Related Manuals for Inficon MPG400
Summary of Contents for Inficon MPG400
- Page 1 Operating Manual Inverted Magnetron Pirani Gauge MPG400 MPG401 tina48e1-c (2017-10)
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Page 2: Product Identification
The Inverted Magnetron Pirani Gauges must not be used for measuring flammable or combustible gases which react in air. The gauges can be used with an INFICON Controller of the VGC40x / VGC50x series or with another evaluation unit. Functional Principle Over the whole measuring range, the measuring signal is output as a logarithm of the pressure. -
Page 3: Table Of Contents
3 Installation 3.1 Vacuum Connection 3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges) 3.2 Electrical Connection 3.2.1 Use With an INFICON Controller 3.2.2 Use With Another Control Device 4 Operation 4.1 Measurement Principle, Measuring Behavior 5 Deinstallation 6 Maintenance 6.1 Adjusting the Gauge... -
Page 4: Safety
Maintain a safety distance of ≥10 cm between the magnet and the heart pacemaker or prevent the influence of strong magnetic fields by antimagnetic shielding. Communicate the safety instructions to all other users. tina48e1-c (2017-10) MPG400-401.om... -
Page 5: Liability And Warranty
1.4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end- user or third parties • disregard the information in this document • use the product in a non-conforming manner • make any kind of interventions (modifications, alterations etc.) on the product •... -
Page 6: Technical Data
The minimum voltage of the power supply must be increased proportionally to the length of the sensor cable. Voltage at the supply unit with 16.0 … 30.0 V (dc) (ripple ≤ 1 V maximum line length INFICON controllers fulfill these requirements. tina48e1-c (2017-10) MPG400-401.om... - Page 7 Materials exposed to vacuum Vacuum connection stainless steel Measuring chamber stainless steel Feedthrough ceramic Internal seals MPG400 FPM 75 MPG401 Ag, Cu, soft solder (Sn, Ag) Anode Ignition aid stainless steel Pirani measuring tube Ni, Au Pirani filament...
- Page 8 Dimensions [mm] MPG400 MPG401 ø 63.5 ø 63.5 DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-F Weight ≈700 g ≈730 g 351-010 351-020 ≈720 g ≈750 g 351-011 351-021 ≈980 g ≈1010 g 351-012 351-022 tina48e1-c (2017-10) MPG400-401.om...
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Page 9: Installation
WARNING WARNING: electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the product out of operation and remove the electronics unit. tina48e1-c (2017-10) MPG400-401.om... - Page 10 Remove the protective lid and install the product to the vacuum system. When making a CF flange connection, it may be advantageous to temporarily remove the magnet unit (→ 11). Seal with centering ring Protective lid Clamp Seal with centering ring and filter Keep the protective lid. tina48e1-c (2017-10) MPG400-401.om...
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Page 11: Removing The Magnet Unit (Only For Gauges With Cf Flanges)
Carefully mount the electronics unit (2). (Make sure the pin of the Pirani ele- ment is properly plugged into the corresponding hole of the electronics unit.) g) Push the electronics unit up to the mechanical stop and lock it with the hexagon socket set screw (1). tina48e1-c (2017-10) MPG400-401.om... -
Page 12: Electrical Connection
3.2 Electrical Connection Precondition Make sure the vacuum connection is properly made (→ 9). 3.2.1 Use With an INFICON Connect the sensor cable to the gauge and the controller. Controller 3.2.2 Use With Another Control Make a sensor cable according to the diagram. -
Page 13: Operation
, CO and N . They can be mathematically converted for other gases (→ Appendix B). If you are using an INFICON controller, you can enter a calibration factor to correct the pressure reading (→ of that controller). Ignition delay An ignition delay occurs when cold cathode gauges are switched on. - Page 14 Special precautions are required for vapors deposited under plasma (of the cold cathode measuring system). It may even be necessary to temporarily switch of the gauge while such vapors occur. tina48e1-c (2017-10) MPG400-401.om...
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Page 15: Deinstallation
Put the gauge out off operation and unplug the sensor cable. Remove the gauge from the vacuum system and install the protective lid. When deinstalling the CF flange connection, it may be advantageous to temporarily remove the magnet unit (→ 11). Protective lid tina48e1-c (2017-10) MPG400-401.om... -
Page 16: Maintenance
Put the gauge into operation (if possible, in the position, in which it will be used later on). Evacuate the vacuum system to p << 10 mbar, and then wait 10 minutes. Turn the nameplate counter-clockwise until the mechanical stop is reached. tina48e1-c (2017-10) MPG400-401.om... - Page 17 Turn the nameplate clockwise until the mechanical stop is reached. Using the 1.5 mm screwdriver, adjust the <ATM> potentiometer … … to 8.60 V … to 1×10 mbar. Turn the nameplate back to its original position (it catches). tina48e1-c (2017-10) MPG400-401.om...
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Page 18: Cleaning Mpg400, Replacing Parts
6.2 Cleaning MPG400, DANGER Replacing Parts DANGER: cleaning agents Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling cleaning agents and disposing of them. Consider possible reactions with the product materials (→ 7). -
Page 19: Cleaning Mpg400
Pirani element (13)): pressure piece (9), complete anode (10), FPM seal (11) incl. support ring (12), Pirani element (13) incl. FPM seal (13a). The parts can now be cleaned or replaced individually. 6.2.2 Cleaning MPG400 Cleaning the measuring ... -
Page 20: Reassembling Mpg400
Slide a new FPM seal (13a) over the Pirani element (13) and insert it into the corresponding groove. Mount the Pirani element (→ 20). 6.2.3 Reassembling MPG400 (→ figure 18) Insert the FPM seal (11) with the support ring (12) centered into the measuring chamber (7). -
Page 21: Cleaning Mpg401, Replacing Parts
Polishing cloth (400 grain) or Scotch-Brite • Tweezers • Cleaning alcohol • Mounting tool for ignition aid • Ignition aid • Metal seal (11) for anode feedthrough • Pirani element (13) incl. set of seals (13a, 13b) tina48e1-c (2017-10) MPG400-401.om... -
Page 22: Disassembling Mpg401
(10), metal seal (11) incl. centering ring (12). Unfasten the screw fitting (13a) of the Pirani element and remove Pirani ele- ment together with the copper seal (13b). The parts can now be cleaned or replaced individually. tina48e1-c (2017-10) MPG400-401.om... -
Page 23: Cleaning Mpg401
15 mm. The final positioning is established after the anode is installed. Replacing the Pirani element Slide the screw fitting (13a) and the copper seal (13b) over the Pirani element (13). Mount the Pirani element (→ 24). tina48e1-c (2017-10) MPG400-401.om... -
Page 24: Reassembling Mpg401
Push the electronics unit up to the mechanical stop and lock it with the hexagon socket set screw (1). Adjust the gauge (→ 16). tina48e1-c (2017-10) MPG400-401.om... -
Page 25: Troubleshooting
Pirani measurement Replace the Pirani continually > 9.5 V element defective element "Error high". (filament rupture). (MPG400 → 20) (MPG401 → 23). Electronics unit not cor- Mount the electronics rectly mounted. unit correctly (MPG400 → 20) (MPG401 → 24). -
Page 26: Accessories
BG443155-X 8 Spare Parts When ordering spare parts, always mention: • all information on the product nameplate • description and ordering number according to the spare parts list MPG400 Pos. Description Ordering number Maintenance kit, consisting of: 351-999 1× support ring 1×... - Page 27 1× centering ring Set of ignition aids, consisting of: 351-995 10× ignition aid Mounting tool for ignition aid 351-994 Measurement system, complete DN 25 ISO-KF flange BN846472-T DN 40 ISO-KF flange BN846473-T DN 40 CF-F flange BN846474-T tina48e1-c (2017-10) MPG400-401.om...
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Page 28: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment. Products returned to INFICON should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination (form under www.inficon.com). -
Page 29: Appendix
5.0×10 1.0×10 7.5×10 1.0×10 1.0×10 7.5×10 1.0×10 1.0×10 7.5×10 1.0×10 1.0×10 7.5×10 1.0×10 1.0×10 7.5×10 1.0×10 1.0×10 7.5×10 1.0×10 7.5×10 7.5×10 0.75 1000 1.0×10 1000 1.0×10 8.6 … 9.5 Overrange 9.5 … 10.5 Sensor error (Pirani defective) tina48e1-c (2017-10) MPG400-401.om... -
Page 30: B: Gas Type Dependence
4 6 8 (mbar) Indication range Pressure indicated (gauge calibrated for air). … 0.1 mbar p (mbar) –1 Indication range ... 10 mbar –2 –3 –4 –5 –6 –6 –5 –4 –3 –2 –1 4 6 8 (mbar) tina48e1-c (2017-10) MPG400-401.om... -
Page 31: Etl Certification
ETL Certification ETL LISTED RECOGNIZED COMPONENT The products MPG400 and MPG401 • conform to the UL Standard UL 61010-1 • are certified to the CAN/CSA Standard C22.2 No. 61010-1 3103457... - Page 32 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina48d1-c (2017-10) www.inficon.com t i na48e1- c...