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Summary of Contents for Zeiss MultiSEM 505
- Page 1 Carl Zeiss Microscopy - Electron and Ion Beam Microscopy Plasma Cleaner Add On Integration Pack for MultiSEM Enabling the Nano-Age World ®...
- Page 2 Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back- up copy for safety purposes.
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Page 3: Table Of Contents
`çåíÉåíë 1. About this manual ....................5 1.1. Definition of terms...................... 7 2. Safety summary..................... 8 2.1. Intended use ....................... 8 2.2. Prevention of accidents and of improper use ............9 3. Description......................10 3.1. Overview ........................10 3.2. Principle of operation ....................11 3.3. - Page 4 Q=çÑ=OO mä~ëã~=`äÉ~åÉê=^ÇÇ=çå=Ñçê=jìäíápbj...
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Page 5: About This Manual
This instruction manual is designed for users who have been trained by an authorised Carl Zeiss Microscopy expert to operate the workstation, the Plasma Cleaner Add On is built in. Operators of the Plasma Cleaner Add On must not deviate from the instructions provided in this document. - Page 6 NK=^Äçìí=íÜáë=ã~åì~ä For the description of software, the following typographical conventions are used: Typographical conventions Typography Meaning Push <ENTER>. Push the ENTER key on the keyboard. Type <key1, key2> Type key 1 first, then type key 2 on the keyboard. Type <Ctrl + Alt + Del>. Simultaneously type CTRL key, ALT key and DEL key on the keyboard.
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Page 7: Definition Of Terms
Electrically skilled person who has been trained to perform basic main- tenance tasks. User A person or organisation that uses products of Carl Zeiss Microscopy. Carl Zeiss service engineer, Specially trained service expert, either Carl Zeiss staff or authorised Carl Zeiss service staff service partner of Carl Zeiss Microscopy. -
Page 8: Safety Summary
OK=p~ÑÉíó=ëìãã~êó 2. Safety summary 2.1. Intended use The Plasma Cleaner Add On is used to generate reactive gas-phase radicals in a plasma. This plasma is fully contained in the Plasma Cleaner unit. The radicals migrate into the specimen chamber and chemically react with unwanted hydrocarbons. This is useful for: Fast specimen decontamination ... - Page 9 OK=p~ÑÉíó=ëìãã~êó 2.1.1 Recommended cleaning processes Different plasma cleaning processes can be selected. For detailed information regarding the con- troller of the Plasma Cleaner refer to the XEI Manual. The corresponding parameters for some selected process can be found in the table below. Ignition Cleaning type / Plasma pressure / power...
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Page 10: Prevention Of Accidents And Of Improper Use
The warranty might be voided. Follow the instructions given in this instruction manual. IMPORTANT All pursuing tasks of maintenance, service, and repair not described in this instruction manual have to be performed by authorised Carl Zeiss service staff only. NM=çÑ=OO mä~ëã~=`äÉ~åÉê=^ÇÇ=çå=Ñçê=jìäíápbj... -
Page 11: Description
PK=aÉëÅêáéíáçå 3. Description 3.1. Overview Electron column Specimen stage Vacuum exhaust Plasma High vacuum pump Plasma radical source (PRS) Reactive gas radicals Fig. 1.1: Operation principles of the Plasma Cleaner Add On mä~ëã~=`äÉ~åÉê=^ÇÇ=çå=Ñçê=jìäíápbj =NN=çÑ=OO... -
Page 12: Principle Of Operation
PK=aÉëÅêáéíáçå 3.2. Principle of operation When starting the Plasma Cleaner via the Plasma Cleaner menue the chamber to which the Plas- ma Cleaner is attached is vented above at least 3mbar. Then the corresponding chamer is pumped again. When the pressure approaches the preset ignition pressure of the plasma clean- er, a valve (connected to air) in the plasma cleaner (PRS) is opened, stabilizing the pressure close to the PRS in the chamber to the preset ignition pressure. -
Page 13: Technical Data
PK=aÉëÅêáéíáçå 3.3. Technical data The Plasma Cleaner Add On consists of two major components: • Plasma Radical Source (PRS) • Controller These components are connected by a cable bundle. Environmental requirements Pollution degree Installation category Electrical supplies Connected to power supply Specifications of the Plasma Cleaner Add On electronics Rise time <... -
Page 14: Customer Service
QK=fåëí~ää~íáçå 3.4. Customer service For customer service, contact your local Carl Zeiss service engineer. A list of Carl Zeiss Microscopy locations and authorised service partners can be found at: http://www.zeiss.com/microscopy 4. Installation The Plasma Cleaner Add On is either factory-installed or retrofitted by authorised Carl Zeiss serv- ice staff. -
Page 15: Operation
RK=léÉê~íáçå 5. Operation IMPORTANT For detailed information about the Plasma Cleaner, refer to the XEI Manual. Procedure If there are several plasma cleaners attached to the MultiSEM (object chamber and/or load lock), the plasma cleaner for the desired cleaning process can be chosen in the first line of the ZEN menu Plasma Cleaner Control. - Page 16 RK=léÉê~íáçå The LEDs in the Plasma Cleaner Control menu reflect the state of the LEDs on the Plasma cleaner control front panel 5.1. Possible Errors Note If the plasma cleaner was not in use for a longer time period, the PRS may be oxidized and the first ignition of the plasma may take several minutes.
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Page 17: Maintenance And Repair
Strictly follow the instructions given in this instruction manual. The Plasma Cleaner Add On is not user-serviceable. In case of a defect contact your local Carl Zeiss Microscopy service engineer for assistance. 6.2. Troubleshooting For detailed information, refer to the XEI Manual. -
Page 18: Installation And Disposal
TK=aÉJáåëí~ää~íáçå=~åÇ=Çáëéçë~ä 7. De-installation and disposal De-installation and disposal for Plasma Cleaner Add On can be looked up in the original manual from XEI Evactron 25Z/40Z/45Z De-Contaminator RF Plasma Cleaning System. 8. Abbreviations Plasma Radical Source mSEM Multibeam scanning electron microscope Radio frequency NU=çÑ=OO mä~ëã~=`äÉ~åÉê=^ÇÇ=çå=Ñçê=jìäíápbj... - Page 19 Abbreviations 18 Customer service 14 About this manual 5 Definition of terms 7 De-installation and disposal 18 Customer service 13 Description 11 Definition of terms 7 Installation 14 De-installation and disposal 18 instruction 5 Description 10 Intended use 8 Maintenance and repair 17 Installation 13 instruction 5 Intended use 8...
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- Page 22 Carl Zeiss Microscopy, LLC One Zeiss Drive Thornwood, NY 10594 USA microscopy@zeiss.com Plus a worldwide network of distributors www.zeiss.com/microscopy Due to a policy of continuous development, we reserve the right to change specifications without notice. © Carl Zeiss Microscopy GmbH, Oberkochen...
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