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Instruction Manual
CVM201 Super Bee
Coatings: Some gases can condense on sensor surfaces, forming a solid coating, which changes the rate at
which heat is removed from the sensor. Some of these coatings may be removed by cleaning the gauge.
Particles: Particles generated by the process may enter the gauge during the process cycle or during the venting
cycle. The result is interference with heat removal from the sensor. In this case, cleaning may be able to
remove particles from the gauge. However, particulate contamination is the most difficult to remove as
particles can become stubbornly trapped inside the gauge. In some processes, solid particles are created during
the process throughout the chamber including inside the gauge. Particles tend to form on cooler surfaces such
as in a gauge at room temperature. You may slow down the build-up of particles in the gauge by keeping the
gauge warm (within specified limits) during the process cycle.
Particles in the process chamber may be swept into the gauge during the vent cycle. The CVM201 has a screen
built into the gauge port to help keep the largest particles out of the gauge. In very dirty applications, or where
particles are small enough to get through the screen, an additional filter installed on the inlet may help prolong
the gauge life.
In some vacuum processes, desorbed and sputtered materials from the process may enter vacuum components
connected to the process vacuum chamber by line-of-sight transport, especially under high vacuum conditions,
i.e., in the molecular flow regime. To prevent materials that may be transported via line-of-sight momentum
from entering your vacuum gauge or other components, it is advisable to install some form of apparatus that
o
will block the line-of-sight. In many cases a simple 90
elbow may help prevent or reduce the transport of
particles from entering your vacuum gauge.
In the event of gauge contamination please contact the factory to return the gauge for possible cleaning if the
gauge has not been exposed to hazardous materials.
Module and sensor replacement
9.5
The CVM201 module is factory calibrated for the specific sensor (gauge tube) installed in it. If the sensor inside
the module fails for any reason, the CVM201 module should be replaced or returned to the factory for
replacement of the sensor and recalibration of the complete CVM201 module. If you prefer to have your sensor
replaced and the module recalibrated, contact the factory for return authorization, as described below.
InstruTech, Inc.
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