Related Manuals for Edwards nEXT 730D
Summary of Contents for Edwards nEXT 730D
- Page 1 SERVICE TOOL KIT nEXT 730D/930D/1230H INSTRUCTION MANUAL 300872820_002 Original instructions B8J203880_C...
- Page 2 Copyright notice ©Edwards Limited 2021. All rights reserved. Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.
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Page 3: Table Of Contents
..............29 300872820_002_C2 Page 3 06/2021 - ©Edwards Limited B8J203880_C... - Page 4 Figure 27: Controller view........... . 30 300872820_002_C2 Page 4 06/2021 - ©Edwards Limited B8J203880_C...
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Page 5: Safety And Compliance
For the operation of this equipment “trained personnel” are: ▪ skilled workers with knowledge in the fields of mechanics, electrical engineering, pollution abatement and vacuum technology and ▪ personnel specially trained for the operation of vacuum pumps 300872820_002_C2 Page 5 06/2021 - ©Edwards Limited B8J203880_C... -
Page 6: Safety Symbols
Earth point for electrical equipment. Warning - Use protective equipment Use appropriate protective equipment for the task. Warning - Risk of explosion There is a risk of explosion when you do the task. 300872820_002_C2 Page 6 06/2021 - ©Edwards Limited B8J203880_C... -
Page 7: Important Safety Information
Before servicing, ensure that gas cannot flow through the pump. Only open the pump system when it is under atmospheric pressure. CAUTION: BURNS Touching hot surfaces may lead to burns. Handle the pump only when ventilated and cooled down. Wear suitable protective equipment. 300872820_002_C2 Page 7 06/2021 - ©Edwards Limited B8J203880_C... -
Page 8: Description
This manual provides step by step instructions for the removal and insertion of the mechanical bearing on the nEXT730D/930D/1230H pump. 3.1 Supplied equipment Bearing exchange video training is available on the Edwards Vacuum Channel on YouTube. nEXT730/930D Bearing kit part no. B8J200827 nEXT1230H Bearing kit part no. -
Page 9: Additional Tools And Items Required
Torque screwdriver with 12 mm and 14 mm hex socket (1/4" square), torque range 2 to 6 4 mm T-bar Long nose pliers, 200 mm 13 mm hex socket wrench ISO 2236 Dial gauge with 50 mm extension Polyester clean swab stick Scissors Lint-free cloth Latex gloves 300872820_002_C2 Page 9 06/2021 - ©Edwards Limited B8J203880_C... -
Page 10: Preload Check
2. Bearing adjuster nut Place the preload tool onto the inlet of the turbomolecular pump. The force probe must be located in the centre of the pump inlet with the adjuster legs engaged on the 300872820_002_C2 Page 10 06/2021 - ©Edwards Limited B8J203880_C... - Page 11 When the force applied at the test plunger is bigger than the preload there is an electrical connection between the test plunger and the housing. The set preload is measured at the moment when it changes from no electrical connection to electrical connection. 300872820_002_C2 Page 11 06/2021 - ©Edwards Limited B8J203880_C...
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Page 12: Mounting Orientation
300872820_002_C2 - Preload check Figure 4 Preload tool nEXT 730D, 930D nEXT 1230H Sleeve: the sleeve must be in contact with the spider of the pump while pressing down the test plunger Correct adjustment Test plunger Marker: the marker must be within the correct adjustment area when hear- ing the distinct sound. -
Page 13: Figure 5 Mounting Orientation For Next1230H
NOTICE: PUMP DAMAGE The pump can be damaged if it is operated in the incorrectly installed orientation. Observe the sticker on the pump and install the pump only in the permitted orientation. 300872820_002_C2 Page 13 06/2021 - ©Edwards Limited B8J203880_C... -
Page 14: Disassembly
5. Axial disc 5. Axial disc 6. Counter nut M12x1 6. Counter nut M12x1 7. Nut M8x1 7. Nut M8x1 8. Groove ball bearing 8x23x15 install ready 8. Groove ball bearing 8x23x15 install ready 300872820_002_C2 Page 14 06/2021 - ©Edwards Limited B8J203880_C... -
Page 15: Figure 8 Disassembly 1 (Bearing Lid)
Open the pump by removing the bearing lid. Use the 22 mm hex socket wrench to unfasten the axial limiter and remove it. Figure 9 Disassembly 2 (axial limiter) as figure 6 300872820_002_C2 Page 15 06/2021 - ©Edwards Limited B8J203880_C... -
Page 16: Figure 10 Remove The Axial Disc
Put the upper part on the hexagonal shaft and screw it into the spider on the block. Turn the knurled screw carefully in the pump direction until you hear the noise when it changes to the opposite direction. 300872820_002_C2 Page 16 06/2021 - ©Edwards Limited B8J203880_C... -
Page 17: Figure 12 Remove The Counter Nut
Use the torque driver with 14 mm hex socket to remove the counter nut. Figure 13 Remove the M8x1 nut Use the torque driver with 12 mm hex socket to remove the M8x1 nut. 300872820_002_C2 Page 17 06/2021 - ©Edwards Limited B8J203880_C... -
Page 18: Figure 14 Extract The Bearing
Push the plastic sleeve down until it blocks. Turn the knurled screw until the bearing is pulled off the shaft. Remove the bearing. Push the knurled screw into the plastic sleeve. Take the bearing away. 300872820_002_C2 Page 18 06/2021 - ©Edwards Limited B8J203880_C... -
Page 19: Assembly
Use a polyester clean swab stick to clean the contact area of the axial disc in the pump and remove the old grease from the axial disc. Grease the axial disc again with 0.2 ml new grease from the syringe of the service kit. 300872820_002_C2 Page 19 06/2021 - ©Edwards Limited B8J203880_C... -
Page 20: Figure 16 Press In The Bearing
Insert the press bolt and press the bearing onto the shaft. The bearing is in its final position when the gap between the bearing retainer and the head of the press bolt is about 3 to 4 mm. 300872820_002_C2 Page 20 06/2021 - ©Edwards Limited B8J203880_C... -
Page 21: Figure 17 Screw In The M8X1 Nut And The Counter Nut
Remove the rotor fixation tool. Turn the pump upside down on the foam. Use the torque driver to press the rotor back in position on the spider until you hear that it has changed its position. 300872820_002_C2 Page 21 06/2021 - ©Edwards Limited B8J203880_C... -
Page 22: Figure 19 Assemble The Axial Disc
Use the T-bar to turn the headless screw of the axial limiter by a half turn counter- clockwise. Insert the axial limiter and install the 22 mm hex socket on the inserted axial limiter. Use the wrench to fasten the axial limiter. 300872820_002_C2 Page 22 06/2021 - ©Edwards Limited B8J203880_C... -
Page 23: Figure 21 Insert The Gauge - Measure The Axial Play
- to 0.035 to 0.055 mm for thenEXT1230H. When you release the rotor it must come back (if not, pull the rotor back to the original position). Adjust the axial play as follows. 300872820_002_C2 Page 23 06/2021 - ©Edwards Limited B8J203880_C... -
Page 24: Figure 22 Adjust The Axial Play
Put the pump upside down on the foam plastic pad. Take the bearing lid and replace the O-ring with the new O-ring from the service kit. Insert the bearing lid and fasten it using the wrench. 300872820_002_C2 Page 24 06/2021 - ©Edwards Limited B8J203880_C... -
Page 25: Bearing Preload Check
If no preload is detected, slowly turn the preload tool body clockwise until preload is established. When the preload has been verified, measure the preload force by following the corresponding instructions above. 300872820_002_C2 Page 25 06/2021 - ©Edwards Limited B8J203880_C... -
Page 26: Clearance Check
300872820_002_C2 - Assembly Figure 25 Preload tool (pass/fail indication) nEXT 730D, 930D nEXT 1230H 1. Fail 2. Pass 3. Pass/ Fail test indicator (only one marker for all pump models) 4. Pass/ Fail test indicator (upper marker for pump models with part nos without "INV") -
Page 27: Bearing Run In Mode
LED is permanently ON BRIM is running LED is flashing 0.25 s ON and 0.25 s OFF Pump has been stored for more than 3 years, bear- ing replacement is required 300872820_002_C2 Page 27 06/2021 - ©Edwards Limited B8J203880_C... -
Page 28: Service Counter Reset
To confirm that the service reset has been successful, check that the status LED has been reset and is no longer flashing. ▪ Once the service counter reset has been completed, a power cycle must be performed to complete the process. 300872820_002_C2 Page 28 06/2021 - ©Edwards Limited B8J203880_C... -
Page 29: Reset The Service Interval Using A Nst Pc Program
Currently, nST software requires a free license to be used. To obtain a free license follow the on screen instructions, fill out the user data form and then send the automatically generated email to Edwards. First time users are recommended to refer to the nST Support Toolkit instruction manual D396-49-880. -
Page 30: Figure 27 Controller View
8. CAN status LED 9. nEXT pump power supply interface 9. nEXT pump power supply interface 10. Accessory connector 10. Accessory connector 11. nEXT pump logic interface 11. nEXT pump logic interface 300872820_002_C2 Page 30 06/2021 - ©Edwards Limited B8J203880_C... - Page 31 300872820_002_C2 - Service counter reset 300872820_002_C2 Page 31 06/2021 - ©Edwards Limited B8J203880_C...
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