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Instruction Manual
CVM201 Super Bee
Installation
3
3.1
Mechanical Installation
Mount
CVM with
Mount the CVM201 as close as possible to the pressure
this axis
you want to measure. Long or restricted, small
horizontal
diameter tubing will create a pressure difference
between your process chamber and the gauge. This
may cause a delay in response to pressure changes.
Mounting the CVM201 too close to a gas source inlet
may also cause measurement and control instability.
Do not mount the CVM201 near a source of heating or
cooling, such as heaters or air conditioning vents.
Mount the CVM201 with its main (long) axis horizontal (see diagram at right). The CVM201 is calibrated in this
orientation. Pressure reading errors may occur above 1 Torr if the unit is not mounted horizontally. Below 1
Torr, mounting position has little to no effect.
Mount the CVM201 with port down, if possible, to help minimize the effect of any particles or condensation
from collecting in the gauge.
Do not mount the CVM201 where it will be subjected to excessive vibration. Vibrations may cause unstable
readings, measurement errors and possible mechanical stress to components in the CVM201.
Flanges/ Fittings - follow the manufacturer's recommendations and note the following:
- NPT fittings: When connecting the device using a NPT fitting, apply a thread sealant compound or wrap the
threaded portion of the tubing with one-and-a-half to two wraps of pipe thread seal tape such as PTFE (Teflon®)
tape and hand tighten the gauge into the gauge port. Do not use a wrench or other tool which may damage the
gauge.
InstruTech, Inc.
Page 9
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