Brooks MagnaTran LEAP User Manual

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MagnaTran® LEAP™

User Manual

Part Number: 605563 Revision A

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Page 1 MagnaTran® LEAP™ User Manual Part Number: 605563 Revision A...
Page 2 MagnaTran LEAP Part Number: 605563 Rev. A Brooks Automation, Inc. Information provided within this document is subject to change without notice, and although believed to be accurate, Brooks Automation, Inc. assumes no responsibility for any errors, omissions, or inaccuracies. ABF™, AcuLigner™, Advan Tag™, Align™, AutoTeach™, ATR™, AXM™, Basic Blue™, BiSymmetrik™, CenterSmart™, Crate to Operate™, CrossingConnect™, DARTS™, E nerta™, e-RMA™, e-Spares™, e- Volution™, F alcon™, FastRegen™, FIXLOAD™, FrogLeg™, Independent Twin Linear Exchange™, InLigner™, Interface™, I soport™, ITLX™, Jet™, Jet Engine™, LEAP™, LowProfile™, M2 Nano™, PASIV™, PowerPak™, PerformanceBlue™, Plate Auditor™, PowerPak™, PowerTools™, PuroMaxx™, QuadraFly™, Radius™, Radient™, Radient Express™, Reliance™, Reliance ATR™, RetroEase™, SCARA™, SmartPM™, SPOTLevel™, Sprint™, Synetics™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time Optimal Trajectory™, Time Optimized Path™, TopCooler™, TopLigner™, Ultimate Blue™, VAC-407™, VacuTran™, VersaPort™, and WaferEngine™ are trademarks of Brooks Automation, Inc. AcuTran®, A syst®, Crossing Automation®, Fusion®, GOLDLink®, Guardian®, H elix®, L eapfrog®, MagnaTran®, ...
Page 3 Chelmsford, MA 01824 U.S.A. For Technical Support: Location Contact Number Website +1-800-447-5007 (Toll Free) North America +1-978-262-2900 (Local) +49 800 000 9347 (Toll Free Germany) Europe +49 364 176 9999 6 (Has Toll) +81 120-255-390 (Toll Free) Japan +81 45-330-9005 (Local) http://www.brooks.com/ China +86 21-5131-7066 +886 080-003-5556 (Toll Free) Taiwan +886 3-5525258 (Local) Korea 1800-5116 (Toll Free) +65 1-800-4-276657 (Toll Free) Singapore +65 6309 0701 (Local) Contact Technical Publications directly: Technical.Publications@brooks.com Accelerating Innovation Copyright © 2023, Brooks Automation, Inc.
Page 4 Zhangjiang Hi-Tech Malaysia Brooks Automation Ltd. (Germany) GmbH Park P udong, Shanghai ...
Page 5 Brooks Automation Part Number: 605563 Rev. A Revision History Revision Date Action Author Initial completion of the manual EC145579 5/30/2023 K. Forscher template. Copyright © 2023, Brooks Automation, Inc.
Page 6: Table Of Contents
Safety Alert and Informational Labels Labels on the MagnaTran LEAP Approximate Location of Labels on the MagnaTran LEAP Location of Labels on the MagnaTran LEAP External Controller Safety Interlocks and Disconnect Devices Disconnect Devices Interlocks Emergency Stop Circuit (E-Stop) Safety System Mechanical Hazards Electrical Hazard Ergonomic Hazard Robot Lift Points Teach Pendant Environmental Hazards Noise Emission Vibration Recycling and Hazardous Materials Decommissioning and Disposal Safety Data Sheets - SDS Other Hazards Emergency Information Fire Fighting Equipment Robot Movement Without Drive Power Emergency Z-Axis Brake Release Procedure 2. Overview MagnaTran LEAP Components Robot Drive Overview Flange and Drive Shaft Configurations Armset Overview MagnaTran LEAP Software Controls Overview End Effectors Field Replaceable Units (FRUs) Copyright © 2023, Brooks Automation, Inc.
Page 7 Robot Workspace Robot I/O Host Ethernet Host IOIOI Power Connection Power Supply Power Supply Wiring for MagnaTran LEAP Robot Safety I/O Status Indicators Liveman Teach Pendant Legacy Teach Pendants Z-Axis Brake Release Misc I/O MISCELLANEOUS I/O Operation Interface Selection Between High-Side or Low-Side Hardware High-Side Inputs: High-Side Outputs Low-Side Inputs Low-Side Outputs Miscellaneous I/O Power, Differences between MagnaTran 7/8 and MagnaTran LEAP Summary Miscellaneous I/O Connector Pin Out Power Status Diagnostics Auxiliary Center Of Gravity Robot Mounting 4. Armsets 5. Set-up and Operation Basic Set-up Procedure Theory of Operation Start-Up Single Point of Control (Host Interface or Teach Pendant) Copyright © 2023, Brooks Automation, Inc.
Page 8 Station Setup Defining Stations Assigning Station Coordinates (per arm) Assigning a Station with Known Coordinates Teaching a Station with the Liveman Teach Pendant - Function Keypad Teaching a Station with the Liveman Teach Pendant - Coordinate Keypad Example of Teaching a Station with the Teach Pendant Station Parameters Cycling and Transferring Wafers Basic Transfer Commands and Their Movements Example Wafer Transfer Cycle Shut-Down 6. Embedded Safety Controller Overview LEAP Safety Controller Supported Regulatory Features: Safety Overview Hardware Connections for Operation MagnaTran LEAP Safety I/O Connector Safety Connector Pinout Emergency Stop Safety Switches Please Observe the Following: Protective Emergency Switches Please observe the following: Redundant Input Fault Detection Miscellaneous I/O Interlocks Miscellaneous I/O Connector Operational MODE Inputs Manual Mode Safety System Teach Pendant Basic Completed Wiring Advanced Safety Connector Implementation Monitor Bits Muting the Safety I/O Connector MagnaTran 7 Retrofit Copyright © 2023, Brooks Automation, Inc.
Page 9 Coordinate Teach Pendant Key Descriptions 8. Preventive Maintenance Preventive Maintenance Schedule Robot Cleaning Cleaning Procedure End Effector Cleaning and Inspection Cleaning Elastomeric Pads Procedure Cleaning Stainless Steel or Quartz Pads Procedure End Effector Pad Inspection Pad Inspection Procedure Pad Replacement Pad Replacement Procedure 9. Troubleshooting Troubleshooting Overview Appendix A: Error Codes Communication Power Motion Errors Home Errors Vibration Radial Motion Theta Motion Z-Axis Motion Find Phase 10. Recommended Spare Parts 11. MagnaTran LEAP Controller and Software Appendices Contact Brooks Automation Technical Support Appendix B: Functional Safety Appendix C: Safety Function Tests Appendix D: Safety Data Sheets NYETORR_5200_SDS Krytox_SDS Braycote_803_SDS Copyright © 2023, Brooks Automation, Inc.
Page 10: Safety
All personnel involved with the operation or maintenance of this product must read and understand the information in this safety chapter. Follow all applicable safety codes of the facility as well as national and international safety codes. Know the facility safety procedures, safety equipment, and contact information. Read and understand each procedure before performing it. Authorized Personnel Only The MagnaTran LEAP is intended for use by trained and experienced semiconductor fabrication plant personnel. Operators are advised to comply with applicable organizational standard operating procedures, industry standard guidelines, and all local, regional, national, and international laws and regulations. Explanation of Hazard Alerts This manual and this product use industry standard hazard alerts to notify the user about personal or equipment safety hazards. Hazard alerts contain Safety Text, Safety Icons, Signal Words, and Color. Safety Text Hazard alert text follows a standard, fixed-order, three part format. Identify the type and source of the hazard. State the severity of the consequences if the hazard is not avoided. State how to avoid the hazard. Copyright © 2023, Brooks Automation, Inc.
Page 11: Safety Icons
RESULT IN DEATH OR SERIOUS INJURY. Danger signal word is white on a red background with an iconic exclamation point inside a yellow triangle with a black border. Warning indicates a hazardous situation which, if not avoided, COULD RESULT IN DEATH OR SERIOUS INJURY. Warning signal word is black on an orange background with an iconic exclamation point inside a yellow triangle with black border. Caution indicates a hazardous situation or unsafe practice which, if not avoided, MAY RESULT IN MINOR OR MODERATE PERSONAL INJURY. Caution signal word is black on a yellow background with an iconic exclamation point inside a yellow triangle with black border. Notice indicates a situation or unsafe practice which, if not avoided, MAY RESULT IN EQUIPMENT DAMAGE. Notice signal word is white on blue background with no icon. Copyright © 2023, Brooks Automation, Inc.
Page 12: Alert Example
Explanation of Hazard Alerts Part Number: 605563 Rev. A Alert Example Figure 1-1: Components of a Safety Alert Table 1-1: Components of a Safety Alert - Description Number Description General Alert Icon Alert Signal Word Type of Hazard Source of Hazard and Severity How to Avoid the Hazard Hazard Symbol(s) Copyright © 2023, Brooks Automation, Inc.
Page 13: General Safety Considerations
M aximum torque could be momentarily applied that may cause death, serious injury or equipment damage: Only operate the robot with covers installed. Use physical barriers to prevent human access to the robot path during all powered operation where the arms are not contained in a chamber that prevents human contact. Ensure safety controller features are in place (ex: emergency stop, protective stops, etc.) Regularly test safety components to ensure they function correctly. Pinch Points If the servo system fails, the maximum torque could be momentarily applied. Significant power levels are present that may cause death, serious injury, or equipment damage. Use physical barriers to prevent human access to the robot path during all powered operation where the arms are not contained in a chamber that prevents human contact. Operate the robot only with covers installed. Robot Mounting The robot must be mounted in a rigid test stand or system application before applying power. Improperly mounted robots can cause excessive vibration and uncontrolled robot movement which may cause death or serious injury. Always mount the robot in a secure test stand or system before applying power. Copyright © 2023, Brooks Automation, Inc.
Page 14 Know the location of the Safety Data Sheets (SDS) in your facility (formerly referred to as Material Safety Data Sheets - MSDS) Become familiar with the proper handling of material in the environment of the robot. Do Not Use Unauthorized Parts Using parts with different inertial properties with the same robot application can cause the robot performance decrease and potentially cause unplanned robot motion that could result in death or serious injury. Do not use unauthorized parts. Confirm that the correct robot application is being used. Always have Brooks Automation update the robot application if new parts are changed or added to the robot. Legacy Teach Pendants Legacy Teach Pendants do not comply with the ISO 10218-1 standard because they do not have a liveman switch. Brooks recommends using liveman teach pendants when working on any robot or system. Never enter the robot workspace when operating the robot with a legacy teach pendant. Copyright © 2023, Brooks Automation, Inc.
Page 15 Magnetic Field Hazard This product contains permanent magnetic motors that can be hazardous to implanted medical devices, such as pacemakers, and cause serious death or personal harm. Maintain a safe working distance of 30 cm from the motor when working with an energized robot if you use a cardiac rhythm management device. Reduced Speed Implementation of reduced speed during teach or manual modes is not safety-rated. Always use a liveman teach pendant when operating inside the robot workspace. Personal Protective Equipment This product contains heavy objects that may cause personal injury. Use safety shoes and head protection when installing or maintaining the product. Wear protective eyewear when setting up or testing the system. Unauthorized Service Personal injury or damage to equipment may result if this product is operated or serviced by unauthorized personnel. Only qualified personnel are allowed to transport, assemble, operate, or maintain the Product. Properly qualified personnel are those who have received certified training and have the proper qualifications for their jobs. Copyright © 2023, Brooks Automation, Inc.
Page 16 Do not use this product if components or cables appear to be damaged. Place the product in a location where it will not get damaged. Route cables and tubing so that they do not become damaged and do not present a personal safety hazard. Trip Hazard Cables for power and communication and facilities create trip hazards which may cause serious injury. Always route the cables where they are not in the way of traffic. Inappropriate Use Use of this product in a manner or for purposes other than for what it is intended may cause equipment damage or personal injury. Only use the product for its intended application. Do not modify this product beyond its original design. Always operate this product with the covers in place. Seismic Restraint The use of this product in an earthquake prone environment may cause equipment damage or personal injury. The user is responsible for determining whether the product is used in an earthquake prone environment and installing the appropriate seismic restraints in accordance with local regulations. Copyright © 2023, Brooks Automation, Inc.
Page 17 C ontact Brooks technical support for recovery of motor power Never Remove External Controller Covers Never remove covers from the external controller. R emoving covers from the external controller adds new hazards not present when the covers are properly in place. Removing covers triggers a tamper detect that disables power to the robot motors. R e-installation of the covers does not reset the tamper detect. C ontact Brooks technical support for recovery of motor power. Never Remove Arm Covers Never remove the arm covers. Arm Covers are structural elements of the arm. Intended Use The MagnaTran LEAP robot is intended to be used for w afer handling in semiconductor fabrication processes inside a vacuum chamber. It is not intended to be used in automatic mode without an enclosure. Because of its design as a vacuum robot, the MagnaTran LEAP robot is not intended to be used as a collaborative robot. The MagnaTran LEAP is not designed for synchronized motion with other robots. Copyright © 2023, Brooks Automation, Inc.
Page 18: Illustration Of Hazard Locations
MagnaTran LEAP Illustration of Hazard Locations Part Number: 605563 Rev. A Illustration of Hazard Locations A pinch point is any location on the MagnaTran LEAP between two moving parts or a moving part and a stationary part, where a person’s body part may become caught or trapped and result in injury. Figure 1-2: Locations of Pinch Points on the MagnaTran LEAP with Dual Pan SCARA Armset Pinch point general location Copyright © 2023, Brooks Automation, Inc.
Page 19 Part Number: 605563 Rev. A Illustration of Hazard Locations Figure 1-3: Locations of typical Pinch Points on the MagnaTran LEAP with Radius armset Figure 1-4: Locations of typical Pinch Points on the MagnaTran LEAP with LeapFrog armset Copyright © 2023, Brooks Automation, Inc.
Page 20: Safety Alert And Informational Labels
Moving parts of the product may cause squeezing or compression of fingers or hands resulting in personal injury. Do not operate the product without the protective covers in place. Automatic Movement Whenever power is applied to the product, there is the potential for automatic or unplanned movement of the product or its components which could result in death or personal injury. Know the product's range of motion and stay out of the product's range of motion when the product is energized. Place physical barriers to prohibit others from entering the working range of the product. Follow safe practices for working with energized products per the facility requirements. Do not rely on the system software or process technology to prevent unexpected product motion. Safety Alert and Informational Labels Table 1-2 lists the labels that are placed on the robot drive and external controller to alert personnel to hazards on or within the equipment, and to provide information. Figure 1-5 shows the approximate location of each label on the drive. Figure 1-6 s hows the location of each label on the external controller. To replace a lost or damaged label, contact Brooks Automation Technical Support. Copyright © 2023, Brooks Automation, Inc.
Page 21: Labels On The Magnatran Leap
Brooks Automation 1. Safety Part Number: 605563 Rev. A Safety Alert and Informational Labels Labels on the MagnaTran LEAP Table 1-2: Labels Attached to the Robot Drive LABEL,WARNING,HEAVY OBJECT,2.75X1.35,RC6 WARNING - Heavy Object P/N 145749 Qty: 1 Location: K Drive - On front panel All other robot drives- Near I/O panel Possible injuries: Muscle strain or back injury How to avoid the Hazard: Use lift aid and proper lift techniques. LABEL,PINCH,HAZARD,HANDS,2.75 X 1.35 WARNING - Crush hazard P/N 130189...
Page 22 Qty: 1 Location: K Drive - On front panel All other robot drives- Near I/O panel This label indicates that there are no serviceable parts inside the robot. LABEL,ENCODER,TAMPER PROOF,2.1X.59 Tamper Proof Encoder Seal P/N 121891 Qty: Varies by robot Location: Across removable covers (varies by robot) Do not tamper with the seal. Robot operation and performance will be affected if the covers are removed. LABEL,STANDARD SERIAL NUMBER Serial Number Label P/N 196635 Qty: 2 Location: K Drive - On front panel All other robot drives- Near I/O panel LEAP External controller - On front panel Robot Calibration Label P/N: 255839 Qty: 1 Location: K Drive - On front panel All other robot drives - Near I/O panel Copyright © 2023, Brooks Automation, Inc.
Page 23 Brooks Automation 1. Safety Part Number: 605563 Rev. A Safety Alert and Informational Labels (2,3,4-axis C-Series Version Example) Robot Specifications Label P/N: Varies (See the bottom right corner of the label on the drive for the accurate part number) Qty: 1 Location: Above the I/O panel (4-axis M-Series Version Example) Robot Specifications Label P/N: Varies (See the bottom right corner of the label on the drive for the accurate part number) Qty: 1 Location: Above the I/O panel (6-axis LEAP OPTIMAX Version Example) Robot Specifications Label P/N: Varies (See the bottom right corner of the label on the drive for the accurate part number) Location: K Drive - On front panel H Drive- Above the I/O panel. Copyright © 2023, Brooks Automation, Inc.
Page 24 1. Safety MagnaTran LEAP Safety Alert and Informational Labels Part Number: 605563 Rev. A (Drive with External Controller Version) Robot Specifications Label P/N: 376679 Location: Above the I/O Panel LEAP External Controller Specifications Label P/N: 376681 Location: Top controller cover LABEL,CA PROP 65,LEAD,2 HAZ CA Prop 65 Label P/N 310730-0001 Qty: 1 Location: K Drive - On front panel All other robot drives- Near I/O panel Copyright © 2023, Brooks Automation, Inc.
Page 25: Approximate Location Of Labels On The Magnatran Leap
Safety Alert and Informational Labels Approximate Location of Labels on the MagnaTran LEAP NOTE: The number of labels applied and their relation to the I/O panel may vary by robot. Figure 1-5: Labels on the Outside of the MagnaTran LEAP Table 1-3: Labels on the Outside of the MagnaTran LEAP - Explanation Number Explanation Number Explanation CA Prop 65 Label...
Page 26: Location Of Labels On The Magnatran Leap External Controller
Part Number: 605563 Rev. A Location of Labels on the MagnaTran LEAP External Controller Figure 1-6: Labels on the Outside of the MagnaTran LEAP External Controller Table 1-4: Labels on the Outside of the MagnaTran LEAP External Controller - Explanation Number Explanation...
Page 27: Safety Interlocks And Disconnect Devices
Safety Interlocks and Disconnect Devices Safety Interlocks and Disconnect Devices The LEAP controller contains an embedded safety controller for convenient attachment of emergency stop switches, protective interlocks and mode selection. O utputs of the embedded safety controller are designed to interface with a higher level (system) safety controller. I t is the responsibility of the system integrator to locate and install safety switches to protect the user. Disconnect Devices The facility/robot integrator is responsible for the robot’s main disconnect device and for ensuring it complies with the correct electric codes. Personnel servicing this equipment are responsible for the status of the robot’s main disconnect device as specified on the facilities’ Lockout/Tagout procedure. Emergency Off (EMO) This device is not equipped with an EMO disconnect device. Using this product without an Emergency Off (EMO) circuit may cause death or personal injury. The integrator and user are responsible for installation of the EMO disconnect device that complies with the mandated safety codes. Personnel servicing this product are responsible for disconnecting power as specified by the facility Lockout/Tagout procedures. Copyright © 2023, Brooks Automation, Inc.
Page 28: Interlocks
Part Number: 605563 Rev. A Lockout/Tagout It is the responsibility of the tool owner to create a Lockout/Tagout procedure that ensures safety to personnel and equipment. Lockout / Tagout Working with energized equipment may cause sudden movement or electrical shock and may result in death or serious injury. All energy must be removed from the equipment per the facility’s Lockout/Tagout procedure before servicing. If local procedures are not available, follow the procedure for Lockout/Tagout in OSHA Standard 29CFR 1910.147. Interlocks Safety Interlocks The MagnaTran LEAP robot contains an embedded safety rated controller. S afety interlocks are mandated by regulatory standards ISO 60204-1, ISO10218-1 for moving machinery and robots. As stated by ISO/TR 24119, it is possible for multiple interlocking devices connected serially to mask faults in the interlocking system. The fault masking probability is a function of the number of movable guards and their fre- quency of use. Consult ISO/TR 24119 for guidance when designing an interlocking system connected to the Mag- naTran LEAP robot. Copyright © 2023, Brooks Automation, Inc.
Page 29 Advised The legacy interlocks are presented in the section on the MISC I/O interface. The term “Safety Rated Controller” is a subset of the overall robot motion controller. T he function of the Safety Rated Controller is limited to enabling and removing power to the motors. If an interlock is opened during robot motion, a c ontrolled stop is executed followed by removal of motor power. The safety rated controller embedded in the MagnaTran LEAP robot will only apply power to the robot motors if all the interlocks on the Safety Controller the MISC I/O interface are satisfied, and then only upon issuing an action command. The term “legacy” is used to signify a design carried over from the MagnaTran 7 and MagnaTran 8 robot families. T he Embedded Safety Controller should be fully implemented in all new vacuum systems. If the MagnaTran LEAP is being put into an existing vacuum system that already has adequate safety that meets the required standards, the Embedded Safety Controller can be muted by a simple muting plug on the Safety IO connector. The MISC I/O interlock provides only single conductor protection and should not be relied upon for human safety. Software interlocks, if employed, are not safety rated and should never be relied upon for human safety. O nly the firmware resident in the safety controller is safety rated. Safety Interlocks Overriding the safety interlocks could cause personal injury or death. Always use the safety interlocks. Copyright © 2023, Brooks Automation, Inc.
Page 30 A message is sent to the host indicating an over-temperature event. Interlock Override Overriding interlocks may cause death or serious injury. Do not override interlocks. Become familiar with the interlocks and their function. Table 1-6: Operational Interlocks Interlock Type Function Customer provided per requirements of the facility where the Customer wired EMO Customer Provided MagnaTran LEAP robot is installed. E-Stop circuit provided on the Safety I/O connector on the robot Customer wired E-Stop Customer Provided I/O panel. Ensures the primary circuit breakers are OFF in order to High Voltage Interlock Lockout/Tagout remove the high voltage box covers when accessing the interior of the high voltage assembly. Copyright © 2023, Brooks Automation, Inc.
Page 31: Emergency Stop Circuit (E-Stop)
Safety System Emergency Stop Circuit (E-Stop) An Emergency Stop Switch must be provided by the integrator of the robot. For more information on the Emergency Stop Circuit, please see "Embedded Safety Controller" on page 147. Stopping time and distance is a function of the armset configuration, load, end-effector weight, r obot mode, and velocity of the arm at the moment the E-stop is activated. B ecause of the variability on loads and configurations, this manual does not cite specific stopping times or distances. Brooks Automation recommends testing the robot with the intended armset configuration, load, end- effector(s), r obot mode, and velocity if stopping time and distance is critical for an application. Emergency Stop Circuit Using this product without an emergency stop circuit may cause death or personal harm. Customer is responsible for integrating an emergency stop circuit into their system. Do not override or bypass the emergency stop circuit. Brooks requests placing cables for the E-stop and/or liveman in conduit or flexible metal cabling. Safety System For more information on the MagnaTran LEAP Safety System, please see "Embedded Safety Controller" on page 147. Copyright © 2023, Brooks Automation, Inc.
Page 32: Mechanical Hazards
Follow safe practices for working with energized products per the facility requirements. Do not rely on the system software or process technology to prevent unexpected product motion. Unplanned Robot Motion Motion software and electrical drives are not not provided by Brooks Automation. The robot integrator must take action to protect themselves and others from unplanned or faulty auto- matic robot motion which may cause death or serious injury. Be aware that unplanned robot motion may occur. Know and stay out of the robot’s range of motion. Place physical barriers to prohibit others from entering the working range of the robot. Follow safe practices for working with energized robots. Do not rely on the system software or processor technology to prevent unexpected robot motion Tipover Hazard This product has a high center of gravity which may cause the product to tip over causing serious injury. Always properly restrain the product when moving it. Never operate the robot unless it is rigidly mounted. Copyright © 2023, Brooks Automation, Inc.
Page 33: Electrical Hazard
Always route the cables where they are not in the way of traffic. Electrical Hazard The robot is a hazardous low voltage device. Power between the controller and the robot is 4 8VDC or 24VDC. Power supplies converting facility power may be operating at higher levels of AC in close proximity to the robot. Electrical Burn Improper electrical connection or connection to an improper electrical supply can result in electrical burns resulting in death or serious injury or equipment damage. Maximum power consumption for the robot is +48VDC at 20 Amps and 1000 Watts. Always provide the robot with the proper power supply connectors, and ground that are compliant with appropriate electrical codes. Electrical Fire Hazard All energized electrical equipment pose the risk of fire, which may result in death or serious injury. Fires in wiring, fuse boxes, energized electrical equipment, computers, and other electrical sources require an extinguisher labeled Class C. Use a fire extinguisher designed for electrical fires (labeled Class C in the US and Class E in Asia). It is the responsibility of the facility to determine if any other fire extinguishers are needed for the system that the robot is in. Copyright © 2023, Brooks Automation, Inc.
Page 34: Ergonomic Hazard
MagnaTran LEAP Ergonomic Hazard Part Number: 605563 Rev. A Improper handling of the power source or connecting devices may cause component damage or equipment fire. Connect the system to an appropriate electrical supply. Turn off power before servicing. Turn off power before disconnecting cables Ergonomic Hazard Robot Heavy Lift Hazard The weight of the product is between 23 kg (50 lbs) and 251.2 kg (554 lbs), depending on the configuration Failure to take the proper precautions before moving the drive or arms could result in back injury and muscle strain. Use a lifting device and cart rated for the weight of the drive or arm. Only persons certified in operating the lifting device should be moving the product. Depending on the configuration, the 4-axis version of the MagnaTran LEAP can weigh up to 68 kg (150 lbs) without shipping fixtures, whereas the 6-axis version can have a maximum weight of 251.2 kg (554 lb) without shipping fixtures. Brooks Automation recommends using lifting devices rated for lifting 1000 lb (450 kg) or more when lifting the MagnaTran LEAP. Copyright © 2023, Brooks Automation, Inc.
Page 35: Lift Points
Part Number: 605563 Rev. A Ergonomic Hazard Lift Points Brooks Automation recommends different ways of lifting the robot depending on the mounting flange and if the arm is attached. Arm is not attached to drive: Overhead lifting device via eyebolts or lift fixture attached to the flange (dependent on d rive type). Arm is attached to drive: Overhead lifting device via a lifting fixture installed onto the flange (fixture dependent on arm and drive type). Bottom mount flange - Scissor Lift Table. The recommended lift points of the MagnaTran LEAP robot are shown below in Figure 1-7, Figure 1-8, Figure 1-9, and Figure 1-10. Figure 1-7: Eyebolt Lift Points for MagnaTran LEAP without Arm Attached Copyright © 2023, Brooks Automation, Inc.
Page 36 MagnaTran LEAP Ergonomic Hazard Part Number: 605563 Rev. A Figure 1-8: Lift Fixture and Lift Point for X-Large MagnaTran LEAP without Arm Attached Figure 1-9: MagnaTran LEAP with Arm and Lifting Fixture Attached with Lifting Device Copyright © 2023, Brooks Automation, Inc.
Page 37: Teach Pendant
Brooks Automation 1. Safety Part Number: 605563 Rev. A Environmental Hazards Figure 1-10: Cart Lift for Bottom Mount MagnaTran LEAP Teach Pendant The Teach Pendant does not pose any ergonomic hazards. Environmental Hazards Noise Emission The robot provides no direct noise hazard during operation. The robot produces a noise level that is less than 80 dB during normal operation. Vibration The robot provides no direct vibration hazard during normal operation. Any vibrations produced during normal operation are minimal and cause no hazardous conditions. Copyright © 2023, Brooks Automation, Inc.
Page 38: Recycling And Hazardous Materials
Recycling and Hazardous Materials Lubricants that are considered hazardous may be located in arm and drive bearings. If the armset or the drive is removed or replaced, it must be handled following all Federal, State, Local, and Facility’s procedures for the disposal of hazardous materials. Decommissioning and Disposal Corrosive and/or Toxic Materials The robot in its intended use may be exposed to corrosive and/or toxic materials during its operation. Failure to properly decontaminate the robot or wear adequate personal pro- tective equipment during its removal can expose personnel to toxic corrosive and/or toxic substances. Wear appropriate personal protective equipment when handling robots that have not been properly decontaminated. Ensure appropriate decontamination procedures are followed before handling the robot without personal protective equipment or placing the robot within reach of personnel that may be not be properly warned or protected such as shipping personnel. Do not dispose of the robot or its parts without having properly decontaminated it. Brooks Automation complies with the EU Directive 2002/96/EU Waste Electrical and Electronic Equipment (WEEE). The obligation for disposal for the product and the components are passed to the end user for responsible disposal. No cost for disposal is included in the initial cost of the equipment. For further information and assistance in disposal, please contact the Brooks Automation Service Department. Copyright © 2023, Brooks Automation, Inc.
Page 39: Safety Data Sheets - Sds
NOTE: Safety Data Sheets were previously known as Material Safety Data Sheets, usually abbreviated to MSDS. Table 1-7: Hazardous Material Identification Material Where Used Krytox Flourinated High Vacuum Grease T1, T2, and optional T3, and T4 armsets Bracote 803 Perflouraoether High Vacuum Grease armset NYE TORR 5200 Bearing Radial grease T1, T2, and optional T3, and T4 bearings Other Hazards The Brooks Automation MagnaTran LEAP robot does not directly pose any of the following hazards: Laser Hazards Gas Hazards Chemical Hazards Thermal Hazards Vacuum Hazards Copyright © 2023, Brooks Automation, Inc.
Page 40: Emergency Information
Know the location of the S afety Data Sheets. Emergency Information Fire Fighting Equipment The MagnaTran LEAP robot does not impose special requirements on firefighting equipment. However, fire extinguishers for electrical fires are preferred due to its proximity to equipment that may function with voltages that may pose a hazard to fire fighting personnel. F inal determination of the fire fighting equipment to be used shall be made by the end-user based on the processes and equipment with which the MagnaTran LEAP robot is used. Robot Movement Without Drive Power The MagnaTran LEAP robot is designed so that all axes, except for the Z-axis, are capable of being moved by a single-person without the use of drive power in emergency or abnormal situation. See "Emergency Z-Axis Brake Release Procedure" on the facing page for instructions on moving the Z- axis during emergency and/or abnormal situation. Crush Hazard Releasing the Z-axis brake causes the Z-axis to fall due to gravity which may crush extremit- ies or fingers. Only properly trained personnel should perform the Z-axis Brake Release Procedure. Fully support the Z-axis during release to avoid additional hazards. Only perform the brake release for testing or emergencies. Copyright © 2023, Brooks Automation, Inc.
Page 41: Emergency Z-Axis Brake Release Procedure
1. Safety Part Number: 605563 Rev. A Emergency Information Emergency Z-Axis Brake Release Procedure For Emergency Use Only Entrapment by this product can cause serious injury to extremities. The Emergency Z-axis Brake Release procedure should only be used in emergencies. This procedure assumes the following: A dedicated 24V power supply with a compatible connector that is available to personnel for emergencies. For more information on the Z-axis Brake, see "Z-Axis Brake Release" on page 74. In the event that the Z-axis needs to be moved with power removed, perform the following steps: Step Action Support the robot arm so that it does not fall due to gravity when the Z-axis brake is released. Plug the user supplied Switchcraft 760 connected to a 24VDC power supply into the Brake Release con- nector on the robot I/O panel. Copyright © 2023, Brooks Automation, Inc.
Page 42 1. Safety MagnaTran LEAP Emergency Information Part Number: 605563 Rev. A Step Action Turn on the Brake Release power supply. The Z-axis is now free to move. Remove the person or object that is trapped. Turn off the power to the emergency power supply and disconnect from the controller. Copyright © 2023, Brooks Automation, Inc.
Page 43: Overview
Brooks Automation 2. Overview Part Number: 605563 Rev. A 2. Overview The MagnaTran LEAP robot is a vacuum robot that can have 2 or more axes, i ntended to be used for semiconductor fabrication processes inside a vacuum chamber. There are many possible robot drive, arm, and end effector combinations. The MagnaTran LEAP robot is a drop-in replacement for both MagnaTran 7 and MagnaTran 8 robots. Copyright © 2023, Brooks Automation, Inc.
Page 44: Magnatran Leap Components
Robot Drive Armset LEAP Controller/Passthrough I/O Panel End Effector Figure 2-1: MagnaTran LEAP Robot with Dual Pan SCARA Table 2-1: MagnaTran LEAP Robot with Dual Pan SCARA - Explanation Number Explanation Armset End Effectors Robot Drive I/O Panel Copyright © 2023, Brooks Automation, Inc.
Page 45: Robot Drive Overview
Table 2-2: MagnaTran LEAP Sizes Robot Letter Theta Axes Size Designation Small Medium Large Large X-Large Figure 2-2: MagnaTran LEAP External Controller Table 2-3: MagnaTran LEAP External Controller Dimensions Length Width Height Weight 16.00" (406.4 mm) 14.00" (355.6 mm) 6.26” (168.1 mm) 26.45 lbs (12.0 kg) Copyright © 2023, Brooks Automation, Inc.
Page 46 2. Overview MagnaTran LEAP Robot Drive Overview Part Number: 605563 Rev. A The mechanical design and operation of the robot uses a minimum number of moving parts to ensure minimal maintenance requirements. The robot is controlled by either a highly integrated and compact o n-board controller that resides in the base of the robot drive or by an external controller that is independent from the robot. The controllers require only DC power and a communication connection to the host.The on-board controller provides power and communcation directly to the robot whereas the external contoller must be connected to the robot by a series of additional cables that provide power and communication. The controller receives high level commands from an external system host computer and the robot controller interprets and disassembles the command into smaller instructions. The robot drive is powered by either 24VDC or 48VDC. The operating voltage is part of the robot configuration defined by Brooks Automation’s factory settings. The power supply requirement is listed on the robot nameplate label. N ever operate a 24V robot from 48V and never operate a 48V robot at 24VDC. For more information see "Power Supply" on page 69. The [[[Undefined variable MyVariables.ProductName1]]] External Controller is designed for use with 48V robots and is powered by 85-264 VAC at 47-63 Hz. Copyright © 2023, Brooks Automation, Inc.
Page 47: Flange And Drive Shaft Configurations
Part Number: 605563 Rev. A Flange and Drive Shaft Configurations Flange and Drive Shaft Configurations Figure 2-3: Top View of MagnaTran LEAP Two Theta Axis Drive Table 2-4: Top View of MagnaTran LEAP Two Theta Axis Drive - Explanation Number Explanation Theta 1 (T1) Theta 2 (T2)
Page 48 MagnaTran LEAP Flange and Drive Shaft Configurations Part Number: 605563 Rev. A Figure 2-4: Top View of MagnaTran LEAP Three Theta Axis Drive Table 2-5: Top View of MagnaTran LEAP Three Theta Axis Drive - Explanation Number Explanation Theta 1 (T1) Theta 2 (T2) Theta 3 (T3)
Page 49 Brooks Automation 2. Overview Part Number: 605563 Rev. A Flange and Drive Shaft Configurations Figure 2-5: Top View of MagnaTran LEAP Four Theta Axis Table 2-6: Top View of the MagnaTran LEAP Four Theta Axis - Explanation Number Explanation Theta 1 (T1) Theta 2 (T2) Theta 3 (T3)
Page 50: Armset Overview
Some armsets require the robot to be equipped with a Z-axis while some arms do not. Robots containing two theta motors are considered coaxial drives, robots with three motors are labeled tri-axial drives, and robots with four theta motors are considered quadaxial drives. All MagnaTran LEAP armsets consist of an upper arm, forearm, wrist, and end effector. In order to meet specific requirements, most end effectors are custom designed. Figure 2-6: Parts of a Typical (Dual Pan) SCARA Armset Table 2-7: Parts of a Typical (Dual Pan) SCARA Armset - Explanation Number Explanation End Effectors Wrist Upper Arm Forearm Copyright © 2023, Brooks Automation, Inc.
Page 51 Figure 2-7: Parts of a Dual Independent Frogleg Armset Table 2-8: Parts of a Dual Independent Frogleg Armset - Explanation Number Explanation Wrist Plate, Arm A Forearms, Arm A Upper Arms, Arm A End Effector, Arm A End Effector, Arm B Wrist Plate, Arm B Forearms, Arm B Upper Arms, Arm B NOTE: Body, wrist, and end effector designs can vary between Frogleg Armset styles. Copyright © 2023, Brooks Automation, Inc.
Page 52: Magnatran Leap Software Controls Overview
Figure 2-8: Parts of an OPTIMAX Armset Table 2-9: Parts of a Typical (Dual Pan) SCARA Armset - Explanation Number Explanation Upper Arm Forearm Wrist A Wrist B NOTE: The End Effectors are not shown in Figure 2-8 so that other parts of the armset are not obscured. MagnaTran LEAP Software Controls Overview MagnaTran LEAP Software Controls are the fully integrated software controls for the MagnaTran LEAP robot. MagnaTran LEAP software supports many of the same commands as the MagnaTran 7 and MagnaTran 8 WAVE II Controls. Copyright © 2023, Brooks Automation, Inc.
Page 53: End Effectors
End Effectors There are many different types of end effectors used with the MagnaTran LEAP. E nd effectors may be provided by Brooks, or can be customer supplied. M any different types of materials can be used to create end effectors. Always handle end effectors with care and verify flatness before use. Field Replaceable Units (FRUs) The MagnaTran LEAP system consists of sub components that may be replaced as Field Replaceable Units or FRUs. There are four primary FRUs for MagnaTran LEAP robots: Drive Armset End effectors External controller Contact Brooks Technical Support to determine the available FRUs for your system. For more information on contacting Brooks Technical Support, please see "Contact Brooks Automation Technical Support". Figure 2-9: MagnaTran LEAP Field Replaceable Units Copyright © 2023, Brooks Automation, Inc.
Page 54: Brooks Product Training
2. Overview MagnaTran LEAP Brooks Product Training Part Number: 605563 Rev. A Table 2-10: MagnaTran LEAP Field Replaceable Units - Explanation Number Explanation End Effectors Armset Robot Drive Brooks Product Training Brooks Automation offers training courses on safety and operation as well as maintenance and troubleshooting. For more information on training courses go to www.brooks.com/education or contact your Brooks representative. Copyright © 2023, Brooks Automation, Inc.
Page 55: Regulatory Compliance
Brooks Automation 2. Overview Part Number: 605563 Rev. A Regulatory Compliance Regulatory Compliance Declaration of Incorporation The MagnaTran LEAP meets the requirements of the European Union's Machinery Directive 2006/42/EC as a partially completed machine. In accordance with the Directive, Brooks Automation has issued a Declaration of Incorporation and MagnaTran LEAP robots do not have a CE mark affixed. It is the responsibility of the party integrating the robot into a system to acquire CE approval. The Declaration of Incorporation below is a sample. P lease contact Brooks Automation if a copy of the Declaration of Incorporation is needed. Copyright © 2023, Brooks Automation, Inc.
Page 56: Specifications And Site Requirements
Site Requirements Environment Table 3-1: Site Requirements Requirement Specification Clean Room ISO 14644-1 Class ISO 6 or better cleanroom ambient Temperature: 10° C to 50° C (50° F to 122° F) Humidity 30% to 55% (relative, non-condensing) Standard lighting provided in the cleanroom environment. Lighting Additional lighting is not required for normal operation. Installation and maintenance may require a user supplied service lamp. Other Trained personnel Lifting apparatus Chamber o r rigid stand for support Requirement to protective flange sealing surface 24V or 48V power supply (depending on robot configuration/application) 100-240 VAC input for external controller configuration Copyright © 2023, Brooks Automation, Inc.
Page 57: Access
Do not operate the robot if it is not securely bolted to the system or test stand. Access The MagnaTran LEAP robot requires space for service access and for proper operation. It is the responsibility of the robot integrator to ensure that there is adequate space for service, cables, and the teach pendant. E nsure ambient temperatures do not exceed robot design limits and there is adequate airflow for the robot internal cooling fan. Robot Specifications The nameplate data label on the robot covers represent the typical operating limits for the MagnaTran LEAP robot. It is designed to provide guidance for general lifting and safeguarding. Table 3-2: Robot Parameters Parameters Value R (Radial) Axis Extension distance dependent upon armset and arm angle. T(Rotational) Axis Infinite, continuous rotation Operating Temperature 10°C to 50°C (283.15K to 323.15K / 50°F to 122°F) Storage Temperature -25°C to 55°C (-13F to 131F), up to 65°C (149°F) for 24 hrs. Shipping Temperature -25°C to 55°C (-13°F to 131°F), up to 65°C (149°F) for 24 hrs. Humidity 30% to 55% (relative, non-condensing). Altitude The robot operation is not affected by altitude (atmospheric/barometric pressure). Copyright © 2023, Brooks Automation, Inc.
Page 58 Robot Weight with Arm Varies by drive and armset 5A to 10A @ 24V/48V (armset dependent) Nominal Current 10A @ 220 VAC (external controller) 20A @ 24V/48V (armset dependent) Peak Current 35A @ 60 VDC (armset dependent) Nominal Power 100W to 500W (armset dependent) 24V: 480W Peak Power 48V: 2100W 24 VDC+/-2% Operating Voltage 48 VDC+/-2% Permanent damage to the controller and drive may occur if voltage goes above these values: 24V configuration: 34V Maximum Voltage 48V configuration: 68V 24V MISC I/O Power Supply: 26V Accessories Custom designed end effectors 40A for On-Board Controller configuration SCCR (Short-Circuit Current 5 kA for External Controller configuration Rating) Brooks does not recommend current protection sizing to be based on the SCCR. Brooks recommends a 20A circuit breaker or fuse with a medium delay. Consult Brooks Product Support concerning the nominal and peak current/power for your specific robot application. Copyright © 2023, Brooks Automation, Inc.
Page 59: Robot Dimensions
Maximum Cable Length Between External Controller 10 meters and Robot Drive Robot Dimensions Drive, arm, and end effector dimensions depend on the combination of drive, arm link length, wrist, and end effector. Refer to the layout drawing document in the documentation package that is part of your system materials. Robot Weights The weight of the robot varies by robot configuration. Refer to Name Plate Data Label, Interface Drawings or contact Brooks Technical Support for approximate weights of the drive. For more information on contacting Brooks Technical Support, please see "Contact Brooks Automation Technical Support". Robot Part Numbers The p art and serial numbers can be found on the Standard Serial Number Label, attached to the robot drive near the I/O panel. Robot Workspace The robot workspace is the available range of motion for the robot arm. The workspace of the robot is a horizontal cylindrical volume. T he radius of the cylinder defined from the center of the robot drive to the tip of the end effector when the arm is fully extended. Refer to the robot and system Interface drawings for more information. The robot workspace must be safeguarded from personnel and external objects when the robot is powered. Refer to the specifications label on the robot drive for the maximum reach and height of the armset to determine the workspace of the robot. Copyright © 2023, Brooks Automation, Inc.
Page 60 3. Specifications and Site Requirements MagnaTran LEAP Robot Workspace Part Number: 605563 Rev. A Figure 3-1: Robot Workspace Table 3-3: Robot Workspace- Explanation Number Explanation Radius Height Copyright © 2023, Brooks Automation, Inc.
Page 61: Robot I/O
Part Number: 605563 Rev. A Robot I/O Robot I/O Figure 3-2: 24V Robot I/O Panel Table 3-4: 24V Robot I/O Panel - Explanation Number Explanation Number Explanation Host I/O (Serial) Safety I/O Safety / Robot / Err / Run Status Miscellaneous I/O LEDs Power Connection Teach Pendant Connections Diagnostics (Ethernet) Brake Release Host I/O (Ethernet) Auxiliary (Ethernet) Copyright © 2023, Brooks Automation, Inc.
Page 62 Part Number: 605563 Rev. A Figure 3-3: 48V Robot I/O Panel Table 3-5: 48V Robot I/O Panel - Explanation Number Explanation Number Explanation Host I/O (Serial) Safety I/O Safety / Robot / Err / Run Status Miscellaneous I/O LEDs Power Connection Teach Pendant Connections Diagnostics (Ethernet) Brake Release Host I/O (Ethernet) Auxiliary (Ethernet) Copyright © 2023, Brooks Automation, Inc.
Page 63 Part Number: 605563 Rev. A Robot I/O Figure 3-4: Offboard Controller Robot Passthrough I/O Panel Table 3-6: Offboard Controller Robot Passthrough I/O Panel - Explanation Number Explanation Number Explanation Encoders (To external controller) Motor Power (To external controller) 24V AUX (To external controller) 24V Brake Release NOTE: Most images of the I/O panel in the manual are of the 24V Robot. Copyright © 2023, Brooks Automation, Inc.
Page 64 Motor Drive Power (To robot AUX ( To robot passthrough I/O) passthrough I/O) +48V DC NOTE: Use only cables provided by Brooks Automation to connect offboard controller robots to external controllers. Table 3-8: Robot Connectors Label Function Mating Connection Type Link/Page Connects Robot to Host Com- Host D-Sub 9 Socket Connector "Host" on page 65 puter D-Sub Combo-D, female (Mate - Molex) FCI: DB9W4SA00LF (power contacts "Power Connection" on page Power Connection separate) NorComp: 680M9W4203L201 ITT Cannon: DBMN9H4SNA197 Copyright © 2023, Brooks Automation, Inc.
Page 65: Host
Customer Interface Con- Misc I/O D-Sub 50 pin connector "Misc I/O" on page 76 nection DIAG Diagnostics connections RJ-45 "Diagnostics" on page 88 Connects robot to host com- "Ethernet" on page 65 HOST RJ-45 puter "Auxiliary" on page 88 Auxiliary connections RJ-45 Host Communication between the robot and a host controller can be accomplished by connecting the robot over a Serial I/O RS232 communication port or by using an Ethernet port. The Host communication selection is made based on customer preference so the robot is factory set to the desired state. Only one Host communication interface can be enabled at a time and it can be changed as desired using the teach pendant. NOTE: Customers must use Ethernet cables with ferrite protection when making the connection to the robot. Ethernet The MagnaTran LEAP robot has a 10/100BASE-T Ethernet for Host communications. Network communications using the Ethernet communications protocol provides the ability to connect a number of different devices to a factory controller using a single communications cable, which simplifies wiring. Ethernet communication allows the MagnaTran LEAP Controller to send and receive data faster than with a serial communication connection. Each device connected to the Copyright © 2023, Brooks Automation, Inc.
Page 66 3. Specifications and Site Requirements MagnaTran LEAP Host Part Number: 605563 Rev. A cable has a unique network device address. Only communications addressed to a specific device through the network will be received by that device. Network communications allows the host controller to communicate with the LEAP Controller using the commands detailed in the MagnaTran LEAP Controller Software Manual (605651). In situations where the Remote Service Interface and the Host Controller are unavailable, a personal computer running a network communications application may be connected to the HOST network port on the LEAP I/O panel using an Ethernet cable that includes ferrite protection. The connection to the MagnaTran LEAP Controller from the host controller uses standard Ethernet network communications protocols and wiring. The configuration for the controller’s external network communications is defined by the facility where the MagnaTran LEAP robot is installed. Note that if more than one MagnaTran LEAP robot will be connected to the same network the IP address of each additional system must be changed to avoid IP conflicts. The MagnaTran LEAP Controller can use Ethernet to communicate with additional devices within the controlled environment. The configuration for the internal network communications is described in the table below. Table 3-9: Internal Network Communications Configuration Setting Value Factory Default IP Address...
Page 67: Host Ioioi
3. Specifications and Site Requirements Part Number: 605563 Rev. A Host Figure 3-6: Host Ethernet Connection NOTE: To establish a direct communications link to the MagnaTran LEAP Controller using Ethernet either a crossover cable or an Ethernet Switch is needed. Host IOIOI As an alternative, the MagnaTran LEAP Controller can use a conventional RS232 serial communications port for connection to a host controller. S erial communications provides the ability to connect the LEAP Controller to a host controller using a simple 3-wire cable. Using the serial connection requires each device within a system have its own serial communications cable. Serial communications allows the host controller to communicate with the MagnaTran LEAP Controller using the commands detailed in the Wavecode Manuals. N o additional control, or “handshaking”, wires are used. The Baud Rate can be set from 9600 BAUD to 115200 BAUD as defined by the protocol standard. The connector on the controller is the industry standard DB9 connector. The mating connector would contain male contacts. Copyright © 2023, Brooks Automation, Inc.
Page 68 Figure 3-7: Host Serial Connection The setup and selection are made using the teach pendant. The Host IOIOI connector also contains an RS422 interface. The actual application use of the RS422 interface remains held in reserve. The serial communications cable uses a standard 9-pin female “D” connector that plugs into the MagnaTran LEAP Controller on the robot I/O panel. The serial communications cable for Host Control and PC Control uses a standard 9-pin male “D” connector at the end that plugs into the robot in the connector labeled “HOST IOIOI”. The pin-out for this cable is provided in Table 3-10 on page 68. Note that pins not identified with a signal name are to be left unconnected. Table 3-10: RS-232 Pin Assignments S101 Pin ID RS-232 Signal Name AUX RS422 TX+ HOST RS232 TX HOST RS232 RX AUX RS422 RX- AUX RS422 TX- Unused AUX RS422 RX+ Unused Copyright © 2023, Brooks Automation, Inc.
Page 69: Power Connection
Power Supply The MagnaTran LEAP robot is designed to operate from a 24VDC or 48VDC power supply. Brooks Automation tests and tunes all MagnaTran LEAP robots using the COSEL ADA750F-24V or the COSEL ADA750F-48V. Use Table 3-2: " Robot Parameters" on page 57 to help select a power supply based on power and voltage requirements. Selecting a different power supply based on cost or size should first be fully characterized by the user in all combinations of arm movement. This power supply has been selected based on reliability, fault tolerance, and on peak power requirements common in the servo-motion industry. Power requirements vary from one application to another. Contact Brooks Automation to determine which power supply voltage best meets a specific wafer transport application. Power Supply Wiring for MagnaTran LEAP Robot The LEAP robot power supply should be wired to meet all required safety standards. A sample checklist is included below. T his list is a general checklist and may not contain all the requirements required by the safety standards: Conductors and insulation must be sized correctly Primary and secondary wiring should not be bundled together Use circuit protection where required to permit downsizing of conductors Reference DC RETURN protective earth with an appropriately rated wire Ensure primary circuits have appropriately sized disconnect devices ...
Page 71: Safety I/O
Brooks Automation 3. Specifications and Site Requirements Part Number: 605563 Rev. A Safety I/O Figure 3-9: 24V and 48V Power Connectors Safety I/O Brooks MagnaTran LEAP robots contain an embedded controller designed to help customers meet the requirements of EN ISO 10218-1:2011 and EN ISO 13849-1:2008 Category 3, PL d. The Embedded Safety Controller connects to the robot through the safety I/O port on the robot I/O panel. For more information , see "Embedded Safety Controller" on page 147. Copyright © 2023, Brooks Automation, Inc.
Page 72: Status Indicators
Solid Motor Power is applied Slow speed motion possible. Motor power is off. Motor power will Holding with motor power off. Yellow Solid be applied on the next motion com- Motion is possible on next Manual mand. motion command. Open interlock Emergency Yellow Blinking 4Hz Motor Power is off. Stop. Motion not possible. Slow speed motion possible. Blue Solid Motor Power is applied E-Stops are satisfied. Legacy Teach Motor Power is off, will be applied Holding with motor power off. Pendant Yellow Solid on next motion command Motion not possible. Yellow Blinking 4Hz Motor power is off. Open Emergency Stop Copyright © 2023, Brooks Automation, Inc.
Page 73: Liveman Teach Pendant
Motion is not possible. man button is gripped. Yellow Blinking 4Hz Motor Power is off. Open Emergency Stop Safety Wiring, channel A and Error Motor Power is off. channel B mismatch. NOTE: The Robot Status indicator and the Network Status indicators (ERR and RUN) are reserved and will be defined at a later date. Liveman Teach Pendant The MagnaTran LEAP robot uses a Liveman Teach Pendant for increased safety. The 3-position Liveman Switch o nly allows robot movement when it is properly engaged. The Liveman Teach Pendant connects to the robot using a high density D-Sub 15 pin connection. For more information please see "Teach Pendant" on page 173. Brooks requests placing cables for the E-stop and/or liveman in conduit or flexible metal cabling. Legacy Teach Pendants MagnaTran 7 and MagnaTran 8 Teach Pendants can be used with the MagnaTran LEAP robot if certain system safety conditions are met. Legacy Teach Pendants connect to the robot using an RJ45 connection. For more information on using Legacy Teach Pendants with your MagnaTran LEAP robot, please see "Teach Pendant" on page 173 a nd the "Embedded Safety Controller" on page 147. Copyright © 2023, Brooks Automation, Inc.
Page 74: Z-Axis Brake Release
Legacy Teach Pendants do not comply with the ISO 10218-1 standard because they do not have a liveman switch. Brooks recommends using liveman teach pendants when working on any robot or system. Never enter the robot workspace when operating the robot with a legacy teach pendant. Z-Axis Brake Release See "Emergency Z-Axis Brake Release Procedure" on page 41. The Z-axis is equipped with a brake that holds the Z-axis in position whenever power to the brake is off. When power is applied to the brake, the brake releases and the Z-axis can move. When power is removed from the brake, the brake holds the Z-axis and prevents Z movement. When conditions require that the Z-axis is moved when the drive power is off, the Emergency Brake Release circuit may be used to release the internal Z-axis brake. The Z-axis Brake Release requires a separate 24VDC 500mA power supply with a floating power source or earth referenced negative terminal and a Switchcraft™ 760 Mini Power Plug power output connector. Crush Hazard Releasing the Z-axis brake causes the Z-axis to fall due to gravity which may crush extremit- ies or fingers. Only properly trained personnel should perform the Z-axis Brake Release Procedure. Fully support the Z-axis during release to avoid additional hazards. Only perform the brake release for testing or emergencies. Copyright © 2023, Brooks Automation, Inc.
Page 75 Brooks Automation 3. Specifications and Site Requirements Part Number: 605563 Rev. A Z-Axis Brake Release Figure 3-10: Emergency Z-axis Brake Release Wiring Diagram Input Signal: DC21-30V @ 1/2A, center pin is positive. Figure 3-11: Switchcraft 760 Copyright © 2023, Brooks Automation, Inc.
Page 76: Misc I/O
Discrete I/O interface can be configured as high-side or low-side. T he safety standards advise the high side application. A high side application is asserted as a connection to the 24V power supply, while the low side application is asserted by a connection to ground. W hen performing a risk assessment for a broken wire, the broken wire is m ore likely to contact ground than +24V. The short to ground would provide a false assertion with the low-side configuration. R egardless, it is required that each system integrator perform a risk assessment to determine which configuration is the most reliable and therefore the safest for their given design. In its simplest form, using mechanical switches, high-side and low-side operation are described below. Figure 3-12: High-Side and Low-Side Configuration The miscellaneous I/O connector is located on the robot front panel. I t is the DB50 male connector J1 located on the upper left. Connection of external devices to the MagnaTran LEAP robot is accomplished through the miscellaneous I/O. T here are 22 inputs and 20 output lines. Copyright © 2023, Brooks Automation, Inc.
Page 77: Selection Between High-Side Or Low-Side Hardware
Part Number: 605563 Rev. A Misc I/O NOTE: It is not possible to split the inputs or outputs between high-side and low-side. Figure 3-13: Miscellaneous I/O on the Robot I/O Panel Selection Between High-Side or Low-Side Hardware Selection of high-side or low-side hardware interface is performed at Brooks. Customer must specify high-side or low-side operation, and communicate the requirement to Brooks. High-Side Inputs: External devices must be capable of sourcing 4.4mA from 24V. H ysteresis is ~6V. Input High ≥ 17V Input Low ≤ 8V Absolute maximum ratings: Copyright © 2023, Brooks Automation, Inc.
Page 78: High-Side Outputs
a. Output Type: H igh-side output drive, MOSFET connection to +24V. A high-side switch is designed to connect the output to a positive power source. Logic “1” is a connection to +24V. Copyright © 2023, Brooks Automation, Inc.
Page 79 Part Number: 605563 Rev. A Misc I/O Logic “0’ is a disconnect from 24V. Some type of LOAD may be required to ensure logic “0” goes to ground. Figure 3-15: High-Side b. Power Budget: T otal 24V current for all the outputs combined should be less than 700mA. U p to 100mA can be drawn from a single output. c. Connection of any discreet output bit to a large capacitor may damage the controller or impact other 24V outputs. F ailure to follow this rule may expose personnel to hazards that may include injury or death. Connection to a Large Capacitor Connection of any discreet output bit to a large capacitor may damage the controller or impact other 24V outputs potentially leading to death or personal injury. Do not connect any discreet output bit to a large capacitor. Copyright © 2023, Brooks Automation, Inc.
Page 80 MagnaTran LEAP Misc I/O Part Number: 605563 Rev. A Wiring Information - High-Side Outputs Outputs 0 through 19 are likewise located on connector P1. M ISC Outputs are pinned sequentially starting at pin 31 and ending at pin 50. S ee the wiring diagram below. A sample connection is shown for pin 31. NOTE: The MagnaTran LEAP Controller outputs +24V to the external device. Figure 3-16: Configuration Misc I/O High Side - Outputs 0 - 19 Copyright © 2023, Brooks Automation, Inc.
Page 81: Low-Side Inputs
Misc I/O Low-Side Inputs Unintended Input When using low side interface, a shorted connection wire creates an unintended active sig- nal which may cause improper or unsafe system operation. Use active-high interface whenever possible. External devices must be capable of sinking 4mA to ground. H ysteresis is ~6V. Input High ≥ 16V Input Low ≤ 8V NOTE: The pull-up resistor on the input bit will only pull-up to 19.5V. I f a higher level is needed an external pull-up is required Absolute maximum ratings: Input High: 28V Input Low: -0.6V Wiring Information - Low-Side Inputs Low-side inputs 0 through 21 are located on connector P1. M ISC Inputs start at pin 1 and count sequentially through pin 22 as shown in the wiring diagram below. A sample connection is shown to IN21. NOTE: The low-side connection from the external device forms a connection to ground. Copyright © 2023, Brooks Automation, Inc.
Page 82: Low-Side Outputs
Part Number: 605563 Rev. A Figure 3-17: Configuration Misc I/O Low-Side - Inputs 0 - 21 Low-Side Outputs Low-side outputs are open drain devices. A n external load resistor may be required to pull up to +24V. a. Output Type: low-side output drive, MOSFET connection to ground. A low-side switch is designed to connect the output to ground. Logic “0” is a connection to ground. Logic “1’ is a disconnect from ground where the load will be seen to pull up to 24V. Some type of LOAD may be required to ensure a logic “1” goes to +24V. Is not considered as safe as a high-side design. Copyright © 2023, Brooks Automation, Inc.
Page 83 b. Power Budget: T otal 24V current for all the outputs combined should be less than 700mA. U p to 100mA can be drawn from a single output. c. Connection of any discreet output bit to a large capacitor may damage the controller or impact other 24V outputs. F ailure to follow this simple rule may expose personnel to hazards that may include injury or death. Connection to a Large Capacitor Connection of any discreet output bit to a large capacitor may damage the controller or impact other 24V outputs potentially leading to death or personal injury. Do not connect any discreet output bit to a large capacitor. Wiring Information - Low-Side Outputs Outputs 0 through 19 are likewise located on connector P1. M ISC Outputs are numbered sequentially starting at pin 31 and ending at pin 50. S ee the wiring diagram below. A sample connection is shown for pin 31. NOTE: The LEAP Controller outputs a ground connection to the external device. Copyright © 2023, Brooks Automation, Inc.
Page 84: Miscellaneous I/O Power, Differences Between Magnatran 7/8 And Magnatran Leap
3. Specifications and Site Requirements MagnaTran LEAP Misc I/O Part Number: 605563 Rev. A Figure 3-19: Configuration Misc I/O Low-Side - Outputs 0 - 19 Miscellaneous I/O Power, Differences between MagnaTran 7/8 and MagnaTran LEAP Location: R obot I/O Panel, MISC I/O Connector, DB50 male. High-side and low-side MISC I/O interfaces are designed to operate from 24VDC nominal. T he integrator of the robot, in making connection to the interface, selects to power the robot I/O interface either from an external 24V power supply or from the 24V power supply internal to MagnaTran LEAP controller.
Page 85 3. Specifications and Site Requirements Part Number: 605563 Rev. A Misc I/O Figure 3-20: MagnaTran 7 and 8 Miscellaneous I/O 24V ISO Power The above design (Figure 3-20) presented a problem for some users of the external power option. When external power was removed, the transfer relay would switch and apply 24V robot power to the interface. A utomatic transfer of power violated the purpose of using isolated power and presented an unintended condition where removal of external power did not remove power from the interface circuits. The MagnaTran LEAP Controller solves this problem by eliminating the transfer relay and by a requirement (if selected) to hard-wire the internal power supply. The following diagram (Figure 3-21) demonstrates how the LEAP connection is wired for guaranteed isolation or for guaranteed connection to the internal power supply. Copyright © 2023, Brooks Automation, Inc.
Page 86: Summary
3. Specifications and Site Requirements MagnaTran LEAP Miscellaneous I/O Connector Pin Out Part Number: 605563 Rev. A Figure 3-21: MagnaTran LEAP Miscellaneous I/O 24V Power There is no change for users who chose to supply external 24V to power the MISC I/O interface. However there is a minor functional change to operation. R emoval of external power now removes power from the MISC I/O interface and all its output drivers. T he original MagnaTran 7/8 design had a transfer switch that maintained power to the interface as long as the robot was powered. There is a required change to wiring for users who power the MISC I/O interface from the robot. T he user must now add two wires to their MISC I/O connector to power the interface from the internal robot power supply. T he jumpers are shown in the above diagram.
Page 87 EXT_IN8 (input 9) DRV_OUT3 (output 4) EXT_IN9 (input 10) DRV_OUT4 (output 5) EXT_IN10 (input 11) DRV_OUT5 (output 6) EXT_IN11 (input 12) DRV_OUT6 (output 7) EXT_IN12 (input 13) DRV_OUT7 (output 8) EXT_IN13 (input 14) DRV_OUT8 (output 9) EXT_IN14 (input 15) DRV_OUT9 (output 10) EXT_IN15 (input 16) DRV_OUT10 (output 11) EXT_IN16 (input 17) DRV_OUT11 (output 12) EXT_IN17 (input 18) DRV_OUT12 (output 13) EXT_IN18 (input 19) DRV_OUT13 (output 14) EXT_IN19 (input 20) DRV_OUT14 (output 15) EXT_IN20 (input 21) DRV_OUT15 (output 16) EXT_IN21 (input 22) DRV_OUT16 (output 17) Safety Interlock DRV_OUT17 (output 18) Safety Interlock DRV_OUT18 (output 19) +PWR_ISOL DRV_OUT19 (output 20) Copyright © 2023, Brooks Automation, Inc.
Page 88: Power Status
MagnaTran LEAP Power Status Part Number: 605563 Rev. A Figure 3-22: I/O Assignment Pin Locations Power Status This connection port is reserved for future use. Diagnostics The diagnostics connection is a optional feature on the MagnaTran LEAP robot that performs health monitoring and fault-diagnostics. Health monitoring assesses the performance of the robot and reports when a problematic condition is identified. Fault-diagnostics aids in troubleshooting to determine error codes, fault location, and fault severity. For more information on the diagnostics feature of your MagnaTran LEAP, please contact your Brooks representative. Auxiliary The auxiliary connection on the Robot I/O panel provides an additional Ethernet port on the MagnaTran LEAP robot. Center Of Gravity The Center of Gravity for each robot depends on the specific drive, armset, and end effector configuration. Refer to interface drawings or contact Brooks Technical Support for the specific Center of Gravity of your robot. For more information on contacting Brooks Technical Support, please see "Contact Brooks Automation Technical Support". Copyright © 2023, Brooks Automation, Inc.
Page 89: Robot Mounting
Part Number: 605563 Rev. A Robot Mounting Robot Mounting Table 3-13: Robot Mounting Configurations Top Bolt Bottom Bolt Top Mount Bottom Mount Brooks Automation does not provide mounting hardware or a mounting flange o-ring/gasket for MagnaTran LEAP robots. It is the responsibility of the robot integrator to mount the robot to a chamber. The typical MagnaTran LEAP Mounting Flange has threaded holes and alignment pins for mounting the robot to a chamber. The robot should be aligned in the system so the drive I/O panel is accessible. Figure 3-23: Top of Robot Mounting Flange Copyright © 2023, Brooks Automation, Inc.
Page 91: Armsets
CW/CCW CCW: Counter Clockwise. S ometimes called “anti-clockwise” Z Motion Movement of the robot arm up or down. A sequence of motion which extends one of the robot’s arms into and then Robot Cycle retracts it out of a station. F or example, each pick or place operation is counted as a cycle. An arm is a set of mechanical linkages which is capable of carrying mater- ial. I f the robot has multiple arms which are stacked, the conventional des- Arm A/B ignation is that ARM A is above ARM B. I f the robot has multiple arms which are placed horizontally, ARM A is aligned with the zero of the theta axis. A joint which permits the first linkage to rotate relative to the robot mount- Shoulder Joint ing flange. A joint which permits the second linkage to rotate relative to the first link- Elbow Joint age. A joint which permits the end-effector to rotate relative to the previous link- Wrist Joint age to control the orientation of the end-effector. D epending on the robot arm design, the wrist joint may be passive or actively driven by a motor. Copyright © 2023, Brooks Automation, Inc.
Page 92 4. Armsets MagnaTran LEAP Part Number: 605563 Rev. A Term Definition The first linkage of an arm from the center of the robot to the elbow joint. Upper Arm The upper arm rotates about the shoulder joint. Typically, if the upper arm linkage is rotated by itself, the arm will execute a theta motion. Typically, the second linkage of an arm from the second joint to the wrist. Forearm The forearm rotates about the elbow joint. Typically, the forearm is rotated in conjunction with the upper arm to execute a radial motion. The first part of the final linkage upon which end-effectors are mounted. Wrist Plate The wrist plate rotates about the wrist joint. The second part of the final linkage which carries the material. The end End Effector (Pan) effector is mounted onto the wrist plate. Batwing Wrist plate upon which two end-effectors are mounted, side-by-side. Copyright © 2023, Brooks Automation, Inc.
Page 93: 5. Set-Up And Operation
5. Set-up and Operation Part Number: 605563 Rev. A Basic Set-up Procedure 5. Set-up and Operation Basic Set-up Procedure This Basic Set-Up Procedure is a walk-through from starting up the MagnaTran LEAP robot, cycling wafers, and finally shutting down the robot. Each step is linked to a section for more details and explanations. Robot Mounting The robot must be mounted in a rigid test stand or system application before applying power. Improperly mounted robots can cause excessive vibration and uncontrolled robot movement which may cause death or serious injury. Always mount the robot in a secure test stand or system before applying power. Step Action Confirm that the robot has been properly mounted in the system. Copyright © 2023, Brooks Automation, Inc.
Page 94 Basic Set-up Procedure Part Number: 605563 Rev. A Step Action Confirm connections to the I/O panel are properly installed: An Ethernet cable or serial cable from the Host System Controller (or from a laptop running RSU) is plugged into the HOST IOIOI or Ethernet port. If necessary, use the CDM to select the desired HOST interface for your configuration. An HD-Sub 26 Pin Connector from the completed/satisfied safety controller or a jumper (Brooks PN 248841) is plugged into Safety I/O. A D-Sub 50 Pin Connector from a completed/satisfied Miscellaneous I/O circuit or a jumper (Brooks PN 250343) is plugged into the Misc I/O. A D-Sub Combo-D female Connector (Molex FM3W3S-K121 or equivalent) power connection cable from a 24V or 48V power source is plugged into the Power Connection Port. Number Explanation Host I/O (Serial) Power Connection Host I/O (Ethernet) Miscellaneous I/O Safety I/O For more information on the connections to the I/O panel, please see "Host Communication" on page 102 "Host Communication" on page 102, "Embedded Safety Controller" on page 147, "Misc I/O" on page 76, and "Power Connection" on page 69. Copyright © 2023, Brooks Automation, Inc.
Page 95 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Basic Set-up Procedure Step Action Confirm any additional/optional connections to the I/O panel are properly installed: A Diagnostics Ethernet cable from a laptop into the Diagnostics port. A cable from an auxiliary device into the Auxiliary port. Number Explanation Diagnostics (Ethernet) Auxiliary For more information on the optional connections to the I/O Panel, please see "Power Status" on page 88, "Diagnostics" on page 88, and "Auxiliary" on page 88. Robot Start-Up: Turn on the customer supplied 24V or 48V Power Source to apply power to the robot. For more information, please see "Start-Up" on page 99. Copyright © 2023, Brooks Automation, Inc.
Page 96 107. NOTE: The MagnaTran LEAP has absolute encoders. Find Zero T takes effect immediately, independent of arm type. The armset needs to be positioned at the correct home position prior to the Find Zero T command. This is different than the procedure used for the Magnatran 7 and Magnatran 8 encoders.
Page 97: Theory Of Operation
5. Set-up and Operation Part Number: 605563 Rev. A Theory of Operation Step Action Enter the Home command: HOME ALL The robot moves to the Home position. For more information, please see "Homing the Robot" on page 106. Create Stations using either the Teach Pendant or the Command Line. For more information, please see "Station Setup" on page 108. Cycle wafers. For more information, please see "Cycling and Transferring Wafers" on page 145. Shut down the robot if necessary or desired. For more information, please see "Shut-Down" on page 146. Theory of Operation The MagnaTran LEAP robot provides control for either a single arm or dual semi-independent arms through a single concentric shoulder-shaft mechanism. The shoulder shaft mechanism provides the drive to the left and right arm mechanisms on both the single and dual arms. The single arm, referred to as “Arm A”, and the dual arms, referred to as “Arm A” and “Arm B,” are configured in software for full motion in three axes: Radial (R), Rotational (T), and, Vertical (Z). A station coordinate system provides a convenient shorthand for commanding the robot where to move. Each station is identified by its Theta position, its Radial position (amount of arm extension), and its Z position (vertical distance from Home). By defining the stations in this manner it is only necessary to provide the robot with the station number instead of the complete coordinate set each time a command is issued to the robot. Copyright © 2023, Brooks Automation, Inc.
Page 98 5. Set-up and Operation MagnaTran LEAP Theory of Operation Part Number: 605563 Rev. A Figure 5-1: MagnaTran LEAP Z Axis Parameters Table 5-1: MagnaTran LEAP Z-axis Parameters - Explanation Number Explanation Wafer Transport Plane (WTP) - Bottom surface of wafer Base Transfer Offset (BTO) End Effector Robot Home (Z-axis) Lower Center Line Slot #1 Slot #2 ...
Page 99: Start-Up
H ost serial port or the Host Ethernet port. If the teach pendant has been turned on, the robot will only accept commands from the keypad entries. All c ommunication connections and power connections should be made before power is applied. NOTE: Once power is applied, the robot will enter a “start-up” state, which assumes that wafers are present on the end effectors. The speed of all arm motions are governed by this start-up state until the robot is either commanded to “place” the wafers or instructed that the end effectors are empty using the “LOAD” command. Automatic Movement Whenever power is applied to the product, there is the potential for automatic or unplanned movement of the product or its components which could result in death or personal injury. Know the product's range of motion and stay out of the product's range of motion when the product is energized. Place physical barriers to prohibit others from entering the working range of the product. Follow safe practices for working with energized products per the facility requirements. Do not rely on the system software or process technology to prevent unexpected product motion. Copyright © 2023, Brooks Automation, Inc.
Page 100: Single Point Of Control (Host Interface Or Teach Pendant)
Single Point of Control (Host Interface or Teach Pendant) The MagnaTran LEAP robot may be operated in either of two ways: Directly by the Host Interface or through the use of the hand-held teach pendant. The robot cannot be controlled by two sources at the same time. NOTE: This manual uses the term “teach pendant.” Teach pendants are commonly referred to as Control/Display Module (CDM). When being operated by the Host Interface, the robot will respond to the software commands it receives through the Ethernet port or the serial communications port. When being operated by the teach pendant, the robot responds directly to the commands entered manually on the teach pendant. The Teach pendant takes priority when it is plugged in and turned on. When t he teach pendant is in use it locks out motion communication with the Host Interface; the Host communication can only query the controller. If a command is sent from the Host Interface while the teach pendant is in control the host will receive an unsolicited error message “Teach pendant has control of the robot”. Understanding Command Syntax Commands are shown as MONOSPACE TEXT and should be typed into the user interface at the command prompt. Information (data) can be specified for entry in several ways. Specific Entries Fixed Keywords - CAPITAL LETTERS Text in capital letters defines the exact text required as an input to the system. Copyright © 2023, Brooks Automation, Inc.
Page 101: Optional Entries
Part Number: 605563 Rev. A Understanding Command Syntax Example: RQ VERSION Version is a request command that responds with the version number of the robot software. The system requires “RQ VERSION” to be entered exactly as shown. User Provided Arguments - lowercase italicized text Lowercase italicized text defines the name of the variable or integer required as an input to the system. Enter the value for that variable. Lowercase italicized text is also used in the syntax of command responses to show variables. Example:RQ STN station ALL The Request Station command requests the parameters from a specific station. The argument ALL requests all the parameters associated with that station. Type RQ STN exactly as shown and then enter the appropriate station n umber: RQ STN 1 ALL. Selectable Arguments(Parenthesis) Text in parenthesis “( )” separated by a vertical line “|” defines a set of options, one of which is required as an input to the system. Do not type the parenthesis or the vertical line. Example: RQ STN station ARM (A|B) ALL The Request Station command requests the parameters from a specific station. If the robot has more than one arm/end effector, the user must specify the arm. To request all the parameters for station 1 for arm A, type: RQ STN 1 ARM A ALL.To request all the parameters for station 1 but for arm B, type: RQ STN 1 ARM B ALL. Optional Entries Optional Arguments [Brackets] Text in brackets is optional. A single item may appear in brackets as an optional entry, “[EXAMPLE]”, or a group of options may appear in brackets, “[EX1 | EX2 | EX3]”. If there is more than one option listed in the brackets, only one item should be entered. Example: RQ STN station [[ARM] (A|B)] Copyright © 2023, Brooks Automation, Inc.
Page 102: Sending Commands
Commands should be followed by a carriage return (Enter) to indicate that the command s hould be executed. Commands are completed when either a "_RDY" or "_DONE" is received, depending on the communication mode. “ _RDY” and “_DONE” indicate that a new command can be sent. Host Communication To switch control between the serial and Ethernet connections use the command: RESET TO (SERIAL|ENET) Serial Serial communication between the robot and a Host Controller is accomplished by connecting a 3 wire serial communications cable from port “HOST |O|O| on the robot I/O to a serial I/O port on the Host Controller. The connection to the MagnaTran LEAP robot from the external controller uses R S-232 serial communications. The configuration for the robot’s serial communications protocol for all serial connectors is described in Table 5-2. Table 5-2: RS-232 Protocol Default Port Configuration RS-232 Baud Rate 9600 Data Bits Parity None Stop Bits Copyright © 2023, Brooks Automation, Inc.
Page 103: Basic Communication Settings
NOTE: Customers must use Ethernet cables with ferrite protection when making the connection to the robot. Table 5-3: Ethernet Communications IP (Default Setting) SubNet Port 20.20.249.2 255.255.255.0 1102 The IP address is often customized by the OEM. To request the IP address of the robot, enter the command: RQ ENET IP To change the IP address of the robot, enter the command: CONFIG ENET IP ipaddress MASK mask Examples: CONFIG ENET IP 20.20.249.2 MASK 255.255.255.0 RQ ENET IP IP 20.20.249.2 MASK 255.255.255.0 Basic Communication Settings Communication settings are typically customized for the OEM. Communication settings can be requested by entering the command: RQ COMM ALL Communications can be set to packet mode by entering the command: SET COMM M/B PKT Sequential mode can be achieved by entering the command: SET COMM FLOW SEQ Copyright © 2023, Brooks Automation, Inc.
Page 104: Robot Application Number
Consistent robot accuracy and repeatability Virtually identical throughput on a given tool platform Do Not Use Unauthorized Parts Uncontrolled Motion will likely occur if the robot drive, robot arm(s), and end-effector do not agree with the robot application number. M aximum torque could be momentarily applied. Significant power levels are present that may cause death, serious injury, or equipment damage. Always verify the part number for the robot drive, the robot arms and the end-effectors match the application number loaded into the robot controller. U se the QR document shipped with the robot to verify part numbers and the application number. Do not use unauthorized parts. Confirm that the correct robot application is being used. Always have Brooks Automation update the robot application if new parts are changed or added to the robot. To request the Robot Application being used enter either of the following two commands: RQ ROBOT APPLIC RQ CONFIG The commands return an ID number. Have this ID number ready when contacting Brooks Technical Support. For more information on contacting Brooks Technical Support, please see "Contact Brooks Automation Technical Support". An example ID number is: G001-C001-P001-DS001-W001-L3100M. Copyright © 2023, Brooks Automation, Inc.
Page 105: Load An Application
Compare the Robot Application Number against the Quality Report (QR) document. If Robot Application Number is different than the QR document, load the correct Robot Application Number by entering the following command: CONFIG ROBOT APLIC application_id NOTE: Ensure that hyphens are included when typing in a Robot Application. If the Robot Application ID cannot be loaded, contact Brooks Automation Technical Services. Confirm the arm configuration is correct. If the Request Arms command reports that the arm is off send the command: SET ARMS ON Arms On/Off In some circumstances, the MagnaTran LEAP may be powered on and operated without an armset installed. Use the Set Arms command to configure the robot to arms on or off, and use the Mount command to find, set, request, and store the axes positions for arm installation. Set Arms Format: SET ARMS (ON|OFF) Mount Format: MOUNT FIND MOUNT SET MOUNT [(R|T|Z|W|S|WA|WB) value]] SET MOUNT <ARM> B [(R|T) value]] RQ MOUNT STORE MOUNT Copyright © 2023, Brooks Automation, Inc.
Page 106: Homing The Robot
Part Number: 605563 Rev. A Homing the Robot The robot enables motor power and then enables the servos (starts applying power to the motors to hold the robots current position), releases the Z brake, and then moves into the position of the minimum radius. Sequence for multi-axis homes: R axis (moves toward retract position) T axis (moves to Theta = 0) Z axis (moves to lowest z position) The Home command is most often used immediately after start-up, when recovering from a motion error, and before shut down in order to place the arm in a safe location. All axes can be homed b y entering the command: HOME ALL Individual axes can be homed by entering the Home command followed by the specific axis: HOME R HOME T HOME Z Robot Zero and Home Positions Home The Brooks default home position is the position of the arm that achieves the smallest possible radius for theta motion. The Brooks default home position for the standard drive orients end effector A at 90° counter-clockwise from the interface panel. The Home position can be defined by customer application by setting the zero positions. Copyright © 2023, Brooks Automation, Inc.
Page 107 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Homing the Robot Figure 5-2: Typical Home Positions Figure 5-3: Typical Home Position for Radius arm Zero Position Always Zero the robot if hardware has been changed. Always use a zeroing fixture if the Theta 0 position is being changed. The Home position is set relative to the Zero positions of the Theta axes. The Home position can be defined by customer application by changing the Zero position. For SCARA Armsets, a new Zero Position can be established by moving the robot into the Arm Over Arm position (the Forearm is directly over the Upper Arm) with the End Effector in the desired Copyright © 2023, Brooks Automation, Inc.
Page 108: Operational Modes
SET SYNC ZERO (T1|T2|Z)position RQ SYNC ZERO [ALL| (T1|T2|Z)] STORE SYNC ZERO [ALL| (T1|T2|Z)] NOTE: The MagnaTran LEAP has absolute encoders. Find Zero T takes effect immediately, independent of arm type. The armset needs to be positioned at the correct home position prior to the Find Zero T command. Operational Modes The MagnaTran LEAP Safety System provides three modes of operation: Automatic, Stop, and Manual. The Operational Mode Selector allows the user to change Modes. Teaching the robot and using the Teach Pendant must be done in Manual Mode. For more information, please see "Operational MODE Inputs" on page 160. Station Setup Stations are assigned numbers to represent their location coordinates inside a system. Instead of telling a robot the radial, theta, and z units each time we want it to go to a station, we simply tell a robot to go to Station 1. All station numbers are dependent upon the specific system configuration. Stations are typically numbered in a clockwise direction around the robot. A ssigning a station number for each module connected to the system allows a convenient shorthand for directing all robot motion and ensures that all wafer movement to and from the stations remains consistent. All arms must be separately taught each station. If only Arm A has been taught Station 1, Arm B is incapable of going to Station 1. Each station represents a module connected to the system. A module may be a Vacuum Cassette Elevator, a load lock, an InLigner, a wafer flipper, a customer’s process module, etc. A single module may have more than one station assigned to it. For example, a Dual Stacked Load Lock has two shelves, an upper and a lower. The stations will have the same Theta and Radial coordinates, but different Z coordinates. Any modules with more than one station are numbered on a second clockwise circuit around the robot. In Figure 5-4 below, if the Process Modules all had two shelves, the upper shelves would be on the second clockwise circuit. Process Module A would have Station 3 and Station 7, Process Module B would have Station 4 and Station 8, and Process Module C would have Station and Station 9, and Process Module D would have Station 6 and Station 10. Copyright © 2023, Brooks Automation, Inc.
Page 109: Defining Stations
Figure 5-4: Example of Station Numbering and the Corresponding Modules Table 5-4: Example of Station Numbering and the Corresponding Modules - Explanation Number Explanation Station 1 Station 2 Station 3 Station 4 Station 5 Station 6 Defining Stations Each station is identified by its Theta position (angle from Home), its Radial position (amount of arm extension), and its BTO/Z position (vertical distance from Home) and Lower (the vertical distance Copyright © 2023, Brooks Automation, Inc.
Page 110: Assigning Station Coordinates (Per Arm)
Assigning a Station with Known Coordinates If the exact station coordinates are known, assigning stations can be done using the Command Line. Enter the commands Set Station, Request Station, and Store Station: SET STN station <<(ARM).[(A|B)] [R rVal] [T tVal] [Z zVal] [LOWER lowDist] [Z_WAF zWafVal] [NSLOTS numSlots] [PITCH pitch] RQ STN station <<(ARM)> [(A|B)> ALL STORE STN ALL The following procedure uses a MagnaTran LEAP robot. The stations being created are Station 1 and Station 2. The coordinates of the station are: Station 1 R: 600000 T: 90000 Z: 20000 Lower: 6000 Station 2 R: 600000 T: 10000 Z: 20000 Lower: 6000 Copyright © 2023, Brooks Automation, Inc.
Page 111: Teaching A Station With The Liveman Teach Pendant - Function Keypad
SET STN 1 ARM B R 600000 T 90000 Z 20000 LOWER 6000 Store all of the station parameters by entering S tore Station command: STORE STN ALL Confirm all stations have been stored correctly by entering the Request Station command for each sta- tion: RQ STN 1 ARM ALL Teaching a Station with the Liveman Teach Pendant - Function Keypad The following procedure is an example of teaching a station by jogging the end effector into position using the Liveman Teach Pendant with the function style keypad. The exact R/T/Z coordinates of the station are not known. The procedure uses Arm A of a MagnaTran LEAP. NOTE: The teach pendant screen images in the procedure may differ from the actual teach pendant screen. In order for the robot to move, the Liveman switch must be in the engaged position. The engaged position is the midpoint of the switch, between fully released, and fully pressed. For more information on the Liveman Switch operation, please see "Liveman Teach Pendant 3 Position Design" on page 179. Step Action Confirm that the MagnaTran LEAP robot is powered on. Turn the mode selector to Teach Mode. Connect the Teach Pendant to the Robot: Copyright © 2023, Brooks Automation, Inc.
Page 112 Station Setup Part Number: 605563 Rev. A Step Action Connect the cable from the teach pendant to the robot. Confirm that the E-Stop button on the teach pendant is released. Turn the teach pendant on by selecting On. The teach pendant turns on and the Function screen is displayed. Establish Local Control of the Robot: Fully release the liveman switch before choosing a function. Copyright © 2023, Brooks Automation, Inc.
Page 113 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Select (F1) Home Axis from the Function screen by pressing the F1 button on the keypad. The Get Control screen is displayed. Select YES from the Get Control screen by pressing CR YES on the keypad. The Home Axis screen appears. Home the Robot: Engage the liveman switch. The LIVEMAN status changes from released to engaged on the screen. Copyright © 2023, Brooks Automation, Inc.
Page 114 Part Number: 605563 Rev. A Step Action Select All by pressing the F1 button on the keypad. Keep the liveman switch engaged the entire time the robot is homing or the robot will stop and an error message will appear on the screen. When the robot has finished homing the teach pendant makes a beeping sound. Release the liveman switch. Press QUIT on the keypad to go to the Function screen. Enter the Robot Setup Mode to Teach the Station Location: Copyright © 2023, Brooks Automation, Inc.
Page 115 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Select Setup Robot on the Function screen by pressing the F3 button on the keypad. The Setup screen is displayed. Select (2) Stations on the Setup screen by pressing 2 on the keypad. The Arm Selection screen is displayed. Specify the Arm and Station to be Taught: Select the arm to be taught from the Arm Selection screen. The Setup Arm A screen is displayed. For single arm configuration, this step is skipped. Copyright © 2023, Brooks Automation, Inc.
Page 116 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action From the Setup Arm A screen enter the station number to be taught (these examples will use “Station 1”). Press the CR YES button on the keypad to confirm station number. Press CR. The Teach Selection screen is displayed. Teach the Robot the Station by Jogging the End Effector to the Station Location Using the Motion Control Keys on the Teach Pendant Keypad: Select (2) Learn R, T, BTO from the Setup Station 1 Arm A screen by pressing 2 on the keypad. The Teach Options screen is displayed. Copyright © 2023, Brooks Automation, Inc.
Page 117 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Select (4) Hand Locate from the Learn R, T, BTO Screen by pressing 4 on the keypad. T he Hand Locate screen is displayed. Position the end effector in the station by hand. Skip to Step 23. If t he system is already in vacuum and the robot arm cannot be manipulated by hand, select (2) Jog by pressing 2 on the keypad. The Jog Arm screen is displayed. Engage the liveman switch before selecting the action. Copyright © 2023, Brooks Automation, Inc.
Page 118 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action Move the end effector by using the keypad on the teach pendant. The position display on the Jog Status screen is updated with the end effector’s current position. Number Explanation Wafer Transport Plane (WTP) - Bottom surface of wafer Base Transfer Offset (BTO) End Effector Robot Home (Z-axis) Lower Center Line Slot #1 Slot #2 Release the liveman switch when the end effector is properly located in the station. Press the ESCAPE button on the keypad to go back to the Learn R, T, BTO screen. (Or press the F3 button to automatically jump to the Store Location screen). Copyright © 2023, Brooks Automation, Inc.
Page 119 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Store the Taught Location of the Station: Select (1) Store by pressing the 1 button on the keypad. The Store screen is displayed. Select each axis to be stored by pressing the corresponding button on the keypad, or press CR YES to store all axes. STORED is displayed after the axis once it is stored. NOTE: 2-axis robots will not have the Z-axis displayed. When all axes have been stored, press the QUIT button on the keypad to return to the Function screen. (Alternatively, press the ESCAPE button to return to the previous screens until you return to the Setup Station screen and then skip to Step 32.) Teach the Z-axis Lower Position for the Station: Copyright © 2023, Brooks Automation, Inc.
Page 120 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action Select (F3) Setup Robot by pressing the F3 button on the keypad. The Setup screen is displayed. Select (2) Stations by pressing the 2 button on the keypad. The Arm Selection screen is displayed. From the Arm Selection screen select the arm to be taught (these examples will use Arm A). The Sta- tion Selection screen is displayed. Copyright © 2023, Brooks Automation, Inc.
Page 121 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action From the Station Selection screen enter the station to be taught (these examples will use Station 1). Confirm the station number by pressing CR YES on the keypad. From the Teach Selection screen select (3) Learn Lower by pressing the 3 button on the keypad. The Teach Options screen is displayed. Copyright © 2023, Brooks Automation, Inc.
Page 122 Station Setup Part Number: 605563 Rev. A Step Action From the Teach Options screen select (2) Jog by pressing the 2 button on the keypad. The Jog Z Status screen is displayed. Engage liveman switch before performing action. Copyright © 2023, Brooks Automation, Inc.
Page 123 Move the end effector down to the lower position (where the end effector will fully clear the wafer when it is retracted out) by using the keypad on the teach pendant. The position display on the Jog Status screen is updated with the end effector’s current position in the Z-axis and the distance between the BTO (Z) and the current position. Number Explanation Wafer Transport Plane (WTP) - Bottom surface of wafer Base Transfer Offset (BTO) End Effector Robot Home (Z-axis) Lower Center Line Slot #1 Slot #2 Release the liveman switch. Copyright © 2023, Brooks Automation, Inc.
Page 124 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action When the end effector is properly located in the station, select ESCAPE (or press F3 on the keypad to jump to the Store screen) The Teach Options screen is displayed. Select (1) Store by pressing the 1 button on the keypad. The Store screen is displayed. Select (1) Lower by pressing the 1 button on the keypad (or select <CR> STORE ALL by pressing the CR YES button on the keypad. STORED is displayed once the lower value is stored. Select QUIT. The Function screen is displayed. Verify the Taught Location of the Station: Copyright © 2023, Brooks Automation, Inc.
Page 125 Select (3) Transfer Wafer with Arm A by pressing the 3 button on the keypad. The Transfer Wafer With Arm A screen is displayed. Select (2) Place by pressing the 2 button on the keypad. The Pick with Arm A screen appears. Engage the liveman switch. Copyright © 2023, Brooks Automation, Inc.
Page 126 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action Select the station number for the robot to pick from. Select <CR> Continue by pressing the CR YES button on the keypad. The Place With Arm A Screen appears. Select the station number for the robot to place to. Copyright © 2023, Brooks Automation, Inc.
Page 127 Disconnect the cable from the teach pendant to the robot. Store the teach pendant in a secure location. NOTE: When the teach pendant is not plugged in it must be removed from the area where the robot is located to avoid the attempted use of the E-Stop during an emergency. Copyright © 2023, Brooks Automation, Inc.
Page 128: Teaching A Station With The Liveman Teach Pendant - Coordinate Keypad
Station Setup Part Number: 605563 Rev. A Teaching a Station with the Liveman Teach Pendant - Coordinate Keypad The following procedure is an example of teaching a station by jogging the end effector into position using the Liveman Teach Pendant with Coordinate style keypad. The exact spacial coordinates of the station is not known. The procedure uses Arm A of a MagnaTran LEAP with Dual SCARA. NOTE: The teach pendant screen images in the procedure may differ from the actual teach pendant screen. In order for the robot to move, the Liveman switch must be in the engaged position. The engaged position is the midpoint of the switch, between fully released, and fully pressed. For more information on the Liveman Switch operation, please see "Liveman Teach Pendant 3 Position Design" on page 179. Step Action Confirm that the MagnaTran LEAP robot is powered on. Turn the mode selector to Teach Mode. Connect the Teach Pendant to the Robot: Copyright © 2023, Brooks Automation, Inc.
Page 129 Part Number: 605563 Rev. A Station Setup Step Action Connect the cable from the teach pendant to the robot. Confirm that the E-Stop button on the teach pendant is released. Turn the teach pendant on by selecting On. The teach pendant turns on and the Function screen is displayed. Establish Local Control of the Robot: Fully release the liveman switch before choosing a function. Copyright © 2023, Brooks Automation, Inc.
Page 130 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action Press the Home button on the keypad. The Home Axis screen is displayed. Press the All button o n the keypad. The Get Control screen appears. Press the CR YES button on the keypad. The teach pendant takes control of the robot. Press the Quit button on the keypad to return to the Function screen. Home the Robot: Copyright © 2023, Brooks Automation, Inc.
Page 131 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Press theHome button on the keypad. The Home Axis screen is displayed. Engage the liveman switch. The LIVEMAN status changes from “Released” to “Engaged” on the screen. Press the All button on the keypad. Keep the liveman switch engaged the entire time the robot is homing or the robot will stop and an error message will appear on the screen. Copyright © 2023, Brooks Automation, Inc.
Page 132 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action When the robot has finished homing the teach pendant makes a beeping sound. Release the liveman switch. The image below shows a MagnaTran LEAP robot in the home position inside a vacuum back end. Station Explanation Station 1 Station 2 Station 3 Station 4 Station 5 Station 6 Press Quit on the keypad to go to the Function screen. Enter the Robot Setup Mode to Teach the Station Location: Copyright © 2023, Brooks Automation, Inc.
Page 133 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Press the Setup button on the k eypad. The Setup screen is displayed. Select (2) Stations on the Setup screen by pressing 2 on the keypad. The Arm Selection screen is displayed. Specify the Arm and Station to be Taught: Select the arm to be taught from the Arm Selection screen. The Setup Arm A screen is displayed. For single arm configuration, this step is skipped. (This procedure uses “Arm A”) Copyright © 2023, Brooks Automation, Inc.
Page 134 MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action From the Setup Arm A screen enter the station number to be taught. (This procedure uses “Station 1”) Press the CR Yes button on the keypad to confirm station number. The Teach Selection screen is displayed. Teach the Robot the Station by Jogging the End Effector to the Station Location Using the Motion Control Keys on the Teach Pendant Keypad: Select (2) Learn R, T, BTO from the Setup Station 1 Arm A screen by pressing 2 on the keypad. The Teach Options screen is displayed. Copyright © 2023, Brooks Automation, Inc.
Page 135 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Select (2) Jog from the Learn R, T, BTO Screen by pressing 2 on the keypad. T he Jog Status screen is displayed. Engage the liveman switch. Copyright © 2023, Brooks Automation, Inc.
Page 136 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action Move the end effector by using the jog buttons on the k eypad. The R, T, and Z coordinates of the end effector are displayed on the teach pendant’s screen. Number Explanation Wafer Transport Plane (WTP) - Bottom surface of wafer Base Transfer Offset (BTO) End Effector Robot Home (Z-axis) Lower Center Line Slot #1 Slot #2 End Effector Retracted and Extended at Process Module D (Station 6 and 10) Release the liveman switch when the end effector is properly located in the station. Copyright © 2023, Brooks Automation, Inc.
Page 137 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Press the Escape button on the keypad to go back to the Learn R, T, BTO screen. Store the Taught Location of the Station: Select (1) Store by pressing the 1 button on the keypad. The Store screen is displayed. Select each axis to be stored by pressing R, T, and Z BTO buttons on the keypad. STORED is displayed o nce the axis stored. NOTE: 2-axis robots will not have the BTO displayed. When all axes have been stored, press the Quit button on the keypad to return to the Function screen. Copyright © 2023, Brooks Automation, Inc.
Page 138 5. Set-up and Operation MagnaTran LEAP Station Setup Part Number: 605563 Rev. A Step Action Teach the Z-axis Lower Position for the Station: Press the S etup button on the keypad. The Setup screen is displayed. Select (2) Stations by pressing the 2 button on the keypad. The Arm Selection screen is displayed. From the Arm Selection screen select the arm to be taught (these examples will Arm A). The Station Selection screen is displayed. Copyright © 2023, Brooks Automation, Inc.
Page 139 Brooks Automation 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action From the Station Selection screen enter the station to be taught (these examples use Station 1). Confirm the station number by pressing CR YES on the keypad. From the Teach Selection screen select (3) Learn Lower by pressing the 3 button on the keypad. The Teach Options screen is displayed. Copyright © 2023, Brooks Automation, Inc.
Page 140 Engage the liveman switch. Move the end effector down to the lower position by using the Down button on the keypad. The Z, Lower, and BTO coordinates are displayed on the teach pendant’s screen. Release the liveman switch. When the end effector is properly located in the station, press Escape to go back to the Learn Lower screen. Copyright © 2023, Brooks Automation, Inc.
Page 141 5. Set-up and Operation Part Number: 605563 Rev. A Station Setup Step Action Select (1) Store by pressing the 1 button on the keypad. The Store screen is displayed. Press the Lower b utton on the keypad to store the Lower value. STORED is displayed once the Lower value is stored. Select Quit. The Function screen is displayed. Verify the Taught Location of the Station: Place a test wafer o n Arm A’s end effector. E nsure that the wafer is properly centered on the end effector. Press the Wafer Xfer button on the keypad. The Move Using Which Arm screen is displayed. Copyright © 2023, Brooks Automation, Inc.
Page 142 Action Select (1) Arm A by pressing the 1 button on the keypad. The Transfer Wafer with Arm A screen is dis- played. Select the station number for the robot to pick from. Confirm the station number by pressing CR YES on the keypad. Engage the liveman switch. Copyright © 2023, Brooks Automation, Inc.
Page 143 Disconnect the cable from the teach pendant to the robot. Store the teach pendant in a secure location. NOTE: When the teach pendant is not plugged in it must be removed from the area where the robot is located to avoid the attempted use of the E-Stop during an emergency. Copyright © 2023, Brooks Automation, Inc.
Page 144: Example Of Teaching A Station With The Teach Pendant
Jog and hold down the Extend or Retract key until the arm is extended to the proper distance, then press Store, which would store that value of R as the extended position for Station #3 and return to the previous menu. Suppose the values of the other station parameters are already known. The operator might then press Escape to return to the previous menu, where Assign can be selected and the remaining parameters for Station #3 can be entered directly. Finally, pressing Quit will end the station setting session and return to the main menu. At this point, the operator should issue a Move-Station command to the station just set to check that the values learned are correct. The operator should then use Setup-Station-Assign to make any required minor adjustments, and again check the position using a Move-Station command. Station Parameters Table 5-5: Station Parameters Station Storable Description Parameters The full radial extension in increments of 1 micron (0.001 mm). The rotational position, Theta, in increments of 0.001 degrees over a range of 360°. The Z axis location, in microns, of the Wafer Transfer Plane, which is also the Up pos- ition of the robot arm in Station 1. The distance in microns below the Wafer Transfer Plane at which the Down position of LOWER the robot arm is located. NSLOTS The number of slots at that station. PITCH The uniform distance, in microns, between the slots. Copyright © 2023, Brooks Automation, Inc.
Page 145: Cycling And Transferring Wafers
b. and waits f or the next command to be issued. b. PICK - The robot picks a wafer from a specified station and slot number. PICK station [SLOT slot] <<(ARM)>[(A|B|AB)]> a. the robot simultaneously turns in theta to the station and moves in Z to the Z-Down position. b. extends an end effector radially to the R-Extend position under a wafer. c. moves the Lower distance vertically up in Z to pick up a wafer d. retracts out to the Z-Up, R-Retract position. c. PLACE - The robot places a wafer at a specified station and slot number. PLACE station [SLOT slot] <<(ARM)>[(A|B|AB)]> a. the robot simultaneously turns in theta to the station and moves in Z to the Z-Up position. b. extends an end effector radially to the R-Extend position over the station. c. moves the Lower Distance vertically down in Z to place a wafer. d. retracts out to the Z-Down, R-Retract position. Example Wafer Transfer Cycle INIT: “HOME ALL” “SET LOAD A OFF” “SET LOAD B OFF” CYCLE: Copyright © 2023, Brooks Automation, Inc.
Page 146: Shut-Down
Part Number: 605563 Rev. A “PICK 1 A” “PICK 2 B” “PLACE 4 B” “PLACE 3 A” “PICK 3 A” “PICK 4 B” “PLACE 1 A” “PLACE 2 B” END: HOME ALL SET LOAD A OFF SET LOAD B OFF Shut-Down The MagnaTran LEAP robot does not require special shut-down procedures. Once use of the robot is complete, power can be removed. Ensure that the robot has completed all transfer operations and that there are no wafers left on the end effectors. Send the Home ALL command to the robot before removing power. Send the command SHUTDOWN SUP to the robot. If the host controller is to be shut off, the robot should be shut-down first. SET commands only load parameter values into RAM. These values will be reset to default values if power is removed. If permanent storage of values is desired, STORE values using appropriate commands before shut-down. If necessary, complete the shipping procedure before transporting the MagnaTran LEAP robot. Contact Brooks Technical Support. For more information on contacting Brooks Technical Support, please see "Contact Brooks Automation Technical Support". Copyright © 2023, Brooks Automation, Inc.
Page 147: 6. Embedded Safety Controller
6. Embedded Safety Controller Overview Brooks MagnaTran LEAP robots contain an embedded controller designed to help customers meet the requirements of EN ISO 10218-1:2011, EN ISO 13849-1:2008 Category 3, PL d., and SEMI S2- 0715. It is important to note that additional connections are required before motor power and motion can be enabled. The MagnaTran LEAP robot fully supports the MagnaTran 7 and MagnaTran 8 MISC I/O interface, hereafter known as the “legacy” interface. The legacy MISC I/O interface provides a non-safety rated single channel emergency-stop input. It should be used only where backward compatibility requires only a non-safety rated functional stop. It is incumbent on the robot integrator to determine an approach for safety that provides an appropriate mitigation to the risks identified in their individual assessment. Identifying Safety Risks Operating the MagnaTran LEAP robot without safety guards in place may cause death or serious injury. It is incumbent on the robot integrator to determine an approach for safety that provides an appropriate mitigation to the risks identified in their individual assessment. Do not operate the MagnaTran LEAP Robot without appropriate safety guards. This section: Presents a method to upgrade MagnaTran 7 and MagnaTran 8 robots with MagnaTran LEAP robots. Is intended for use as a guide and will illustrate a variety of potential implementations. The integrator is responsible for implementation of the embedded safety controller. Provides detailed diagrams for implementation of safety related controls. Copyright © 2023, Brooks Automation, Inc.
Page 148: Leap Safety Controller Supported Regulatory Features
Appropriate Safety Hardware Brooks Automation Inc supplies a safety system that is intended to facilitate interface of Emergency Stops and Protective Stops to the robot. I t is the responsibility of the system integrator to select appropriate safety hardware and locate that hardware to ensure human and equipment safety. Safety Overview The design is a redundant safety controller which monitors protective safety switches, ensures circuit integrity, enables motor power, and outputs status. a. Emergency Stop and Protective Stops require redundant dual circuits connected to the robot. b. Emergency Stops and Protective stops are grouped separately. c. Mode Selector (Automatic/Stop/Manual) provides operation according to ISO 10218-1. d. Outputs controller states and indicates with safety status with a single multi-color lamp. e. Provides motor power enable/disable and further monitors motor power for successful application and removal of motor power. f. It provides discreet output bits for ease of interface into a larger system. T he robot safety controller is designed to be implemented within a higher level safety system. NOTE: The Safety I/O Connector implements redundant circuits; however, the interlock loop in the Misc I/O connector are not redundant (Refer to "Miscellaneous I/O Interlocks" on page 157). Copyright © 2023, Brooks Automation, Inc.
Page 149: Hardware Connections For Operation
Hardware Connections for Operation Hardware Connections for Operation There are multiple layers of wiring required to satisfy the safety controller before motion can occur. These are as follows: a. Emergency Stop: Designed to be implemented as a series loop of normally closed switches. Interruption of the loop’s continuity commands a Category 1 stop. b. Protective Stop: Provides a function implemented similarly to emergency stop on an independent circuit. . Protective stops are intended to prevent access to moving components and other hazards. Can be muted in Liveman Teach Pendant mode. c. Mode Selector Operation: Per ISO 10218-1, selects Manual mode, Stop mode, or Automatic mode. d. MISC I/O Legacy Operation: Supports legacy mode (MagnaTran 7 or MagnaTran 8) operation. Useful for single wire tool protection. The first three wiring requirements are found on the MagnaTran LEAP safety I/O connector. The fourth is located on the MISC I/O connector interface. The safety I/O and the MISC I/O connectors contain stops/interlocks. The safety I/O is a full safety dual channel. The MISC I/O is a single wire interlock. Copyright © 2023, Brooks Automation, Inc.
Page 150 MagnaTran LEAP Hardware Connections for Operation Part Number: 605563 Rev. A Figure 6-1: Safety I/O and Miscellaneous I/O Table 6-1: Safety I/O and Miscellaneous I/O - Explanation Number Explanation Safety I/O Miscellaneous I/O Brooks Automation supplies a safety system that facilitates interface of Emergency Stops and Protective Stops. It is the responsibility of the system integrator to select appropriate safety hardware and to locate that hardware so as to ensure human and equipment safety. Copyright © 2023, Brooks Automation, Inc.
Page 151: Magnatran Leap Safety I/O Connector
Brooks Automation 6. Embedded Safety Controller Part Number: 605563 Rev. A MagnaTran LEAP Safety I/O Connector MagnaTran LEAP Safety I/O Connector The following diagram is an overview of the MagnaTran LEAP embedded safety controller. The diagram is presented as an introduction, where the internal robot hardware is shown connected to the safety I/O connector. There are inputs to the connector, outputs from the connector, and limited 24VDC power. For safety, the I/O connector contains two identical circuits (Controller A and Controller B) coupled to hardware-based comparison checks to ensure redundancy. Almost every signal input or output is present on the connector has a connection on the “A” side and an identical connection on the “B” side. This ensures that any single fault will be detected and motion will not be possible when a fault occurs. It also requires the integrator to select redundant switches and wire them appropriately. Figure 6-2: Embedded Safety Controller with Redundant Channels A and B...
Page 152: Safety Connector Pinout
Mode A1 Input Stop A (CAT1) Output Mode A2 Output Mode A2 Input Ground (A) Channel A Power (A) 24V 100mA E-STOP A Input Interlocks OK A Output Teach Mode A Output Interlock A Input Heartbeat_10Hz_A Copyright © 2023, Brooks Automation, Inc.
Page 153: Emergency Stop Safety Switches
Emergency Stop B Mode B1 Output Emergency Stop Safety Switches The safety standards require, without exception, an emergency stop switch conforming to EN418 and equipped with redundant contact blocks. A t a minimum the switch must contain: A mushroom-shaped-head that is red in color. When depressed, the switch must have a latching mechanism that is maintained. Can only be reset with a “twist to release” function. Have a dual set of contacts that are positive opening when the mushroom head is depressed. The background surrounding the switch must be yellow. The switches must be located so that they are easily accessible to operators and support staff. The switches must be connected in series such that any depressed switch will stop the robot. Figure 6-3: Example of an Emergency Stop Switch Copyright © 2023, Brooks Automation, Inc.
Page 154: Please Observe The Following
24V/1mA signals for emergency stop. F or reliable operation, use switches with gold-plated contacts. Figure 6-4: Emergency Stop Switch Wiring As stated by ISO/TR 24119, it is possible for multiple interlocking devices connected serially to mask faults in the interlocking system. The fault masking probability is a function of the number of movable guards and their fre- quency of use. Consult ISO/TR 24119 for guidance when designing an interlocking system connected to the Mag- naTran LEAP robot. Please Observe the Following: Never attach emergency stop (E-Stop) conductors to other voltage sources or capacitive loads. Failure to comply could damage the safety controller interface and/or modify operation of the safety circuits. Depression of any emergency stop switch will launch an E-Stop event, causing arm motion to come to a controlled stop and the removal of power from the robot motors. There are two separate circuits for redundancy: Channel A and Channel B There are two separate 24V supply circuits (A and B). Both are current limited at 100mA and shared among three circuits: emergency stop, protective stops, and mode selectors. Circuit “A” starts with P6 pin 12 (24V-A) and terminates with E-Stop A on P6 pin 21 Circuit “B” starts with P6 pin 16 (24V-B) and terminates with E-Stop B on P6 pin 24 Copyright © 2023, Brooks Automation, Inc.
Page 155: Protective Emergency Switches
Part Number: 605563 Rev. A Protective Emergency Switches To ensure operational integrity, both circuits A and B track each other and report any mismatch as a failure. If a failure is detected, motion is stopped and motor power is removed. As shown in the wiring diagram, multiple emergency stop switches are connected in series. The number and placement of emergency stop switches is defined by the system integrator based on the requirement to safeguard personnel. The above wiring diagram is complete for the emergency stop function. Motion is not possible unless the protective stop switches are installed, the mode selector is installed, and the MISC I/O tool-related interlock is closed. Please see "Protective Emergency Switches" on page 155 for additional wiring requirements for protective stops (interlocks), tool-related interlocks, and for a MODE selector. Protective Emergency Switches Protective Stops are used to protect personnel from entering the robot workspace or any other hazardous location. For reliable operation, use switches with gold-plated contacts. Protective switches once opened should remain open until manually reset. Protective stops differ from emergency stops as they can be muted when in liveman teach pendant mode. Figure 6-5: Protective-Stop Switches Wiring Copyright © 2023, Brooks Automation, Inc.
Page 156: Please Observe The Following
Please observe the following: Never attach protective stop conductors to other voltage sources or capacitive loads. F ailure to comply could damage the controller interface or modify operation of the safety circuits. The actuation of any protective stop switch will launch a category 1 stop event, bring the robot to a controlled stop, and remove power from the robot motors. There are two separate circuits for redundancy: Channel A and Channel B There are separate 24V supply circuits (A and B). B oth are current limited at 100mA and shared among emergency stop, protective stops, and mode selectors. Circuit “A” starts with P6 pin 12 (24V-A) and terminates with Interlock A on P6 pin 22 Circuit “B” starts with P6 pin 16 (24V-B) and terminates with Interlock B on P6 pin 23 To ensure operational integrity, both circuits A and B will track each other Multiple protective stop switches are connected in series. The number and placement of protective stop switches is defined by the system integrator based on the requirement to safeguard personnel. Figure 6-5 wiring diagram is not complete and will not permit motion. I n addition to emergency stop and protective stop, there are additional requirements to complete an interlock on the Miscellaneous I/O connector and to install a MODE selector. See "Miscellaneous I/O Interlocks" on page 157. Copyright © 2023, Brooks Automation, Inc.
Page 157: Redundant Input Fault Detection
Example: A dual-pole E-Stop button has been pressed. O ne of the contacts is stuck in the closed position despite the user pressing the button. O nly one contact opening is sufficient to invoke the safety function. The user is made aware of the failure by the safety status LED blinking red. Continuing to operate with the faulty switch could make the system unsafe if the remaining operational contact were to also fail. The embedded safety controller does not allow robot operation/movement until the E-Stop button has been fixed, and the robot has been power cycled. Miscellaneous I/O Interlocks Miscellaneous I/O switches provide a convenient location to install single-conductor tool switches. By definition this interlock is not redundant and should not be r elied upon for human safety. This interlock was the primary safety interlock on the legacy MagnaTran 7 and MagnaTran 8 controllers. It exists on the MagnaTran LEAP for connection of single wire tool switches. Like the emergency stop and protective stop switches, motion cannot occur until this connection is satisfied. There are three possible applications for the MISC I/O interlock: a. Installation of tool single wire switches for protection against robot motion. Example: To prevent the robot arm from extending into a closed slot valve b. As a straight wired jumper indicating the MISC I/O external cable is installed Example: The MISC I/O cable must be plugged into the robot before motion is possible. c. MagnaTran 7 & 8 retrofit: Re-use of existing MagnaTran 7 & 8 where there resides a higher level safety system. NOTE: The legacy MISC I/O interface provides a non-safety rated single channel emergency-stop input. Use only in legacy applications where backward compatibility and a non-safety rated functional stop are all that is required. Copyright © 2023, Brooks Automation, Inc.
Page 158 6. Embedded Safety Controller MagnaTran LEAP Miscellaneous I/O Interlocks Part Number: 605563 Rev. A Figure 6-6: Miscellaneous I/O Interlock Application #1 Figure 6-7: Miscellaneous I/O Interlock Application #2 Copyright © 2023, Brooks Automation, Inc.
Page 159: Miscellaneous I/O Connector
6. Embedded Safety Controller Part Number: 605563 Rev. A Miscellaneous I/O Interlocks Figure 6-8: Miscellaneous I/O Interlock Application #3 The above wiring diagrams are not complete and will not yet permit motion. In addition to emergency stop, protective stop, and tool switches, there is an additional requirement for a MODE selector and tool interlocks. See "Operational MODE Inputs" on page 160. Miscellaneous I/O Connector Unlike the MagnaTran 7 and MagnaTran 8 Misc I/O interface which defaulted to operation with robot power, the MagnaTran LEAP controller requires the integrator to define the use of either internal robot power or use of an external power supply. W hen operating with robot power, jumpers are required. Figure 6-9: " Internal and External Robot Power" on the next page. Copyright © 2023, Brooks Automation, Inc.
Page 160: Operational Mode Inputs
6. Embedded Safety Controller MagnaTran LEAP Operational MODE Inputs Part Number: 605563 Rev. A Figure 6-9: Internal and External Robot Power Operational MODE Inputs The MagnaTran LEAP robot safety controller provides a mode selection interface for the system integrator. This section defines operation of the MODE inputs and further describes how they can be used in a larger system. MODE inputs can be used to select robot modes: Automatic, stop, or manual. A utomatic mode is the normal mode of operation, where the host controller sequences the robot to pick and place as directed by upper level software. Manual mode is used by trained personnel to teach the robot, debug errors, recover from failure, and more generally, is intended for use during system maintenance. Copyright © 2023, Brooks Automation, Inc.
Page 161 Part Number: 605563 Rev. A Operational MODE Inputs To transition between Manual mode and Automatic mode, the embedded safety controller must sequence through the Stop mode. This ensures the robot is not in motion before entering the next operational mode and complies with the machinery directive. Figure 6-10 and Table 6-3 show the mode selection inputs and truth table. Table 6-3: MODE Selection Inputs Truth Table Channel A Mode Inputs Channel B Mode Inputs Modes Automatic Stop Manual Mute Fault 0 = No Connection 1 = 24VDC A or B respectively Copyright © 2023, Brooks Automation, Inc.
Page 162: Manual Mode
MagnaTran LEAP Manual Mode Part Number: 605563 Rev. A Figure 6-10: MODE Selection Inputs Manual Mode Manual mode is intended for use by trained technical employees as the exposure to hazards is higher. M anual mode is used to teach the robot station positions, recover from faults, and for system maintenance. Trained Personnel Only To gain access to hardware, manual mode may permit the trained technical personnel to remove protective stops. To reduce the possibility of accidental contact with robot arms, the controller sets safe speed mode. S afe speed limits the velocity to 250mm/sec at the robot end effector. Copyright © 2023, Brooks Automation, Inc.
Page 163 Reduced Speed Implementation of reduced speed during teach or manual modes is not safety-rated. Always use a liveman teach pendant when operating inside the robot workspace. Manual mode enables operation of the teach pendant. T he teach pendant will not operate in Stop mode or in Automatic mode. Only operate the teach pendant outside of the robot workspace. A liveman teach pendant is available for purchase which permits operation inside the robot workspace. The MagnaTran LEAP controller permits use of two different categories of pendant styles: l egacy teach pendants and Liveman Teach Pendants. T he legacy teach pendants are not fully recognized by EN/ISO10218 as they do not have the required liveman switch. U se of the legacy pendant is permitted only on retrofitted systems. I t should not be used in new designs. Legacy Teach Pendant Never use the legacy teach pendant in the robot workspace. I t lacks a Live Man switch and does not contain redundant safety circuits. In addition to the MODE inputs described above, the robot safety controller also has MODE outputs bits that are useful in extending functionality of the safety controller. The term “monitor bits” is used Copyright © 2023, Brooks Automation, Inc.
Page 164: Safety System Teach Pendant
Safety System Teach Pendant Part Number: 605563 Rev. A to describe the discreet output bits of the safety controller. These bits are useful for integration of the robot safety controller into a larger system environment. The o utput bits for the safety controller are not monitored. Safety System Teach Pendant The MagnaTran LEAP uses a custom LivemanTeach Pendant that is compliant to the EN/ISO 10218 standard. The pendant has a liveman switch and applies redundant technology to emergency stop and liveman switches. The pendant operates only in the Manual mode and contains a liveman safety switch. The liveman switch meets the safety requirement with redundant switches and a 3-position switch: o ff, gripped, and panic. M otion is permitted only in the gripped (center) position. For more information of the Liveman Teach Pendant, please see the "Embedded Safety Controller" on page 147. Figure 6-11: MagnaTran Liveman Teach Pendants Copyright © 2023, Brooks Automation, Inc.
Page 165: Basic Completed Wiring
Part Number: 605563 Rev. A Basic Completed Wiring Basic Completed Wiring The wiring diagram below (Figure 6-12) represents a completed design for the MagnaTran LEAP Safety System. The number of safety switches can vary, but this design is otherwise complete. The completed design consists of three separate wiring segments: Emergency Stop, Protective Stop, and Mode Selector. These are shown below (Figure 6-12). A fourth segment is the tool interlock. See "Miscellaneous I/O Interlocks" on page 157. Assuming the emergency stops, protective stops and miscellaneous tool interlocks are complete, the safety system will permit the robot motion in either the manual or automatic modes. Figure 6-12: Basic Completed Wiring See Table 6-3 on page 161 for additional information on MODE Inputs. Advanced Safety Connector Implementation Monitor Bits The MagnaTran LEAP safety controller also provides status of the inputs bits described in the previous section. F or most input bits there is a corresponding output bit. T he output bits can be used to indicate status or to extend the safety operation to the larger semiconductor manufacturing tool. The discreet monitor bits require functional definition and further definition of electrical parameters. Copyright © 2023, Brooks Automation, Inc.
Page 166 A high-side switch is designed to connect the output to a positive power source. Logic “1” is a connection to +24V. Logic “0’ is a disconnect from 24V. Some type of load is required to ensure a logic “0” goes to ground. b. Power Budget: t otal 24V current for all the outputs combined should be less than 500mA total. Example: 250mA for Channel A, 250mA for Channel B). NOTE: 24V-A and 24V-B on the safety connector diagrams are exclusively for inputs to the connector. T hey are not used for the monitor bits c. Connection of monitor bits to capacitors may: Expose personnel to hazards, including injury and death. Override the operation of the safety controller. Damage the controller d. (If Used) Outputs require a resistive load to their respective ground. Channel A outputs require a resistor to Ground A Channel B outputs require a resistor to Ground B Typical resistor loads would range from 1K to 24Kohm Copyright © 2023, Brooks Automation, Inc.
Page 167 Brooks Automation 6. Embedded Safety Controller Part Number: 605563 Rev. A Advanced Safety Connector Implementation Figure 6-14: Simplified Diagram of the Safety Controller Observations Safety controllers are redundant and data are processed by hardware with a mode dependent response time that varies from 200ms ± 40ms for manual mode to 2s ± 0.4s in automatic mode. The monitor bits are discreet data output bits to the robot safety connector. Monitor bits are intended for use by the integrator to implement a system-wide safety controller. The integrator should never compromise safety with wiring that connects both A and B controllers inputs together. Copyright © 2023, Brooks Automation, Inc.
Page 168 Mode A1 Output Exception: I f a fault is detected, this bit will not be asserted as a “1” This output is the same as the input bit of the same name on pin 20 Mode A2 Output Exception: I f a fault is detected, this bit will not be asserted as a “1” This output is the same as the input bit of the same name on pin 26 Mode B1 Output Exception: I f a fault is detected, this bit will not be asserted as a “1” This output is the same as the input bit of the same name on pin 25 Mode B1 Output Exception: I f a fault is detected, this bit will not be asserted as a “1” 1 = Teach pendant is in control. Teach Mode B Output 0 = Indicates teach pendant is not active. 0 = Protective Stops (interlocks) are not satisfied. 0→1 = Safety controller “B” senses that external requirements for protective Interlocks OK B Out- stop switches are satisfied (closed). T his is one of many interlocks required before motion can be commanded. 1 = All channel “B” protective switches are satisfied, (closed). A 10Hz clock which indicates channel B of the Safety System is alive and Heartbeat B Output operational. Copyright © 2023, Brooks Automation, Inc.
Page 169: Muting The Safety I/O Connector
(either after 200ms ± 40s in Manual mode or 2s ± 0.4s if in Automatic mode). Muting the Safety I/O Connector There may be instances where it is necessary to operate the robot without an external operating safety environment. W hile Brooks Automation cannot conceive of a single instance where interlocks and Emergency Stops cannot be installed to protect personnel and equipment, a provision has been made for such operation. Emergency And Protective Stops Bypassing the safety system puts everyone in danger. Assess personnel and equipment safety hazards that are created from bypassing interlocks before proceeding. Brooks Automation advises against operation or test without safety interlocks in place. Brooks Automation offers a safety muting connector for use when retrofitting a MagnaTran 7 or MagnaTran 8 robot with a MagnaTran LEAP robot. I f the risk assessment determines the pre- existing safety system is a dequate, it is possible to use a connector assembly to mute the new features of the MagnaTran LEAP safety controller. Please note the MagnaTran 7 and MagnaTran 8 places the interlocks on the robot MISC I/O connector. Copyright © 2023, Brooks Automation, Inc.
Page 170 6. Embedded Safety Controller MagnaTran LEAP Muting the Safety I/O Connector Part Number: 605563 Rev. A Figure 6-15: Safety Controller Mute/Legacy Mode Diagram Figure 6-16: Muting Connector Copyright © 2023, Brooks Automation, Inc.
Page 171: Magnatran 7 Retrofit
Provide Brooks with the part number of the robot targeted for upgrade to MagnaTran LEAP. Confirm if the robot arm and end effectors are to be part of the retrofit program. Provide the logs for all existing WAVE II setups and commands being used and a list of RSU screen shots and commands. Confirm which version of MagnaTran LEAP software i s required for compatibility. Consider upgrading to a Liveman Teach Pendant, otherwise confirm that the existing legacy teach pendant will work with the new MagnaTran LEAP robot. Request a new part number for the replacement robot and appropriate kits. b. Order the replacement robot. c. Receive the upgrade package: u npack, inspect, and use the existing tooling for testing. The electrical adapters may be needed at this time. d. Remove the MagnaTran 7 robot using established procedures: Unplug the MagnaTran 7 from the power supply, host, and MISC I/O connectors. Remove the arms if required. Unbolt the MagnaTran 7 robot and remove from vacuum chamber. e. Install MagnaTran LEAP robot and bolt in place. f. Plug in 248841 muting connector if the safety system was deemed adequate. Copyright © 2023, Brooks Automation, Inc.
Page 172 6. Embedded Safety Controller MagnaTran LEAP MagnaTran 7 Retrofit Part Number: 605563 Rev. A NOTE: Two jumpers are required if the Misc IO interface is internally powered. See "Miscellaneous I/O Interlocks" on page 157. g. Plug in the existing host and MISC I/O and power supply. h. If the arms are not installed, check the emergency stop and associated switch-based interlocks. i. Test robot without arms if that is the existing protocol, otherwise mount arms. j. Mount arms. k. Test and teach MagnaTran LEAP robot using the teach pendant. NOTE: If the teach pendant is updated some modifications to the existing procedure may be required. l. Close up the system and test according to existing protocol. Notify Brooks Automation of any issues with the installation. Copyright © 2023, Brooks Automation, Inc.
Page 173: 7. Teach Pendant
7. Teach Pendant Part Number: 605563 Rev. A Teach Pendant Safety 7. Teach Pendant Four types of teach pendants can be used with the MagnaTran LEAP robot: MagnaTran LEAP Liveman Teach Pendant: Coordinate Style MagnaTran LEAP Liveman Teach Pendant: Function (Soft Key) Style MagnaTran 7 Legacy Teach Pendant MagnaTran 8 Legacy Teach Pendant The MagnaTran LEAP Liveman Teach Pendant comes in two keypad styles: Coordinate and Function. Teach pendants with the coordinate style keypad are typically used with robots that have a single arm with 1 or 2 end effectors. Teach pendants with the function (soft key) style keypad are typically used with robots that have multiple arms and end effectors. Teach Pendant Safety The MagnaTran LEAP uses a custom LivemanTeach Pendant that is compliant to the EN/ISO 10218 standard. The pendant has a liveman switch and applies redundant technology to emergency stop and liveman switches. Whenever possible, manual mode operation should be performed with all persons outside the robot’s workspace. Copyright © 2023, Brooks Automation, Inc.
Page 174 7. Teach Pendant MagnaTran LEAP Teach Pendant Safety Part Number: 605563 Rev. A Figure 7-1: MagnaTran LEAP Liveman Teach Pendant Brooks requests placing cables for the E-stop and/or liveman in conduit or flexible metal cabling. The Liveman Teach Pendant is designed to provide increased safety. I t is intended for use with the MagnaTran LEAP robot and controller. The Liveman Teach Pendant will only operate when the operational mode selector is set to Manual mode. The liveman pendant provides a redundant E-stop switch and a 3-position switch: o ff/fully released, gripped, and panic/fully pressed. M otion is permitted only in the gripped (center) position. The MagnaTran LEAP controller also supports legacy MagnaTran 7 and MagnaTran 8 teach pendants. T he legacy teach pendant does not provide the same level of safety as the Liveman Teach Pendant. N ever use a legacy teach pendant while operating in the robot workspace.
Page 175 Brooks Automation 7. Teach Pendant Part Number: 605563 Rev. A Teach Pendant Safety Legacy Teach Pendants Legacy Teach Pendants do not comply with the ISO 10218-1 standard because they do not have a liveman switch. Brooks recommends using liveman teach pendants when working on any robot or system. Never enter the robot workspace when operating the robot with a legacy teach pendant. Figure 7-2: Legacy Teach Pendant Legacy teach pendants are not intended for use within the robot workspace. N ever enter the robot workspace as you are not protected by a liveman switch. Copyright © 2023, Brooks Automation, Inc.
Page 176 7. Teach Pendant MagnaTran LEAP Teach Pendant Safety Part Number: 605563 Rev. A Figure 7-3: Legacy and Liveman Teach Pendants Connections Table 7-1: Legacy and Liveman Teach Pendants Connections - Explanation Number Explanation Legacy Teach Pendants connect to the Robot I/O Panel with an RJ45 Connector The MagnaTran LEAP Teach Pendant connects to the robot using a high density D-Sub 15 pin connection. Copyright © 2023, Brooks Automation, Inc.
Page 177: Teach Pendant Emergency Stop And Liveman Test
Teach Pendant Emergency Stop and Liveman Test Always test the emergency stop and the liveman switch before using the teach pendant, before robot first use, and before the robot is placed into production. Step Action Issue a move command via the teach pendant and while the robot is still in motion, press the emergency stop button. If the robot stops, clear the error and continue use. Issue a move command via the teach pendant and while the robot is still in motion, fully release the live- man switch. If the robot stops, clear the error and continue use. Issue a move command via the teach pendant and while the robot is still in motion, fully press the liveman switch. If the robot stops, clear the error and continue use. If the robot does not stop during any of these tests, DO NOT USE the teach pendant. Contact Brooks for troubleshooting. Teach Pendant Operation Teach pendants are designed to be a single-point of control terminal to assist personnel in commanding the robot. Teach pendants o perate the robot at a slow teaching speed and have an Emergency stop button for safety. The MagnaTran LEAP Liveman Teach Pendant has been designed to be easy to use and self explanatory. All major functions available through the robot’s control software are available through the teach pendant. Liveman Teach Pendants only operate when correctly mated to the LIVEMAN PENDANT DB15 connection on the robot I/O Panel. Non-liveman teach pendants only operate when correctly mated to the PENDANT RJ 45 connection on the robot I/O panel. For safety reasons, non-liveman teach pendants and Liveman Teach Pendants connections cannot be switched. Copyright © 2023, Brooks Automation, Inc.
Page 178 7. Teach Pendant MagnaTran LEAP Teach Pendant Operation Part Number: 605563 Rev. A Figure 7-4: Legacy Teach Pendant with Emergency Stop Figure 7-5: Liveman Teach Pendant with Emergency Stop Copyright © 2023, Brooks Automation, Inc.
Page 179: Liveman Teach Pendant 3 Position Design
Liveman Teach Pendant 3 Position Design Liveman Teach Pendant 3 Position Design The 3-position design of the Liveman Teach Pendant provides a closed circuit when pressed to the mid-point. A fully released or fully pressed switch opens the switch circuit, which will cause the robot to stop operation. Figure 7-6: Liveman 3 Position Design Table 7-2: Liveman 3 Position Design - Explanation Number Explanation Fully Released / Unengaged Engaged Fully Pressed / Panic Copyright © 2023, Brooks Automation, Inc.
Page 180: Teach Pendant Emergency Stop
The e mergency stop button will halt any robot motion currently in progress and release servo control of the robot arms. An error number and description will be displayed on the teach pendant screen (if the teach pendant is turned on) and be sent to the host controller. All arm position data and arm referencing will remain. Electrical Shock The emergency stop button removes power to the motors. It does not remove DC power to the robot. Electrical hazards still exist when the emergency stop circuit is active, which could cause death or s erious injury . All power to the MagnaTran LEAP must be disconnected per the facilities’ lockout/tagout procedure before servicing. If local procedures are not available, follow the procedure for Lockout/Tagout in OSHA Standard 29CFR 1910.147. The teach pendant does not need to be in control of the robot for the emergency stop button to work; nor does it have to be on. The teach pendant needs only to be plugged into the robot to allow access to the emergency stop function. While the emergency stop circuit is active, the encoders remain powered. This allows the arms to be physically moved but remain referenced. The current arm position will be updated on the teach Copyright © 2023, Brooks Automation, Inc.
Page 181: Releasing The Emergency Stop Button
Function/Softkey Teach Pendant Key Descriptions pendant. When control of the robot is regained, the robot is able to recover from its physical position without having to home the robot. Releasing the Emergency Stop Button To release the emergency stop button: press down and turn the button clockwise. Function/Softkey Teach Pendant Key Descriptions Table 7-3: Function/Softkey Teach Pendant Key Descriptions Description On-Off key turns the teach pendant on or off. Quit key returns the teach pendant display to main menu. Stop key brings all robot actions to controlled stop. Escape key moves teach pendant display back one menu. Backspace key allows entered characters to be deleted. Enters “-” Enters “.” Enters “0” Copyright © 2023, Brooks Automation, Inc.
Page 182 Function/Softkey Teach Pendant Key Part Number: 605563 Rev. A Descriptions Description Enters “1” Enters “2” Enters “3” Moves the screen selection down (dependent on screen). Jogs down (dependent on screen). Enters “4” Moves the screen selection to the left (dependent on screen). Enters “5” Moves the screen selection to the right (dependent on screen). Enters “6” Moves the screen selection up (dependent on screen). Jogs up (dependent on screen). Enters “7” Jogs the arm clockwise. Enters “8” Moves the screen selection to the right (dependent on screen). Enters “9”. Jogs the arm counter clockwise. through Selects an option presented on the screen. Selects an option presented on the screen. Jogs the wrist counter-clockwise. Copyright © 2023, Brooks Automation, Inc.
Page 183: Coordinate Teach Pendant Key Descriptions
Coordinate Teach Pendant Key Descriptions Description Selects an option presented on the screen. Moves the screen selection (dependent on screen). Jogs up, (dependent on screen). Selects an option presented on the screen. Jogs the wrist c lockwise. Selects an option presented on the screen. Moves the screen selection left (dependent on screen). Selects an option presented on the screen. Moves the screen selection right (dependent on screen). Indicates numerical entry is complete. Responds “Yes” to prompts. Coordinate Teach Pendant Key Descriptions Table 7-4: Coordinate Teach Pendant Key Descriptions Description On-Off key turns the teach pendant on or off. Quit key returns teach pendant display to main menu. Stop key brings all robot actions to controlled stop. Escape key moves teach pendant display back one menu. Backspace key allows entered characters to be deleted. Copyright © 2023, Brooks Automation, Inc.
Page 184 7. Teach Pendant MagnaTran LEAP Coordinate Teach Pendant Key Descrip- Part Number: 605563 Rev. A tions Description Selects the Home menu. Selects the Move menu. Selects the Wafer Transfer menu. Selects the Setup menu. Selects the Information menu. Selects the Self Test menu. Specifies the R-axis for data entry or query. Specifies the T-axis for data entry or query. Specifies the Z-axis for data entry or query, Specifies BTO for data entry or query. Lower key is used to specify the lower value for a specific station for data entry or query. Specify the slot number for a specific station for data entry or query. Specify the pitch between slots for a specific station for data entry or query. Copyright © 2023, Brooks Automation, Inc.
Page 185 7. Teach Pendant Part Number: 605563 Rev. A Coordinate Teach Pendant Key Descriptions Description Specify all values for data entry or query. Enters “1” Enters “2” Jogs down Enters “3” Responds “No” to prompts. Enters “4” Retracts arm in jog mode. Enters “5” Enters “6” Extends arm in jog mode. Enters “7” Jogs counter clockwise Enters “8” Jogs up. Enters “9” Jogs clockwise Enters “0” Sets value to a negative number Enters ”.” Copyright © 2023, Brooks Automation, Inc.
Page 186 7. Teach Pendant MagnaTran LEAP Coordinate Teach Pendant Key Descrip- Part Number: 605563 Rev. A tions Description Used to indicate numerical entry is complete. Responds “Yes” to prompts. Copyright © 2023, Brooks Automation, Inc.
Page 187: 8. Preventive Maintenance
Read the Safety Chapter Failure to review the Safety chapter and follow the safety warnings can result in death or serious injury. All personnel involved with the operation or maintenance of this product must read and understand the information in this safety chapter. Follow all applicable safety codes of the facility as well as national and international safety codes. Know the facility safety procedures, safety equipment, and contact information. Read and understand each procedure before performing it. Read the Safety Chapter The MagnaTran LEAP robot presents mechanical and electrical hazards which, if not prop- erly handled, may result in death or serious injury. Only trained and qualified personnel should work on the MagnaTran LEAP. Do not perform maintenance procedures on the MagnaTran LEAP robot unless you have read and understand the information in the Safety Chapter, starting on Page 10. Preventive Maintenance Schedule The MagnaTran LEAP robot may be cleaned and the system may be checked for errors or faults when the equipment is shut down for maintenance. Before beginning any cleaning or maintenance procedure, read and understand the Safety Chapter, starting on Page 10. Copyright © 2023, Brooks Automation, Inc.
Page 188 8. Preventive Maintenance MagnaTran LEAP Preventive Maintenance Schedule Part Number: 605563 Rev. A NOTE: The preventive maintenance schedule is based on the robot operating in a certified clean and dry environment. The user should adjust the maintenance duties to account for any deviations from this environment. Brooks Automation strongly recommends that a record be kept to document conformance to any required procedures. Failure to perform required procedures may void the warranty. Table 8-1: Preventive Maintenance Schedule Interval Action Daily Ensure the unit is functioning as expected Clean the robot, armset, and end effectors. As Required Test the emergency stop and safety circuit. Inspect end effectors. 6-Months Clean residue as required. Inspect all connections. Copyright © 2023, Brooks Automation, Inc.
Page 189: Robot Cleaning
Isopropyl alcohol properly diluted with Deionized water Tools and Materials Deionized (DI) water Cleanroom wipes Chemical Hazard The robot may be used in equipment that exposes users to chemical hazards which, if not properly handled, may result in death or serious injury. Read and understand the safety information for the equipment where the robot is used. Know the location of the S afety Data Sheets (SDS) in your facility. (also known as Material Safety Data Sheets - MSDS) Become familiar with the proper handling of material in the environment of the robot. Lockout / Tagout Working with energized equipment may cause sudden movement or electrical shock and may result in death or serious injury. All energy must be removed from the equipment per the facility’s Lockout/Tagout procedure before servicing. If local procedures are not available, follow the procedure for Lockout/Tagout in OSHA Standard 29CFR 1910.147. Copyright © 2023, Brooks Automation, Inc.
Page 190: Cleaning Procedure
8. Preventive Maintenance MagnaTran LEAP Robot Cleaning Part Number: 605563 Rev. A Cleaning Procedure Fire Hazard Flammable cleaning products such as Isopropyl alcohol may cause fire if used on hot parts which may lead to death or personal injury. Allow the product to completely cool before using flammable cleaning products for maintenance procedures. Wipes used for cleaning with liquids must be moistened only. Do no saturate. Squeezing the wipe must not cause liquid to drip. Do no allow isopropyl alcohol to contact perflouroelastomer pads, bearing, seals, etc. Do not allow water to contact bearings, seals, etc. Step Action Remove any hazardous material from the robot's surfaces following the facilities procedures for those materials. Clean all exposed surfaces using cleanroom wipes moistened with isopropyl alcohol. Once all contaminates are removed, use cleanroom wipes moistened with DI water to remove any residue. Once all residue is removed, use dry cleanroom wipes to dry all surfaces. Copyright © 2023, Brooks Automation, Inc.
Page 191: End Effector Cleaning And Inspection
NOTE: Cleaning procedures depend on the type of pads. Table 8-3: Robot Cleaning Electrical Category and Materials Item Description Electrical Category Type 1 - Equipment is fully de-energized. Elastomeric pads: Use de-ionized water Stainless Steel pads: Use Isopropyl alcohol Tools and Materials Quartz pads: Use Isopropyl alcohol Lint-free, cleanroom wipes Cleanroom gloves The MagnaTran LEAP may be used in an environment where hazardous materials are present, and surfaces may be contaminated by those materials. Refer to the facility’s Safety Data Sheets for those materials to determine proper handling. Wipes used for cleaning with liquids must be moistened only. Do not saturate. Squeezing the wipe must not cause liquid to drip. Do not let alcohol contact Elastomeric pads, bearings, seals, etc. Do not let water contact bearings, seals, etc. Copyright © 2023, Brooks Automation, Inc.
Page 192: Cleaning Elastomeric Pads Procedure
End Effector Cleaning and Inspection Part Number: 605563 Rev. A Cleaning Elastomeric Pads Procedure Step Action Dampen a cleanroom wipe with de-ionized water. Clean the entire end effector, paying special attention to the Elastomeric pads. Do not apply excessive pressure or force to the pads while cleaning. Excessive force may dislodge pads or bend the end effector. Once all residue is removed, use dry cleanroom wipes to dry all surfaces. Cleaning Stainless Steel or Quartz Pads Procedure Step Action Dampen a cleanroom wipe with Isopropyl alcohol. Clean the entire end effector, paying special attention to the pads. Do not apply excessive pressure or force to the pads while cleaning. Excessive force may bend the end effector. Once all residue is removed, use dry cleanroom wipes to dry all surfaces. Copyright © 2023, Brooks Automation, Inc.
Page 193: End Effector Pad Inspection
Part Number: 605563 Rev. A End Effector Pad Inspection End Effector Pad Inspection Over time, repeated wafer transfers wears away the surface of the Elastomeric wafer support pads, and decreases its effectiveness. It is necessary to inspect these pads to prevent wafer slippage and loss of repeatability. The MagnaTran LEAP may be used in an environment where hazardous materials are present, and surfaces may be contaminated by those materials. Refer to the facility’s Safety Data Sheets for those materials to determine proper handling. Wipes used for cleaning with liquids must be moistened only. Do not saturate. Squeezing the wipe must not cause liquid to drip. Do not let alcohol contact Elastomeric pads, bearings, seals, etc. Do not let water contact bearings, seals, etc. Pad Inspection Procedure Step Action Extend the end effector into the load lock or process module. Visually inspect the surface of the pads for excessive wear or damage. If any of the pads show signs of wear or damage, replace the pads. See"Pad Replacement" on page 194. Copyright © 2023, Brooks Automation, Inc.
Page 194: Pad Replacement
NOTE: Do not allow alcohol to come in contact with Elastomeric type pads. Alcohol will reduce the coefficient of friction and cause wafer slippage. Clean the pads with DI water only. See "End Effector Cleaning and Inspection" on page 191. Press the small end of the new pad, by hand, into holes in the end effector. Copyright © 2023, Brooks Automation, Inc.
Page 195: Troubleshooting
9. Troubleshooting Part Number: 605563 Rev. A Troubleshooting Overview 9. Troubleshooting The MagnaTran LEAP robot does not have a traditional controller. It is the responsibility of the robot integrator to develop and provide software troubleshooting, as well as diagnostics and error messages. Troubleshooting Overview Depending on the error type, three troubleshooting options are described for the MagnaTran LEAP robot: a. Troubleshooting specific error codes: failures that generate an error code identified by a number. For example, the robot generates an error such as, “ERR 10009: Hard tracking error, T1 motor”. These types of failures are listed in the following section: "Error Codes" on page 197. b. Troubleshooting commands: The MagnaTran LEAP has three commands that provide additional information from the robot that is useful in troubleshooting. These commands are: RQ HISTORY - this command displays the errors and non-action commands executed by the robot. SET ERRLVL 5 - this command sets the robot’s error level response to a range of 1 through 5, where 1 yields the least number of error messages and 5 yields the maximum number of error messages. The Brooks default error level is 2. For maximum wafer throughput, the error level must be set at “2” after troubleshooting by using the command SET ERRLVL 2 and STORE ERRLVL. SET COMM SEQ or SET COMM BKG+ - The MagnaTran LEAP robot must either be in the “sequential” or “background+” communication flow setting to generate error code messages. The MagnaTran LEAP robot will not generate error code messages when operating in the “background” communication flow setting. The robot must be returned to the original communication flow setting after troubleshooting. Copyright © 2023, Brooks Automation, Inc.
Page 196 Z Motion Armset has jerky motion. Armset oscillates. Armset overshoots taught position. "Z-Axis Motion" on page 204 Robot is unable to move in the Z direction Robot hits Z hard stops during operation in Z. Robot hits Z hard stops during homing in Z. Find Phase ”Command Failed” error occurs. "Find Phase" on page 206 T1/T2 shafts do not move together while pinging in theta direction. Homing Z-axis "Home Errors" on page 200 ”Command Failed” error occurs. Copyright © 2023, Brooks Automation, Inc.
Page 197: Appendix A: Error Codes
Brooks Automation 9. Troubleshooting Part Number: 605563 Rev. A Appendix A: Error Codes Appendix A: Error Codes Refer to the MagnaTran LEAP Software Manual (605651) for a list of error codes. Communication Troubleshooting communication requires that the MagnaTran LEAP has power and is turned on. Symptoms Possible Cause Corrective Action Verify settings on computer 9600, N, 8, 1. Verify PC communication port. Incorrect settings Verify robot com settings are proper using RQ COMM ALL. Verify RS-232 on Personality PC board is set properly. Teach pendant inter- Verify teach pendant is off. No response using computer ference Verify on pendant that robot is not set to Ethernet. ...
Page 198: Power
Fuses to motors con- "Contact Brooks Automation Technical Support" for further up and LED is on. stantly blow troubleshooting. No power to motors. Check input power to MagnaTran LEAP Bad DC power Resolve input power if required. MagnaTran LEAP boots Check for error code. up. Error being generated Follow error code corrective actions. Cannot move any axis. Copyright © 2023, Brooks Automation, Inc.
Page 199: Motion Errors
Confirm proper robot arm, end effector, and or location application. Incorrect application code Enter proper application. Do EEPROM. RESET. Confirm proper robot application. Improper application for robot, Enter proper application. arm, and end effector Do EEPROM. RESET. Request sync phase values from robot and compare to QR document. Motion error at any speed and at any location Incorrect sync phase values Perform FIND SYNC PHASE and compare to QR document. Re-teach sync phase values as required. Remove / reinstall armset. Incorrect arm installation Check torque on mounting screws. Confirm current application code. Check against system requirements. Incorrect application code If incorrect, reload application. Wrong location If OK, check taught values. or Check values for stations. hits something Incorrect taught station values Reload backup file. Re-teach stations. Copyright © 2023, Brooks Automation, Inc.
Page 200: Home Errors
E-Stop circuit is open. Check E-Stop circuitry to confirm that robot has power. Confirm proper robot application. Improper or corrupted applic- Enter proper application. ation data Do EEPROM. RESET. Check sync phase values. Find new sync phase values. Bad calibration Compare new values to original values and to stored val- All axes will not home ues. Enter new values if they are in range and are different from stored values. Check arm mounting. Robot arm mounted incor- rectly Remove and remount arm. Check arm and robot drive for smooth motion. Arm bearings defective Replace arm or robot drive if movement problems are found. E-Stop circuit is open. Check E-Stop circuitry to confirm that robot has power. Re-teach station and via locations. Improper teaching of stations Replace robot drive if no problems found. Specific axis does not home Confirm proper robot arm, end effector, and application. Improper application Enter proper application. Do EEPROM. RESET. Copyright © 2023, Brooks Automation, Inc.
Page 201: Vibration
Enter proper application. data Do EEPROM. RESET. Check sync phase values. Find new sync phase values. Bad calibration Compare new values to original values and stored values. Constant vibration Enter new values if they are in range and are dif- ferent from stored values. Check arm mounting. Robot arm mounted incorrectly Remove and remount arm. Check robot arm and drive for smooth motion. Arm bearings defective Replace arm or robot drive if movement prob- lems are found. Re-teach station and via locations. Improper teaching of stations Replace robot drive if no problems found. Confirm proper robot arm, end effector, and Vibration at specific station application. or location Improper application Enter proper application. Do EEPROM. RESET. Confirm proper robot application. Improper application for robot, arm, Vibration at high speed Enter proper application ID. and end effector EEPROM. RESET. Copyright © 2023, Brooks Automation, Inc.
Page 202: Radial Motion
Bad calibration Compare new values to original values and to stored values. Enter new values if they are in range and are different from stored values. Verify application number that the robot is using is correct. Application number incorrect Re-enter application number. Physical obstruction Correct any physical obstruction. Repeatability issue Perform Position Repeatability Test. System alignment improper Verify system alignment. Arm has jerky motion Level end effector. End effector hitting Arm oscillates Reteach stations and vias. Arm overshoots destination Verify arm is installed properly. Arm sways side to side during Arm installed incorrectly Reinstall arm. motion Confirm proper fastener torque. Tighten arm mounting bolts to recom- Arm bolts incorrect torque mended torque. Manually extend, retract, move arm. Elbow or shoulder bearings fail- Feel for rough travel. If arm motion is rough, replace arm. Copyright © 2023, Brooks Automation, Inc.
Page 203: Theta Motion
Measure power supply voltage during a com- manded move. Vibration or hard track during R or Voltage issue T motion at pan speed If voltage drops more than 10%, power is faulty. Theta Motion Troubleshooting motion requires that the system is fully booted up. Table 9-7: Theta Motion Symptom Possible Cause Corrective Action Confirm proper robot application. Improper or corrupted applic- Enter proper application ation data Do EEPROM. RESET Check SYNC PHASE VALUES Constant Find new Synch Phase values Bad calibration Compare new values to original values and to stored values. Enter new values if they are in range and are different from stored values. Copyright © 2023, Brooks Automation, Inc.
Page 204: Z-Axis Motion
Arm has jerky motion Level end effector. End effector hitting Arm oscillates Reteach stations and vias. Arm overshoots destination Verify arm is installed properly. Arm sways side to side during Arm installed incorrectly Reinstall arm. motion Confirm proper fastener torque. Tighten arm mounting bolts to recom- Arm bolts incorrect torque mended torque. Manually extend, retract, move arm. Elbow or shoulder bearings fail- Feel for rough travel. If arm motion is rough, replace arm. Robot does not move in theta dir- T1, T2, or optional T3, or T4 not Check sync phase and encoder values. ection operating properly Measure power supply voltage during a com- manded move. Vibration or hard track during R or Voltage issue T motion at pan speed If voltage drops more than 10%, power is faulty. Z-Axis Motion Troubleshooting motion requires that the system is fully booted up. Copyright © 2023, Brooks Automation, Inc.
Page 205 Verify application number that the robot is using is correct. Application number incorrect Re-enter application number. Physical obstruction Correct any physical obstruction. Repeatability issue Perform position repeatability test. Arm has jerky motion System alignment improper Verify system alignment Arm oscillates Level end effector. End effector hitting Arm overshoots destination Reteach stations and vias. Arm sways side to side during Perform Z binding test using the trace com- Z Axis is binding motion mand. Z Brake is binding Perform Z brake binding test Verify arm is installed properly. Arm improperly installed Reinstall arm. Confirm proper fastener torque. Verify application number that the robot is Robot does not move in Z-axis using is correct. Application number incorrect direction Re-enter application number. Copyright © 2023, Brooks Automation, Inc.
Page 206: Find Phase
Vibration or hard track during Z Power supply issue motion at pan speed If duty cycles is saturated 97% or more, replace power supply. Find Phase Table 9-9: Find Phase Symptom Possible Cause Corrective Action Check position of lower Z-axis micro switch Lower the Z-axis microswitch Command failed error during Z-axis motion. appears engaged Check continuity of lower Z-axis micro switch Check for obstructions. Correct obstructions. Obstruction to theta axis Check for smooth motion of T1 T1 and T2 shafts do not move together while and T2 shafts pinging the Theta axis. Check MagnaTran LEAP out- put. T1 or T2 drive issues Replace MagnaTran LEAP. Copyright © 2023, Brooks Automation, Inc.
Page 207: 10. Recommended Spare Parts
Brooks Automation 10. Recommended Spare Parts Part Number: 605563 Rev. A 10. Recommended Spare Parts The entire MagnaTran LEAP robot is a Field Replaceable Unit (FRU). There are very few recommended spare parts for that reason. It is recommended to keep spare end effectors and spare end effector pads. The specific amounts of spare parts should be determined by the robot owner. Copyright © 2023, Brooks Automation, Inc.
Page 208: Magnatran Leap Controller And Software
11. MagnaTran LEAP Controller and Soft- MagnaTran LEAP ware Part Number: 605563 Rev. A 11. MagnaTran LEAP Controller and Software The r obot is controlled by the MagnaTran LEAP Controller. For more information on this controller and software, please contact your Brooks representative. Please see "Contact Brooks Automation Technical Support". Copyright © 2023, Brooks Automation, Inc.
Page 210: Contact Brooks Automation Technical Support
f. Contact Brooks Automation Technical Support at these numbers: Location Contact Number Website +1-800-447-5007 (Toll Free) North America http://www.brooks.com/ +1-978-262-2900 (Local) +49 800 000 9347 (Toll Free Germany) Europe http://www.brooks.com/ +49 364 176 9999 6 (Has Toll) +81 120-255-390 (Toll Free) Japan http://jp.brooks.com/ +81 45-330-9005 (Local) China +86 400 627 6657 http://cn.brooks.com/ +886 080-003-5556 (Toll Free) Taiwan http://tw.brooks.com/ +886 3-5525258 (Local) Korea 1800-5116 (Toll Free) http://kr.brooks.com/ +65 1-800-4-276657 (Toll Free) Singapore http://www.brooks.com/ +65 6309 0701 (Local) For additional contact information, please send an E-mail to techsupport@brooks.com. Copyright © 2023, Brooks Automation, Inc.
Page 211: Appendix B: Functional Safety
5 Hz ≤ ƒ ≤ 8.4 Hz: 3 .5 mm peak amplitude 8.4 Hz ≤ ƒ ≤ 150 Hz : 1 .0g peak acceleration The LEAP controller is not qualified against shock. The LEAP robot shall not be exposed to shock as it will adversely affect performance. An external supply that follows the requirements set forth in the manual is critical to avoid failures; the system is not intended for connection to distributed DC networks. T he system has been evaluated as a DC system; mitigation against AC EMC phenomena shall be provided by the integrator. The legacy pendant and the legacy inputs in the MISC I/O connector are not rated for functional safety. Category Structure: 3 Hardware Fault Tolerance: 1 The controller can stand one single fault and still operate safely. Diagnostic test interval: 1 second Periodic proof test requirements: None Failure Rate The LEAP safety controller has been analyzed for failure rate. The mean time to dangerous failure and diagnostic coverage of the safety controller are: MTTFd 100 years Copyright © 2023, Brooks Automation, Inc.
Page 212 The robot integrator is responsible for the incorporation of these o utputs into their system-wide safety system (HSC). The SAFETY CONTROLLER provides inputs on J6 for connection to a mode select s witch. The SAFETY CONTROLLER senses t he position of the integrator- provided mode selector (AUTO/STOP/MANUAL) and u ses dedicated None mode outputs on J6 to echo the setting received by the SAFETY CONTROLLER. The HSC must validate that t he switch setting matches the setting returned by the SAFETY CONTROLLER. When the SAFETY CONTROLLER detects the system mode selector is set to AUTO, t he SAFETY CONTROLLER mode outputs echo the mode selector input setting. The SAFETY CONTROLLER validates all integrator-supplied E -Stop and None interlock inputs. Once s atisfied, the SAFETY CONTROLLER allows power to flow to the robot motors. Copyright © 2023, Brooks Automation, Inc.
Page 213 The SAFETY CONTROLLER c hecks redundant “gripped” Liveman switch inputs states on J18 before power i s allowed to flow to the robot motors. The SAFETY CONTROLLER provides redundant, monitored motor power disconnect. On Channel-A (CHA) The S AFETY CONTROLLER removes power to the motors using a solid state s witch. R emoval of power is monitored, a nd any None mismatch results in a fault. On Channel-B (CHB) the SAFETY CONTROLLER removes all PWM signals to t he electronically commutated motors. I t monitors and verifies all H-bridge driver circuits are off, and any m ismatch results in a fault. No robot m otion is possible as power is removed from the motors. For more information, refer to "Embedded Safety Controller" on page 147. Copyright © 2023, Brooks Automation, Inc.
Page 214: Appendix C: Safety Function Tests
the robot or teach stations. Home the robot. While the robot is moving, press the liveman switch to The robot should come to a position 3 as shown in Figure 7-6 on page 179. stop within 200ms. Home the robot. While the robot is moving, release the liveman switch to The robot should come to a position 1 as shown in Figure 7-6 on page 179. stop within 200ms. Robot should come to a stop within 200ms (if in teach Home the robot or command it to move between two stations; while mov- mode) or in less than 2s (if in ing open switch A. automatic mode). It should not be possible to re-enable motion. Robot should come to a stop within 200ms (if in teach Power-cycle the robot. Home the robot or command it to move between mode) or in less than 2s (if in two stations; while moving open switch B. automatic mode). It should not be possible to re-enable motion. Robot should come to a stop within 200ms (if in teach Power-cycle the robot. Home the robot or command it to move between mode) or in less than 2s (if in two stations; while moving open switch C. automatic mode). It should not be possible to re-enable motion. Copyright © 2023, Brooks Automation, Inc.
Page 215 Brooks Automation Appendices Part Number: 605563 Rev. A Appendix C: Safety Function Tests Action Outcome Robot should come to a stop within 200ms (if in teach Power-cycle the robot. Home the robot or command it to move between mode) or in less than 2s (if in two stations; while moving open switch D. automatic mode). It should not be possible to re-enable motion. Robot speed cannot be set Power-cycle the robot. With the pendant connected and in manual mode above 250mm/s while in attempt to set CDM speed higher than 250mm/s. manual mode. Copyright © 2023, Brooks Automation, Inc.
Page 216: Appendix D: Safety Data Sheets
Appendices MagnaTran LEAP Appendix D: Safety Data Sheets Part Number: 605563 Rev. A Appendix D: Safety Data Sheets Safety Data Sheets are presented below. Ensure that there is a copy in each workplace for all hazardous materials involved in the operation and maintenance of the robot. If needed, print out the following SDSs and make them available in the workplace. NOTE: Safety Data Sheets were previously known as Material Safety Data Sheets, usually abbreviated to MSDS. Copyright © 2023, Brooks Automation, Inc.
Page 217: Nyetorr_5200_Sds
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Page 223 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 This Safety Data Sheet adheres to the standards and regulatory requirements of the Republic of Ireland and may not meet the regulatory requirements of other countries.
Page 224 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 The hazards of this product are associated mainly with its processing. The thermal decomposition vapours of fluorinated polymers may cause polymer fume fever with flu-like symptoms in humans, especially when smoking contaminated tobacco.
Page 225 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 Skin contact may provoke the following symptoms:, Irritation, Redness 4.3. Indication of any immediate medical attention and special treatment needed Treatment Treat symptomatically.
Page 226 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 Advice on safe handling Avoid breathing vapors from overheated material. Do not store or consume food, drink or tobacco in areas where they may become contaminated with this material.
Page 227 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 Colour : white Odour : none : neutral Melting point/range : 320 °...
Page 228 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 • Polytetrafluoroethylene The thermal decomposition vapours of fluorinated plastics may cause polymer fume fever with flu-like symptoms in humans, especially when smoking contaminated tobacco.
Page 229 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 • Polytetrafluoroethylene human Classification: Not a skin sensitizer. Result: Does not cause skin sensitisation. Patch test on human volunteers did not demonstrate sensitisation properties.
Page 230 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 Irritation, Discomfort, Blurred vision SECTION 12: Ecological information 12.1. Toxicity Toxicity to fish •...
Page 231 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 Product : Dispose of as hazardous waste in compliance with local and national regulations.
Page 232 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 SECTION 16: Other information Other information professional use Abbreviations and acronyms European Agreement concerning the International Carriage of Dangerous Goods by Road Acute toxicity estimate...
Page 233 SAFETY DATA SHEET according to Regulation (EC) No 1907/2006 and 453/2010 ™ ® DuPont Krytox PFPE/PTFE Greases (GPL 20(X) Series) Version 4.0 (replaces: Version 3.2) Revision Date 11.07.2014 Ref. 150000001170 The information provided in this Safety Data Sheet is correct to the best of our knowledge, information and belief at the date of its publication.
Page 234: Braycote_803_Sds
Material Safety Data Sheet 1. Chemical product and company identification Product name BRAYCOTE 803 MSDS # 25019-AM Code 25019-AM Product use Lubricant Manufacturer Castrol Industrial North America, Inc. 150 W. Warrenville Road Naperville, IL 60563 Supplier SPI-Chem™ SPI Supplies Division Structure Probe, Inc. P.O.
Page 235 4. First aid measures Eye contact In case of contact, immediately flush eyes with plenty of water for at least 15 minutes. Get medical attention if irritation develops. Skin contact Immediately wash exposed skin with soap and water. Remove contaminated clothing and shoes. Wash clothing before reuse.
Page 236 8. Exposure controls/personal protection Occupational exposure limits This product does not have any assigned OELs. No special ventilation requirements. Good general ventilation should be sufficient to control Control Measures airborne levels. If this product contains ingredients with exposure limits, use process enclosures, local exhaust ventilation, or other engineering controls to keep worker exposure below any recommended or statutory limits.
Page 237 No component of this product at levels greater than 0.1% is classified by established regulatory Mutagenic criteria as a mutagen. effects Reproductive No component of this product at levels greater than 0.1% is classified by established regulatory criteria as a reproductive toxin. effects No component of this product at levels greater than 0.1% is classified by established regulatory Teratogenic...
Page 238 16. Other information Label requirements CAUTION! MAY CAUSE EYE IRRITATION. MAY CAUSE SKIN IRRITATION. MAY CAUSE RESPIRATORY TRACT IRRITATION. Health HMIS® Rating : National Fire Fire hazard Flammability Protection Health Instability Physical Association Specific hazard Hazard (U.S.A.) Personal protection Other special A NFPA health hazard rating of "3"...

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