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Summary of Contents for Pfeiffer Vacuum CMR 362
- Page 1 A P A S S I O N F O R P E R F E C T I O N CMR 361 … CMR 365 Ceramic Capacitance Gauge Operating instructions...
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Page 2: Product Identification
Product identification The details on the rating plate are required when communicating with Pfeiffer Vacuum. Therefore, you must specify these details. BG 5136 BEN/C (2019-06) -
Page 3: Validity
PT R24 602 DN 16 CF-R ® PT R24 603 8 VCR PT R24 610 ½" tube PT R24 611 DN 16 ISO-KF CMR 362 10'000 11'000 PT R24 612 DN 16 CF-R ® PT R24 613 8 VCR PT R24 620 ½"... -
Page 4: Intended Use
Intended use The Ceramic Capacitance Gauges from the CMR 36X series are vacuum gauges and enable the measuring of absolute pressure of gases in diverse measuring ranges (→ 3). Function The CMR gauge comprises a ceramic capacitive sensor element and an electronic circuit that converts the capacity into a direct voltage output signal. -
Page 5: Table Of Contents
Contents Product identification Validity Intended use Function Type 4 Patents Scope of delivery Safety 1.1 Symbols used 1.2 Personnel qualifications 1.3 General safety instructions 1.4 Responsibilities and warranty Technical data Installation 3.1 Vacuum connection 3.2 Electrical connection Operation 4.1 Indicate (to) 4.2 Calibrating the gauge 4.3 Factory reset Dismantling... -
Page 6: Safety
Safety Symbols used DANGER Information to prevent any kind of injury to persons. WARNING Information to prevent extensive damage to property and the environment. Caution Information on handling or use. Failure to observe can lead to malfunctions or minor material damage. Note Personnel qualifications Skilled personnel... -
Page 7: General Safety Instructions
Pass on safety instructions to all other users. Responsibilities and warranty Pfeiffer Vacuum shall assume no liability nor provide any warranty if the operating company or a third party • disregards this document • does not use the product for its intended purpose •... -
Page 8: Technical Data
Technical data Measuring range → "Validity" Accuracy PT R24 600 … PT R24 633 0.2% of measured value PT R24 640 … PT R24 643 0.5% of measured value Temperature influence at zero point PT R24 600 … PT R24 623 0.005% F.S./ °C PT R24 630 …... - Page 9 Identification of gauge Resistance 13.2 kΩ against supply earth Supply DANGER The gauge may only be connected to supply devices or measurement instruments that comply with the requirements of the earthed protective extra low voltage (PELV). Protection must be provided for the cable leading to the gauge.
- Page 10 Material against vacuum Flange, tube Stainless steel AISI 316L Sensor and diaphragm Ceramic (Al ≥99.5%) Connection sensor–diaphragm Glass ceramic solder Connection ceramic–metal AgTiCu-hard solder, Vacon 70 (28% Ni, 23% Co, 49% Fe) Internal volume ≤3.6 cm Maximum pressure (absolute) PT R24 600 … PT R24 603 300 kPa PT R24 610 …...
- Page 11 Dimensions [mm] OD½" DN 16 ISO-KF DN 16 CF-R 8 VCR female Weight ≤370 g BG 5136 BEN/C (2019-06)
- Page 12 Relation measuring signal analog – pressure Pressure p [mbar] F.S. sensor error overrange sensor error sensor error sensor error overrange overrange overrange underrange underrange underrange underrange Measuring signal U [V] p = (U - 1) × c (F.S.) Torr 0,125 12.5 0,094 Example: Gauge CMR 361 with 1,000 hPa F.S.
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Page 13: Installation
Installation WARNING WARNING: Risk of breakage Impacts can destroy the ceramic sensor. Avoid harsh impacts and never allow the product to drop to the floor. Vacuum connection DANGER DANGER: Overpressure in the vacuum system >100 kPa Opening tensioning pieces with overpressure in the vacuum system can lead to injuries as a result of flying parts, and escaping process medium could prove harmful to health. - Page 14 DANGER DANGER: Protective earth Products that are not properly grounded can cause fatal injuries in the event of a fault. The gauge must be galvanically connected with the earthed vacuum chamber. The connection must comply with the requirements of a protective bonding according to EN 61010: •...
- Page 15 Install the gauge vibration-free wherever possible. The installation position is arbitrary. To prevent condensate and particles accumulating in the measurement chamber, the installation position should be horizontal or upright, and a seal with centering ring and filter must be fitted where necessary. If calibration of the gauge is possible in the installed condition, you must ensure easy access to the buttons with a pin (→...
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Page 16: Electrical Connection
Electrical connection The gauge must be correctly connected to the vacuum equipment (→ 13). DANGER The gauge may only be connected to supply devices or measurement instruments that comply with the requirements of the earthed protective extra low voltage (PELV). Protection must be provided for the cable leading to the gauge. - Page 17 If no measurement cable is present, a measurement cable can be fitted in accordance with the following diagram. – 13K2 – Electrical connection Pin 1 Gauge identification Pin 2 Signal output (measuring signal) Pin 3 Signal common Pin 4 Supply Pin 5 Supply common...
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Page 18: Operation
Operation Start up the gauge. Warm-up period • for general pressure measurements (within >¼ of an hour the specifications) • for precision measurements and zero point >2 hours calibration Indicate (to) For factory setting only ZERO Condition Meaning <RUN> lights up Measuring mode is flashing Other mode, error,... - Page 19 Perform a zero adjustment for identical and constant ambient conditions and with the same installation position in which the gauge is normally used. The output signal is dependent upon the installation position. Shifting from a vertical upright position to a horizontal position constitutes: F.S.
- Page 20 Operate the gauge for at least 2 hours (until the measured value stabilizes). Push the <ZERO> button briefly with a pin (max. ø1.1 mm). The zero point is calibrated automatically. The LED <RUN> continues to flash until calibration is complete (duration ≤8 s). Press the button max.
- Page 21 Furthermore, an offset of the characteristic can be set with the ramp in order to • compensate an offset from the measurement system, or • to generate a slightly positive zero point for a 0 … 10 V AD-converter. The offset should not be greater than 2% of the F.S. (+160 mV). A greater positive offset will exceed the upper measuring range limit.
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Page 22: Factory Reset
Press the <ZERO> button again: Fine adjustment Zero-adjust value changes by one within 0...3 s: unit (press button approx. 1 x every second) Direction change Zero-adjust setting changes the within 3...5 s: direction (flash frequency of the LED <RUN> changes briefly) If the <ZERO>... -
Page 23: Dismantling
Dismantling WARNING WARNING: Risk of breakage Impacts can destroy the ceramic sensor. Avoid harsh impacts and never allow the product to drop to the floor. DANGER DANGER: Contaminated parts Contaminated parts can be harmful to health and to the environment. Inform yourself about any contamination before starting work. -
Page 24: Maintenance, Repair
We recommend that you check the zero point periodically (→ 19). Pfeiffer Vacuum shall assume no responsibility nor provide any warranty if the operating company or a third party performs the repair work. -
Page 25: Returning The Product
Returning the product WARNING WARNING: Shipping of contaminated products Contaminated products (e.g. by radioactive, toxic, corrosive or microbiological means) can be harmful to health and to the environment. Products should be free of contaminants during delivery wherever possible. Observe the shipping guidelines of the respective countries and transport companies. - Page 26 WARNING WARNING: Environmentally hazardous substances Products or parts thereof (mechanical and electrical components, operating fluid, etc.) can cause environmental damage. Dispose of the environmentally hazardous substances in accordance with local regulations. Breaking down the components After the product has been dismantled, the components must be separated into the following categories for disposal: •...
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Page 27: Conversion Table
Conversion table mbar Torr mm Hg mbar 1×10 0.75 1×10 1×10 1×10 0.01 1×10 0.01 1×10 7.5×10 1×10 0.75 0.01 1×10 Torr 1,332 1,332×10 133.32 1.3332 0.1332 mm Hg 1 Pa = 1 N/m ETL-Certification ETL LISTED The products CMR 361 … CMR 365 •... -
Page 28: Eu-Declaration Of Conformity
EU-Declaration of Conformity Pfeiffer Vacuum, hereby confirms that the following product conforms to EMC Directive 2014/30/EU and RoHS Directive 2011/65/EU. Ceramic Capacitance Gauge CMR 361 … CMR 365 Standards Harmonized standards and applied national standards and specifications: • EN 61000-6-2:2005 (EMC immunity to interference) •... - Page 29 Notes BG 5136 BEN/C (2019-06)
- Page 30 Notes BG 5136 BEN/C (2019-06)
- Page 31 Notes BG 5136 BEN/C (2019-06)
- Page 32 A P A S S I O N F O R P E R F E C T I O N Vacuum solutions Worldwide, Pfeiffer Vacuum stands for innovative and from a single source customized vacuum solutions, technological perfection, competent consultation and reliable service.
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