LEYBOLD MAG W 2010 C Operating Instructions Manual
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LEYBOLD MAG W 2010 C Operating Instructions Manual

Turbomolecular pumps with magnetic bearing & electronic frequency converter
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LEYBOLD VACUUM
Vacuum Solutions
Application Support
Service
GA 05.136/2.02
MAG W 2010 C
Turbomolecular Pump
with Magnetic Bearing
MAG.DRIVE 2000
Electronic Frequency
Converter
Software version 1.4.xx
Cat. Nos.
121 32
121 35 /36
Operating Instructions

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  • Page 1 LEYBOLD VACUUM Vacuum Solutions Application Support Service GA 05.136/2.02 MAG W 2010 C Turbomolecular Pump with Magnetic Bearing MAG.DRIVE 2000 Electronic Frequency Converter Software version 1.4.xx Cat. Nos. 121 32 121 35 /36 Operating Instructions...

  • Page 2: Table Of Contents

    Removing the pump from the system ..36 wings for the purge gas connector. Service at Leybold’s ....37 •...

  • Page 3: Description

    In addition to the turbine stage it has a screw stage. The MAG W 2010 C is specifically designed for the The rotor is machined from one piece and the geometry needs of the semiconductor industry.

  • Page 4: Function And Design Of The Mag.drive

    2 fuses TMS (Temperature Management System; no fun- complete operation time of the pump. ction when operating a MAG W 2010 C) The converter monitors continously all important opera- The optional plug-in control has 10 keys and 1 backlit ting parameters and provides warning and alarm signals LCD with 2 lines, each 16 characters.
  • Page 5 Description MAG.DRIVE 2000 Prog Enter Start Stop MAG.DRIVE 2000 with plug-in control Fig. 1 Front panel X14 Connection control plug X19 Mains connection X20 Connection magnetic bearing X21 Connection pump motor and Fig.2 Rear panel with connections GA 05.136/2.02 - 10/98...

  • Page 6: Standard Specification

    Description 1.5 Standard specification 1.6 Technical data MAG W 2010 C The turbomolecular pumps are shipped complete, Pumping speed for N measured sealed in a PE bag containing a desiccant. The maxi- with splinter guard (PNEUROP) 1650 l·s mum effective life time of the desiccant is one year.

  • Page 7: Ordering Information

    Description Technical data 1.7 Ordering data (continued) MAG.DRIVE Order No. MAG W 2010 C 121 32 Voltage range 200 - 240 V +10% -15% Line supply frequency 50 / 60 Hz Seal Kit DN 250 200 91 641 Load Stand-by approx.
  • Page 8 Description with cable length 1.5 m with cable length 10 or 20 m Ø 3.3 122.4 Fig. 3 Dimensional drawing of the MAG.DRIVE; dimensions in mm GA 05.136/2.02 - 10/98...
  • Page 9 480 Hz Purge gas flow 36 sccm Nitrogen with splinter guard Forepump D 65 B + WS 251 Pipe 1 m DN 40 according to PNEUROP Fig. 5 MAG W 2010 C: operation diagram for nitrogen GA 05.136/2.02 - 10/98...
  • Page 10 Description Fig. 6 MAG W 2010 C, Dimensions in mm GA 05.136/2.02 - 10/98...

  • Page 11: Installation

    If this unit is dama- Only suitably qualified personnel are per- ged contact your carrier and inform LEYBOLD if neces- mitted to work on the pump or converter. sary. For storage of the product, use the packaging pro- Personnel must be completely knowledgea- vided.

  • Page 12: Operating Environment

    Installation 1 Aluminum cover 2 Screws Fig. 7 Removing the transport seal 2.3 Operating environment 2.4 Connecting the MAG to the vacuum chamber When using the MAG inside a magnetic field, the magne- tic induction at the pump housing must not exceed 5 mT; The MAG is shipped in a sealed PE bag with desiccant.
  • Page 13 Installation Intake flange Forevacuum flange Purge gas connector Cooling water out (behind the pump) Cooling water in Fig. 8 Connection elements Foreign objects entering the pump through the high-va- cuum flange can cause serious damage to the rotor. Correct That’s why the splinter guard must always be installed. Damages caused during operation without the splinter guard are excluded from warranty.
  • Page 14 The valve be absorbed by the system. To accomplish should normally be closed with power off. this, use all 12 bolts provided by Leybold for fastening the high-vacuum flange; see also Fig. 11.
  • Page 15 Installation Bolts: M10 x 35 / M10 x 40 Quality 12.9 according to DIN 898: 0,2% yield strength > 1080 N/mm Bolt torque = 40 Nm Sealing (FPM) l > 15 mm in aluminium l > 10 mm in steel Splinter guard Max.

  • Page 16: Connecting The Backing Pump

    Installation Key to Fig. 12 Turbomolecular pump Forevacuum gauge point Backing pump Anti-vibration bellows Forevacuum valve High vacuum valve Purge gas connection Valve in the roughing line Electronic frequency converter — — — — roughing line; recommended if shorter cycle times are to be achieved —...
  • Page 17 Installation M < 150 Nm < 150 Nm Cooling water out 1/2“ tube Cooling water in 2 x 3/8“ tube Fig. 13 Maximum torques for the forevacuum connection and connecting the cooling water GA 05.136/2.02 - 10/98...

  • Page 18: Connecting The Cooling Water

    Installation minimum °C Temperature Fig. 14 Recommended cooling water flow as a function of cooling water temperature 2.6 Connecting the cooling Connect the cooling water to the connectors; see Fig. 13. In case you want to use only 1 inlet connector close the water other one with the blind plug provided with the pump.

  • Page 19: Connecting The Purge Gas

    Installation Fig. 15 Connecting the purge gas 2.7 Connecting the purge The MAG is equipped with a purge gas connector. To ensure protection of the pump a constant purge gas throughput of 30 to 40 sccm is required. You may use a flow controller to ensure the flow.

  • Page 20: Installing The Mag.drive

    • To connect the pump to the converter the prescribed able connector cable. Leybold cables must be used. Peak voltages of up to 130 V may be pre- sent at the connector line between the fre- •...

  • Page 21: Pump Connection

    Installation BEARING DRIVE TMS (no function) MAINS Control plug Fig. 16 Block wiring diagram 2.8.2 Pump connection Connect the converter (X20) to the magnetic bearing connection of the pump (X23) using the BEARING cable. Connect the converter (X21) to the pump motor connec- tion (X25) using the DRIVE/TMS cable.
  • Page 22 Installation X14 50 pole Sub-D I/O PIN SIGNAL Relay 1 n.o. FAILURE 18 Relay 1 com. FAILURE 34 Relay 1 n.c. FAILURE Relay 2 n.o. NORMAL 19 Relay 2 com. NORMAL 35 Relay 2 n.c. NORMAL OPERATION OPERATION OPERATION Relay 3 n.o. WARNING 20 Relay 3 com.
  • Page 23 Installation Relay Failure X14.18 No failure X14. Relay Warning Warning X14.20 X14.3 X14.36 Start command applied Relay Normal Operation & X14.19 Actual frequency X14.2 Normal operation X14.35 Motor- or bearing- temperature Threshold Motor current Function Threshold signal relay Act. frequency Relay option 1/2/3/4 Threshold X14.23/24/25/26...

  • Page 24: Interface Connector

    Installation +5V Power supply for plug-in control n.c. -5V Power supply for plug-in control Reset out for plug-in control select plug-in control input Boot input Fig. 21 Connector assignment, interface X7 (front side) 2.8.4 Interface connector Analog inputs The converter has two analog inputs with a 10-bit reso- A 9-pin sub-D socket is provided at the front panel to lution.

  • Page 25: Operation

    Operation Forevacuum pressure/mbar Time/s Fig. 22 Curve for safe venting of the MAG; pressure rise as a function of venting time 3 Operation 3.1 General operation rules • Do not stop the MAG with the mains. Use the STOP key or a stop command. Switching off the mains while The magnetic bearing in the MAG are immune to wear.

  • Page 26: Operation With The Start And Stop Keys

    Operation 3.2 Operation with the Significance of the lamps START and STOP keys (green) Is lit if communication has been established via the Switching on interface. • Switch on the MAG.DRIVE. STATUS (green/red) The MAIN LED lights green. Red, steady light = Failure In case of corresponding connection the backing pump Red, flashing...

  • Page 27: Remote Control

    Operation +15 V ~ 3 kOhm X14.48 Shutdown X14.47 X14.11 Operating mode: REMOTE 0 V = 0 Programming only via 15 V = 1 X14.12 serial interface START Start delay time X14.30/31 START interface START & pump START key pad STOP key pad ≥1...

  • Page 28: Plug-In Control

    Plug-in control 4 Plug-in control 4.1 Operation with plug-in Switching off control • Press the STOP key. Deceleration Observe the general operation rules given 20.0 A 400 Hz in Section 3.1 will be displayed. When the display reads Ready Switching on 0.0 A 0 Hz •...
  • Page 29 Plug-in control Function • Returns to the operating display from the storage procedure without storage. • Returns to the operating display from any point of the basic menu. Acceleration • No function 17.5A 254Hz HOK Prog • Selects the programming menu from the operating display. •...

  • Page 30: Operating Statuses

    Plug-in control 4.2 Operating statuses Overload The speed is continuously monitored and controlled. If Switch-On Guard the speed, even at maximum current, cannot be held at the setpoint, as a result of external influences, e.g. The converter goes into the “Switch On Guard” operating excessive gas intake, the speed reduces until the con- status after the power is switched on and after initializa- verter goes into the „Overload“...
  • Page 31 Plug-in control Mains switched on Initialization Switch On Guard After a failure, quit a second time Ready START command STOP command Start Delay Mains ok Mains failure Acceleration Frequency > P 25 x P24 Mains failure Mains Down Normal Operation Frequency <...

  • Page 32: Operating Menu

    Plug-in control 4.3 Operating menu 4.3.1 Basic menu Menu item Description Adjustable value / option cess min. max. stan- Unit value value dard Ready Operating display Ready 0.0 A 0 Hz Enter Freq. Setpoint Sets the speed for operation !! Every change is directly written Freq.

  • Page 33: Settings Converter

    Plug-in control 4.3.2 Settings converter Set Converter Menu item Description Adjustable value / option cess Enter min. max. stan- Unit Option Relay 1 value value dard Bearing Temp. Motor Current Option Relay 1 Relay with change-over Threshold bearing Frequency °C contact;...

  • Page 34: Settings Pump

    Plug-in control 4.3.3 Settings pump Menu item Description Adjustable value / option cess min. max. stan- Unit value value dard Set Pump Normal Operation Threshold for normal operation corresponding to the Enter frequency setpoint Normal Operation Max. Accel. Time Monitor time for acceleration 95 % and overload 3600...

  • Page 35: Total View Of The Menu

    Plug-in control 4.3.6 Total view of the menu GA 05.136/2.02 - 10/98...

  • Page 36: Maintenance

    Therefore the converter must be cleaned after 5 years. Only the Leybold service can change the rotor and clean the converter. 5.1 Removing the pump from the system Disconnect the cables from the pump.

  • Page 37: Service At Leybold's

    This declaration of contamination is necessary to comp- ly with legal requirements and to protect our staff. If you send a pump to Leybold indicate whether the Leybold must return any pump without a declaration of pump is free of substances damaging to health or contamination to the sender’s address.

  • Page 38: Troubleshooting

    Troubleshooting 6 Troubleshooting In case of a malfunction, the MAG will be braked and the first line of the display shows FAILURE Malfunction messages can be cancelled once the pump has come to a stop and after the malfunction has been rectified;...
  • Page 39 (65 °C). perature 45 °C. Unbalanc. PVW13 Mechanical shocks, perhaps due to tool If warning message persists contact Leybold Unbalanc. PVW24 maintenance. service. Unbalanc. PZ12 Shock venting.

  • Page 40: Failure Messages

    Replace the cable if it is damaged or in case the measurement of the resistance shows abnormal values (> 3.4 kΩ) now. Converter failure. Contact Leybold service. Bearing Temp. Cooling water flow too low or cooling Apply cooling water according to specifications.
  • Page 41 0 and 5 BEARING cable or connector damaged. Check BEARING connector and cable for Hz. The code designates the bent pins. Contact Leybold service if the affected axis. cable is damaged. Mechanical shocks, possibly due to tool Acknowledge failure message and restart maintenance.
  • Page 42 Measures Bearing Temp. SC Temperature sensor Pt 100 short-circuited. Repeat step 1 of „failure Bearing Temp.“. Contact Leybold service if the resistance of The magnetic bearing tem- the sensor is less than 100 Ω. perature sensor reads a tem- perature lower than 1 °C.

  • Page 43: Malfunctions

    Display malfunction, confu- Converter failure. Switch the converter off and on again. If the sing messages. No reaction converter still malfunctions contact Leybold when pressing keys. service. Vacuum chamber pressure Purge gas or venting valve open or malfunc- Check and replace valve if required.

  • Page 44: Certifications

    Certifications EEC Manufacturer’s Declaration in the sense of EEC Directive on Machinery 89/392/EWG, Annex IIb We - LEYBOLD Vacuum GmbH - herewith declare that Applied harmonized standards: operation of the incomplete machine defined below, is • EN 292 Part 1 & 2 Nov.
  • Page 45 Certifications EC declaration of manufacture in accordance with Art. 4 paragraph 2 of EC directive 89/392/EEC Document No.: MSR 0898 / MAG.DRIVE 2000 Manufacturer: REFU elektronik GmbH Product Identification: MAG.DRIVE 2000 Catalog No.: 121 35, 121 36, 121 37 The product indicated solely for fitting in another machine. Commissioning is prohibited until the conformity of the end product with EC directive 89/392/EEC has been established.
  • Page 46 Certifications EC declaration of conformity Document No.: NSR 0898 / MAG.DRIVE 2000 Manufacturer: REFU elektronik GmbH Product Identification: MAG.DRIVE 2000 Catalog No.: 121 35, 121 36, 121 37 Herewith, we declare that this product, as a result of ist design and type of construction, and the version marketed by us, correspond to the basic health and safety regulations specified in the EEC Directives.
  • Page 47 Certifications Factory certificate Document No.: EMV 0898 / MAG.DRIVE 2000 Manufacturer: REFU elektronik GmbH Product Identification: MAG.DRIVE 2000 Catalog No.: 121 35, 121 36, 121 37 The named product, when put to ist intended use, satisfies the requirements of Directive 89/336/EEC concerning electromagnetic compatibility. The applicable measurements were made taking into account the following standards: EN 50081 Part 2...

  • Page 48: Forms

    Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara- tion.
  • Page 49 Process Gas: Was the turbopump replaced? Yes; If yes, replacement pump P/N: replacement pump S/N: Date Installed: Date Removed: Date Received: Date Examined: Examined by: Received Condition: Findings: Cause of Failure: Recommendations: Remarks/Questions: LEYBOLD VACUUM LEYBOLD AG GA 05.136/2.02 - 10/98...
  • Page 50 MAG 1600 C, CT MAG.DRIVE 2000 (August 1998) MAG W 1600 C, CT MAG 2000 C, CT MAG W 2000 C, CT GA 05.136/1.02 MAG W 2010 C MAG.DRIVE 2000 (July 1998) GA 05.136/2.02 MAG W 2010 C MAG.DRIVE 2000 (October 1998)

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Mag.drive 2000

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