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QNP3 Hardware Manual
List of Figures
Figure 1-1:
Single-Axis Stage Travel and Voltage Relationship
Figure 2-1:
QNP3-100XYAZ-030-10 Dimensions
Figure 2-2:
QNP3-100XYAZ-100-10 Dimensions
Figure 2-3:
QNP3-150XYAZ-200-20 Dimensions
Figure 2-4:
QNP3-100XYAZ-030-10 Mounting Plate (-MP) Dimensions
Figure 2-5:
QNP3-100XYAZ-100-10 Mounting Plate (-MP) Dimensions
Figure 2-6:
QNP3-150XYAZ-200-20 Mounting Plate (-MP) Dimensions
Figure 2-7:
QNP3-100XYAZ-030-10 Tabletop (-TT1) Dimensions
Figure 2-8:
QNP3-100XYAZ-100-10 Tabletop (-TT1) Dimensions
Figure 2-9:
QNP3-150XYAZ-200-20 Tabletop (-TT1) Dimensions
Figure 2-10:
Mounting Hole Locations
Figure 2-11:
Mounting Hole Locations (Tabletop)
Figure 3-1:
Piezo Actuator Wiring
Figure 3-2:
Machine Direction
Figure C-1:
Strain (displacement) behavior of a ferroelectric material like PZT with an applied electric
field driven to its excitation limits
Figure C-2:
Typical hysteresis curve of a piezoelectric stack actuator operating from -30V to +150V 45
Figure C-3:
Force vs. displacement output of a piezo actuator at various applied voltages
Figure C-4:
Displacement of a piezo stage or actuator with a constant external load
Figure C-5:
Displacement of a piezo stage or actuator driving against an external spring of stiffness
ke
Figure C-6:
Estimated power dissipated as a function of frequency and applied voltage for a typical
piezo actuator with a 4 µF capacitance
Figure C-7:
Raw measurement results from an accuracy and linearity test of a 100 μm piezo stage 53
Figure C-8:
Example accuracy error calculated from the measurement data shown in Figure 1-7
Figure C-9:
Illustration showing how linearity is calculated based on measurement data taken from a
100 μm piezo nanopositioning stage
Figure C-10:
Maximum sinusoidal peak-peak voltage of a given amplifier with various piezo stack
capacitances
Figure C-11:
Voltage and current waveforms for the profile commanded in Example 1
Figure C-12:
Voltage and current waveforms for the profile commanded in Example 2
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