Parker X-Flow Operational Instructions
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Parker X-Flow Operational Instructions

Mass flow controller
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Summary of Contents for Parker X-Flow

  • Page 2 The material in this manual is for information purposes only, and is subject to change without notice. Precision Fluidics Division August 2018 Page 2 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 3: Table Of Contents

    The two LEDs on the instrument give information about the status of the instrument. Check chapter 3.7, “Micro-switch use for reading/changing control mode ................35 Troubleshooting summary general ....................36 Service ..........................37 Page 3 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 4: General Product Information

    601XF 1.2 Intended Use The intended use of X-Flow™ instruments is to control gas flow rates of the specified gas noted on the instrument label. The gas must be clean. The instruments can be used for either (fast) switching or controlling a constant flow rate.

  • Page 5: Product Description

    1.5 Product Description 1.5.1 General Description An X-Flow™ mass flow controller consists of a thermal mass flow sensor, a laminar flow element which acts as a bypass, a solenoid proportional control valve and a digital electronic PC-board for PID- control and communication.
  • Page 6 Check if the seals like O-rings, plunger and packing gland of capillary are suitable for the used gas and process. Page 6 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...
  • Page 7 1.5.4 Calibration X-Flow™ instruments are Nitrogen calibrated. X-Flow™ instruments are delivered with a Calibration Certificate. Precision Fluidics certifies that all instruments meet the rated accuracy. The calibration is converted to the customer’s gas and conditions using a detailed conversion model.

  • Page 8: Operating Principles

    1.6.2 Bypass Principle The measurement part of an X-Flow™ consists of a thermal sensor and a laminar flow element (LFE). A laminar flow element consists of a stack of discs with precision etched flow channels. The flow through each channel is proportional to the flow through the sensor.

  • Page 9: Maintenance

    1.6.3 Solenoid Valve Principle The control valve used in the X-Flow™ series is a standard, direct operated control valve. It is a normally closed solenoid valve. The plunger is lifted by the force of the magnetic field of the coil. The diameter of the orifice under the plunger is optimised for the customer’s application.

  • Page 10: Introduction

    Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your Parker representative.

  • Page 11: In-Line Filter Usage

    6 mm compression fitting with screen and O-ring, p/n B-1562-036V Gas Connections Each X-Flow™ mass flow controller has two (2) threaded process connection ports, one (1) located at each end of the base block. One (1) serves as the gas inlet while the other is the gas outlet. Make certain the tubing which mates to the fitting is correctly sized, clean and is seated against the shoulder in the body of the compression fitting, prior to tightening the connection.

  • Page 12: Power And Warm-Up

    Refer to Hook-up X-Flow™ , document no. FM-1409, for more details. Parker recommends the use of their standard cables. These cables have the right connectors and if loose ends are used, these will be marked to prevent wrong connection.

  • Page 13: Zeroing

    • When the process is completed the green LED is on continuously. For information how to start the zeroing procedure over RS232 Flowbus® or RS485 Modbus® check chapter 4.1.4, “Auto Zeroing” Page 13 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 14: Basic Operation

    Basic Operation 2.1 General An X-Flow™ instrument can be operated by means of: • Analog interface (0...5Vdc/4...20mA) • Digital RS232 Flowbus® interface (connected to COM-port by means of T cable (7.03.366) on 38400 Baud) • Digital RS485 Modbus® interface. Operation via analog or digital interface can be performed at the same time. A special parameter called “control mode”...

  • Page 15: Digital Communication Protocol Detection

    According to the pin-designation both RS232 and RS485 are assigned to the same pins. At each power-on/off the X-Flow™ instrument the digital communication protocol from the master (PLC/PC) must be detected by the X-Flow™ instrument. This auto detection cannot be switched off or by-passed.

  • Page 16: Modbus® Rs485 Operation

    This chapter is limited to the description of the interface between the Modbus® Mass Flow Controller with a master device. It will explain how to install an X-Flow™ instrument to your Modbus® system. The implementation of the Modbus® interface is based on the following standards: [1] MODBUS®...
  • Page 17 Default instruments will be delivered to customers on address 1 and with a baud rate of 19200 baud and EVEN parity. The slave address, baud rate and parity of the X-Flow™ controller Modbus® slave can be changed to fit the instrument in your existing Modbus® network. Changing the slave address, baud rate and parity...
  • Page 18 19200 and 38400, valid values for parity are 0 (= None), 1 (= Odd) and 2 (= Even). The changed values will be effective immediately after changing. Note: There are no hardware switches available on the X-Flow™ instruments for Slave address and Baud rate setting.
  • Page 19 “MODBUS® over Serial Line specification and implementation guide V1.02”. The following options have been implemented: Parameter Options Remarks Addressing address configurable from 1 to see section 3.5.1 247 (default 1) broadcast support Page 19 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...
  • Page 20 When one of the written registers raises an exception, the value written to all subsequent registers are discarded (ignored). Diagnostics (08) The following sub-functions are supported: Sub-function code Name (dec) Return Query Data Page 20 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...
  • Page 21 RW  0x0E61 0x0E62 3682 Monitor mode Unsigned char RW  0x0E62 0x0E63 3683 Reset Unsigned char 0x0E68 0x0E69 3689 Sensor zero Unsigned char RW  0x0E85 0x0E86 3718 potmeter Page 21 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...
  • Page 22 • When a byte parameter is read, the upper 8-bits of the Modbus® register will be 0. When a byte parameter is written, the upper 8-bits must be set to 0. Page 22 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...
  • Page 23 (it is not possible to write a part of a string). If the string is shorter than the specified maximum length the string should be terminated with a 0. Page 23 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 24: Push-Button Operation

    4 – 8 sec Restore parameters flash All parameter settings (except field bus settings) will restored to situation of final test at Parker production normal 8 – 12 sec No action flash normal normal 12 –...

  • Page 25: Led Indications

    Bus activity on the Modbus® interface Continuously Critical error message A serious error occurred in the instrument Instrument needs service before further using Red LED indication modes (no switch used) Page 25 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 26: Basic Parameters And Properties

    When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to RS232 or Modbus®/RS485 for reading/changing parameters (e.g. controller response or other fluid selection). Page 26 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 27: Digital Communication Protocol Detection

    According to the pin-designation both RS232 and RS485 are assigned to the same pins. At each power-on/off the X-Flow™ instrument the digital communication protocol from the master (PLC/PC) must be detected by the X-Flow™ instrument. This auto detection cannot be switched off or by-passed.
  • Page 28 After power-up the control mode will always be set to DIGITAL_INPUT or ANALOG_INPUT, depending on customer’s requirement. Check chapter 4.1.6, Changing Default Control Mode, to change the start- up mode. Page 28 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 29: Advanced Operation

    Modbus® PDU Unsigned RW  113/4 0xF120..0xF127/61729..61736 char[16] Digital instrument manufacturing configuration information string. This string can be used by Parker to add extra information to the model number information. Page 29 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...
  • Page 30 Auto-zeroing failed 3.1.5 Controller Response Adjustment The controller settling time of X-Flow™ instruments is factory adjusted to approximately 1 second at customer process conditions. When real process conditions differ from supplied data, or when a faster or slower controller response is needed, a readjustment can be performed.
  • Page 31 Settling time is defined as the time to reach the setpoint (and stay) within 2% of the initial setpoint The picture below shows the basic controller diagram of the X-Flow™. It consists of a standard PID controller with a number of add-ons. open...
  • Page 32 • Write IOstatus 3.1.7 Display Filter The output signal of an X-Flow™ instrument (measured value) is filtered. The filter has dynamic behaviour: when a change in sensor signal is detected, the measured value will be less filtered than when the sensor signal is constant and stable.

  • Page 33: Using Other Gasses Than Specified

    Check chapter 1.6, “Operating Principles”, for detailed information about the sensor principle. 3.2.1 Fluid conversion factor information Contact the factory for more information on conversion factors, at any temperature/pressure combination, when converting to different fluids and gases. Page 33 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...
  • Page 34 1.73 x 10 1.30 2.93 x 10 1.50 3.90 x 10 5.00 x 10 1.70 2.00 6.63 x 10 Also, the minimum pressure drop is limited. For exact figures consult factory. Page 34 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 35: Troubleshooting

    (0…2) amount 0 … 2 units in control mode number of count sec. flashes maximu (0…9) ” for detailed info. Page 35 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 36: Troubleshooting Summary General

    ‘1e’ Pressure too high or much too low 6b) apply correct pressure High flow at zero setpoint Damaged diaphragm (only applicable to 7a) replace membrane seal valves with membrane) Page 36 Instruction manual Parker X-Flow FM-1407 Rev - 7/18...

  • Page 37: Service

    Service Only factory service is available. Contact your local Parker Sales office. In the US contact the Parker factory or send an email describing the problem to ppfinfo@parker.com. PARKER HANNIFIN CORPORATION INSTRUMENTATION GROUP PRECISION FLUIDICS DIVISION 26 CLINTON DRIVE – UNIT 103...

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