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Related Manuals for Zeiss MultiSEM 505 Series
Summary of Contents for Zeiss MultiSEM 505 Series
- Page 1 Instruction Manual ZEISS MultiSEM 505/506 Series Scanning Electron Microscope...
- Page 2 ZEISS. No program, documentation, or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of ZEISS has been procured to do so, nor may be copied or otherwise duplicated, even for the customer's internal needs apart from a single back-up copy for safety purposes.
- Page 3 Table of Contents...
- Page 4 Table of Contents Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 5: Table Of Contents
Inside the Microscope Cabinet 2.5.3 Material Safety Data Sheets 2.5.4 Safety Information for Operation with the Cabinet Removed Device Description 41 Introduction About ZEISS MultiSEM Main Hardware Components ZEISS MultiSEM Microscope Cabinet 3.4.1 Specimen Chamber Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 6 Functional Principle (Overview) Illumination and Detection Optics 5.3.1 Components in the Illumination Column 5.3.2 Beam Splitter, Scan Deflector, and Objective Lens 5.3.3 Components in the Detection Column Applied Voltages Source of the Detection Signal Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 7 Adjustment of Scan Rotation 8.8.1 Scan Rotation Specimen Registration 137 Introduction Loading and Unloading the Specimen Chamber 9.2.1 Unloading the Specimen Chamber 9.2.2 Loading the Specimen Chamber Pre-Adjustment 9.3.1 Pre-Adjustment via Chamber CCD Camera Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 8 11.4 Column Bakeout 11.5 Shutdown 11.6 Disposal 11.6.1 Disposing of Consumables 11.6.2 Disposing of the Microscope 11.7 Support Technical Data 163 12.1 Declaration of Conformity 12.2 Warranty 12.3 Technical Data Index 167 Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 9 About this Instruction Manual...
- Page 10 1. About this Instruction Manual Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 11: About This Instruction Manual
Content This Instruction Manual contains all the information you need to start the ZEISS MultiSEM system as well as to start ZEN MultiSEM. This Instruction Manual is part of the ZEISS MultiSEM multi-beam scanning electron microscope, hereinafter referred to as "microscope". -
Page 12: Conventions In This Document
Conventions in this Document Text Conventions The following text conventions are used in this document: Example Description Save icon Clickable user interface elements, e.g. buttons and icons ON button Hardware buttons on the microscope Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 13 Link to further information Info and Tip Additional information and tips are indicated as follows: INFO Helpful additional information, e.g. about necessary additional actions. Useful information, e.g. about alternative methods for achieving an aim. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 14 1 About this Instruction Manual | 1.2 Conventions in this Document Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 15 Safety...
- Page 16 2. Safety Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 17: Safety
2 Safety 2.1 Intended Use | 2.1 Intended Use ZEISS MultiSEM is to be used in a laboratory environment for scientific and/or commercial purposes. ZEISS MultiSEM is designed for large-area microscopic examinations in the following applications: ¢ Neuroscience and life sciences ¢... -
Page 18: Safety Procedures
Windows operating system instructions supplied with the operating system. 2.3 Safety Procedures | 2.3 Safety Procedures 2.3.1 Safe Operation Conditions INFO Only authorized ZEISS service representatives must unpack, install, and initially start up the product. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 19: Requirements For Personnel
Only ZEISS service representatives, who have specialized knowledge of radiation protection, are permitted to service the microscope. Operator Training Within the scope of initial start-up, the ZEISS service representative will perform a basic operator training. This consists of fundamental operating procedures including safety instructions. -
Page 20: Preventive Maintenance
Risk of injury: Spare parts Using spare parts that are not provided by ZEISS can be hazardous. Only genuine parts supplied by ZEISS are to be used in servicing the microscope. Contact your ZEISS service representative for information regarding how to order spare parts. -
Page 21: Prevention Of Hazards
When disposing of aggressive or toxic chemicals, there is a risk of damage to the environment. When disposing of waste that has been generated during a service operation (e.g. used rotary pump oil) comply with all national and local safety and environmental protection regulations. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 22: Electrical Hazards
High-voltage potentials present in the microscope can be fatal. Contact may cause burn or electrical shock. Ensure proper grounding. For more information refer to the Installation Requirements document. Only authorized ZEISS service representatives are allowed to remove the microscope enclosure. CAUTION Electrocution hazard: High residual current High residual currents can be present in the microscope. -
Page 23: Mechanical Hazards
Risk of injury: Closing the chamber door Fingers could be trapped between microscope and chamber door. Use the recessed grip to close the chamber door. Do not trap your fingers in the chamber door gap. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 24 CCD camera. NOTICE Risk of damage to ZEISS MultiSEM or the specimen: Short working distance The specimen or the specimen stage may collide with the objective lens if they are too close to each other (i.e. the working distance is too small) when opening the chamber door.
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Page 25: High Pressure Hazards
X-rays are generated inside the microscope during operation. This is unavoidable due to electrons accelerated to an energy of up to 52 keV. Only authorized ZEISS service representatives are allowed to service the microscope. Do not remove any parts around column and chamber that are essential for radiation protection. -
Page 26: Suffocation Hazards
In order to prevent any risk of hazard to human health or of property damage, ZEISS MultiSEM is equipped with several safety and protective devices. 2.5.1.1 Protective Cover Panels The following parts of the ZEISS MultiSEM cabinet are equipped with protective cover panels: Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 27: Interlock System
Vacuum Interlock The vacuum interlock is an internal interlock. It ensures that the gun pressure (i.e. the vacuum in the electron gun section) and the system vacuum excel the required thresholds. 2.5.1.3 Main Switch The main switch is essential for compliance with the SEMI standard. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 28: Emo Button
The POWER ON button is located at the front of the power supply rack below the main switch and to the right of the operation mode buttons. It is required to reset the EMO function. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 29: Main Shut-Off Valves
2.5.2 Safety Labels and Labels Safety labels are placed on the ZEISS MultiSEM microscope cabinet to warn users of hazards. Each safety label is placed close to spots where particular hazards could occur. -
Page 30: At The Microscope Cabinet
2 Safety | 2.5 Safety Equipment 2.5.2.1 At the Microscope Cabinet Chamber Door Fig. 2.5: Safety labels on the chamber door Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 31 Right Side of the Cabinet Fig. 2.6: Safety label on the right side of the microscope cabinet Back Side of the Cabinet Fig. 2.7: Safety label on the back side of the microscope cabinet Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 32: At The Power Supply Rack
2 Safety | 2.5 Safety Equipment 2.5.2.2 At the Power Supply Rack Main Switch Area Fig. 2.8: Safety labels at the main switch area Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 33 Bottom of the Rack Fig. 2.9: Safety label and type plate at the bottom of the power supply rack (Examplary illustration of a type plate on ZEISS MultiSEM 505. The type plate on your particular instrument may slightly differ.) Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 34: At The Image Acquisition Rack
Fig. 2.10: Safety label at the back door of the power supply rack 2.5.2.3 At the Image Acquisition Rack Front Door Fig. 2.11: Safety label at the front door of the image acquisition rack Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 35: Inside The Microscope Cabinet
EMO Button The Emergency Off button (EMO button) on the cabinet must be replaced by an external EMO button, connected via cable and placed visibly near the microscope. Safety Labels The following safety labels placed on microscope parts are visible when ZEISS MultiSEM is operated with the cabinet removed:... - Page 36 Hazardous voltage warning at the rear of the illumination column (two times) ¢ Risk of injury warning on the vibrational isolation section ¢ Radiation hazard warning at the rear of the microscope Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 37 2 Safety | 2.5 Safety Equipment Health Hazard Labels The ion getter pumps create a strong magnetic field which can be dangerous for people wearing pacemakers. Therefore, the following health hazard labels are placed on the pumps. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 38 2 Safety | 2.5 Safety Equipment Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 39 Device Description...
- Page 40 3. Device Description Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 41: Device Description
The multi-beam array consists of several single beams in a hexagonal configuration (e.g. 61 single beams). In contrast to a conventional SEM, ZEISS MultiSEM can use this multi-beam array to scan across the specimen and thus increase the imaging speed significantly. - Page 42 The workflow-oriented ZEN MultiSEM guides you through the necessary steps to examine a specimen as well as to stitch all the scans together to create an overall image of the entire specimen. Fig. 3.2: Creation of the overall image of the specimen Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 43: Main Hardware Components
ZEISS MultiSEM microscope cabinet and the image acquisition rack. You can set the operating status (On, STANDBY, or Off) for ZEISS MultiSEM on the front side of the power supply rack. Regardless of the set operating status, the image acquisition rack is always active. -
Page 44: Zeiss Multisem Microscope Cabinet
ZEISS MultiSEM Microscope Cabinet The ZEISS MultiSEM microscope cabinet is the central component of the system. It is also referred to as the ZEISS MultiSEM microscope or simply as the microscope. The ZEISS MultiSEM microscope cabinet is divided into the following sections: Fig. 3.4: ZEISS MultiSEM microscope cabinet... - Page 45 Vacuum valves that separate the different vacuum sections For further information on the system's vacuum components, refer to Vacuum System [} 69]. The upper section of the cabinet also contains the scan amplifier electronics. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 46 Cabinet door Specimen Chamber Chamber door For detailed information about the specimen chamber, refer to Specimen Chamber [} 47]. Depending on the configuration of your ZEISS MultiSEM, further components are available, for example: ¢ Airlock ¢ Plasma cleaner at the specimen chamber for cleaning the specimen chamber ¢...
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Page 47: Specimen Chamber
Interfaces and tubing for the auxiliary supply systems, e.g. cooling water 3.4.1 Specimen Chamber The specimen chamber is located in the middle part of the ZEISS MultiSEM microscope cabinet. It is the only component within the cabinet to which you have direct access. - Page 48 Chamber CCD camera The chamber CCD camera monitors the stage movements and, particularly, assists you in monitoring the distance between objective lens and specimen (or specimen holder surface). Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 49 Specimen holder mount Chamber CCD camera Specimen holder (with specimen) For optimal imaging, you have to set the correct working distance between the objective lens and specimen surface (see Working Distance [} 147]). Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 50: Airlock
200 mm-Airlock with HV Interlock Instruction Manual. NOTICE Risk of property damage due to improper maintenance, service, or repair. The warranty might be voided. Follow the instructions given in the 200 mm-Airlock with HV Interlock Instruction Manual. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 51: Plasma Cleaner
INFO The Plasma Cleaner must only be operated by persons who have received training by an authorized ZEISS service representative. For detailed information on how to safely operate the Plasma Cleaner, refer to the Evactron 25Z Users Manual or the Plasma Cleaner Add On Instruction Manual. - Page 52 The three motorized axes are driven either automatically, by ZEN MultiSEM, or manually, using one of the following possibilities: ¢ Dual joystick panel ¢ Control Panel ¢ Control elements in the Stage tool window within ZEN MultiSEM Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 53 Do not move the stage for a total distance of more than 6 m within a time span of 30 minutes. Typical operations of the ZEISS MultiSEM result in less than 0.5 m stage movement within 30 minutes and are not critical for the stage motors.
- Page 54 (e.g. the objective lens) are fixed, the specimen stage actually moves to the left. ¢ The chamber CCD camera shows the actual horizontal stage movements, recorded from the back of the specimen chamber (see Chamber CCD Camera [} 57]). Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 55: Specimen Holder
The specimen holder is the component that you remove from the specimen chamber in order to place the specimen on it. All specimen holders have dedicated fiducial marks, the ZEISS Shuttle & Find L-markers, and are suitable for correlative microscopy. - Page 56 You typically place the specimen in the center of the holder. The specimen's diameter should not exceed 100 mm. The following figure shows the minimum distance to the edges. 5 mm 5 mm Fig. 3.12: Minimum distance to the edges of the specimen holder Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 57: Chamber Ccd Camera
For more information, see Shuttle & Find. 3.4.6 Chamber CCD Camera ZEISS MultiSEM contains a CCD camera (charge-coupled device camera) inside the specimen chamber (see Specimen Chamber [} 47]). It is referred to as the chamber CCD camera. It allows you to monitor the position of the specimen holder mount and particularly the distance between the objective lens and the specimen holder. - Page 58 3 Device Description | 3.4 ZEISS MultiSEM Microscope Cabinet Fig. 3.14: Specimen image from chamber CCD camera Objective lens Objective lens opening Specimen Specimen holder mount (rear site) Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 59: Detection Ccd Camera
3.4.7 Detection CCD Camera ZEISS MultiSEM contains a CCD camera (charge-coupled device camera) that is located behind the scintillator at the end of the detection column (see Components in the Detection Column [} 96]). This camera allows you to monitor the Z position of the specimen stage and helps you to set the working distance (see Working Distance [} 147]). -
Page 60: Workstation
| 3.5 Workstation The workstation is the main component of ZEISS MultiSEM you interact with. You perform all your imaging tasks at the workstation apart from loading (or unloading) the specimen chamber. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 61: Control Panel
Dual joystick panel Control computer ZEN MultiSEM, and all other software required to operate ZEISS MultiSEM, is pre- installed on the control computer. It is the user interface between the microscope hardware, the controllers, the image acquisition rack, and the panels or keyboards at the workstation. - Page 62 Considering the required image quality, set the Scan Speed to a value as low as possible to optimize throughput. The lower the Scan Speed number, the shorter the integration time per pixel, the faster the acquisition speed, but the lower the image quality. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 63 If the field of view is shifting, adjust with Wobble Adjust X / Wobble Adjust Y until the field of view goes in and out of focus but does not change in other respects. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 64: Dual Joystick Panel
Always move the specimen stage slowly and observe its movement using the chamber CCD camera. The dual joystick panel controls the specimen stage and thus enables you to navigate the specimen. Fig. 3.18: Dual joystick panel Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 65 ¢ Push the joystick gently if you want to move the specimen stage slowly in the corresponding direction. ¢ Push the joystick firmly if you want to move the specimen stage fast. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 66: Power Supply Rack
| 3.6 Power Supply Rack The main power supply of ZEISS MultiSEM is contained within the PSU rack (power supply unit rack). Only a small number of hardware components, for example the pre-vacuum pump, are connected to additional power sockets. -
Page 67: Image Acquisition Rack
| 3.7 Image Acquisition Rack The image acquisition rack receives the analog scan signals from the ZEISS MultiSEM microscope and converts them into digital live images. The live images are then transferred to ZEN MultiSEM and to the image storage. - Page 68 Connection to Storage System Each of the image acquisition PCs has to be connected with a 10 GBit/s connection to your image storage system. The following figure shows the connection for the ethernet cable leading to the storage. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 69: Vacuum System
Vacuum Sections in the To provide the required vacuum conditions in each electron-beam section, the Microscope following vacuum pumps are installed in the ZEISS MultiSEM microscope: Fig. 3.24: Vacuum sections Ion getter pump for detection column Turbo pump for specimen chamber. - Page 70 Gun Pressure Vacuum in the 9 x 10 mbar 1 x 10 mbar electron gun section Micro Optics Vacuum in the 4 x 10 mbar 6 x 10 mbar Pressure micro optics section Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 71 If a value has a green background, then the vacuum for the corresponding section is within the operating limits. Pre-vacuum unit The pre-vacuum unit is installed outside the ZEISS MultiSEM microscope cabinet. All other vacuum components are located inside the cabinet.
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Page 72: Overview Of Auxiliary Supply Systems
3 Device Description | 3.9 Overview of Auxiliary Supply Systems Using the Quiet Mode unit allows you to run ZEISS MultiSEM for hours without using the pre-vacuum pump, which reduces the noise levels. 3.9 Overview of Auxiliary Supply Systems | 3.9 Overview of Auxiliary Supply Systems... -
Page 73: Integration Into Laboratory Environment
ZEN MultiSEM and the ZEISS MultiSEM microscope can be integrated into your existing lab environment. ZEISS MultiSEM Control PC It is possible to connect the ZEISS MultiSEM control PC to your local network. If you do so, then it is your own responsibility to guarantee a sufficient network security with regard to the ZEISS MultiSEM control PC. - Page 74 Python. You can run your programs on the control computer or from any computer that has access to the control computer via the network. For more information, contact a ZEISS service representative. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 75 Software Overview...
- Page 76 4. Software Overview Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 77: Software Overview
Fig. 4.1: Screen layout of the user interface Title Bar Contains most basic functions such as closing or minimizing the user interface Menu Bar Allows you to manage, edit, and view your work in ZEN MultiSEM Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 78: Basic Software Functions
Light is recommended for daylight conditions, Dark for low light conditions. Workspace Save and reload all your personal settings as a workspace configuration. Quickly load previously saved workspace configurations using the dropdown menu. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 79: Adjusting The Tool Windows
Click the dock icon to dock a tool window back to its initial location. Show All Click Show all in a tool window to show advanced settings or functions. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 80: Show Or Hide Areas
Deflector Controls The deflector controls for the objective and projective are available via the Beam tool: ¢ Objective Controls Contains 2D Controls for each adjustable stigmator of the objective. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 81 The deflection is displayed in X and Y coordinates inside the control. The D button in the lower right corner resets the deflector to its default position. For information how to operate the control using the keyboard or mouse, see Using the 2D Controls below. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 82 The dot is displayed in red. The rate of change is decreased by a factor of 0.1. CTRL + SHIFT + Enables you to very finely change the deflection or move Arrow Keys the stage. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 83: Adding Meta Information To An Image
Procedure 1 Open the image to which you want to add a scan note. At the left side of the image viewer, click the Info tab. The image meta data information is displayed. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 84: Saving An Image
In the Images and Documents tool window, select the desired image. Click the Save icon. Enter a file name and select the desired image format. The recommended formats are: – Carl Zeiss Image (.czi) – Portable Network Graphics (.png) Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 85: User Management
4 Software Overview | 4.4 User Management – Windows Bitmap (.bmp) If you select Carl Zeiss Image, you can compress the image: – From the Compression drop-down menu, select Compressed. – Enter a quality level between 0 (worst) and 100 (best). Click Save. -
Page 86: Access Rights Of Super Users
Super Users. Tab. 2: Software functions limited to Super Users 4.6 Message List | 4.6 Message List The message list keeps track of the system status and displays errors and warnings: Fig. 4.7: Message list Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 87: Starting The Software
| 4.7 Starting the Software The following describes how to start or restart ZEN MultiSEM. For information about how to start the complete ZEISS MultiSEM system, refer to Powering Up the Microscope [} 111]. ¢ Prerequisite You are logged on to the operating system on the control computer. -
Page 88: Closing The Software
ZEN MultiSEM and the mSEMService software are closed. For information about how to power down the complete ZEISS MultiSEM system, refer to Powering Down the Microscope [} 111]. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 89 Principle of Operation...
- Page 90 5. Principle of Operation Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 91: Principle Of Operation
5 Principle of Operation 5.1 Introduction | 5.1 Introduction This chapter introduces you to the basic principles of ZEISS MultiSEM. It provides an overview of the most important functional electron-optical components that are installed inside the microscope. 5.2 Functional Principle (Overview) | 5.2... -
Page 92: Illumination And Detection Optics
| 5.3 Illumination and Detection Optics The ZEISS MultiSEM microscope is designed such that the illumination path and projection path are mostly separate. The primary-electron beam is generated and focused in the illumination column. The secondary-electron beam is processed in the detection column. -
Page 93: Components In The Illumination Column
It contains the following basic electron-optical components. Fig. 5.3: Illumination column Electron gun Condenser Micro optics Beam blanker Field lens system Electron Gun The electron gun is the source of the electrons to illuminate the specimen. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 94: Beam Splitter, Scan Deflector, And Objective Lens
Condenser The double condenser system controls the illumination of the subsequent micro optics. Micro Optics The micro optics are specially designed for ZEISS MultiSEM. The micro optics act as a beam sieve; they split the incoming beam into the configured number of single-beams, thus forming the (primary) multiple electron beam. - Page 95 The beam splitter is an arrangement of magnets that deflects the primary electrons from the illumination column into the objective lens. Additionally, it deflects the secondary electron beams coming from the objective lens into the detection column. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 96: Components In The Detection Column
When the primary-electron beam hits the specimen, secondary electrons are emitted. 5.3.3 Components in the Detection Column The detection column guides the secondary-electron beams from the beam splitter to the light optics. It contains the following electron-optical components. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 97 The anti scan compensates the motion of the primary-electron beams on the specimen caused by the scan deflector such that the secondary electrons of each single beam always hit the same spot on the scintillator. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 98: Applied Voltages
5.4 Applied Voltages The high-voltage supplies of ZEISS MultiSEM provide the high voltages that are required by some of the electron-optical components in order to extract and accelerate the electrons. These voltages are also used to adjust the landing energy of the primary electrons. - Page 99 = + 22 kV is applied to the micro optics. The voltage U is applied to the specimen holder. By setting U Specimen Specimen landing energy (U - U ) can be adjusted between 1 keV and 3 keV. Specimen Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 100: Source Of The Detection Signal
1.0 and 3.0 keV (per electron). When an electron with this energy penetrates into the surface of the specimen, it is subjected to several elastic and inelastic scattering processes. The electron loses energy and slows down significantly. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 101 The electron optics is designed to efficiently collect these secondary electrons, which then generate the imaging signal. Multi-beam characteristics ZEISS MultiSEM achieves its very high imaging throughput by using a multi-beam array of primary electrons. Hence, multiple single beams simultaneously hit the specimen (at different incident points) and simultaneously emit secondary electrons from the specimen (near the corresponding entry points).
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Page 102: Overview Of Coordinate Systems
Fig. 5.12: Scan signal in detection column as seen with the detection CCD camera 5.6 Overview of Coordinate Systems | 5.6 Overview of Coordinate Systems ZEISS MultiSEM contains the following Cartesian coordinate systems that are particularly relevant for beam alignment and specimen registration: ¢ System coordinate system ¢... - Page 103 Stage Coordinate System The stage coordinate system describes the location of the specimen stage. In an ideal calibration, it has the same orientation as the system coordinate system, i.e. its X axis, for example, is parallel to the X axis of the stage coordinate system. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 104 Fig. 5.15: Location and orientation of the stage coordinate system Beam Coordinate System The beam coordinate system describes the location and orientation of the multi- beam array. It is attached to the multi-beam hexagon. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 105 The single image coordinate system is a two-dimensional coordinate system. This means, only the orientation of the X and Y axes is relevant. Note that the Y axis goes from the top left corner of the image to the lower left corner. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 106 Field of View (sFoV). The full image is also referred to as multi-beam Field of View (mFoV). Ideal Calibration If ZEISS MultiSEM is calibrated, the coordinate systems are aligned as follows (the system coordinate system is neglected):...
- Page 107 Powering Down/Up the Microscope...
- Page 108 6. Powering Down/Up the Microscope Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 109: Powering Down/Up The Microscope
6 Powering Down/Up the Microscope | 6.1 Introduction 6 Powering Down/Up the Microscope 6.1 Introduction | 6.1 Introduction This chapter describes how to power down and power up ZEISS MultiSEM to and from STANDBY mode respectively. 6.2 Handling the High Voltage | 6.2 Handling the High Voltage The following high voltages inside the ZEISS MultiSEM can be controlled separately: ¢... -
Page 110: Standby Mode And Off Mode
6.3 STANDBY Mode and OFF Mode STANDBY Mode ZEISS MultiSEM normally remains powered at all times. This means that illumination column and detection column are under vacuum, the electron gun is on, and all of the control electronics are operating. -
Page 111: Powering Down The Microscope
Powering down ZEISS MultiSEM means setting the system into the STANDBY mode. You should put the system into the STANDBY mode when ZEISS MultiSEM is not going to be used for an extended period of time, e.g. a few days. -
Page 112: Emergency Off (Emo)
In the Beam section, click ON. For information about monitoring the vacuum sections, see Vacuum System [} 69]. ZEISS MultiSEM is switched on and ready for operation. It is recommended that you perform the following checks, before you start your experiment: ¢... -
Page 113: Switching The Microscope On After An Emergency Off
INFO Before switching the ZEISS MultiSEM on, ensure that the cause of the Emergency Off is eliminated and that it is safe to switch the ZEISS MultiSEM on. Procedure 1 On the microscope cabinet, pull the EMO button to release it. - Page 114 6 Powering Down/Up the Microscope | 6.6 Emergency Off (EMO) Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 115 Handling of the Specimen...
- Page 116 7. Handling of the Specimen Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 117: Handling Of The Specimen
7.2 Mounting of the Specimen | 7.2 Mounting of the Specimen To examine a specimen in the ZEISS MultiSEM, you need to mount the specimen onto a standard specimen holder before inserting it into the microscope. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 118 Embedding the specimen into a frame of the same material reduces the field distortions and improves the image quality at the edges. INFO You can find more detailed information about mounting specimens in the ZEISS MultiSEM Sample Preparation Guide: https://p.widencdn.net/klyxoh/EN_wp_MultiSEM-505_Sample-Preparation-Guide...
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Page 119: Using The Plasma Cleaners
Multiport is primarily used in combination with the Specimen cleaning mode to clean the specimen inside the airlock. INFO Object Chamber is primarily used with the Chamber cleaning mode to clean the specimen chamber. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 120 If you want to clean the specimen itself, then select Specimen cleaning as the Cleaning Mode. If you select Specimen cleaning, the Plasma time and the Plasma power are automatically lowered to avoid damage to the specimen. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 121 If required, manually adjust the remaining parameters. For example you can adjust a lower Plasma time or a lower Plasma power in case of very fragile specimens. To start the plasma cleaning procedure, click Start Cleaning. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 122 7 Handling of the Specimen | 7.3 Using the Plasma Cleaners Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 123 Alignment...
- Page 124 8. Alignment Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 125: Alignment
8.1 Introduction | 8.1 Introduction This chapter describes the alignment workflow and principles of ZEISS MultiSEM. You should perform alignment when you change or insert a new specimen. There are two different ways to perform the alignment: ¢ Auto Tuning Routines If you insert a new specimen or navigate to a different position on the specimen, then you need to perform the Auto Tuning Routines. -
Page 126: Auto Tuning Routines
Autofocus The Autofocus routine adjusts the focus of the specimen. Perform this alignment routine if the live image of the specimen appears to be too blurred. A progress bar indicates the progress of the routine. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 127 Beam on Detector The Beam on Detector routine corrects the alignment of the fiber optics. Perform this alignment routine if ghost images are visible in the live image or if the outer regions of the multi-beam image are dark. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 128: Single Routines
Pixelsize and Overlap that you intend to use later during the workflow. The calibration of the beam coordinate system and the stage coordinate system should be performed directly at the sample position of your planned experiment. This way you can Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 129: Manual Operation
Single Routines 8.5 Manual Operation | 8.5 Manual Operation 8.5.1 Moving the Stage The motorized stage, which the specimen holder is placed on, enables you to move your specimen. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 130 For example, you can store the marker positions of your specimen holder. If you use the Shuttle & Find module and change the specimen, you can easily navigate to the marker positions of the new specimen. This considerably speeds up the specimen registration. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 131: Detector Equalization
Specify a gray value to be applied to all single-beam images. The brightness is equalized. Relative Target Calculate a gray level based on a single image and then apply this value to all single-beam images. The brightness is equalized. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 132: Single Beam Contrast
A scan rotation means that each of the single images in the full-image hexagon is rotated by the same amount, as shown in the following figure. The orientation of the hexagon itself remains the same. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 133 If Field of View = Pitch (no overlap), gaps occur between the sFoV images and are displayed as black areas. The areas on the specimen corresponding to the gaps are not scanned. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 134 Use a scan rotation different from 0° only if necessary. Scan Rotation in Alignment The alignment with the calibration pattern should be performed with the scan Workflow rotation set to 0°. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 135 Specimen Registration...
- Page 136 9. Specimen Registration Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 137: Specimen Registration
If you begin to experience symptoms of asphyxia (for example: rapid breathing, loss of mental alertness and/or muscular coordination, depression of sensations, emotional instability, fatigue) leave the room immediately and inform the facility’s safety officer. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 138 Minimize the time span the chamber door is open. NOTICE Risk of damage to ZEISS MultiSEM or the specimen: Short working distance The specimen or the specimen stage may collide with the objective lens if they are too close to each other (i.e. the working distance is too small) when opening the chamber door.
- Page 139 – The Vacuum Status displays a Chamber Pressure of 0 mbar. The value of 0 mbar is displayed as the now atmospheric pressure inside the specimen chamber is beyond the measurement range of the vacuum gauge head. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 140 9 Specimen Registration | 9.2 Loading and Unloading the Specimen Chamber Open the cabinet door. Open the chamber door. Remove the specimen holder. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 141: Loading The Specimen Chamber
NOTICE Risk of damage to ZEISS MultiSEM: Contamination with dust particles. Opening the chamber door exposes the chamber to dust particles from the environment. The dust particles may permanently contaminate the high voltage insulators inside the chamber, which results in an inoperable MultiSEM. - Page 142 9 Specimen Registration | 9.2 Loading and Unloading the Specimen Chamber NOTICE Risk of damage to ZEISS MultiSEM or the specimen: Short working distance The specimen or the specimen stage may collide with the objective lens if they are too close to each other (i.e. the working distance is too small) when opening the chamber door.
- Page 143 Attach the specimen holder to the specimen holder mount. Ensure that the specimen holder is completely inserted. Check whether the seal in the chamber door is correctly mounted. Close the chamber door. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 144: Pre-Adjustment
9.3 Pre-Adjustment | 9.3 Pre-Adjustment 9.3.1 Pre-Adjustment via Chamber CCD Camera Before you (horizontally) move to your desired ROI, you have to set the correct Z- distance between objective lens and specimen. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 145 Optimizing the focus After performing the pre-adjustment, you can optimize the specimen focus in two steps: Perform a coarse adjustment. You can perform the coarse adjustment in the Stage tool window. Perform a fine adjustment. You can perform the fine adjustment in the Beam tool window. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 146: Vertical Adjustment Of The Specimen Stage
You have to set the specimen focus. To do this, adjust the Z position of the specimen stage so that the optimum working distance of ZEISS MultiSEM is set. You can monitor this vertical adjustment on the detection CCD camera (see Detection CCD Camera [} 59]). -
Page 147: Working Distance
The working distance is the distance between objective lens opening and specimen surface. The optimum working distance of ZEISS MultiSEM in which the specimen surface is in focus is 1.4 mm (± 10 µm). This also means that the scintillator image and the live image are in focus. - Page 148 9 Specimen Registration | 9.4 Vertical Adjustment of the Specimen Stage Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 149 Troubleshooting...
- Page 150 10. Troubleshooting Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 151: Troubleshooting
High-voltage potentials present in the microscope can be fatal. Contact may cause burn or electrical shock. Ensure proper grounding. For more information refer to the Installation Requirements document. Only authorized ZEISS service representatives are allowed to remove the microscope enclosure. Symptom Possible Reason... - Page 152 Set the beam blanker to Auto Beam or gun is switched off Switch the beam or gun on via the System Control tool Contrast/brightness is insufficient. Increase contrast and/or brightness of the detectors. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 153 Constants in the Autofocus / Auto Stigmation section. Structure of the specimen is too Ensure that the specimen is visible in homogeneous at the current the scan image and exhibits a position sufficient amount of structure. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 154 Via the Scan Parameters tool, set Scan Rotation to 0° Image displayed in the Center Unsuitable histogram settings Via the Histogram tab in the Center Screen Area is too dark or too Screen Area, click Reset bright Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 155 Maintenance, Shutdown, and Disposal...
- Page 156 11. Maintenance, Shutdown, and Disposal Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 157: Maintenance, Shutdown, And Disposal
To ensure the optimal performance of the microscope it is essential to perform preventive maintenance regularly. It is recommended that you enter into a service contract with your ZEISS service representative. This will ensure trouble-free operation of the microscope. Scheduled downtime is the time when the ZEISS MultiSEM is not available to perform its intended function due to planned downtime events. -
Page 158: Column Bakeout
If the microscope will not be used for an extended period of time, for example several months, it should be shut down. Contact your local ZEISS service representative if you want to put the microscope out of operation. The ZEISS service representative will also make sure that the cooling water is completely removed from the interior of the microscope. -
Page 159: Disposing Of The Microscope
Electronic scrap material: e.g. transformers, circuit boards, cables Comply with national and regional waste disposal ordinances. 11.7 Support | 11.7 Support If you require support, please contact your ZEISS representative or consult one of the following websites: ¢ Sales: multisem.microscopy@zeiss.com ¢... - Page 160 11 Maintenance, Shutdown, and Disposal | 11.7 Support Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 161 Technical Data...
- Page 162 12. Technical Data Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 163: Technical Data
European Union. Regarding electromagnetic immunity, the equipment shall be operated in a controlled electromagnetic environment. In terms of emission requirements, the equipment is classified in Class A. Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... -
Page 164: Warranty
This invalidates all warranty claims. With the exception of the work specified in this manual, no maintenance or repair of ZEISS MultiSEM may be undertaken. Repairs may only be performed by a ZEISS service representative. Should any defect occur with the instrument, please contact your ZEISS service representative. - Page 165 Index...
- Page 166 Index Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
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Page 167: Index
Power Supply Rack 66 Vacuum System 69 Hardware Workstation 60 Components 43 Condenser 94 Controller 46 Contact address 159 Hardware components Control panel 61 Control panel 61 Coordinate Systems Dual Joystick Panel 64 Beam 104 High voltages 98 Single Image 105 High-voltage power supplies 46 Stage 103 System 103 Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5... - Page 168 Overview of the microscope 41 System Power-up 111 Shut-down 110 System Coordinate System 103 Plasma Cleaner 51 System overview 43 Power Supply Rack 66 Powering down 111 Powering up 111 Principle of Operation 91 Technical Data 164 Projection path 97 Troubleshooting Pumping 142 ZEISS MultiSEM 151 Remote Access 73 Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 169 Index User Interface 2D Controls 80 Elements 77 Workspace Configuration 78 Vacuum System 69 Venting 137 Vibrational isolation system 46 Voltages 98 Warranty 164 Working Distance 147 Workspace Configuration 78 Workstation 60 ZEISS MultiSEM Overview 41 ZEISS representative 159 Instruction Manual ZEISS MultiSEM 505/506 Series | ZEN MultiSEM v1.5...
- Page 170 Carl Zeiss Microscopy GmbH Carl-Zeiss-Straße 22 73447 Oberkochen Germany Plus a worldwide network of distributors www.zeiss.com/microscopy ZEISS reserves the right to make modifications to this document without notice. © Jena 2018 by Carl Zeiss Microscopy GmbH - all rights reserved...
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