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Instruction Manual
7.1
Non-Linear Analog Output - Torr / mTorr
Non-Linear analog output for selected gases - Engineering units in Torr/mTorr
True Total
N
2
Pressure
0
mTorr
0.3751
0.1
mTorr
0.3759
0.2
mTorr
0.3768
0.5
mTorr
0.3795
1
mTorr
0.3840
2
mTorr
0.3927
5
mTorr
0.4174
10
mTorr
0.4555
20
mTorr
0.5226
50
mTorr
0.6819
100
mTorr
0.8780
200
mTorr
1.1552
500
mTorr
1.6833
1
Torr
2.2168
2
Torr
2.8418
5
Torr
3.6753
10
Torr
4.2056
20
Torr
4.5766
50
Torr
4.8464
100
Torr
4.9449
200
Torr
5.0190
300
Torr
5.1111
400
Torr
5.2236
500
Torr
5.3294
600
Torr
5.4194
700
Torr
5.4949
760
Torr
5.5340
800
Torr
5.5581
900
Torr
5.6141
1000
Torr
5.6593
Note: By design, these values are identical to the outputs from Brooks Automation, Inc. / Granville-Phillips®
Convectron® gauges, Mini-Convectron® modules and controllers so that equivalent units can be interchanged
without affecting your process system or software.
An analog output of less than 0.01 volts to near 0 volt indicates a damaged or faulty sensor.
InstruTech, Inc.
O
Ar
He
2
0.3750
0.3750
0.3750
0.3757
0.3755
0.3760
0.3760
0.3765
0.3770
0.3780
0.3790
0.3800
0.3810
0.3820
0.3840
0.3870
0.3890
0.3920
0.4030
0.4090
0.4170
0.4290
0.4410
0.4530
0.4770
0.4970
0.5210
0.5950
0.6370
0.6790
0.7450
0.8140
0.8680
0.9620
1.0680
1.1410
1.3860
1.5890
1.6640
1.8180
2.1640
2.1950
2.3330
2.9390
2.8140
3.0280
4.3870
3.6720
3.4800
5.7740
4.2250
3.8010
7.3140
4.6200
4.0370
4.9160
4.1220
5.0260
4.1920
5.1060
4.2830
5.2000
4.3860
5.3150
4.4770
5.4220
4.5500
5.5150
4.6110
5.5920
4.6430
5.6330
4.6630
5.6580
4.7060
5.7130
4.7450
5.7620
Values listed under each gas type are in volts.
CO
Kr
Freon12
2
0.3750
0.3750
0.3750
0.3760
0.3755
0.3760
0.3770
0.3768
0.3780
0.3810
0.3772
0.3820
0.3850
0.3790
0.3880
0.3950
0.3840
0.4010
0.4120
0.3950
0.4370
0.4620
0.4150
0.4880
0.5360
0.4510
0.5810
0.7050
0.5440
0.7780
0.9000
0.6680
1.0090
1.1790
0.8470
1.3150
1.6680
1.1940
1.8260
2.1720
1.5360
2.2570
2.6950
1.9210
2.6470
3.3160
2.4290
3.0290
3.6700
2.7340
3.2040
3.9030
2.9660
3.3080
4.0710
3.0750
3.4300
4.1540
3.1340
3.6180
4.3360
3.2690
3.8270
4.5020
3.3840
3.9380
4.6210
3.4660
4.0160
4.7080
3.5260
4.0760
4.7750
3.5730
4.1240
4.8300
3.6130
4.1660
4.8600
3.6320
4.1900
4.8770
3.6450
4.2030
4.9190
3.6740
4.2370
4.9550
3.6900
4.2700
CVM201 Super Bee
D
Freon22
Ne
2
0.3750
0.3750
0.3750
0.3760
0.3760
0.3757
0.3780
0.3770
0.3763
0.3810
0.3810
0.3782
0.3880
0.3860
0.3810
0.4000
0.3960
0.3880
0.4320
0.4250
0.4050
0.4800
0.4700
0.4330
0.5660
0.5490
0.4840
0.7640
0.7270
0.6080
0.9900
0.9440
0.7680
1.2910
1.2650
1.0020
1.8050
1.9140
1.4690
2.2470
2.6030
1.9760
2.6660
3.5080
2.6310
3.0900
5.0590
3.7150
3.3300
6.3610
4.6050
3.4140
5.4060
3.5090
6.1590
3.6600
6.4830
3.8830
6.6610
4.0050
6.7260
4.0880
6.7670
4.1510
6.8030
4.2030
6.8430
4.2470
6.8900
4.2710
6.9200
4.2860
6.9420
4.3210
7.0000
4.3540
7.0560
CH
4
0.3750
0.3766
0.3780
0.3825
0.3896
0.4030
0.4380
0.4920
0.5840
0.7960
1.0530
1.3920
2.0140
2.6320
3.3130
4.6990
5.1720
5.5830
5.7200
5.8600
6.1030
6.3420
6.5190
6.6420
Page 19
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