Parker X-Flow FM-1407 Operational Instructions
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Parker X-Flow FM-1407 Operational Instructions

Mass flow controller
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FM-1407

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Summary of Contents for Parker X-Flow FM-1407

  • Page 1 FM-1407...
  • Page 2 The material in this manual is for information purposes only and is subject to change without notice. Precision Fluidics Division November 2021 Page 2 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 3: Table Of Contents

    General ................................34 LED indications ..............................34 The two LEDs on the instrument give information about the status of the instrument ......... 34 Troubleshooting summary general ........................35 Service ..........................35 Page 3 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 4: General Product Information

    Hook-up diagram X-Flow™, document FM-1409 X-Flow™ Dimensional drawing 601XF, document A-4539 X-Flow™ Transition Plate Dimensional drawing, document A-4540 All these documents are available at www.parker.com/precisionfluidics/X-Flow™ or by request to ppfinfo@parker.com. Page 4 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 5: Product Description

    There is one model, 601XF, for flow rates from 40 ml/min to 20 l/min. For simplicity, the standard X-Flow™ configuration is optimized to provide the best repeatable flow measurement possible. Page 5 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 6 Check if the seals like O-rings, plunger and packing gland of capillary are suitable for the used gas and process. Page 6 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 7 • Direct reading at readout/control module or host computer • Several control/setpoint modes (e.g. purge/close valve) • Identification (serial number, model number, device type, user tag) • Adjustable controller settings for custom controller response Page 7 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 8: Operating Principles

    In this way, by adding more or fewer laminar flow discs, the total flow rate of an instrument can be adjusted while using the same sensor flow rate. Example of a 50 ml/min measurement part Page 8 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 9: Maintenance

    Consider using the Parker Tracking System (PTS) for the management of your X-Flow™ mass flow controller. Each X-Flow™ mass flow controller has a unique PTS number assigned to it.

  • Page 10: Installation Instructions

    Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your Parker representative.

  • Page 11: In-Line Filter Usage

    It is recommended to install an in-line filter or liquid separator upstream of the flow controller, and if backflow can occur, a downstream filter is recommended too. Be aware of the pressure drop caused by the filter. Contact ppfinfo@parker.com for further information. 2.6 Piping requirements Be sure that piping is clean! DO NOT install small diameter piping on high flow rates, because the inlet jet flow will affect the accuracy.

  • Page 12: Power And Warm-Up

    Refer to Hook-up X-Flow™, document no. FM-1409, for more details. Parker recommends the use of their standard cables. These cables have the right connectors and if loose ends are used, these will be marked to prevent incorrect connections.

  • Page 13: Zeroing

    • When the process is completed the green LED is on continuously. For information how to start the zeroing procedure over RS232 Flowbus® or RS485 Modbus® check section 4.1.4, “Auto Zeroing” Page 13 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 14: Basic Operation

    When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to RS232 or Modbus®/RS485 for reading/changing parameters (e.g. controller response or other fluid selection). Page 14 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 15: Digital Communication Protocol Detection (Flow-Bus Rs232 Or Modbus® Rs485)

    For example, a cell in Microsoft® Excel® could be linked to the measured value of the flow controller and when the measured value changes, it will be automatically updated in the Excel® spreadsheet. Page 15 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 16: Modbus® Rs485 Operation

    Node-address and process number will be translated by FlowDDE to a channel number. FlowDDE and other Parker X-Flow™ applications are available from the factory. A special RS232 cable (7.03.366) can be ordered separately. It consists of a T-part with 1 male and 1 female sub-D 9 connector on one instrument-side and a normal female sub-D 9 connector on the side of the computer.
  • Page 17 Start FlowDDE and open communication via the menu (as shown below) or by pressing <F3>. Once the DDE server is active, open the FlowDDE Test Form via the menu (as shown below) or by pressing <F6>. Page 17 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 18 Within the time-out period of 60 sec. it is possible to start changing the bus-address/MAC-ID of the instrument (see table below). Page 18 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 19 The physical and data link layer is implemented conforming to the "basic slave" implementation class as described in the document, “MODBUS® over Serial Line specification and implementation guide V1.02”. The following options have been implemented: Page 19 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 20 • 04, SLAVE DEVICE FAILURE, in case of writing illegal value to register When one of the written registers raises an exception, the value written to all subsequent registers are discarded (ignored). Page 20 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 21 RW  0x0E51 0x0E52 3666 RespOpen0 Unsigned char RW  0x0E52 0x0E53 3667 Calibration mode Unsigned char RW  0x0E61 0x0E62 3682 Monitor mode Unsigned char RW  0x0E62 0x0E63 3683 Page 21 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 22 (it is not possible to write a part of a string). If the string is shorter than the specified maximum length the string should be terminated with a 0. Page 22 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 23: Push-Button Operation

    4 – 8 sec Restore parameters flash All parameter settings (except field bus settings) will be restored to situation of final test at Parker production normal 8 – 12 No action flash normal normal 12 –...

  • Page 24: Led Indications

    0.2 sec off By a command send to the instrument. fast wink 0.1 sec on, Switch-released, selected action started. 0.1 sec off Green and Red LED turn-by-turn indication modes (no switch used) Page 24 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 25: Basic Parameters And Properties

    When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to RS232 or Modbus®/RS485 for reading/changing parameters (e.g. controller response or other fluid selection). Page 25 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 26: Digital Communication Protocol Detection (Flow-Bus Rs232 Or Modbus® Rs485)

    PDU Address and register number to address parameters using the Modbus® protocol. [address] Hexadecimal PDU address. [index] Decimal register number. For the Modbus® protocol every 2 bytes are addressed separately. Check section 3.5, “Modbus® RS485 operation” for more details. Page 26 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 27 RS232 Flowbus® After power-up the control mode will always be set to DIGITAL_INPUT or ANALOG_INPUT, depending on customer’s requirement. Check section 4.1.6, Changing Default Control Mode, to change the start-up mode. Page 27 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 28: Advanced Operation

    Modbus® PDU Unsigned RW  113/4 0xF120..0xF127/61729..61736 char[16] Digital instrument manufacturing configuration information string. This string can be used by Parker to add extra information to the model number information. Page 28 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 29 Settling time is defined as the time for the flow signal to reach the setpoint value (and stay) ± within 2% of the initial setpoint Page 29 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 30 Controller response when starting-up from 0% (when valve opens). Value 128 is default and means: no correction. Otherwise controller speed will be adjusted as follows: (128-RespOpen0) New response = old response * 1.05 Page 30 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 31 There are two filter constants: Static Display Factor and Dynamic Display Factor. These two factors can be transformed into time constants using the following formula: − factor τ cycletime ⋅ factor Page 31 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 32: Using Other Gasses Than Specified

    Check section 1.6, “Operating Principles”, for detailed information about the sensor principle. 4.2.1 Fluid conversion factor information Contact the factory for more information on conversion factors, at any temperature/pressure combination, when converting to different fluids and gases. Page 32 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...
  • Page 33 1.73 x 10 2.93 x 10 1.30 1.50 3.90 x 10 1.70 5.00 x 10 2.00 6.63 x 10 Also, the minimum pressure drop is limited. For exact figures consult factory. Page 33 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 34: Troubleshooting

    ‘1e’ Pressure too high or much too low 6b) apply correct pressure High flow at zero setpoint Damaged diaphragm (only applicable to 7a) replace membrane seal valves with membrane) Page 34 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021...

  • Page 35: Service

    Service Only factory service is available. Contact your local Parker Sales office. In the US contact the Parker factory or send an email describing the problem to ppfinfo@parker.com. PARKER HANNIFIN CORPORATION INSTRUMENTATION GROUP PRECISION FLUIDICS DIVISION 26 CLINTON DRIVE – UNIT 103...

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