Inficon Quantus LP100 Operating Manual
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Inficon Quantus LP100 Operating Manual

Inficon Quantus LP100 Operating Manual

Gas analysis system
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Quantus
LP100
™
Gas Analysis System
IPN 074-510-P1B

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Summary of Contents for Inficon Quantus LP100

  • Page 1 Quantus LP100 ™ Gas Analysis System IPN 074-510-P1B...
  • Page 3 Quantus LP100 ™ Gas Analysis System IPN 074-510-P1B ® www.inficon.com re achus@inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. ©2011 INFICON...
  • Page 4 All other brand and product names are trademarks or registered trademarks of their respective companies. Disclaimer The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
  • Page 7 Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer. This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.

  • Page 9: Table Of Contents

    1.10 Quantus LP100 Specifications ........1-9...
  • Page 10 Installation Installation of the Quantus LP100 ....... . 3-1 3.1.1 LP100 Installation Requirements .

  • Page 11: Introduction

    Quantus LP100 Operating Manual Chapter 1 Introduction 1.1 System Overview INFICON Quantus LP100 gas analysis system operates using the principal of ™ optical emission spectroscopy. A gas sample or gas-flow of interest is presented to a proprietary Microplasma Sensor Cell inside the sensor that excites the gas, causing it to produce a plasma.

  • Page 12: Before You Begin

    Quantus LP100 Operating Manual 1.2.2 Before You Begin REVIEW the installation process thoroughly before beginning work. CONFIRM that the sensor materials of construction and surfaces are compatible with the exposed process environment. CONFIRM that the sensor is installed in an approved manner.

  • Page 13: Terminology

    This unit is powered by a 24 V (dc) 2.5 A supply. Microplasma Sensor Cell (MSC): The MSC contains the microplasma light source. The MSC is field-replaceable. Software: Quantus is operated by INFICON FabGuard analysis software running ® on an INFICON FabGuard Controller or Windows -based PC.

  • Page 14: How To Contact Customer Support

    Customer Support Representative. You must obtain a Return Material Authorization (RMA) number from the Customer Support Representative. If you deliver a package to INFICON without an RMA number, your package will be held and you will be contacted. This will result in delays in servicing your instrument.

  • Page 15: Purpose Of The Quantus Lp100 Gas Analysis System

    Quantus LP100 Operating Manual 1.5 Purpose of the Quantus LP100 Gas Analysis System The Quantus LP100 detects changes in gas characteristics such as composition, pressure or concentration. Detecting such changes allows the user to detect leaks, contaminants and process endpoints in critical process environments.

  • Page 16: Lp100 Sensor Overview

    Quantus LP100 Operating Manual 1.8.2 LP100 Sensor Overview The LP100 (Figure 1-1) is designed for applications that operate between 0.01 and 1 Torr. Exact pressure range is application dependent. Range of 0.01 to 1 Torr is tested with argon. The LP100 is designed and manufactured to withstand exposure to corrosive and aggressive gases such as Chlorine, Fluorine and other chemicals.

  • Page 17: Lp100 Microplasma Sensor Cell

    1.8.3 LP100 Microplasma Sensor Cell Figure 1-2 LP100 Microplasma Sensor Cell The Quantus LP100 creates a plasma by coupling energy into the gas utilizing a patented planar antenna in the Microplasma Sensor Cell. The antenna is protected by a sapphire window so it is not exposed to the process chamber or gas sample.

  • Page 18: Aux I/O Connector

    Quantus LP100 Operating Manual 1.9 AUX I/O Connector 1.9.1 Auxiliary I/O Specifications 1.9.1.1 Mechanical 15-pin D-sub male connector used on Electronic Control Module. 15-pin D-sub female mating connector required. 1.9.1.2 Electrical 1.9.1.2.1 Digital I/O Signals I/O 0 to I/O 3 can be set or read by the Quantus. These four (input or output) bi-directional auto-sensing level shifters are TTL-compatible I/O connections rated for 0 to 5V (dc) with 10 k-ohm pull-up impedance.

  • Page 19: Quantus Lp100 Specifications

    1.10 Quantus LP100 Specifications Table 1-3 details the specifications for the Quantus LP100 gas analysis system. As a result of the continuous product improvement and quality assurance programs in place at INFICON, these specifications are subject to change without notice or obligation.
  • Page 20 Quantus LP100 Operating Manual Table 1-3 Quantus LP100 Specifications (continued) Parameters LP100 Serviceability Sensor Cell is field replaceable Facilities Operating Temp Range 0-50°C (non-condensing, Sensor Cell 80°C) Power Requirements 24 V (dc) @ 2.5 A (AC/DC converter provided) Power Consumption <...

  • Page 21: Introduction To Optical Emission Spectroscopy

    Theory 2.1 Introduction to Optical Emission Spectroscopy The INFICON Quantus gas analysis system utilizes optical emission spectroscopy to monitor gases present in a chamber, delivery line or pump line. This chapter will discuss the theory behind optical emission spectroscopy and then briefly discuss how Quantus utilizes these phenomena for detecting leaks, contaminants, process changes, or process endpoints.
  • Page 22 Quantus LP100 Operating Manual Figure 2-1 Hydrogen Energy Levels Paschem Series Balmer Series Lyman Series Figure 2-2 Balmer Series The energy of the photon emitted by the gas can be determined by the following equations: h  -- - ...

  • Page 23: Complex Optical Emission Spectra

    Quantus LP100 Operating Manual Since the energy is quantized, only a single wavelength of light is emitted for each relaxation. This produces a line in the optical spectrum. Since each element or molecule has a specific set of energy levels, each element or molecule has a unique line spectrum.

  • Page 24: Molecular Combinations Of Atoms

    These photons are then divided according to their wavelength and detected by a CCD in the LP100 system. This allows INFICON FabGuard analysis software to monitor, as a function of time, the intensity versus wavelength optical emission specta generated in the Microplasma Sensor Cell.

  • Page 25: Installation

    Quantus LP100 Operating Manual Chapter 3 Installation 3.1 Installation of the Quantus LP100 The LP100 installs quickly and easily. Listed below are the typical steps required to install the sensor. Please note that your installation requirements may differ. 3.1.1 LP100 Installation Requirements Power .

  • Page 26: Installation Comments

    Quantus LP100 Operating Manual 3.1.2 Installation Comments WARNING The gas sensors utilize radio-frequency power supplies, high-voltage power supplies, and in their intended use may generate light emission from the ultra-violet to the infrared. High-voltage, radio-frequency, and ultra-violet exposure may be hazardous. It is the responsibility of the user to only operate the sensor when it is installed appropriately.

  • Page 27: Cleaning

    The LP100 requires a Class 1, Limited Power Supply DC power supply of 24 V (dc), 2.5 A minimum rating. INFICON offers a 100-240 V (ac) to 24 V (dc) power converter which meets all power supply requirements. Should the user supply power independently, the user must ensure that the supply has at least the minimum capability and is short-circuit and over-current protected.

  • Page 28: Lp100 Installation

    Quantus LP100 Operating Manual 3.2 LP100 Installation Before you start:  CONFIRM that use of a microplasma will not adversely affect the gases, processes or equipment being monitored.  FOLLOW all safety precautions.  REVIEW the installation process thoroughly before beginning work.
  • Page 29 Quantus LP100 Operating Manual Follow the steps shown below to install the Quantus LP100 gas analysis system. Remove KF-25 clamp, protective cap and centering ring from Sensor Cell flange. Attach Sensor Cell flange to mating flange on system using KF-25 centering ring and clamp.
  • Page 30 Quantus LP100 Operating Manual Figure 3-2 LP100 Connections 24 V (dc) Power Input 24V RF ERR 5V ON SS AUX I/O Connection 3 - 6...

  • Page 31: Operation

    Chapter 4 Operation 4.1 Introduction Operation of Quantus is controlled by INFICON FabGuard analysis software. Refer to FabGuard user documentation and INFICON applications support for more information regarding sensor setup and operation. The LP100 is designed to ignite its plasma over a pressure range from 10 mTorr to 1 Torr.

  • Page 32: Spread-Spectrum (Ss)

    Quantus LP100 Operating Manual Table 4-1 Summary of Sensor Status LEDs (continued) LED Label Description Microplasma On - Light is being detected from the microplasma. Hardware Error Spread Spectrum (Dithering) - Frequency modulation, as described in section 4.3, is active.

  • Page 33: Accessories And Spare Parts

    5.2.2 Isolation Valve Kit Isolation Valve Kit 962-020-G1 is available as an accessory for Quantus. This kit includes an INFICON VAP025-X pneumatic right-angle valve and a control cable to interface the valve directly to the Quantus Electronic Control Module. 5 - 1...
  • Page 34 Quantus LP100 Operating Manual This page is intentionally blank. 5 - 2...

  • Page 35: Maintenance

    Follow the steps shown below to replace the MSC of the Quantus LP100. Remove the LP100 from the chamber or system it is installed upon by removing the KF-25 clamp and centering ring. See Figure 6-1.
  • Page 36 Quantus LP100 Operating Manual Remove the sensor cover plate by removing the eight screws as shown in Figure 6-2 Figure 6-3. Keep the cover plate and screws for re-assembly at the end of this procedure. Figure 6-2 LP100 with Cover Plate Installed...
  • Page 37 Quantus LP100 Operating Manual Remove the outer gasket by gently stretching it around the MSC flange. Figure 6-3 Figure 6-4. Figure 6-4 Outer Gasket Removed Remove the MSC from the LP100 housing by sliding the MSC forward from the housing. Do not touch the inside of the MSC. See Figure 6-5.
  • Page 38 Quantus LP100 Operating Manual Remove the inner gasket. Refer to Figure 6-5 Figure 6-6. Figure 6-6 Inner Gasket Removed Install new inner gasket from replacement MSC kit. If a new inner gasket is not available, then re-use the original inner gasket. To install the inner gasket, place...
  • Page 39 Quantus LP100 Operating Manual Carefully install the new MSC by slowly sliding it down into the housing. Be careful to do this slowly, without too much force, to ensure the connectors are not damaged and are properly mated. See Figure 6-8.
  • Page 40 Figure 6-10 LP100 with Cover Plate Installed Be sure to update the MSC frequency at the Sensor Configuration Screen for this sensor using FabGuard software. Refer to FabGuard user documentation or contact INFICON applications support for more information regarding sensor configuration. 6 - 6...

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