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Summary of Contents for Pfeiffer Vacuum PKR 36X
- Page 1 OPERATING INSTRUCTIONS Translation of the Original PKR 36X ∣ IKR 36X Pirani/cold cathode gauge ∣ Cold cathode gauge...
- Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support you in your individual application with maximum performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
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Page 3: Table Of Contents
Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Product description Function Switch and status display Identifying the product Scope of delivery... - Page 4 Malfunctions Troubleshooting Identifying errors at the measurement chamber Shipping Recycling and disposal 11.1 General disposal information 11.2 Dispose of gauges Service solutions by Pfeiffer Vacuum Spare parts Accessories 14.1 Accessory information 14.2 Ordering accessories Technical data and dimensions 15.1 General 15.2 Technical data...
- Page 5 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: PKR variants low voltage Tbl. 3: PKR variants high current Tbl. 4: IKR variants low voltage Tbl. 5: IKR variants high current Tbl. 6: Abbreviations used Tbl. 7: Illuminating diodes PKR Tbl.
- Page 6 List of figures List of figures Fig. 1: PKR measuring configuration Fig. 2: Switch and LED Fig. 3: Establishing the vacuum connection Fig. 4: Electronic unit Fig. 5: Connection diagram Fig. 6: Measurement cable and Hirschmann cable socket Fig. 7: Relation between measuring signal and pressure Fig.
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Page 7: About This Manual
Declarations of Conformity (Component of these instruc- tions) Tbl. 1: Applicable documents You can find these documents in the Pfeiffer Vacuum Download Center. 1.1.2 Variants This document applies to products with the following part numbers: Part number Designation PT T02 140 010... -
Page 8: Target Group
IKR variants high current You can find the part number on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. Information that relates to only one of the products is indicated accordingly. -
Page 9: Pictographs
About this manual 1.3.2 Pictographs The pictographs used in the document indicate useful information. Note Wear laboratory gloves Perform a visual inspection 1.3.3 Stickers on the product This section describes all the stickers on the product along with their meaning. Rating plate The rating plate is located on the back of the device. -
Page 10: Trademark Proof
About this manual 1.4 Trademark proof ● FullRange ® is a trademark of Pfeiffer Vacuum GmbH. ● Hirschmann ® is a trademark of Hirschmann Electronics GmbH. ● Scotch-Brite ® is a registered trade name of 3M Company. 10/60... -
Page 11: Safety
Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during installation DANGER Danger to life due to dangerous contact voltage Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. - Page 12 ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
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Page 13: Safety Precautions
Safety WARNING Health hazards due to cleaning agent The cleaning agents used cause health hazards. ► When handling cleaning agents, observe the applicable regulations. ► Adhere to safety measures regarding handling and disposal of cleaning agents. ► Be aware of potential reactions with product materials. Risks when shipping WARNING Risk of poisoning from contaminated products... -
Page 14: Proper Use
Use the product according to its intended purpose ► Operate the gauge with a Pfeiffer Vacuum total pressure measuring and control unit or with an evaluation unit provided by the customer. ► Install, operate and maintain the gauge exclusively as prescribed in these operating instructions. -
Page 15: Personnel Qualification
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training. -
Page 16: Operator Requirements
4. Comply with the application limits. 5. Observe the technical data. 6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance of the product are not answered by these operating instructions. – You can find information in the Pfeiffer Vacuum service area. -
Page 17: Product Description
Product description 3 Product description 3.1 Function PKR gauge The gauge has 2 measuring systems: ● Pirani measuring system ● Cold cathode measuring system functioning to the principle of the inverted magnetron The Pirani measuring circuit is switched on at all times. The cold cathode measuring circuit controlled by the Pirani measuring circuit is only activated by the gauge when the pressures reach p <... -
Page 18: Identifying The Product
Illuminating diodes IKR 3.3 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. 1. Read the data on the product rating plate. 2. Record this data. 3. Always have all rating plate specifications to hand. -
Page 19: Transport And Storage
Transport and storage 4 Transport and storage 4.1 Transporting the product NOTICE Damage caused by incorrect transportation Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod- uct. ► Comply with the instructions for safe transportation. Packing We recommend keeping the transport packaging and original protective cover. -
Page 20: Installation
Installation 5 Installation 5.1 Establishing the vacuum connection DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010. -
Page 21: Electronic Unit
6. Remove the protective cap and store it in a safe place. 7. Assemble the gauge with vacuum components from the Pfeiffer Vacuum Components Shop the vacuum system. 8. If it was previously necessary to remove the electronic unit of the gauge, assemble the electronic unit once again. -
Page 22: Fig. 4: Electronic Unit
Installation NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ► When working on high or ultra high vacuum systems, always wear clean, lint-free and powder- free laboratory gloves. -
Page 23: Establishing The Electric Connection
2. Tighten the locking screw on the Hirschmann cable socket. – Tightening torque: ≤ 0.2 Nm 3. Connect the gauge to a Pfeiffer Vacuum total pressure measuring and control unit, or to an evalu- ation unit provided by the customer. -
Page 24: Fig. 6: Measurement Cable And Hirschmann Cable Socket
Installation Fig. 6: Measurement cable and Hirschmann cable socket Manufacturing a measurement cable You can find additional information regarding measurement cable type and conductor cross-sections in the technical data. 1. Observe the following steps to ensure optimum signal quality, whereby ground loops, differences in potential or EMC will influence the measuring signal. -
Page 25: Operation
6 Operation Controlling the IKR gauge with a Pirani gauge For Pfeiffer Vacuum total pressure measuring and control units with at least 2 gauge con- nections, the IKR gauge can be controlled with a Pirani gauge, for example. Once the supply voltage has been established, the measuring signal is available at the electrical con- nection between pins 2 and 3. -
Page 26: Converting The Pkr Measuring Signal And Pressure
Operation 6.2 Converting the PKR measuring signal and pressure 1E+04 1E+02 torr 1E+00 1E–02 1E–04 1E–06 1E–08 1E–09 0.0 0.5 10.5 1.217 1.397 U [V] Fig. 7: Relation between measuring signal and pressure p Pressure Measuring signal [V] (output voltage) Measuring signal (U) Pressure (p) Constant (c) Constant (d) -
Page 27: Converting The Ikr Measuring Signal And Pressure
Operation 6.3 Converting the IKR measuring signal and pressure 1E+00 1E–01 1E–02 torr 1E–03 1E–04 1E–05 1E–06 1E–07 1E–08 1E–09 1E–10 0.0 0.5 1.0 1.5 10.0 U [V] Fig. 8: Relation between measuring signal and pressure p Pressure Measuring signal [V] Measuring signal (U) Pressure (p) Constant (c) -
Page 28: Fig. 9: Pressure Range > 10 Hpa Exclusively With Pirani Operation Pkr
Operation p [hPa] Freon 12 –1 Water vapor –2 –3 –2 –1 4 6 8 4 6 8 4 6 8 4 6 8 [hPa] Fig. 9: Pressure range > 10 hPa exclusively with Pirani operation PKR p [hPa] –1 –2 –3 –4... -
Page 29: Tbl. 12: Calibration Factors For The Pressure Range < 10 Hpa Pkr And Ikr
Operation p [hPa] Xe Kr Ne He –3 –4 –5 –6 –7 –7 –6 –5 –4 –3 –2 [hPa] Fig. 11: Displayed pressure IKR Calibration factors In the pressure range < 10 hPa, the display is linear. Gas and vapor mixtures Process gases are mostly mixtures of gas and vapor. -
Page 30: Ignition Delay
Operation Calculating pressure for gases other than air ► Calculate the effective pressure using the following formula: = C × p ● P = Effective pressure ● C = Calibration factor ● p = Displayed pressure (gauge calibrated for air) 6.5 Ignition delay Cold cathode measuring systems have an ignition delay upon activation. - Page 31 Operation Influencing the degree of contamination It is possible to influence the level of contamination to a certain extent. Particular care should be afford- ed for vapors which are separated in the plasma (e.g. from the cold cathode measuring system). ►...
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Page 32: Disassembly
Disassembly 7 Disassembly DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010. -
Page 33: Fig. 12: Disassembling The Gauge
Disassembly Fig. 12: Disassembling the gauge 1 Seal with centering ring Tensioning piece 2 Protective cap Disassembling the gauge 1. Loosen the locking screw of the Hirschmann cable socket on the gauge. 2. Disconnect the measurement cable from the gauge. 3. -
Page 34: Maintenance
The dominant cold cathode measuring circuit for the low pressure range (< 1 × 10 hPa) has under- gone a fixed calibration by Pfeiffer Vacuum ex factory. HV calibration of the Pirani measuring circuit is performed automatically during operation for pressures 1 × 10 hPa. -
Page 35: Maintaining The Ikr Gauge
– The calibration was not successful this time. 8.2 Maintaining the IKR gauge Pfeiffer Vacuum has calibrated the gauge to standard values at the factory. The gauge is maintenance- free. Replacing faulty components ► Replace the ionization chamber and the ignition aid or the complete measurement chamber (re- placement sensor) only if the unit is faulty. -
Page 36: Replacing The Ignition Aid
Maintenance Required tools ● Allen key, WAF 2 ● Pincers for circlip ● Tweezers Fig. 14: Disassembling the gauge 1 Circlip Set screw 2 Ionization chamber Electronic unit 3 Measurement chamber Disassembling the gauge 1. Remove the gauge from the vacuum system. 2. -
Page 37: Fig. 15: Removing The Ignition Aid
Maintenance Fig. 15: Removing the ignition aid 1 Ignition aid Mounting tool Removing the ignition aid ► Remove the ignition aid. Fig. 16: Inserting the ignition aid in the mounting tool 1 Ignition aid Mounting tool 2 Serrated end of ignition aid Inserting the ignition aid in the mounting tool 1. -
Page 38: Cleaning Of Components
► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device. -
Page 39: Assembling The Gauge
Maintenance Cleaning of components 1. Disassemble the gauge to the degree required. – Do not bend the anode. 2. Remove the old ignition aid. 3. Only perform work on the sealing surfaces concentrically. 4. Rub the inside walls of the measurement chamber up to the groove of the circlip with the polishing cloth until shiny. -
Page 40: Fig. 18: Switch For Cal Calibration Value
Maintenance Fig. 18: Switch for CAL calibration value 1 Calibration value for replacement sensor (complete measurement chamber) Setting the calibration value of the replacement sensor When replacing the complete measurement chamber, the calibration value must be set on the replace- ment sensor. - Page 41 Maintenance 8. Secure the grub screw on the side of the electronic unit. 9. Perform a manual ATM and HV calibration. Fitting the IKR gauge 1. Replace the ignition aid as required (see chapter “Replacing the ignition aid”, page 36). 2.
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Page 42: Malfunctions
Malfunctioning of the equipment as a direct result of wear or wear parts (e.g. ionization chamber) is not covered by the warranty. Rectifying malfunctions (reset) In the event of a malfunction, Pfeiffer Vacuum recommends disconnecting the supply volt- age, and then reconnecting after 5 seconds. 9.1 Troubleshooting... -
Page 43: Identifying Errors At The Measurement Chamber
Malfunctions Disturbance Possible Remedy cause "ST" "HV- ST" Voltage at signal output Flashes EEPROM er- Switch the gauge off, wait 5 constantly < 0.3 V seconds and then switch it back on (reset). Replace the gauge. Signal constant with ap- Lights up Lights Measurement... -
Page 44: Shipping
► Comply with the instructions for safe shipping. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Instructions for safe shipping ► Do not ship microbiological, explosive or radioactively contaminated products. -
Page 45: Recycling And Disposal
11.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron –... -
Page 46: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 47 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 48: Spare Parts
DN 25 ISO-KF PT 120 302 -T DN 40 ISO-KF PT 120 306 -T DN 40 CF-F PT 120 310 -T PKR 36x C DN 25 ISO-KF PT 120 303 -T DN 40 ISO-KF PT 120 307 -T DN 40 CF-F... -
Page 49: Accessories
ActiveLine on our website. 14.1 Accessory information Measurement cable Measurement cable in different lengths, for connecting to a Pfeiffer Vacuum total pressure measuring and control unit Mating connector Cable socket for fabrication of the application-specific connecting cable... -
Page 50: Technical Data And Dimensions
Technical data and dimensions 15 Technical data and dimensions 15.1 General mbar Torr | mm Hg mbar 1 · 10 0.75 1000 1000 1 · 10 0.01 0.01 1 · 10 1 · 10 7.5 · 10 0.75 1 · 10 0.01 1000 Torr | mm Hg 1.33... -
Page 51: Tbl. 22: Electrical Data Pkr
2 × 4.7 Ω, short circuit proof Load impedance (minimum load) ≥ 10 kΩ, short circuit proof The minimum voltage for the supply unit must be increased proportional to the cable length. Pfeiffer Vacuum measuring and control equipment complies with this requirement. 51/60... -
Page 52: Tbl. 23: Electrical Data Ikr
≤ 95 % (non-condensing) 1 × 10 to 1 × 10 Mounting orientation Arbitrary The minimum voltage for the supply unit must be increased proportional to the cable length. Pfeiffer Vacuum measuring and control equipment complies with this requirement. 52/60... -
Page 53: Tbl. 25: Ambient Conditions
), glass Feedthrough (ring) Stainless steel (1.4435) Feedthrough (anode) Molybdenum (Mo) Feedthrough (pin) Nickel alloy (Ni) Feedthrough (PKR 36x C, IKR 36x C) Ceramic coated Ionization chamber Stainless steel (1.4301, 1.4016) Ignition aid Stainless steel (1.4310) Tbl. 27: Substances in contact with the media... -
Page 54: Dimensions
Technical data and dimensions 15.3 Dimensions DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-F Fig. 22: Dimensions Dimensions in mm. 54/60... -
Page 55: Etl Certification Pkr
ETL LISTED The products PKR 360, PKR 360 C, PKR 361 and PKR 361C - conform to the UL standard UL 61010-1. - are certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1-12. 3103457... -
Page 56: Etl Certification Ikr
ETL LISTED The products IKR 360, IKR 360 C, IKR 361 and IKR 361C - conform to the UL standard UL 61010-1. - are certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1-12. 3103457... -
Page 57: Declaration Of Conformity
Restriction of the use of certain hazardous substances, delegated directive 2015/863/EU Harmonized standards and applied national standards and specifications: DIN EN 61000-6-2:2006-03 DIN EN 61000-6-3:2011-09 DIN EN 61010-1:2011-07 DIN EN 61326-1:2013-07 Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany (Daniel Sälzer) Asslar, 2020-03-19 Managing Director... -
Page 58: Declaration Of Conformity
Restriction of the use of certain hazardous substances, delegated directive 2015/863/EU Harmonized standards and applied national standards and specifications: DIN EN 61000-6-2:2006-03 DIN EN 61000-6-3:2011-09 DIN EN 61010-1:2011-07 DIN EN 61326-1:2013-07 Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany (Daniel Sälzer) Aßlar, 2020-03-19 Managing Director... - Page 59 59/60...
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