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MP183E
L-738 / V-738 Precision XY Stage
User Manual
Version: 1.1.2
PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email info@pimicos.com, www.pi.ws
Date: 17-July-2019
This document describes the following precision
XY stages with 102 mm x 102 mm travel range:
L-738.051100:
With stepper motor, without encoder
L-738.051111:
With stepper motor and linear encoder,
sin/cos signal transmission
L-738.051112:
With stepper motor and linear encoder,
A/B quadrature signal transmission
L-738.053111:
With DC motor and linear encoder,
sin/cos signal transmission
L-738.053112:
With DC motor and linear encoder,
A/B quadrature signal transmission
L-738.053132:
With DC motor and rotary encoder,
A/B quadrature signal transmission
V-738.056111:
With linear motor and linear encoder,
sin/cos signal transmission
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Summary of Contents for PI L-738 Series
- Page 1 With DC motor and rotary encoder, A/B quadrature signal transmission V-738.056111: With linear motor and linear encoder, sin/cos signal transmission PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email info@pimicos.com, www.pi.ws...
- Page 2 NEXACT®, Picoactuator®, PInano®, NEXSHIFT®, PITOUCH®, PIMag®, PIHera, Q-Motion® © 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG reserves all rights.
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Page 3: Table Of Contents
Affixing the Load to the L-738 / V-738 ..............24 Connecting the L-738 / V-738 to a Controller ............25 Start-Up General Notes on Start-Up ..................27 Starting Up the Stage....................29 6.2.1 L-738 / V-738 Entries in the Stage Database of PI ........29... - Page 4 Maintenance General Notes on Maintenance ................31 Performing a Maintenance Run (L-738 Models) ............31 Cleaning the L-738 / V-738 ..................31 Troubleshooting Possible Causes and Remedies ................. 33 Manually Moving the Platform ................34 Customer Service Technical Data 10.1 Specifications ......................37 10.1.1 Data Table ....................
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Page 5: About This Document
1 About this Document About this Document Objective and Target Group of this User Manual This user manual contains the necessary information on the intended use of the L-738 / V-738. Basic knowledge of closed-loop systems, motion control concepts, and applicable safety measures is assumed. -
Page 6: Pictures
Photographic illustrations may also differ and must not be seen as guaranteed properties. Other Applicable Documents The devices and software tools from PI that are mentioned in this documentation are described in separate manuals. Product... -
Page 7: Safety
2 Safety Safety Intended Use The L-738 / V-738 is a laboratory device as defined by DIN EN 61010. It is intended for indoor use and use in an environment which is free of dirt, oil, and lubricants. In accordance with its design, the L-738 / V-738 is intended for positioning, adjusting and shifting of loads on two axes at various velocities. - Page 8 2 Safety If you give the L-738 / V-738 to other users, also include this user manual as well as all other relevant information provided by the manufacturer. Only use the device on the basis of the complete user manual. Missing information due to an incomplete user manual can result in damage to equipment.
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Page 9: Product Description
3 Product Description Product Description Model Overview Classification of the stages All models are precision XY stages with crossed roller bearings. They differ with respect to the drive type and encoder equipment. L-738 / V-738 Drive type Rotary Linear encoder encoder Stepper DC motor... -
Page 10: Product View
3 Product Description Order number Product description L-738.053112 Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, DC motor, incremental linear encoder with A/B quadrature signal transmission, 10 nm sensor resolution L-738.053132 Precision XY stage, 380 mm ×... -
Page 11: Electrical Connections
3 Product Description 3.2.2 Electrical Connections Connection type and assignments depend on the model (for pin assignment, see p. 46). L-738.051111 L-738.051100 L-738.053111 L-738.051112 V-738.056111 L-738.053112 L-738.053132 Pos. Connection L-738.051111 L-738.051100 L-738.053111 L-738.051112 V-731.056111 L-738.053112 L-738.053132 Sensor connection, X axis (D-Sub 15 panel plug) Sensor connection, Y axis (D-Sub 15 panel plug) Motor connection, X axis (HD D-Sub 26 panel plug) Motor connection, Y axis (HD D-Sub 26 panel plug) -
Page 12: Directions Of Motion
3 Product Description Directions of Motion Figure 2: Direction of the motion of the platform X, Y (arrow direction:) Direction of motion on positive command Product Labeling Figure 3: Product labeling (see following table) Position Labeling Description Warning sign "Electrostatic sensitive devices" Sensor X Encoder connection, X axis Sensor Y... -
Page 13: Scope Of Delivery
3 Product Description Position Labeling Description Warning sign "Observe manual!" Old equipment disposal Country of origin: Germany Country of origin WWW.PI.WS Manufacturer's address (website) V-738. 056111 Complete product code (example) CE conformity mark 415002159 Serial number (example), individual for each V-738... -
Page 14: Suitable Controllers
SMC Hydra RS-232, LAN * 2 controllers are required for operation. PC software is included in the scope of delivery of the controllers from PI. The operation of the controllers is described in the corresponding user manuals. Version: 1.1.2 MP183E... -
Page 15: Technical Features
3 Product Description Technical Features 3.7.1 Encoder The L-738.051111, L-738.051112, L-738.053111, L-738.053112, and V-738.056111 models are equipped with an optical linear encoder. Optical linear encoders measure the actual position directly (direct metrology). Errors occurring in the drive, such as nonlinearity, backlash or elastic deformations cannot influence the measurement of the position. -
Page 17: Unpacking
2. Compare the contents with the items listed in the contract and the packing list. 3. Inspect the contents for signs of damage. If there is any sign of damage or missing parts, contact PI immediately. 4. Keep all packaging materials in case the product needs to be returned. -
Page 19: Installation
5 Installation Installation General Notes on Installation DANGER For V-738 models: Magnetic fields! Magnetic fields may damage or interfere with sensitive devices and objects (e. g. cardiac pacemakers, EC-cards, magnetic data carriers). The fields are also effective when the positioner is not connected to the controller/electric power. Loose magnetizable objects (e.g. - Page 20 5 Installation INFORMATION For optimal repeatability, all components must be connected firmly together. If possible, simulate the stage motions with a mounted load or make suitable calculations to detect collisions or unfavorable center of gravity constellations. If necessary, take suitable constructive measures to avoid collisions and instability in the overall system.
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Page 21: Attaching The L-738 / V-738 To A Surface
5 Installation the L-738 / V-738 to a Surface Attaching NOTICE Warping of the L-738 / V-738 due to mounting on uneven surfaces! Mounting the L-738 / V-738 on an uneven surface can warp the V-738. Warping reduces the accuracy. ... - Page 22 5 Installation Tools and accessories Mounting accessories; in the scope of delivery (p. 11) − 8 socket head cap screws, ISO 4762 M6x25 − 2 dowel pins, ISO 8734 - 4 m6 × 10, for use as locating pins ...
- Page 23 5 Installation 3. If you use locating pins to align the stage: a) Insert the locating pins into the respective holes in the surface. b) Place the stage on the surface so that the locating pins are inserted into the corresponding locating holes on the other side.
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Page 24: Connecting The L-738 / V-738 To The Protective Earth Conductor
5 Installation Connecting the L-738 / V-738 to the Protective Earth Conductor INFORMATION It is only necessary to connect the L-738 / V-738 to the protective earth conductor when both of the following conditions are met: The load on the motion platform of the L-738 / V-738 must be connected to the protective earth conductor, but it is not possible to connect the protective earth conductor directly to the load. - Page 25 5 Installation Figure 7: Mounting of the protective earth conductor (profile view) Base body of the L-738 / V-738 (front side) Flat washer Safety washer Screw, M4x8, ISO 7045 Cable lug Protective earth conductor Requirements You have read and understood the general notes on installation (p. 17). Tools and accessories Suitable protective earth conductor: Cross-sectional area of the cable ≥...
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Page 26: Affixing The Load To The L-738 / V-738
5 Installation Affixing the Load to the L-738 / V-738 NOTICE Impermissibly high load on the stage! An impermissible high load impairs the motion of the motion platform and can damage the stage. When considering the mass and mounting method of the load, pay attention to the specified maximum permissible forces, that are permitted to act on the motion platform (p. -
Page 27: Connecting The L-738 / V-738 To A Controller
5 Installation Connecting the L-738 / V-738 to a Controller NOTICE Damage if an incorrect controller or motor cable is connected! Connecting a stage to an unsuitable controller or using an unsuitable motor cable can cause damage to the stage or controller. ... -
Page 29: Start-Up
6 Start-Up Start-Up General Notes on Start-Up DANGER For V-738 models: Magnetic fields! Magnetic fields may damage or interfere with sensitive devices and objects (e. g. cardiac pacemakers, EC-cards, magnetic data carriers). The fields are also effective when the positioner is not connected to the controller/electric power. Loose magnetizable objects (e.g. - Page 30 6 Start-Up NOTICE Damage if an incorrect controller or motor cable is connected! Connecting a stage to an unsuitable controller or using an unsuitable motor cable can cause damage to the stage or controller. Only connect a stage to a suitable controller. ...
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Page 31: Starting Up The Stage
The repeatability of the positioning is only ensured when the reference point switch is always approached from the same side. Controllers from PI fulfill this requirement as a result of the automatic direction sensing for reference moves to the reference point switch. -
Page 33: Maintenance
7 Maintenance Maintenance General Notes on Maintenance NOTICE Damage due to improper maintenance! Removing caps and screws can lead to contamination and failure of the V-738. Do not loosen screws on the stage. Do not remove any caps other than the ESD protection. Performing a Maintenance Run (L-738 Models) Depending on the operating conditions and the period of use of the L-738, the following maintenance measures are required:... -
Page 35: Troubleshooting
8 Troubleshooting Troubleshooting Possible Causes and Remedies Problem Possible causes Solution Reduced positioning Warped base body Mount the L-738 / V-738 onto an even accuracy surface. The recommended flatness of the surface is ≤ 5 µm. Increased wear due to small ... -
Page 36: Manually Moving The Platform
8 Troubleshooting Manually Moving the Platform INFORMATION It is necessary to repeat the reference move after moving manually and connecting to the controller. The platform can be moved by hand without additional aid. Version: 1.1.2 MP183E L-738 / V-738 Precision XY Stage... -
Page 37: Customer Service
9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (mailto:info@pi.de). If you have questions concerning your system, have the following information ready: − Product and serial numbers of all products in the system −... -
Page 39: Technical Data
10 Technical Data Technical Data 10.1 Specifications The specified data applies to a temperature of 20 °C (±3 °C) and horizontal installation. 10.1.1 Data Table L 738.051100 / L 738.051111 / L 738.051112 L 738.051100 L 738.051111 L 738.051112 Unit Tolerance Motion and positioning Active axes... - Page 40 10 Technical Data L 738.051100 L 738.051111 L 738.051112 Unit Tolerance Mechanical properties Load capacity Permissible torque in θX, θY Permissible torque in θZ Moved mass in X 13.8 13.8 13.8 Moved mass in Y Overall mass Guiding Crossed roller guide with anti-creep system Drive properties Motor Type 2-phase stepper motor...
- Page 41 10 Technical Data L-738.053111 / L-738.053112 / L-738.053132 L-738.053111 L-738.053112 L-738.053132 Unit Tolerance Motion and positioning Active axes X, Y X, Y X, Y 102 × 102 102 × 102 102 × 102 Travel range Integrated sensor Incremental linear Incremental linear Incremental encoder with encoder with A/B...
- Page 42 10 Technical Data L-738.053111 L-738.053112 L-738.053132 Unit Tolerance Drive properties Motor type DC motor Operating voltage nom. max. Miscellaneous Operating temperature range 5 to 40 5 to 40 5 to 40 °C Material Aluminum, black anodized 2 × HD Sub-D 26 2 ×...
- Page 43 10 Technical Data V-738.096111 V-738.096111 Unit Tolerance Motion and positioning Active axes X, Y Travel range 102 × 102 Integrated sensor Incremental linear encoder, sin/cos signal output Design resolution* 0.001 µm Sensor signal period µm Minimum incremental motion 0.02 µm typ.
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Page 44: Maximum Ratings
10 Technical Data V-738.096111 Unit Tolerance Resistance phase-phase Ω typ. Inductance phase-phase typ. Back EMF phase-phase Vs/m max. Pole pitch N-N Miscellaneous Operating temperature range 5 to 40 °C Material Aluminum, black anodized Moved mass in X, unloaded 16.8 ±5 % Moved mass in Y, unloaded ±5 % Overall mass... -
Page 45: Limit Switch Specifications
10 Technical Data 10.1.4 Limit Switch Specifications Type Optical sensor Supply voltage +5 V/GND, supplied via the motor connector Signal output Open Collector Signal logic The signal level changes when passing the limit switch. The signal logic is active high. That means: ... -
Page 46: Dimensions
10 Technical Data 10.2 Dimensions Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 8: Dimensions; Platform in reference position Version: 1.1.2 MP183E L-738 / V-738 Precision XY Stage... - Page 47 10 Technical Data Figure 9: Dimensions; Platform moved out L-738 / V-738 Precision XY Stage MP183E Version: 1.1.2...
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Page 48: Pin Assignment
10 Technical Data 10.3 Pin Assignment 10.3.1 HD D-Sub 26 (Male) Figure 10: HD D-Sub 26 panel plug L 738.051100 / L 738.051111 / L 738.051112 Signal L-731.40SD / L-731.44SD Signal L-731.4ASD Direction Motor A+ Motor + / Motor A+ / U Input Motor A+ Motor + / Motor A+ / U... - Page 49 10 Technical Data L-738.053111 / L-738.053112 / L-738.053132 Signal Direction Motor + Input Motor + Input Motor - Input Motor - Input Output Limit neg. Output Limit pos. Output ID I/O Bidirectional Limit Power (+5 V) Input Encoder A+ Output Encoder A- Output Encoder B+...
- Page 50 10 Technical Data V-738.056111 Signal Direction Phase 1 (U) Input Phase 1 (U) Input Phase 2 (V) Input Phase 2 (V) Input Phase 3 (W) Input Phase 3 (W) Input Output Limit neg. Output Limit pos. Output Output Limit Power (+5 V) Input Version: 1.1.2 MP183E...
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Page 51: D-Sub 15 (Female)
10 Technical Data 10.3.2 D-Sub 15 (Female) Figure 11: D-Sub 15 panel plug Signal Direction Power 5 V DC Input Encoder GND sin + Output sin - Output Temp GND cos + Output cos - Output Limit neg. Output Output REF + Output Output... -
Page 53: Old Equipment Disposal
PI miCos equipment made available on the market after 13 August, 2005 without charge. Any old PI miCos equipment can be sent free of charge to the following address: PI miCos GmbH Freiburger Strasse 30... -
Page 55: Eu Declaration Of Conformity
12 EU Declaration of Conformity EU Declaration of Conformity An EU Declaration of Conformity has been issued for the L-738 / V-738 in accordance with the following European directives: • EMC Directive • RoHS Directive The applied standards certifying the conformity are listed below. •...
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