Summary of Contents for LEYBOLD MAG integra Series
Page 1
MAG integra Turbomolecular Pumps with Magnetic Bearing and Frequency Converter Installation & Operating Instructions 300324726_002_C0 Part Nos. 411300Vxxxx 411600Vxxxx 411700Vxxxx 412200Vxxxx and pumps modified by Leybold...
Page 4
Operating Instructions and follow the information so as to ensure optimum and safe working right from the start. The Leybold MAG integra has been designed for safe and efficient opera- tion when used properly and in accordance with these Operating Instructions.
MAG W 2200 iP MAG W 2200 iPL Fig. 1.1 MAG integra models Description The Leybold MAG integra pumping system consists of: The MAG integra turbo pump ■ The MAG are turbomolecular pumps uti li zing magnetic bearings.They are designed to evacuate va cuum chambers down to pressure values in the high-vacuum range.
The frequency converter has the following interfaces: a Profibus or another optional interface, see Section 4.2 ■ an interface for the Leybold Service (RS 232) and ■ three connections for accessories, e.g. valves. ■...
Keep the packaging Make sure that the product has not been damaged during transportation. If this unit is damaged contact your carrier and inform Leybold if necessary. To prevent damages to the pump, use the packaging pro vided for storage and transport.
Both pump and frequency converter are intended for being operated within closed rooms. The use of any accessories which have not been specified by Leybold is only allowed after approval by Leybold. The supplied integrated MAG.DRIVE iM frequency converter will be required for the operation of the turbomolecular pump.
Page 26
ISO 3669 (CF flange connections). Basically the frequency converter can be detached from the pump. However, this must only be done by an expert trained by Leybold. For this consult with Mount the turbomolecular pump as close as possible to the vacuum chamber.
Page 27
If several turbomolecular pumps are installed to the vacuum chamber of the Vibration influence same system, there is the risk of interference (vibration interference between the pumps). If such a risk exists please contact Leybold Application Support. The standard pump fixing is sufficient for earthquake protection. If required fix Earthquake protection the system to the bottom or to the walls.
Rotor exchange or 20,000 cycles at the latest. Such maintenance work can only be done by the Leybold Service. If required contact the Leybold service center nearest to your location. You can find the address on our internet page www.leybold.com.
(def- ault 1000 contacts or 1 hour). In this case maintenance is required. Only the Leybold service can change the touch-down bear ings. Leybold Service Whenever you send us in equipment, indicate whether the equipment is con- taminated or is free of substances which could pose a health hazard.
Page 50
Person to contact: Calibration: Factory-calibr. Phone : Fax: Quality test certificate DIN 55350-18-4.2.1 End user: A. Description of the Leybold product: Failure description: Material description : Catalog number: Additional parts: Serial number: Application-Tool: Application- Process: Type of oil (ForeVacuum-Pumps) : B.
Page 52
Sales and Service Germany America Great Britain Leybold Japan Co., Ltd. Tsukuba Technical Service Center 1959, Kami-yokoba Leybold UK LTD. Leybold GmbH Tsukuba-shi, Ibaraki-shi 305-0854 Unit 9 Sales, Service, Support Center (3SC) Japan Silverglade Business Park Bonner Strasse 498 Leybold USA Inc.
Need help?
Do you have a question about the MAG integra Series and is the answer not in the manual?
Questions and answers