Varian 959D Manuals

Manuals and User Guides for Varian 959D. We have 1 Varian 959D manual available for free PDF download: Operation Manual

Varian 959D Operation Manual

Varian 959D Operation Manual (82 pages)

Dry Leak Detector

Brand: Varian | Category: Security Sensors | Size: 2.51 MB

Table of Contents

Hazard and Safety Information
4
Varian Services
10
Contacting Varian Vacuum Technologies
10
Table of Contents
11
Section 1. Introduction
15
- General Description
  15
- Unpacking
  17
  - Unpacking Instructions
    17
  - Removing the 959D from the Skid
    18
- Preparation for Operation
  19
- Installation
  19
  - Electrical Connections
    19
  - Gas Requirements
    20
    
    Helium
    20
    
    Nitrogen (Optional)
    20
  - Clean Room Use of the Leak Detector
    21
- Vacuum System Description
  21
  - Measurement System
    22
- Internal Valving
  24
- Specifications
  27
Section 2. Operation
29
- Operator Interface
  29
- 959D Startup Procedure
  35
- Changing the Audible Threshold
  36
- Running a Leak Test
  36
  - Basic Test Procedure
    36
  - Out-Of-Range Situations
    38
  - Testing above 200 Mtorr
    38
- Calibration and Tuning
  39
- Nitrogen Purge Option
  44
- Residual Background Check
  45
  - Measuring the Background
    45
  - Zero the Background
    46
- Shutdown and Restart Procedures
  46
  - Standby
    46
  - Shutdown
    46
  - Starting after Short-Term Shutdown (Standby)
    47
  - Temporary Power Loss
    47
Section 3. Maintenance and Parts Replacements
49
- Safety and Maintenance
  49
  - AC Power
    49
  - Static Charge
    49
  - Ion Source
    49
  - O-Rings
    50
  - Cleaning Kit
    50
  - Maintenance Schedules
    51
- Cleaning the Test Port
  52
- Removing the Cover
  53
- Cleaning or Replacing the Spectrometer Tube
  53
- Replacement Parts
  67
- Accessories
  67
Appendix A. Introduction to Leak Detection
69
- Why Leak Testing Is Necessary
  69
- Classes of Leak Detection
  69
- Terminology
  70
- Leak Detection Methods
  71
- Helium Mass Spectrometer Leak Detection (MSLD
  72
- Using Helium for Leak Detection
  74
  - Test Piece Evacuated
    74
  - Test Piece Pressurized
    75
  - Test Piece Already Sealed
    75
- Mass Spectrometer Leak Detector
  76
Index
79

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