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Instruction Manual
PCM301 Busy Bee
environment, could cause bodily injury and possible damage to equipment. Never expose the vacuum
measuring device internal volume to pressure above local atmospheric pressure when using hazardous gases.
2.5 Gas Dependency
WARNING! The measurement value is gas dependent below 7.6 Torr. The pressure reading applies to dry
air, O
, CO and N
. For other gases, the measurements have to be corrected. Refer to section 5 titled "Using
2
2
the gauge with different gases" for more details.
3 Installation
3.1 Mechanical Installation
WARNING! Fragile components. The ceramic sensor may be damaged by impacts. Do not drop the
product and prevent shocks and impacts.
CAUTION! Dirt and damage can impair the function of the vacuum component. Take appropriate
measures to ensure cleanliness and prevent damage. Touching the product or parts with bare hands increases
the desorption rate. Always use clean, lint free gloves as well as clean tools when working with this product.
Mount the gauge so that no vibrations occur. Should gauge adjustments become necessary in the future, be
sure to install it so that the adjustment button can be accessed with a pin.
Mount the PCM301 as close as possible to the pressure you want to measure. Long or restricted, small diameter
tubing will create a pressure difference between your process chamber and the gauge. This may cause a delay
in response to pressure changes. Mounting the PCM301 too close to a gas source inlet may also cause
measurement and control instability.
The PCM301 can be mounted in any orientation, however, if possible, mount the gauge with port down to help
minimize the effect of any particles or condensation collecting in the gauge.
For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber. When using
KF flanges, metal clamps must be used to ensure proper grounding. Do not attempt to modify your flange in
order to use non-metallic-type flange clamps. Be aware that some vacuum fittings such as NPT connections
installed using Teflon tape may not allow for metal-to-metal contact between the vacuum gauge and the
vacuum chamber. If such is the case, use a 12 gauge or larger copper wire to connect the vacuum gauge to a
ground lug on your vacuum chamber.
-7
Use all metal vacuum fittings with metal seals when operating pressures are expected to be below 1.00 x 10
-7
-5
Torr (1.33 x 10
mbar, 1.33 x 10
Pa).
InstruTech
Page 10
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