4-2(Disassembling the pump).
Inlet / exhaust valve is on the cylinder plate.
Remove the inlet / exhaust valve and place a new inlet / exhaust valve.
Photo 4: O ring installation
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