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Summary of Contents for Pfeiffer Vacuum CMR371
- Page 1 A P A S S I O N F O R P E R F E C T I O N CMR 371 … CMR 375 Ceramic Capacitance Gauge Operating Instructions...
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Page 2: Product Identification
Product Identification In all communications with Pfeiffer Vacuum, please specify the information given on the product nameplate. For convenient re- ference copy that information into the space provided below. Pfeiffer Vacuum, D-35614 Asslar Typ: Range: F-No: W; LPS BG 5138 BEN / A... -
Page 3: Validity
Validity This document applies to products with the following part num- bers: Measurement range min. (1 V) F.S. (9 V) max. (9.8 V) [mbar] [mbar] [mbar] Type Part number Flange [Pascal] [Pascal] [Pascal] PT R25 100 ½" tube PT R25 101 DN 16 ISO-KF 1000 1100... -
Page 4: Intended Use
Intended Use The temperature compensated Capacitance Diaphragm Gauges of the CMR 37X series are intended for absolute pressure measurement of gases in their respective pressure ranges (→ 3). Functional Principle A ceramic diaphragm is deflected by pressure. The deflection is measured capacitively and converted into an analog linear out- put signal by the digital electronics. -
Page 5: Table Of Contents
Contents Product Identification Validity Intended Use Functional Principle Trademark Patents Scope of Delivery Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data Installation 3.1 Vacuum Connection 3.2 Power Connection Operation 4.1 Status Indication 4.2 Zeroing the Gauge 4.2.1 <ZERO>... -
Page 6: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces-... -
Page 7: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 8: Technical Data
Technical Data Measurement range → "Validity" Accuracy 0.15% of reading Temperature effect on zero PT R25 100 … PT R25 133 0.0025% F.S./ °C PT R25 140 … PT R25 143 0.005% F.S./ °C Temperature effect on span 0.01% of reading / °C Resolution 0.003% F.S. - Page 9 Status relay closed measurement mode warning open no supply voltage warming up error Supply DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV) and limited power source (LPS), Class 2.
- Page 10 Grounding concept → "Power Connection" Materials exposed to vacuum ceramics (Al ≥99.5%), stainless steel AISI 316L Internal volume ≤4.2 cm Admissible pressure (absolute) PT R25 100 … PT R25 103 300 kPa PT R25 110 … PT R25 133 200 kPa PT R25 140 …...
- Page 11 Dimensions [mm] DN 16 ISO-KF DN 16 CF-R AD½" 8 VCR female Weight 837 … 897 g BG 5138 BEN / A (2012-11)
- Page 12 Analog Measuring Signal vs. Pressure Pressure p [mbar] F.S. sensor error sensor error sensor error overrange overrange overrange sensor error overrange underrange underrange underrange underrange Measuring signal U [V] p = (U - 1) × c (F.S.) mbar Torr 0.125 12.5 0.094 Example: Gauge CMR 371 with 1000 mbar F.S.
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Page 13: Installation
Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. - Page 14 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 15 Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep conden- sates and particles from getting into the measuring chamber preferably choose a horizontal to upright posi- tion. If adjustment should be possible after the gauge has been installed, be sure to install it so that the but- tons can be accessed with a pin (→...
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Page 16: Power Connection
Power Connection Make sure the vacuum connection is properly made (→ 13). DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV) and limited power source (LPS), Class 2. - Page 17 If no sensor cable is available, make one according to the following diagram (cable length and conductor cross- sections → 9). – 13K2 – Electrical connection Pin 1 Identification Pin 2 Signal output (measuring signal) Pin 3 Signal common Pin 4 Supply Pin 5...
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Page 18: Operation
Operation Put the gauge into operation. A warm-up time of at least ½ hour should be allowed; for exact pressure measurements a warm-up time of at least 2 hours is required. Status Indication For factory setting only STATUS ZERO LED status Meaning <STATUS>... -
Page 19: Zero> Adjustment
For adjusting the zero, operate the gauge under the same con- stant ambient conditions and in the same mounting orientation as normally. The output signal (measuring signal) is depending on the moun- ting orientation. The signal difference between the vertical and horizontal mounting orientation is: F.S. - Page 20 Operate the gauge for at least 1 hour (until the signal is stable). Briefly press the <ZERO> button with a pin (max. ø1.1 mm). The zero adjustment runs automatically. The <STATUS> LED blinks until the adjustment (duration ≤8 s) is completed.
- Page 21 It also permits to adjust an offset of the characteristic curve in order to • compensate for the offset of the measuring system or • obtain a slightly positive zero for a 0 … 10 V AD converter. The offset should not exceed 2% of the F.S. (+200 mV). At a higher positive offset, the upper limit of the measurement range is exceeded.
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Page 22: Activating The Factory Setting (Factory Reset)
Push the <ZERO> button again: Fine adjustment the zero adjustment value changes within 0...3 s: by one unit (push <ZERO> button in intervals of 1 s) Change of direction the zero adjustment changes its within 3...5 s: direction (the blinking frequency of the <STATUS>... -
Page 23: Deinstallation
Deinstallation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. - Page 24 Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Vent the vacuum system. Put the gauge out of operation. ...
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Page 25: Maintenance, Repair
We recommend checking the zero at regular intervals (→ 18). Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. -
Page 26: Disposal
Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment Products or parts thereof (mechanical and electric... -
Page 27: Conversion Table
Conversion Table mbar Torr mm HG mbar 1×10 0.75 1×10 1×10 1×10 0.01 1×10 0.01 1×10 7.5×10 1×10 0.75 0.01 1×10 Torr 1.332 1.332×10 133.32 1.3332 0.1332 mm HG 1 Pa = 1 N/m ETL Certification ETL LISTED The products CMR 371 … CMR 375 com- ply with the requirements of the following Standards: UL 61010-1, Issued: 2004/07/12 Ed: 2... -
Page 28: Ec Declaration Of Conformity
EC Declaration of Conformity We, Pfeiffer Vacuum, hereby declare that the equipment men- tioned below complies with the provisions of the Directive relat- ing to electromagnetic compatibility 2004/108/EC and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. - Page 29 Notes BG 5138 BEN / A (2012-11)
- Page 30 Notes BG 5138 BEN / A (2012-11)
- Page 31 Notes BG 5138 BEN / A (2012-11)
- Page 32 A P A S S I O N F O R P E R F E C T I O N Pfeiffer Vacuum stands for innovative and custom Vacuum solutions vacuum solutions worldwide, technological perfection, from a single source competent advice and reliable service.
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