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Instruction Manual
3 Installation
3.1 Mechanical Installation
CAUTION! Dirt and damage can impair the function of the vacuum component. Take appropriate
measures to ensure cleanliness and prevent damage. Touching the product or parts with bare hands increases
the desorption rate. Always use clean, lint free gloves as well as clean tools when working with this product.
Mount the CCM502 as close as possible to the pressure you want to measure. Long or restricted, small diameter
tubing will create a pressure difference between your process chamber and the gauge. This may cause a delay
in response to pressure changes. Mounting the CCM502 too close to a gas source inlet may also cause
measurement and control instability.
The CCM502 can be mounted in any orientation, however, if possible, mount the gauge with port down to help
minimize the effect of any particles or condensation collecting in the gauge.
For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber. When using
KF flanges, metal clamps must be used to ensure proper grounding. Do not attempt to modify your flange in
order to use non-metallic-type flange clamps.
Use all metal vacuum fittings with metal seals when operating pressures are expected to be below
-7
1.00 x 10
Torr (1.33 x 10
For potentially contaminating applications and to protect the measurement system against contamination,
installation of the optional seal with centering ring and filter is recommended. See
part numbers.
Remove the protective lid and install the product to the vacuum system following manufacturer's
recommendations for different flanges and fittings. Keep the protective lid for future maintenance.
InstruTech
-7
-5
mbar, 1.33 x 10
Pa).
Seal with centering ring
Clamp
or
Protective lid
Seal with centering
ring and filter
CCM502 Hornet
section 1.4
for accessories
Page 10
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