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MPG400
Operating manual
Inficon MPG400 Operating Manual
Inverted magnetron pirani gauge
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Contents
Table of Contents
Troubleshooting
Bookmarks
Table of Contents
Product Identification
Validity
Intended Use
Functional Principle
Table of Contents
1 Safety
Symbols Used
Personnel Qualifications
General Safety Instructions
Liability and Warranty
2 Technical Data
3 Installation
Vacuum Connection
Removing the Magnet Unit (Only for Gauges with CF Flanges)
Electrical Connection
Use with an INFICON Controller
Use with Another Control Device
4 Operation
Measurement Principle, Measuring Behavior
5 Deinstallation
6 Maintenance
Adjusting the Gauge
Cleaning MPG400, Replacing Parts
Disassembling MPG400
Cleaning MPG400
Reassembling MPG400
Cleaning MPG401, Replacing Parts
Disassembling MPG401
Cleaning MPG401
Reassembling MPG401
Troubleshooting
7 Accessories
8 Spare Parts
9 Returning the Product
10 Disposal
Appendix
A: Measuring Signal Vs. Pressure
B: Gas Type Dependence
ETL Certification
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Quick Links
1
Technical Data
2
Electrical Connection
3
Measurement Principle, Measuring Behavior
4
Adjusting the Gauge
5
Cleaning Mpg400, Replacing Parts
6
Troubleshooting
7
A: Measuring Signal Vs. Pressure
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Operating Manual
Inverted Magnetron Pirani Gauge
MPG400
MPG401
tina48e1-c
(2017-10)
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